CA2060047A1 - Ink jet recording head - Google Patents

Ink jet recording head

Info

Publication number
CA2060047A1
CA2060047A1 CA 2060047 CA2060047A CA2060047A1 CA 2060047 A1 CA2060047 A1 CA 2060047A1 CA 2060047 CA2060047 CA 2060047 CA 2060047 A CA2060047 A CA 2060047A CA 2060047 A1 CA2060047 A1 CA 2060047A1
Authority
CA
Canada
Prior art keywords
ink
recording head
jet recording
nozzles
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA 2060047
Other languages
French (fr)
Inventor
Kozo Matsumoto
Kouji Yoshizawa
Mitsuhiro Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of CA2060047A1 publication Critical patent/CA2060047A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/17Ink jet characterised by ink handling
    • B41J2/175Ink supply systems ; Circuit parts therefor
    • B41J2/17503Ink cartridges
    • B41J2/1752Mounting within the printer
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14201Structure of print heads with piezoelectric elements
    • B41J2/14233Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14201Structure of print heads with piezoelectric elements
    • B41J2/1429Structure of print heads with piezoelectric elements of tubular type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1607Production of print heads with piezoelectric elements
    • B41J2/161Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1623Manufacturing processes bonding and adhesion
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1626Manufacturing processes etching
    • B41J2/1628Manufacturing processes etching dry etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/165Prevention or detection of nozzle clogging, e.g. cleaning, capping or moistening for nozzles
    • B41J2/16505Caps, spittoons or covers for cleaning or preventing drying out
    • B41J2/16508Caps, spittoons or covers for cleaning or preventing drying out connected with the printer frame
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/17Ink jet characterised by ink handling
    • B41J2/175Ink supply systems ; Circuit parts therefor
    • B41J2/17503Ink cartridges
    • B41J2/17513Inner structure
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2002/14379Edge shooter

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Ink Jet (AREA)
  • Nozzles (AREA)

Abstract

ABSTRACT
An ink jet recording head in which a plurality of ink nozzles are juxtaposed on a single silicon substrate to provide a Kaiser on-demand type ink jet recording head. The ink flow paths are formed in a surface of the substrate by dry plasma etching and a glass plate is electrostatically bonded onto that surface as a vibrating plate. The surfaces of the ink flow paths are cleaned using an alkali solution, and a water repelling film is formed around the ink jetting outlets. Notch portions, each having a sectional area larger than the ink nozzle, may also be formed on the end surface between adjacent ink jetting outlets. A heater may also be positioned on a surface of the substrate on which the ink nozzles are arranged.
In addition, a releasable cartridge accommodating both the recording head and an ink tank for supplying the ink in a single container may be formed and a cap may be provided at a front portion of the cartridge, the cap being capable of covering the ink jetting outlets by rotation.

