CA2213245C - Accelerometre au silicium a resonance mecanique - Google Patents

Accelerometre au silicium a resonance mecanique Download PDF

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Publication number
CA2213245C
CA2213245C CA002213245A CA2213245A CA2213245C CA 2213245 C CA2213245 C CA 2213245C CA 002213245 A CA002213245 A CA 002213245A CA 2213245 A CA2213245 A CA 2213245A CA 2213245 C CA2213245 C CA 2213245C
Authority
CA
Canada
Prior art keywords
silicon
accelerometer
vibration
sensing means
means comprises
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CA002213245A
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English (en)
Other versions
CA2213245A1 (fr
Inventor
David W. Burns
Richard H. Frische
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell Inc
Original Assignee
Honeywell Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Inc filed Critical Honeywell Inc
Publication of CA2213245A1 publication Critical patent/CA2213245A1/fr
Application granted granted Critical
Publication of CA2213245C publication Critical patent/CA2213245C/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)

Abstract

Un accéléromètre au silicium comprend plusieurs couches de silicium. Les couches de silicium constituent deux lames de silicium supportées par des éléments de flexion. Une masse de silicium sensible à l'accélération est conçue pour incurver les éléments de flexion en réaction aux accélérations. Les lames de silicium sont soumises à des vibrations dans des chambres à vide et la masse sensible à l'accélération, ainsi que les éléments de flexion sont amortis par gaz. Des dispositifs électroniques de détection détectent la vibration des deux lames de silicium.
CA002213245A 1995-03-13 1995-03-13 Accelerometre au silicium a resonance mecanique Expired - Fee Related CA2213245C (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US1995/003011 WO1996028735A1 (fr) 1995-03-13 1995-03-13 Accelerometre au silicium a resonance mecanique

Publications (2)

Publication Number Publication Date
CA2213245A1 CA2213245A1 (fr) 1996-09-19
CA2213245C true CA2213245C (fr) 2004-11-02

Family

ID=22248788

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002213245A Expired - Fee Related CA2213245C (fr) 1995-03-13 1995-03-13 Accelerometre au silicium a resonance mecanique

Country Status (3)

Country Link
EP (1) EP0815453A1 (fr)
CA (1) CA2213245C (fr)
WO (1) WO1996028735A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11714102B2 (en) 2021-06-08 2023-08-01 Analog Devices, Inc. Fully differential accelerometer

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10859596B2 (en) 2018-07-20 2020-12-08 Honeywell International Inc. Mechanically-isolated in-plane pendulous vibrating beam accelerometer
US11493531B2 (en) 2019-11-07 2022-11-08 Honeywell International Inc. Resonator electrode configuration to avoid capacitive feedthrough for vibrating beam accelerometers

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4945765A (en) * 1988-08-31 1990-08-07 Kearfott Guidance & Navigation Corp. Silicon micromachined accelerometer
US5008774A (en) * 1989-02-28 1991-04-16 United Technologies Corporation Capacitive accelerometer with mid-plane proof mass
US5090254A (en) * 1990-04-11 1992-02-25 Wisconsin Alumni Research Foundation Polysilicon resonating beam transducers
DE4208043A1 (de) * 1992-03-13 1993-09-23 Bosch Gmbh Robert Verfahren zur messung einer beschleunigung, beschleunigungssensor und verfahren zu dessen herstellung
US5396798A (en) * 1993-04-15 1995-03-14 Honeywell Inc. Mechanical resonance, silicon accelerometer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11714102B2 (en) 2021-06-08 2023-08-01 Analog Devices, Inc. Fully differential accelerometer

Also Published As

Publication number Publication date
WO1996028735A1 (fr) 1996-09-19
CA2213245A1 (fr) 1996-09-19
EP0815453A1 (fr) 1998-01-07

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