CA2019697A1 - Lightweight structures and methods for the fabrication thereof - Google Patents
Lightweight structures and methods for the fabrication thereofInfo
- Publication number
- CA2019697A1 CA2019697A1 CA002019697A CA2019697A CA2019697A1 CA 2019697 A1 CA2019697 A1 CA 2019697A1 CA 002019697 A CA002019697 A CA 002019697A CA 2019697 A CA2019697 A CA 2019697A CA 2019697 A1 CA2019697 A1 CA 2019697A1
- Authority
- CA
- Canada
- Prior art keywords
- ribs
- cells
- core
- structure core
- lightweight
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- E—FIXED CONSTRUCTIONS
- E04—BUILDING
- E04C—STRUCTURAL ELEMENTS; BUILDING MATERIALS
- E04C2/00—Building elements of relatively thin form for the construction of parts of buildings, e.g. sheet materials, slabs, or panels
- E04C2/30—Building elements of relatively thin form for the construction of parts of buildings, e.g. sheet materials, slabs, or panels characterised by the shape or structure
- E04C2/34—Building elements of relatively thin form for the construction of parts of buildings, e.g. sheet materials, slabs, or panels characterised by the shape or structure composed of two or more spaced sheet-like parts
- E04C2/36—Building elements of relatively thin form for the construction of parts of buildings, e.g. sheet materials, slabs, or panels characterised by the shape or structure composed of two or more spaced sheet-like parts spaced apart by transversely-placed strip material, e.g. honeycomb panels
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- Engineering & Computer Science (AREA)
- Architecture (AREA)
- Civil Engineering (AREA)
- Structural Engineering (AREA)
- Laminated Bodies (AREA)
- Chemical Vapour Deposition (AREA)
- Optical Elements Other Than Lenses (AREA)
Abstract
ABSTRACT OF THE DISCLOSURE
A process is disclosed for fabricating lightweight structures out of material such as silicon carbide (SiC) and silicon (Si). The lightweight structure consists of a core to define the shape and size of the structure.
The core is coated with an appropriate deposit such as SiC or Si to give the lightweight structure strength and stiffness and for bonding the lightweight structure to another surface.
The core is fabricated from extremely thin ribs of appropriately stiff and strong material such as graphite. First, a graphite core consisting of an outer hexagonal cell with six inner triangular cells is constructed from the graphite ribs. The graphite core may be placed on the back-up side of a SiC faceplate and then coated with SiC to produce a monolithic structure without the use of any bonding agent. Cores and methods for the fabrication thereof in which the six inner triangular cells are further divided into a plurality of cells are also disclosed.
A process is disclosed for fabricating lightweight structures out of material such as silicon carbide (SiC) and silicon (Si). The lightweight structure consists of a core to define the shape and size of the structure.
The core is coated with an appropriate deposit such as SiC or Si to give the lightweight structure strength and stiffness and for bonding the lightweight structure to another surface.
The core is fabricated from extremely thin ribs of appropriately stiff and strong material such as graphite. First, a graphite core consisting of an outer hexagonal cell with six inner triangular cells is constructed from the graphite ribs. The graphite core may be placed on the back-up side of a SiC faceplate and then coated with SiC to produce a monolithic structure without the use of any bonding agent. Cores and methods for the fabrication thereof in which the six inner triangular cells are further divided into a plurality of cells are also disclosed.
Description
r- ~ 2 0 19 ~ 9 7 ,, -, .. ..
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:PATENT :-.' 1799-33-00 ,--: TITLE: :~LIGHTWEI~GHT~STRUCTURES AND~METHODS FOR THE ..
FABRICATION THEREOF
,~ .....
- This invent~lon-:was~developed under NASA Contract No.~ NAS 1-18476.~
~ ~ : ~ : . .. :
;5 ~BACKGROUND OF THE~INVENTIOW
: l. Field of the Invention :This invention relates to an improved method of : fabricating stiff and strong l~ightweight structures, and ;~:. .:
more particuIarly,~to an improved method for the ~;
10 ~ :fabrication~of~silicon~carbide tSiC) and/or silicon (Si) lightweight structures by the utilization of ~ ~ :
: : conventional vapor deposition~:techniques. Such lightweight structures;have utility in a variety of diverse~applications i~ncluding back-up structures for :
: 15 optical components:, as structural components for:.
automobile, aerospace and space appIications, and as ~;; lightweight furniture part~s for space.