Description

` ` 2060047 INR JET RECORDING HEAD

BACKGROUND OF THE INVENTION
Field of the Invention The invention relates to ink jet recording heads to be used in analog recorders and the like. More particularly, it s is directed to a recording head having a plurality of ink nozzles which constitute a Kaiser on-demand type ink jet recording head.
Discussion of the Related Art Recorders that make conventional analog system-based lo recordings have an advantage in that changes in temperature, pressure, and variable parameters, supplied from a controlled object can be measured linearly. As a result, use of such recorders may ~e expanded to means for recording, monitoring, and storing data, not only in industrial fields, such as instrumentation and instrumentation control systems, but also in the field of research and development. These recorders mount various types of recording heads and print lines and characters on a recording sheet, or e~uivalent, in accordance with a signal inputted from an external source. The recording head is available in many types which are categorized by the printing system, and the following are some typical examples.
I. Nire dot system:
This system uses a recording head made up of an ink ribbon, a wire unit, and an electrostatic hammer, and operates `~
2~60~7 so that upon impression of a recording pulse, the ! electromagnetic hammer strikes the wire to transfer ink on the ink ribbon onto a recording sheet. While a single strike suffices to print a dot representing analog data, 8 to 25 strikes per digit is required to print a character. In printing color data, a plurality of ink ribbons, each carrying a different color, must be provided and they are replaced in accordance with the color to be printed.
II. Thermal head system:
lo This system includes a recording head having a plurality of recording electrodes, each made up of a heating resistor on an insulating plate. Recording sheets having a thermal coloring chemical agent applied are used. To print a dot representing analog data, a pulse is applied to a single lS electrode, at a position corresponding to a measured value, to heat and color such position on the sheet. To print a character, a pulse is applied to the electrodes at positions corresponding to the character to heat and color such positions on the sheet.
III. Pen strikinq sYstem:
This system employs a recording pen as a recording head and controls this recording pen in accordance with an electric signal. To print analog data, the recording pen is brought into contact with a sheet and traces a figure to implement a 2s continuous recording. To print a character, the recording pen 20600~7 must strike 8 to 25 times per digit on position~ corresponding to the character, using a vertically reciprocating mechanism.
IV. Ink iet svstem:
An ~xemplary recording head of a so-called Gould type is shown in Figure 13 to include a head nozzle portion 1; a nozzle plate 2; an ink tank 3; and a recording sheet 4 serving as a recording medium. As shown in Figure 14, the head nozzle portion 1 is enlarged and, as shown, includes a cylindrically formed piezoelectric element body 5; a glass tube 6 serving as lo a liquid chamber; an orifice 7; and a filter 8. In the head nozzle portion 1 the glass tube 6 is inserted into the cylindrically formed piezoelectric element body 5, and the inner and outer surfaces of the cylindrically formed piezoelectric element body 5 are provided with electrodes (not shown) that are connected to an external power source. Upon application of a pulsed voltage across the cylindrically formed piezoelectric element body 5, the liquid chamber inside the glass tube 6 contracts to decrease its volume. As a result, ink supplied from the external ink tank 3 through the filter 8 is ~etted out from the nozzle plate 2 through the orifice 7, thereby printing dots on a recording sheet 4. Lines and characters can be drawn by printing dots while moving the recording sheet 4 relative to the head nozzle portion 1. For the recording head shown in Figure 13, ink jetting nozzles for 2S three colors, e.g., cyan, magenta, and yellow, are ~uxtaposed horizontally for analog data printing, and 8 black ink nozzles are arranged in 2 vertical rows for character data printing.
: These nozzles receive color inks from ink bags contained in the ink tank 3 through supply tubes, respectively.
To print analog data with a Gould type recording head as shown, the aforesaid drive principle causes ink to jet at an instant in time when a mechanical position of the head coincides with a measured value, so that three color dots are printed on the recording sheet 4. A combination of the three colors can create synthesized colors, which are purple, green, lo and orange, to permit six-color printing. Alphanumeric characters, for example, can be printed by applying a pulsed voltage to the character dedicated nozzle portion l jetting the black ink at a predetermined timing.
Features of the aforesaid conventional printing systems are listed in Table l.
Recording Features Shortcoming/
system Problems s printing Clear printed dots Time-consuming when Wire dot Easy to implement characters color Printinq NoisY printinq must No movable parts Special recording sheets Thermal Silent printing be used (expensive).
lo Not suitable for color printinq __ Continuous recording Time-consuming when printing Pen is possible. - characters striking Recording head must be Provided per color.

High printing speed Care must be taken for Ink jet Easy character clogging of nozzles (Gould printing type) Extremely easy to imPlement color ~rintin~

As is apparent from the above comparison, the ink jet printing system is generally considered superior to the other conventional systems, and the Gould type ink jet recording head is most often applied to various recorders. However, the following problems have been identified with respect to the Gould type ink jet recording head.
A. To downsize the recording head, the cylindrically formed piezoelectric element body used as an ink jetting drive source must also be downsized. However, a highly sophisticated accuracy-oriented forming technique is required to fabricate the cylindrical body in smaller outside and inside diameters and to form electrodes on its inner peripheral surface.

` ` 2060047 Current forming techniques can meet accuracy requirements only to 1 mm for outer diameters. Thus, the downsizin~ of a recording head is limited by the outside diameter of the cylindrically formed piezoelectric element body, that is, 1 mm.
s B. A recordinq head capable of performing multi-color printing requires a plurality of head nozzle portions, or cylindrically formed piezoelectric element bodies, corresponding in number to the number of colors to be used. As a result, the recording head structure is larger in proportion lo to the size of the head nozzle portions. Thus, a smaller structure becomes more difficult.
C. Since the recording head is assembled by bonding the nozzle plate on the front portion of each orifice, thè orifice and the small hole formed on the nozzle plate must be positioned accurately. This elevates the fabrication cost for the entire recording head.

SUMMARY OF THE INVENTION
The invention has been made in view of the above circumstances and to overcome the above problems encountered by the Gould type recording head. Accordingly, an object of the invention is to provide an ink jet recording head that can be made thinner and smaller in structure while reducing the fabrication cost and improving the printing quality.

