CA2031733A1 - Method for forming probe and apparatus therefor - Google Patents

Method for forming probe and apparatus therefor

Info

Publication number
CA2031733A1
CA2031733A1 CA 2031733 CA2031733A CA2031733A1 CA 2031733 A1 CA2031733 A1 CA 2031733A1 CA 2031733 CA2031733 CA 2031733 CA 2031733 A CA2031733 A CA 2031733A CA 2031733 A1 CA2031733 A1 CA 2031733A1
Authority
CA
Canada
Prior art keywords
probe
end portion
electrode
forming part
apparatus therefor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA 2031733
Other languages
French (fr)
Other versions
CA2031733C (en
Inventor
Toshimitsu Kawase
Akihiko Yamano
Hiroyasu Nose
Toshihiko Miyazaki
Takahiro Oguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of CA2031733A1 publication Critical patent/CA2031733A1/en
Application granted granted Critical
Publication of CA2031733C publication Critical patent/CA2031733C/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)

Abstract

A probe for use in an apparatus for effecting information reading and/or information input on an information carrier member by closely positioning the probe thereto is formed by the following manner. An electrode is placed to a portion of the probe where the end portion is to be formed. Distance information between the end portion forming part of the probe and the electrode is detected. The relative position of the end portion forming part of the probe to the electrode is controlled on the basis of the detection result.
A voltage is applied to the end portion forming part of the probe through the electrode under the relative position control, thereby forming the end portion of the probe.
CA 2031733 1989-12-08 1990-12-07 Method for forming probe and apparatus therefor Expired - Lifetime CA2031733C (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1-317468 1989-12-08
JP31746889A JP2789244B2 (en) 1989-12-08 1989-12-08 Method of forming microprobe

Publications (2)

Publication Number Publication Date
CA2031733A1 true CA2031733A1 (en) 1991-06-09
CA2031733C CA2031733C (en) 1994-10-04

Family

ID=18088567

Family Applications (1)

Application Number Title Priority Date Filing Date
CA 2031733 Expired - Lifetime CA2031733C (en) 1989-12-08 1990-12-07 Method for forming probe and apparatus therefor

Country Status (2)

Country Link
JP (1) JP2789244B2 (en)
CA (1) CA2031733C (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100736358B1 (en) * 2004-11-12 2007-07-06 재단법인서울대학교산학협력재단 Method to assemble nanostructures at the end of scanning probe microscope's probe and scanning probe microscope with the probe
KR100660189B1 (en) * 2004-11-12 2006-12-21 한국과학기술원 An apparatus to bond a nano-tip using electrochemical etching and method thereof

Also Published As

Publication number Publication date
CA2031733C (en) 1994-10-04
JPH03179202A (en) 1991-08-05
JP2789244B2 (en) 1998-08-20

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Legal Events

Date Code Title Description
EEER Examination request
MKLA Lapsed
MKEC Expiry (correction)

Effective date: 20121202