;~ : 2. Description of the Prior Art ~ ;
In the field of optics, light detection and ranging (LIDAR) has come to be recogni2ed as an important : diagnostic tool~for remote measurement of a diversity of atmospheric parameters such as minor species of concentrations pressure, temperature, and water vapor -~
, :.:
, .. .
, ;
,:",~
:PATENT :-.' 1799-33-00 ,--: TITLE: :~LIGHTWEI~GHT~STRUCTURES AND~METHODS FOR THE ..
FABRICATION THEREOF
,~ .....
- This invent~lon-:was~developed under NASA Contract No.~ NAS 1-18476.~
~ ~ : ~ : . .. :
;5 ~BACKGROUND OF THE~INVENTIOW
: l. Field of the Invention :This invention relates to an improved method of : fabricating stiff and strong l~ightweight structures, and ;~:. .:
more particuIarly,~to an improved method for the ~;
10 ~ :fabrication~of~silicon~carbide tSiC) and/or silicon (Si) lightweight structures by the utilization of ~ ~ :
: : conventional vapor deposition~:techniques. Such lightweight structures;have utility in a variety of diverse~applications i~ncluding back-up structures for :
: 15 optical components:, as structural components for:.
automobile, aerospace and space appIications, and as ~;; lightweight furniture part~s for space.
;~ : 2. Description of the Prior Art ~ ;
In the field of optics, light detection and ranging (LIDAR) has come to be recogni2ed as an important : diagnostic tool~for remote measurement of a diversity of atmospheric parameters such as minor species of concentrations pressure, temperature, and water vapor -~
, :.:
2 ~19 ~ 9 7 profiles, aerosol cloud distributions, and wind fields.
LIDAR techniques such as measurement of back scattered signals, differential absorption, and Doppler shifts have been used to obtain information about the earth's atmosphere. ~ ~
The performance of a~LIDAR system depends upon the opt~ical configurat~ion~of~its receiving telescope.
Often, due to~space limitations such as in a shuttle b~rne LIDAR;system,~the~length of~the telescope is 10 ~ fixed. There;fore, the~opt}cal designer must select a particular~shape~and optics~speed of the mirrors to ~ -; maximize~the;throughput of the telescope. The most critical element in~the receiving telescope is the primary mirror~because of its size,~we~ight, fabrication cost, and thermal exposure to the outside world. Since the received~signal~ls~directly~proportional to the area of the primary~mirror, it~is important to use as large a ; primary mirror~as feaslble~to~obtain~reasonable signal levels for accurate~measurement. This is particularly true when~a space-borne LIDAR system is used to measure wind profiles in~the troposphere on a global basis.
; The~conventional~;techniques employed in the prior art for fabricating~large t>l.0 meter diameter) mirrors ar~e quite~slow and time consuming. Several months to years are~reguired-to fabricate~a large mirror from ultra low expans~ion silica glass or Zerodur, a product ,commerciallyjavailable from Schott Glass Technologies, Inc., 400 York Avenue, Duryea, PA 18642. Since a number of space-based LIDAR systems are planned for the future, considerable attention is currently being given to the development of techniques for the rapid and economic production~of large, high performance mirrors.
20~9~97 ,, ,, -, ", j , ,, , j", j ", ' ', Thus, a spin casting technique has been proposed to fabricate 1.2 meter and 3.5 meter diameter glass mirror , blanks containing lightweight honeycomb cells. Although this technique is relatively faster than the 5~ conventional mirror fabrication methods and produces lightweight mirr~ors~, the weight of these mirrors is ; still an~order of ma~gnitude more than permissible for many space~applications. Furtherr~the spin-castlng - --technique~is~unsultable for fabricating large mirrors of 10~ ~advanced cerami;cs~such~as SiC,~titanium diboride (TiB2), and boron~carbide (B4C)~that have high melting points. ~ -These latter materials have properties superior to those of glass for large lightweight optics.
Other technlques lnvolving~the casting of fiber reinforced compos~ites containlng epoxy and plastics and the stretching of membranes over appropriate substrates are also currently under investigation.
Stlll another techni~que;for ma~lng stiff ; lightweight structures ;is disc}osed in U. S. Patent No. ~`
LIDAR techniques such as measurement of back scattered signals, differential absorption, and Doppler shifts have been used to obtain information about the earth's atmosphere. ~ ~
The performance of a~LIDAR system depends upon the opt~ical configurat~ion~of~its receiving telescope.