Additional objects and advantages of the invention will be ; set forth in part in the description which follows and in part will be obvious from the description, or may be learned by practice of the invention. The objects and advantages of the invention may be realized and attained by means of the instrumentalities and combinations particularly pointed out in the appended claims.
To achieve the objects and in accordance with the purpose of the invention, as embodied and broadly described herein, the lo ink jet recording head of the present invention juxtaposes on a single substrate, a plurality of ink nozzles constituting a Kaiser on-demand type ink jet recording head.
The substrate is made of silicon. On a surface of the substrate are ink flow paths formed by dry plasma etching.
Preferably, a glass plate is electrostatically bonded onto the upper surface of the substrate, the glass plate serving as a vibrating plate. The surface having the ink flow paths is cleaned using an alkali solution, and a water repelling film is desirably formed around the ink jetting outlets. Notch portions, each having a sectional area larger than the ink nozzle, may also be formed on the end surface between adjacent ink jetting outlets. A heater may also be positioned on a surface of the substrate on which the ink nozzles are arranged.
In addition, a releasable cartridge accommodating both the recording head and an ink tank for supplying the ink in a single container may be formed and a cap may be provided at a front portion of the cartridge, the cap being capable of covering the ink jetting outlets by rotation.
The invention, having a plurality of ink nozzles forming a Kaiser on-demand type ink jet recording head juxtaposed on a single substrate, not only allows a multi-color printing to be achieved, but also contributes to implementing a small and thin structure of the head as a whole. Further, the main portion of the head is arranged primarily on the substrate, so that its fabrication is easy and inexpensive.
lo The forming of the substrate can be further simplified by using a silicon substrate, forming the ink flow paths on a surface of the silicon substrate by dry plasma etching, and electrostatically bonding a glass plate to the substrate. If the surfaces of the ink flow paths formed on the substrate are subjected to alkali cleaning and, if a water repelling film is formed on the end surface of the substrate around the ink jetting outlets, then wettability between the ink and the ink flow path is increased inside the ink flow path. This, in turn, allows air bubbles within the ink to be driven out with ease, while, on the end surface of the substrate around the ink jetting outlets, wettability is reduced to prevent the ink from adhering and accumulating as deposits. In addition, the arrangement of notch portions, each having a sectional area larger than the ink nozzle, between the ink jetting outlets, contributes to preventing separate ink components from being mixed by migrating along the end surface. The arrangement of .
, ` -` 206~047 the heater on the surface of the substrate on which the ink flow paths are formed, and the indirect heating of ink when ambient temperature is decreased, prevent the ink from solidifying due to an increase in its viscosity. The s integration of the recording head body with the ink tank into a single container to form a cartridge permits easy replacement and handling of the cartridge alone. The arrangement of the cap so as to be rotatably supported at the front portion of the cartridge enables the ink jetting outlets to be covered by rotating the cap when the head is not in use, thereby inhibiting deterioration of the ink.

BRIEF DESCRIPTION OF THE DRAWINGS
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and, together with the description, serve to explain the objects, advantages and principles of the invention. In the drawings, Fig. 1 is an exploded perspective view illustrative of the structure of a first embodiment of the invention;
Fig. 2 is a diagram showing the basic construction of a Kaiser on-demand type ink jet recording head to which the invention is applied;
Fig. 3 is a sectional view showing the first embodiment of the invention;

`-~ 2060047 Fig. 4 is a perspective view showing a fourth embodiment of the invention;
Fig. 5 is a perspective view showing a fifth embodiment of the invention;
Fig. 6 is a sectional view showing a sixth embodiment of the invention;
Fig. 7 is a sectional view showing a seventh embodiment of the invention;
Fig. 8 is a partial sectional view showing an eighth embodiment of the invention;
Fig. 9 is a longitudinal sectional view showing the eighth embodiment of the invention;
Fig. 10 is a side elevation showing a ninth embodiment of the invention;
Fig. 11 is a diagram showing the operation of the ninth embodiment of the invention;
Fig. 12 is a front view of the ninth embodiment of the invention;
Fig. 13 is a sectional view showing a conventional example; and Fig. 14 is a sectional view showing a portion of the conventional example in an enlarged form.

