CA2246559A1 - Micro-miroir - Google Patents

Micro-miroir Download PDF

Info

Publication number
CA2246559A1
CA2246559A1 CA 2246559 CA2246559A CA2246559A1 CA 2246559 A1 CA2246559 A1 CA 2246559A1 CA 2246559 CA2246559 CA 2246559 CA 2246559 A CA2246559 A CA 2246559A CA 2246559 A1 CA2246559 A1 CA 2246559A1
Authority
CA
Canada
Prior art keywords
micromirror
mirror segment
mirror
facet
angle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA 2246559
Other languages
English (en)
Inventor
John Miller
Milan Skubnic
Tam Nguyen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Microsemi Semiconductor ULC
Original Assignee
Mitel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitel Corp filed Critical Mitel Corp
Priority to CA 2246559 priority Critical patent/CA2246559A1/fr
Priority to EP99300329A priority patent/EP0932066A1/fr
Priority to CA 2259726 priority patent/CA2259726A1/fr
Priority to US09/234,306 priority patent/US6212309B1/en
Priority to JP1532399A priority patent/JP2992887B2/ja
Publication of CA2246559A1 publication Critical patent/CA2246559A1/fr
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04Q—SELECTING
    • H04Q11/00—Selecting arrangements for multiplex systems
    • H04Q11/0001—Selecting arrangements for multiplex systems using optical switching
    • H04Q11/0005—Switch and router aspects
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04Q—SELECTING
    • H04Q11/00—Selecting arrangements for multiplex systems
    • H04Q11/0001—Selecting arrangements for multiplex systems using optical switching
    • H04Q11/0005—Switch and router aspects
    • H04Q2011/0007—Construction
    • H04Q2011/0024—Construction using space switching
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04Q—SELECTING
    • H04Q11/00—Selecting arrangements for multiplex systems
    • H04Q11/0001—Selecting arrangements for multiplex systems using optical switching
    • H04Q11/0005—Switch and router aspects
    • H04Q2011/0007—Construction
    • H04Q2011/0026—Construction using free space propagation (e.g. lenses, mirrors)
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04Q—SELECTING
    • H04Q11/00—Selecting arrangements for multiplex systems
    • H04Q11/0001—Selecting arrangements for multiplex systems using optical switching
    • H04Q11/0005—Switch and router aspects
    • H04Q2011/0052—Interconnection of switches
    • H04Q2011/0058—Crossbar; Matrix

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
CA 2246559 1998-01-24 1998-09-04 Micro-miroir Abandoned CA2246559A1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CA 2246559 CA2246559A1 (fr) 1998-09-04 1998-09-04 Micro-miroir
EP99300329A EP0932066A1 (fr) 1998-01-24 1999-01-19 Dispositif de commutation de points de connexion optique à micromiroir déformable
CA 2259726 CA2259726A1 (fr) 1998-01-24 1999-01-20 Commutateur de transmission haute-basse impedance optique faisant appel a un micromiroir deformable
US09/234,306 US6212309B1 (en) 1998-01-24 1999-01-21 Optical cross point switch using deformable micromirror
JP1532399A JP2992887B2 (ja) 1998-01-24 1999-01-25 変形可能なマイクロミラ―を用いた光交点スイッチ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA 2246559 CA2246559A1 (fr) 1998-09-04 1998-09-04 Micro-miroir

Publications (1)

Publication Number Publication Date
CA2246559A1 true CA2246559A1 (fr) 2000-03-04

Family

ID=29409845

Family Applications (1)

Application Number Title Priority Date Filing Date
CA 2246559 Abandoned CA2246559A1 (fr) 1998-01-24 1998-09-04 Micro-miroir

Country Status (1)

Country Link
CA (1) CA2246559A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6900919B1 (en) * 2001-02-02 2005-05-31 Cheetah Omni, Llc Variable blazed grating

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6900919B1 (en) * 2001-02-02 2005-05-31 Cheetah Omni, Llc Variable blazed grating

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Legal Events

Date Code Title Description
FZDE Dead