Often, due to~space limitations such as in a shuttle b~rne LIDAR;system,~the~length of~the telescope is 10 ~ fixed. There;fore, the~opt}cal designer must select a particular~shape~and optics~speed of the mirrors to ~ -; maximize~the;throughput of the telescope. The most critical element in~the receiving telescope is the primary mirror~because of its size,~we~ight, fabrication cost, and thermal exposure to the outside world. Since the received~signal~ls~directly~proportional to the area of the primary~mirror, it~is important to use as large a ; primary mirror~as feaslble~to~obtain~reasonable signal levels for accurate~measurement. This is particularly true when~a space-borne LIDAR system is used to measure wind profiles in~the troposphere on a global basis.
; The~conventional~;techniques employed in the prior art for fabricating~large t>l.0 meter diameter) mirrors ar~e quite~slow and time consuming. Several months to years are~reguired-to fabricate~a large mirror from ultra low expans~ion silica glass or Zerodur, a product ,commerciallyjavailable from Schott Glass Technologies, Inc., 400 York Avenue, Duryea, PA 18642. Since a number of space-based LIDAR systems are planned for the future, considerable attention is currently being given to the development of techniques for the rapid and economic production~of large, high performance mirrors.
20~9~97 ,, ,, -, ", j , ,, , j", j ", ' ', Thus, a spin casting technique has been proposed to fabricate 1.2 meter and 3.5 meter diameter glass mirror , blanks containing lightweight honeycomb cells. Although this technique is relatively faster than the 5~ conventional mirror fabrication methods and produces lightweight mirr~ors~, the weight of these mirrors is ; still an~order of ma~gnitude more than permissible for many space~applications. Furtherr~the spin-castlng - --technique~is~unsultable for fabricating large mirrors of 10~ ~advanced cerami;cs~such~as SiC,~titanium diboride (TiB2), and boron~carbide (B4C)~that have high melting points. ~ -These latter materials have properties superior to those of glass for large lightweight optics.
Other technlques lnvolving~the casting of fiber reinforced compos~ites containlng epoxy and plastics and the stretching of membranes over appropriate substrates are also currently under investigation.
Stlll another techni~que;for ma~lng stiff ; lightweight structures ;is disc}osed in U. S. Patent No. ~`
4,716l064 granted to Robert A. Holzl et al. on December~29,~ 198~7.~ The Holzl et~al. patent emphasizes a ~-requirement for two parallel~separated surface defining mémbers~that~;a~re connected by~stlffeners. Fabrication ~ -starts with;a~solid graphite disc which defines the outer envelope~to the part to be produced. Then, by a ;~ -~: ~ : , , series of drillings of bores or holes in the graphite ~
disc~ theluse of plugs and multiple coatings of a i --~; chemically vapor deposlted material possessing a high stiffness to weight ratio, the part is constructed. A
disadvantage of this fabrication procedure is that it is time consuming, complex and costly. Moreover, the many steps of drilling, plugging, and multiple coating ~ -involved inherently limit the ability to control figure stability. This impairs the value of the process where extreme figure stability retention is of importance, as in high performance mirrors. Additionally, the Holzl et :.:
.:, , _ ; al. technique is limited to relatively thin structures because of thé difficulty~of obtaining uniform coatings ~; in the passages~between the spaced~parallel surface ; ; defining members.
~ Thus, there is a need and a demand for improvement n~the~methods~of~ fabricat~l~on~of~stiff and strong lightweight structures:to the~end of achieving extreme f~igure~stab~ ty~retentlon~as~well~as an~amenability to being~scaled~up~in~-si~ze~wh~ile~at~the same time enabling ~a( ~10~ slmplif~ica;tlon~ n~the~fabrication~procedure and~ ;
reduction~in~the~time;r~equired~for and the cost of such procedure.
SUMMARY~OF~THE~INVENTION
An~object~of~the;~invention~-is~to~provide an ~;~
15~ improvéd~method~for;~fabricating~sti~ff~and strong lightweight~structures~that are~characterized by extreme figure~stability;~retent~ion.~
Another~objeot~ of~;the invention is~to provide an ;imp`roved~method~ënabling~simplification~in,;reduction in 2~0~ time~required~for,~and~cost;~of fabricating stiff and~
strong,lightwei~g~ht~ structures.
A~further~ob~ect~of~the ;lnvention~ lS to provide an improved~stiff~and~istrong lightweight structure.
An addit~ional~`object~of the invention is to prdvide ; ;i~
~ such~a~structure~having~pa`rticular~utiIity as back-up structure in the~fabrication o ~lightweight~mirrors.