DESCRIPTION OF THE PREFERRED EMBODIMENTS
Embodiments of the invention will hereunder be described with reference to the drawings. Figure 2 schematically `` 20600~7 illustrates the basic construction of a Xaiser on-demand type ink jet recording head that is used in the present invention.
The head shown in Figure 2 includes an ink tank 9; an ink supply path 10; an ink pressurizing chamber 11; an ink nozzle 12; an ink supply path 13 communicating with the ink nozzle 12;
a vibrating plate 14 disposed outside the ink pressurizing chamber 11; and a piezoelectric element 15 serving as an electric-energy-to-mechanical-energy conversion element bonded onto the vibrating plate 14. The piezoelectric element 15 and lo the vibrating plate 14 form a bimorph. A head substrate 16, carries the ink supply paths 10, 13, the ink pressurizing chamber 11, and the ink nozzle 12. In the above construction, upon application of a pulsed voltage across the piezoelectric element 15, the piezoelectric element 15 both expands in the direction of its thickness and contracts in the direction of its length, causing the vibrating plate 14 to bend toward the ink pressurizing chamber 11. As a result, the volume of the ink pressurizing chamber 11, is slightly reduced, and the pressure wave produced by the deformation of the vibrating plate 14 causes ink in the ink pressurizing chamber 11 to form ink droplets and ink droplets to be ejected, in a direction identified by ~a) in Figure 2, from an ink jetting outlet of the ink nozzle 12.
Because the ink jet recording head shown in Figure 2 may be formed thin as a whole, the overall structure of the head can be kept relatively thin and small. This characteristic is 2~60047 used in the present invention by juxtaposing a plurality of ink nozzles on a single substrate thereby to implement a multi-color printing ink jet recording head that i9 small in overall size.
s Figure 1 is an exploded perspective view illustrating the structure of a first embodiment of the invention, and Figure 3 is a cross-sectional view thereof. In Figures 1 and 3, the reference numeral 17 designates a head suhstrate made of silicon and having a thickness of between O.S and 1.0 mm. On a lo surface of this head substrate 17, are four sets of ink flow paths formed by dry plasma etching. Each ink flow path set includes an ink pond 18, ink supply paths 19, 21, and an ink pressurizing chamber 20. Ink nozzles 22 are also formed so as to communicate with the respective ink flow path sets. The ink lS pond 18, the ink pressurizing chamber 20, and the ink supply path 21 are formed by machining the head substrate 17 to a depth ranging from lS0 to 200 pm . The cross-section of the ink nozzle 22 is of a semicircular shape with a width of between 60 and 80 ~m, a depth of between 35 and 40 pm , and a length of between 0.3 and 0.8 mm. The depth of the ink supply path 19 is made equal to that of the ink nozzle 22. The ink nozzles 22 are juxtaposed at a pitch Ll approximating 1 mm.
After these components have been formed on the head substrate 17 by etching, a vibrating glass plate 23 is bonded onto an upper surface of the substrate 17 by electrostatic bonding to integrate the vibrating plate 23 with the head -\
` 2060047 substrate 17. Therea~ter, piezoelectric elements 24 are bonded onto the upper surface of the vibrating plate 23 at positions corresponding to the ink pressurizing chambers 20 to form the main portion of the recording head. Although not shown, ink bags containing four colors of inks are connected to the ink ponds 18 through ink tubes, respectively. The inks supplied from these ink bags fill the ink ponds 18 and further, are forwarded to the ink pressurizing chambers 20 through the ink supply paths 19, respectively. When a voltage pulse is applied lo across a piezoelectric element 24, which acts on an ink pressurizing chamber 20 through the vibrating plate 23, the vibrating plate 23 is deformed to produce a pressure wave and cause the ink to be jetted from the ink jetting outlet of the corresponding ink nozzle 22 as described in connection with lS Figure 2. In this embodiment, it has been verified that frequencies up to 6 kHz of the voltage pulse to be applied can provide stable ink ~etting performance. In this embodiment, silicon is used as the material for the head substrate 17 and the respective components are formed by dry plasma etching, because this material and above fabrication method are superior to other materials and fabrication methods in terms-of fabrication accuracy, repetitiveness, bonding accuracy, yield, cost, and the like.
As comparative examples, the tradeoffs involved in using a photosensitive glass or a stainless steel as the head substrate 17 w~ll now be described. A head substrate made of a ' 1, ., ~ ........................................................ .

