CA2251737A1 - Cmos au carbure de silicium et procede de fabrication - Google Patents

Cmos au carbure de silicium et procede de fabrication

Info

Publication number
CA2251737A1
CA2251737A1 CA002251737A CA2251737A CA2251737A1 CA 2251737 A1 CA2251737 A1 CA 2251737A1 CA 002251737 A CA002251737 A CA 002251737A CA 2251737 A CA2251737 A CA 2251737A CA 2251737 A1 CA2251737 A1 CA 2251737A1
Authority
CA
Canada
Prior art keywords
silicon carbide
layer
well region
fabrication
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002251737A
Other languages
English (en)
Other versions
CA2251737C (fr
Inventor
David B. Slater, Jr.
Lori A. Lipkin
Alexander A. Suvorov
John W. Palmour
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wolfspeed Inc
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/631,926 external-priority patent/US6344663B1/en
Application filed by Individual filed Critical Individual
Publication of CA2251737A1 publication Critical patent/CA2251737A1/fr
Application granted granted Critical
Publication of CA2251737C publication Critical patent/CA2251737C/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/13—Discrete devices, e.g. 3 terminal devices
    • H01L2924/1304—Transistor
    • H01L2924/1306—Field-effect transistor [FET]
    • H01L2924/13091—Metal-Oxide-Semiconductor Field-Effect Transistor [MOSFET]

Landscapes

  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
CA002251737A 1996-04-15 1997-04-14 Cmos au carbure de silicium et procede de fabrication Expired - Fee Related CA2251737C (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/631,926 1996-04-15
US08/631,926 US6344663B1 (en) 1992-06-05 1996-04-15 Silicon carbide CMOS devices
PCT/US1997/006156 WO1997039485A1 (fr) 1996-04-15 1997-04-14 Cmos au carbure de silicium et procede de fabrication

Publications (2)

Publication Number Publication Date
CA2251737A1 true CA2251737A1 (fr) 1997-10-23
CA2251737C CA2251737C (fr) 2006-02-14

Family

ID=35892350

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002251737A Expired - Fee Related CA2251737C (fr) 1996-04-15 1997-04-14 Cmos au carbure de silicium et procede de fabrication

Country Status (1)

Country Link
CA (1) CA2251737C (fr)

Also Published As

Publication number Publication date
CA2251737C (fr) 2006-02-14

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Legal Events

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MKLA Lapsed

Effective date: 20130415