Another~object~of the~invention is to provide a stiff ànd~strong Lightweight structure~comprising a - -~
plurality of ribs~each~of which has~ a length and~`a -height that are greatly in excess of the thickness ` thereof, the ribs being assembled in the form o~a ~-, ~ 20~9~97 :
: , ! ,/
: _5_ , ,, ,"
. ~ , . . .
: structure having a plurality of cells and a stiffening and strengthening material coated on and enclosing the ;~
ribs, such materiaI comprising a material that is vapor ~ ; deposited on the ribs.
;~ : 5 Still another object of the invention is to provide :~ a method of fabricating;a lightweight structure from a plurality of ribs~each~of which have substantially the ~.
~:: :: same height and~thic~kness~with the height and length ;.;
: greatly exceeding the thickness, comprising the steps : -of~
"
a~ forming~from a first set of said ribs, ~; each of which are of substantially the same length, a hexagonal cell~havi~ng a depth equal to the height : of said~ribs~
: , ~ (bj~:;formlng slots in the center of first, ~ :
second and~third ones of a second set of said :-ribs~which~ribs~;are all of the same length and : -:~
: substantially~ eq~ual to:the distance between the - m~st widely spaced corners of said hexagonal cell, ~ :
: 20 : with:a~fi~rst slot from the top of a first one of said ribs:,~ a:second~slot from the: bottom of said :;;
:second one of said ribs, and:third and fourth slots from~both the top and~bottom of said third : one of said ribs,~ with the~ lengths of said first ~ :
:25 ~ and second~slots being greater than half the height of said:ribs and~the lengths of said third and fourth slots being less than half the height of . said rIbs, (c);lnterlocking said first, second and third ~; 30 ones of said ribs at~the centers thereof by bringing said first and second slots into ~: cooperative relation with said third and fourth ~- .
~; slots, respectively, ~:
:: :
2019~
(d) positioning said interlocked first, second and third ones of said ribs relatively to said hexagonal cell to connect the most widely spaced corners thereof thereby to form a structure core having six regions each of equilateral triangular cross section with each such region comprising a cell, and (e) exposing the structure core to a vapor deposition process to deposit and coat thereon a stiffening and strengthening material thereby to enclose said structure core in a monolithic structure of such material.
Still another object of the invention is to provide an improved method for fabricating such an improved stiff and strong lightweight structure that is characterized by the adaptability thereof for fabrication in various predetermined configurations.
A further object of the invention is to provide an -~
improved method for fabricating stiff and strong lightweight structures that is characterized by the adaptability thereof for scaling up in size.
In accomplishing these and other objectives, there is provided, in accordance with the invention, a four step process for fabricating lightweight structures out ;-of SiC and/or silicon ~Si). The lightweight structure consists of a core to define the shape and size of the structure, overcoated with an appropriate deposit, such as SiC or Si, to give the lightweight structure strength - ~
and stiffness and to bond the lightweight structure to ~ ~ -another surface.
The lightweight structure core is fabricated by bonding together thin ribs of a suitable material with a ;
compatible bonding agent. The core may consist of many ; ~.:- .'~-: : : : : ; :: :
~-`` 20~96~7 honeycomb cells of appropriate shapes. This core structure may be placed on a suitable substrate the surface configuration of which may be predetermined.
The substrate may be coated with a release agent. A
desired overcoat material is then deposited on the core structure by employing conventional or other appropriate deposition processes. A sufficient thickness of the overcoat material is deposited to ensure that the core is totally coated. The lightweight structure so fabricated is unloaded from the deposition system and separated from the substrate. I~ necessary or desirable, the enclosed core material may be removed by drilling small holes in the walls of the structure, followed by burning, etching or melting of the core -material away from the deposited overcoat material.
Fabrication of the lightweight structure in accordance with the four step process thus is as follows: (i) fabrication of a lightweight structure core; (ii) mounting of the lightweight structure core on a substrate for deposition of the overcoat material;
(iii) deposition of the overcoat material to enclose the core; and (iv) core removal from the substrate.
The lightweight structure core may be fabricated using a metal or non-metal as the core material, ; 25 including plastics, ceramics, carbon, glass, polymer,etc. The main requirement for a good candidate core material is that it should be compatible with the deposition process and material. Thin ribs of the core material are obtained and then assembled in the form of a honeycomb structure. The ribs may be joined together at the corners and intersections with a suitable bonding agent, as known to those skilled in the art. Other joining processes such as welding, brazing, soldering, may also be used.