2060~7 photosensitive glass is obtained by irradiating light rays onto the ink flow path portions to make them crystalline; etching the crystalline portions using a hydrofluoric acid solution;
thereafter, superimposing another piece of photosensitive glass of the same quality serving as a vibrating plate on the thus formed head substrate; and bonding them by thermal diffusion while heating them to about 500C. A head substrate formed of a stainless steel plate is prepared by coating portions other than the ink flow paths with a photosensitive resist; and etching the plate to a predetermined depth using a hydrofluoric acid solution. Thereafter, the thus processed stainless steel plate is superimposed on another stainless steel plate serving as a vibrating plate to integrate them by diffusion bonding in a vacuum at 800 to 1000C. When the photosensitive glass plate lS is used, the ink nozzle has a trapezoidal shape since the photosensitive glass plate is anisotropic, and in addition, a steep step is formed by the difference in depth between the ink nozzle and the ink supply path, which causes a vortex of ink streams, imposing problems that must be overcome to ensure response frequency and printing quality. Further, difficulties incurred in bonding the vibrating plate can result in a low bonding yield, which is an economic disadvantage. The stainless steel plate permits an etching process to be performed, but involves such disadvantages as dimensional inaccuracy per lot and inconsistency in performance per ~ ....

` - 2060~47 ~ recording head, making the stainless steel plate inadequate as ; a head for recorders.
The behavior of air bubbles infiltrating into the ink pressurizing chamber 20 with respect to the first embodiment s will now be described. As is well known, for a recording head of this type, which produces a pressure wave to jet the ink, the presence of air bubbles may hamper its effective operation because the air bubbles tend to absorb the produced pressure wave. To avoid this problem, a second embodiment attempts to lo remove air bubbles entering into the ink easily by performing a process to increase the wettability to ink of the surface of each ink flow path set formed on the head substrate 17. Since the wettability to ink can be represented quantitatively in terms of an angle of contact, it will hereinafter be referred to as the angle of contact. The inventors measured the angles of contact for ink with respect to both the head substrate 17 and the vibrating plate 23 by conducting tests under various surface treatments and conditions. Table 2 shows typical test results, and it was verified from them that the angle of contact is minimal when the sample~ were soaked in an alkali solution for 6 hours and cleaned thereafter.

'' . ' ' ' , ' :

.
, 2060~47 Processing conditions Angle of contact ..... _ s Surface to be plasma etched 75 Cleaning with hydrofluoric 73 acid solution Supersonic cleaning in 68 acetone solution soaking in alkali solution (6 Hrs) 35 The alkali solution was prepared by mixing diluting water into a potassium hydroxide (KOH) solution and adjusting its pH.
other tests conducted with the potassium hydroxide solution under different conditions have led to the verification that the angle of contact can be reduced similarly with the pH value ranging from 12 to 14 and the soaking time from 5 to 12 hours.
These processes contribute to reducing the angle of contact of the ink flow path parts, such as the ink supply path 21 and the ink nozzle 22 and thereby increasing wettability.
As a result, the adhesiveness between the ink and the surface of the ink flow path is improved to facilitate migration of the floating air bubbles through the ink. Specifically, when air bubbles enter into the ink within the ink flow path, the air bubbles can be removed by simply putting a piece of blotting paper over the ink jetting outlet of the ink nozzle 22. The air bubbles are attracted together with the ink that is _ 16 -.. .. ..

~~
` 20600~7 absorbed by the paper and thereby removed. The removal of the - air bubbles in this way is an easy solution to the problem of air bubble-induced failure to ~et the ink.
If a pH value of 12 or below is selected as the condition of the aforesaid alkali cleaning, substantially the same result can be obtained, but with a longer processing time required to - obtain an acceptable effect. Under a pH that is between 12 and 14, a processing time longer than required will cause the surface to be overetched, thus increasing the angle of contact 0 against what is expected. For these reasons, it is necessary to select an optimal combination of pH with the processing time for each case.
Measures to be taken in the case where the ink remains adhered around the ink jetting outlet of each ink nozzle 22, and thus impairs printing quality of the above embodiment, will be described. As is well known, an ink jet recording head of this type jets the ink only when a pressure wave is produced by the deformation of the vibrating plate 23. Since ink droplets are jetted from the ink jetting outlet intermittently, there should, in principle, be no ink present at the ink jetting outlet when the ink is not being jetted therefrom. -However, when the ink jetting operation is repeated over a long period of time, a part of the ink starts to adhere around the ink jetting outlet and the adhering ink may gradually accumulate as ink deposition. Once such ink deposition is present, the ink droplets being jetted from the ink nozzle and the ink ....
~ - 17 -.

