CA2080028C - Installation pour la fabrication de plaquettes de semi-conducteurs - Google Patents

Installation pour la fabrication de plaquettes de semi-conducteurs

Info

Publication number
CA2080028C
CA2080028C CA 2080028 CA2080028A CA2080028C CA 2080028 C CA2080028 C CA 2080028C CA 2080028 CA2080028 CA 2080028 CA 2080028 A CA2080028 A CA 2080028A CA 2080028 C CA2080028 C CA 2080028C
Authority
CA
Canada
Prior art keywords
rotor
susceptor
substrate
flange
seating surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CA 2080028
Other languages
English (en)
Other versions
CA2080028A1 (fr
Inventor
Glen Cameron Hillier
Jurgen Becker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nortel Networks Ltd
Original Assignee
Northern Telecom Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Northern Telecom Ltd filed Critical Northern Telecom Ltd
Priority to CA 2080028 priority Critical patent/CA2080028C/fr
Publication of CA2080028A1 publication Critical patent/CA2080028A1/fr
Application granted granted Critical
Publication of CA2080028C publication Critical patent/CA2080028C/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68792—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the construction of the shaft
CA 2080028 1992-10-07 1992-10-07 Installation pour la fabrication de plaquettes de semi-conducteurs Expired - Fee Related CA2080028C (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CA 2080028 CA2080028C (fr) 1992-10-07 1992-10-07 Installation pour la fabrication de plaquettes de semi-conducteurs

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA 2080028 CA2080028C (fr) 1992-10-07 1992-10-07 Installation pour la fabrication de plaquettes de semi-conducteurs

Publications (2)

Publication Number Publication Date
CA2080028A1 CA2080028A1 (fr) 1994-04-08
CA2080028C true CA2080028C (fr) 1998-04-21

Family

ID=4150505

Family Applications (1)

Application Number Title Priority Date Filing Date
CA 2080028 Expired - Fee Related CA2080028C (fr) 1992-10-07 1992-10-07 Installation pour la fabrication de plaquettes de semi-conducteurs

Country Status (1)

Country Link
CA (1) CA2080028C (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016210203B3 (de) * 2016-06-09 2017-08-31 Siltronic Ag Suszeptor zum Halten einer Halbleiterscheibe, Verfahren zum Abscheiden einer epitaktischen Schicht auf einer Vorderseite einer Halbleiterscheibe und Halbleiterscheibe mit epitaktischer Schicht

Also Published As

Publication number Publication date
CA2080028A1 (fr) 1994-04-08

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Legal Events

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