-"` 2~9697 Each cell of the honeycomb structure may be in the shape of a circle, square, rectangle or a polygon. The lightweight structure may also be fabricated with a combination of different cell shapes. The preferred structure, however, is the one which has the greatest stiffness for the intended application, such as one involving hexagonal cells, each of which contain six triangular cells.
. , The invent~ion has particular utility in the fabrication of~ ghtweight Si/SiC mirrors. Thus, a complete lightweight mirror substrate may be fabricated ~
directly in a vapor deposition chamber, in a one-step -process, with~no bonding agent being required to attach ~ ~ -the SiC back-up structure to the faceplate of the mirror. ~ -: ::
The various features of novelty which characterize the invention~are pointed out with particularity in the claims annexed to and forming a part-o~ this specification. For a better understanding of the ~-invention, its operating advantages, and specific objects attained~by its use, reference is made to the accompanying drawings and descriptive matter in which preferred embodiments of the invention are illustrated. ~-BRIEF DESCRIPTION OF THE DRAWINGS ~ ~
; ,: I I . ~ :,-:
2~ With this summary of the invention, a detailed description~follows with reference being made to-the accompanying drawings which form part of the ~ -specification, of which:
Figs. 1 and 2 are plan and front views, respectively, of a lightweight structure core mounted, in accordance with a first embodiment of the invention, for deposition thereon of an overcoat material;
::
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2~9~
Fig. 3 is a detailed view of two of the three intersecting and interlocking ribs of the lightweight structure core of Figs. 1 and 2;
Fig. 4 is a detailed view of the third one of the intersecting and interlocking ribs of the lightweight structure core of Figs. 1 and 2;
Figs. 5 and 6 are plan and front views, respectively, of a lightweight structure core mounted, in accordance with a second embodiment of the invention, for deposition thereon of an overcoat material;
Fig. 7 is a perspective view of a chemically vapor deposited SiC lightweight structure produced utilizing the lightweight structure core mounted as shown in Figs.
disc~ theluse of plugs and multiple coatings of a i --~; chemically vapor deposlted material possessing a high stiffness to weight ratio, the part is constructed. A
disadvantage of this fabrication procedure is that it is time consuming, complex and costly. Moreover, the many steps of drilling, plugging, and multiple coating ~ -involved inherently limit the ability to control figure stability. This impairs the value of the process where extreme figure stability retention is of importance, as in high performance mirrors. Additionally, the Holzl et :.:
.:, , _ ; al. technique is limited to relatively thin structures because of thé difficulty~of obtaining uniform coatings ~; in the passages~between the spaced~parallel surface ; ; defining members.
~ Thus, there is a need and a demand for improvement n~the~methods~of~ fabricat~l~on~of~stiff and strong lightweight structures:to the~end of achieving extreme f~igure~stab~ ty~retentlon~as~well~as an~amenability to being~scaled~up~in~-si~ze~wh~ile~at~the same time enabling ~a( ~10~ slmplif~ica;tlon~ n~the~fabrication~procedure and~ ;
reduction~in~the~time;r~equired~for and the cost of such procedure.
SUMMARY~OF~THE~INVENTION
An~object~of~the;~invention~-is~to~provide an ~;~
15~ improvéd~method~for;~fabricating~sti~ff~and strong lightweight~structures~that are~characterized by extreme figure~stability;~retent~ion.~
Another~objeot~ of~;the invention is~to provide an ;imp`roved~method~ënabling~simplification~in,;reduction in 2~0~ time~required~for,~and~cost;~of fabricating stiff and~
strong,lightwei~g~ht~ structures.
A~further~ob~ect~of~the ;lnvention~ lS to provide an improved~stiff~and~istrong lightweight structure.
An addit~ional~`object~of the invention is to prdvide ; ;i~
~ such~a~structure~having~pa`rticular~utiIity as back-up structure in the~fabrication o ~lightweight~mirrors.
Another~object~of the~invention is to provide a stiff ànd~strong Lightweight structure~comprising a - -~
plurality of ribs~each~of which has~ a length and~`a -height that are greatly in excess of the thickness ` thereof, the ribs being assembled in the form o~a ~-, ~ 20~9~97 :
: , ! ,/
: _5_ , ,, ,"
. ~ , . . .
: structure having a plurality of cells and a stiffening and strengthening material coated on and enclosing the ;~
ribs, such materiaI comprising a material that is vapor ~ ; deposited on the ribs.
;~ : 5 Still another object of the invention is to provide :~ a method of fabricating;a lightweight structure from a plurality of ribs~each~of which have substantially the ~.