deposition ~ormed around the ink jetting outlet interact at the time of jetting the ink, varying the size of the ink droplets that reach the surface of a sheet and damaging the printing quality. Also, this condition produces satellite or auxiliary ink droplets.
To overcome this problem, a third embodiment is provided to increase a water repelling property or hydrophobicity on the end surfaces of both the head substrate 17 and the vibrating plate 23 around the ink jetting outlets so that the ink lo droplets will not adhere around the ink jetting outlets. The water repelling property is a property that is opposite to the wettability. The larger the water repelling property is, the more~ the ink droplets are repelled away and stay out.
Specifically, a silicone oil is applied to the end surfaces of lS the head substrate 17 and the vibrating plate 23 around the ink jetting outlets and baked by heating at 150 to 200C for several hours to form a water repelling film. The thickness of the water repelling film is 1 ~m or so, which provides a satisfactory water repelling performance against the ink It is confirmed from test results that the ink does not adhere even for a lengthy printing operation and therefore-that high quality printing can be ensured with no ink deposition formed.
A fourth embodiment of the invention will be described with reference to Figure 4. As in Figure 3, the fourth embodiment similarly attempts to prevent ink from being deposited around the ink jetting outlets. As shown in Fiqure 4, the recording head of the fourth embodiment is constructed in substantially the same way as that shown in Figure 1, with slits 25a to 25e additionally formed so as to be interposed between ink nozzles 22a to 22d. Each of the slits 25a to 25e is prepared by kerfing the head substrate to a width L2 of 60 to 80 ~ using a cutter. The notch portions provided by the slits 25 in this way are interposed between the ink jetting outlets and, if the cross-sectional area of each notch portion is made larger than the cross-sectional area of each ink nozzle lo 22, the ink is drawn back to the ink nozzle 22 even if the ink has formed an ink deposition around the ink jetting outlet, thereby obviating expansion of the ink deposition. As a result, stable high quality printing can be provided at all times. The phenomenon of expanding the formation of ink deposition around the ink jetting outlet to the neighboring ~etting outlets to cause mixture of different colors can be prevented completely. Being formed of the slits 25 and serving to control the aforesaid behavior and action under the ink surface, the notch portions and their cross-sectional area are 20 80 designed based on the verifications derived from the tests conducted by the inventors.
A fifth embodiment of the invention will be described with reference to Figure 5. As in the third and fourth embodiments, the fifth embodiment similarly attempts to prevent an ink deposition from being formed around the ink ~etting outlets.
As shown in Figure 5, grooves 26a to 26e are interposed between ,~, f ,,, ,~ .,, ~ .. . .

the ink nozzles 22a to 22d of a width L3 in the range of between 80 to 150 ~m when the head substrate 17 is dry plasma etched. The cross-sectional area of the notch portion formed of each of the grooves 26a to 26e is made larger than the cross-sectional area of each ink nozzle 22. This embodiment can also ensure consistently high quality printing at all times with the same action as in the fourth embodiment.
A sixth embodiment of the invention will be described with reference to Figure 6. The sixth embodiment attempts to ensure lo consistent printing quality even if ambient temperature of the recording head changes. The property of an ink changes with changing temperature, and the jetting performance of the ink jet recording head, in particular, is influenced by the viscosity of the ink. That is, when the viscosity of an ink increases with decreasing temperature, the frictional resistance of the ink flow path increases, thereby reducing the flow velocity of the ink. At the same time, the amount of jetted ink is also reduced, impairing the printing quality. As long as the temperature of the ink stays within the range of from 15 to 40C, there is no inconvenience such as printing quality deterioration attributable to changes in viscosity, which is observed at temperatures below 15C. Thus, in this embodiment, the ink is indirectly heated when the ambient temperature drops below 15C so that the viscosity of the ink can be maintained within a prescribed value.

