CA2228402A1 - A process for manufacturing ito alloy articles - Google Patents

A process for manufacturing ito alloy articles

Info

Publication number
CA2228402A1
CA2228402A1 CA002228402A CA2228402A CA2228402A1 CA 2228402 A1 CA2228402 A1 CA 2228402A1 CA 002228402 A CA002228402 A CA 002228402A CA 2228402 A CA2228402 A CA 2228402A CA 2228402 A1 CA2228402 A1 CA 2228402A1
Authority
CA
Canada
Prior art keywords
powder
article
in2o3
manufacturing
alloy articles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002228402A
Other languages
French (fr)
Other versions
CA2228402C (en
Inventor
Paul Lippens
Ludo Froyen
Louis Buekenhout
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Innovative Sputtering Technology IST NV
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority claimed from PCT/EP1996/003802 external-priority patent/WO1997008358A1/en
Publication of CA2228402A1 publication Critical patent/CA2228402A1/en
Application granted granted Critical
Publication of CA2228402C publication Critical patent/CA2228402C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C1/00—Making non-ferrous alloys
    • C22C1/10—Alloys containing non-metals
    • C22C1/1084—Alloys containing non-metals by mechanical alloying (blending, milling)
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C29/00—Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides
    • C22C29/12—Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides based on oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Vapour Deposition (AREA)
  • Powder Metallurgy (AREA)

Abstract

The invention relates to a process for manufacturing a pore free powder metallurgical alloy article starting with a minor portion of Sn powder and a major portion of In2O3 powder and comprising the steps of:
substantially uniformly distributing and fixing the Sn powder on the surface of the In2O3 powder by mixing and milling the different powders in the presence of a process controlling agent to form alloyed powders; and compacting at high temperature the so alloyed powders to form the article. The article has a good electrical conductivity and is usable as a target for plasma sputtering ITO compositions.
CA002228402A 1995-08-31 1996-08-29 A process for manufacturing ito alloy articles Expired - Fee Related CA2228402C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP95202356.2 1995-08-31
EP95202356 1995-08-31
PCT/EP1996/003802 WO1997008358A1 (en) 1995-08-31 1996-08-29 A process for manufacturing ito alloy articles

Publications (2)

Publication Number Publication Date
CA2228402A1 true CA2228402A1 (en) 1997-03-06
CA2228402C CA2228402C (en) 2007-05-01

Family

ID=38068745

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002228402A Expired - Fee Related CA2228402C (en) 1995-08-31 1996-08-29 A process for manufacturing ito alloy articles

Country Status (1)

Country Link
CA (1) CA2228402C (en)

Also Published As

Publication number Publication date
CA2228402C (en) 2007-05-01

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Legal Events

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