_ 20 -20600~7 As shown in Figure 6, in the recording head constructed in the same way as the first embodiment, a heater 27 that is planar in structure is bonded onto a lower surface of the head substrate 17 under the ink pressurizing chamber 20. As is s apparent from Figure 6, the heater 27 is bonded on a surface opposite to the surface on which the piezoelectric element 24 is arranged, their mounting positions corresponding to each other. A PTC thermistor, a chip resistor, or the like is used as the heater 27. When the heater 27 is turned on as the ambient temperature is decreased to a predetermined value, the ink within the ink pressurizing chamber 20 is indirectly heated to a predetermined temperature. This ensures that the viscosity of the ink will be below a predetermined value, allowing a predetermined amount of ink to be ~etted from the ink jetting outlet at all times and ensuring a consistent printing quality. According to the tests conducted by the inventors, satisfactory printing can be performed by heating the ink with the heater 27 even when the ambient temperature is at 0C.
A seventh embodiment of the invention will be described with reference to Figure 7. The seventh embodiment-is another version of the sixth embodiment with the heater 27 bonded at a different position. As shown in Figure 7, a heater 28 is bonded on an end portion of the upper surface of the vibrating 2S plate 23, the end portion being above the ink nozzl~ 22. The operation and effect of the heater 28 is substantially the same ~ .. .

as that of the sixth embodiment. Particularly in the seventh embodiment, the ink is heated by the heater 28 located close to the ink nozzle 22 immediately before its being jetted, which contributes to improving the rise response for the printing s quality when printing is resumed from a stoppage at low ambient atmosphere. This also allows the nozzle jetting outlet of a less frequently used color to be maintained at a predetermined temperature when operating a recorder, thereby preventing the printing quality from being deteriorated.
lo Figures 8 and 9 show an eighth embodiment in which an ink tank and the sixth embodiment are integrated into a cartridge so that they can be mounted easily on a recorder, for example.
Specifically, a recording head body 30 and ink bags 3i, that serve to supply the ink to the body 30, are accommodated in a monolithically constructed container 32 to form a cartridge 33.
Inside the container 32, one end of the body 30 is inserted into and supported by a throughhole formed at a lower portion of a front end of the container 32. The other end of the body 30 is fitted with a connector 34 and connected to tubes 35 that communicate with the ink bags 31. Further, the piezoelectric elements 24 of the body 30 are supported by and secured to the container 32 by a supporting member 36. Conductors 37, 38 are connected to the piezoelectric elements 24 of the body 30 and the heater 27, while the other ends of the conductors are connected to a socket 39 located at the right end of the container 32.

`` ~ 2060~47 Ry accommodating the recording head body 30 and the ink bags 31 in a single container 32, the cartridge 33 permits easy installation and removal of the body 30 and the ink bags 31 to and from a recorder, for example, thereby facilitating s inspection of the recording head, its replacement for ink replenishment and the like, as well as its maintenance.
Particularly, in the event of any printing abnormality during the operation of a recorder, quick replacement of a whole cartridge contributes to minimizing the downtime and thus lo ensuring continuity in printing.
Figures 10 to 12 show a ninth embodiment of the invention, with a modified cartridge 33. An ink used in the ink jet recording head, either watercolor ink or oil ink, contains water and other solvents. When the ink nozzle 22 is exposed to air for a long time, water and the other solvents evaporate to change the composition of the ink, causing an impediment to ink jetting and thereby impair printing performance. To overcome this problem, the embodiment includes a cap 40 on the cartridge 33 to cover the ink jetting outlets as necessary. As shown in Figures lO to 12, the cap 40 overlaps both lateral sides of the front end of the container 32 and is supported by a-pin 41 so as to be pivotable up and down. While the cartridge 33, mounted on a recorder, is printing, the cap 40 is opened upward ~ and held as such so that it does not disturb the printing operation as indicated by a solid line in Figure ll. When the cartridge 33 is released from the recorder or when it is not in v,J.. .

`` ``` 2060~47 use while mounted on the recorder, the cap 40 is positioned against the ink jetting outlets of the recording head body 30 while pivoted downward as depicted by phantom lines in Figure ll. A rubber pad 43 supported by a plate spring 42 inside the cap 40 serves to prevent evaporation of the solvents of the ink by its being in sealing contact with the ink jetting outlets.
By mounting the cap 40 in this way and covering the ink jetting outlets therewith when the cartridge is not in use, the property of the ink can be maintained consistent at all times lo to allow high quality printing to be performed.
As described above, the invention, having a plurality of ink nozzles that constitute a Raiser on-demand type ink jet recording head juxtaposed on a single substrate, allows the entire structure of the recording head to be thin and small while ensuring multi-color printing. The arrangement of its main components primarily on the substrate permits easy and inexpensive fabrication. Various processing done, as necessary, on the ink flow paths and the end surface of the substrate in accordance with the property of the ink allows the removal of air bubbles in the ink and elimination of satellites, which contributes to improving the printing quality and stabilizing the ink jetting performance. In addition, the integration of the ink tank with the recording head into a cartridge achieves easy handling and maintenance, thereby improving user-friendliness. As a result of the above i~
2060~47 advantages, the application of the invention to analog recorders will contribute to downsizing the recorders themselves, reducing their fabrication cost, and improving their reliability.
The foregoing description of preferred embodiments of the invention has been presented for purposes of illustration and description. It is not intended to be exhaustive or to limit the invention to the precise form disclosed, and modifications and variations are possible in light of the above teachings or may be acquired from practice of the invention. The embodiments were chosen and described in order to explain the principles of the invention and its practical application to enable one skilled in the art to utilize the invention in various embodiments and with various modifications as are suited to the particular use contemplated. It is intended that the scope of the invention be defined by the claims appended hereto, and their equivalents.

Claims (18)

1. An ink jet recording head comprising a plurality of ink nozzles to provide a Kaiser on-demand type ink jet recording head, said plurality of ink nozzles being juxtaposed on a single substrate.
2. An ink jet recording head according to claim 1, wherein ink flow paths communicating with said plurality of ink nozzles are formed on a surface of a silicon substrate by a dry plasma etching process and wherein a glass plate is electrostatically bonded onto an upper surface of said silicon substrate.
3. An ink jet recording head according to claim 1 or 2, wherein the surface of each of said ink flow paths communicating with said plurality of ink nozzles is subjected to an alkali cleaning process.
4. An ink jet recording head according to claim 1 or 2 wherein a water repelling film is formed on an end surface around ink jetting outlets of said plurality of ink-nozzles.
5. An ink jet recording head according to claim 3 wherein a water repelling film is formed on an end surface around ink jetting outlets of said plurality of ink nozzles.
6. An ink jet recording head according to claim 1 or 2 wherein a notch portion is formed between the ink jetting outlets of adjacent ones of said ink nozzles, said notch portion having a cross-sectional area larger than a cross-sectional area of one of said ink nozzles.
7. An ink jet recording head according to claim 3 wherein a notch portion is formed between the ink jetting outlets of adjacent ones of said ink nozzles, said notch portion having a cross-sectional area larger than a cross-sectional area of one of said ink nozzles.
8. An ink jet recording head according to claim 4 wherein a notch portion is formed between the ink jetting outlets of adjacent ones of said ink nozzles, said notch portion having a cross-sectional area larger than a cross-sectional area of one of said ink nozzles.
9. An ink jet recording head according to claim 1 or 2 including a heater on said surface of said substrate on which said ink flow paths are positioned.
10. An ink jet recording head according to claim 3 including a heater on said surface of said substrate on which said ink flow paths are positioned.
11. An ink jet recording head according to claim 4 including a heater on said surface of said substrate on which said ink flow paths are positioned.
12. An ink jet recording head according to claim 6 including a heater on said surface of said substrate on which said ink flow paths are positioned.
13. An ink jet recording head according to claim 1 or 2 comprising a cartridge to contain a recording head body including said plurality of ink nozzles and said substrate, and an ink tank for supplying an ink.
14. An ink jet recording head according to claim 3 comprising a cartridge to contain a recording head body including said plurality of ink nozzles and said substrate, and an ink tank for supplying an ink.
15. An ink jet recording head according to claim 4 comprising a cartridge to contain a recording head body including said plurality of ink nozzles and said substrate, and an ink tank for supplying an ink.
16. An ink jet recording head according to claim 6 comprising a cartridge to contain a recording head body including said plurality of ink nozzles and said substrate, and an ink tank for supplying an ink.
17. An ink jet recording head according to claim 9 comprising a cartridge to contain a recording head body including said plurality of ink nozzles and said substrate, and an ink tank for supplying an ink.
18. An ink jet recording head according to claim 13, further comprising a cap, said cap being pivotally supported to be rotatable relative to said cartridge and capable of covering said ink jetting outlets of said plurality of ink nozzles by pivotal movement thereof.
CA 2060047 1991-01-28 1992-01-27 Ink jet recording head Abandoned CA2060047A1 (en)

Applications Claiming Priority (2)

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JP2785791A JPH04251750A (en) 1991-01-28 1991-01-28 Ink-jet recording head
JP3-27857 1991-01-28

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JPH04251750A (en) 1992-09-08
DE4201923A1 (en) 1992-08-06
FR2676022B1 (en) 1995-06-16
FR2676022A1 (en) 1992-11-06

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