~:: :: same height and~thic~kness~with the height and length ;.;
: greatly exceeding the thickness, comprising the steps : -of~
"
a~ forming~from a first set of said ribs, ~; each of which are of substantially the same length, a hexagonal cell~havi~ng a depth equal to the height : of said~ribs~
: , ~ (bj~:;formlng slots in the center of first, ~ :
second and~third ones of a second set of said :-ribs~which~ribs~;are all of the same length and : -:~
: substantially~ eq~ual to:the distance between the - m~st widely spaced corners of said hexagonal cell, ~ :
: 20 : with:a~fi~rst slot from the top of a first one of said ribs:,~ a:second~slot from the: bottom of said :;;
:second one of said ribs, and:third and fourth slots from~both the top and~bottom of said third : one of said ribs,~ with the~ lengths of said first ~ :
:25 ~ and second~slots being greater than half the height of said:ribs and~the lengths of said third and fourth slots being less than half the height of . said rIbs, (c);lnterlocking said first, second and third ~; 30 ones of said ribs at~the centers thereof by bringing said first and second slots into ~: cooperative relation with said third and fourth ~- .
~; slots, respectively, ~:
:: :
2019~
(d) positioning said interlocked first, second and third ones of said ribs relatively to said hexagonal cell to connect the most widely spaced corners thereof thereby to form a structure core having six regions each of equilateral triangular cross section with each such region comprising a cell, and (e) exposing the structure core to a vapor deposition process to deposit and coat thereon a stiffening and strengthening material thereby to enclose said structure core in a monolithic structure of such material.
Still another object of the invention is to provide an improved method for fabricating such an improved stiff and strong lightweight structure that is characterized by the adaptability thereof for fabrication in various predetermined configurations.
A further object of the invention is to provide an -~
improved method for fabricating stiff and strong lightweight structures that is characterized by the adaptability thereof for scaling up in size.
In accomplishing these and other objectives, there is provided, in accordance with the invention, a four step process for fabricating lightweight structures out ;-of SiC and/or silicon ~Si). The lightweight structure consists of a core to define the shape and size of the structure, overcoated with an appropriate deposit, such as SiC or Si, to give the lightweight structure strength - ~
and stiffness and to bond the lightweight structure to ~ ~ -another surface.
The lightweight structure core is fabricated by bonding together thin ribs of a suitable material with a ;
compatible bonding agent. The core may consist of many ; ~.:- .'~-: : : : : ; :: :
~-`` 20~96~7 honeycomb cells of appropriate shapes. This core structure may be placed on a suitable substrate the surface configuration of which may be predetermined.
The substrate may be coated with a release agent. A
desired overcoat material is then deposited on the core structure by employing conventional or other appropriate deposition processes. A sufficient thickness of the overcoat material is deposited to ensure that the core is totally coated. The lightweight structure so fabricated is unloaded from the deposition system and separated from the substrate. I~ necessary or desirable, the enclosed core material may be removed by drilling small holes in the walls of the structure, followed by burning, etching or melting of the core -material away from the deposited overcoat material.
Fabrication of the lightweight structure in accordance with the four step process thus is as follows: (i) fabrication of a lightweight structure core; (ii) mounting of the lightweight structure core on a substrate for deposition of the overcoat material;
(iii) deposition of the overcoat material to enclose the core; and (iv) core removal from the substrate.
The lightweight structure core may be fabricated using a metal or non-metal as the core material, ; 25 including plastics, ceramics, carbon, glass, polymer,etc. The main requirement for a good candidate core material is that it should be compatible with the deposition process and material. Thin ribs of the core material are obtained and then assembled in the form of a honeycomb structure. The ribs may be joined together at the corners and intersections with a suitable bonding agent, as known to those skilled in the art. Other joining processes such as welding, brazing, soldering, may also be used.
-"` 2~9697 Each cell of the honeycomb structure may be in the shape of a circle, square, rectangle or a polygon. The lightweight structure may also be fabricated with a combination of different cell shapes. The preferred structure, however, is the one which has the greatest stiffness for the intended application, such as one involving hexagonal cells, each of which contain six triangular cells.
. , The invent~ion has particular utility in the fabrication of~ ghtweight Si/SiC mirrors. Thus, a complete lightweight mirror substrate may be fabricated ~
directly in a vapor deposition chamber, in a one-step -process, with~no bonding agent being required to attach ~ ~ -the SiC back-up structure to the faceplate of the mirror. ~ -: ::
The various features of novelty which characterize the invention~are pointed out with particularity in the claims annexed to and forming a part-o~ this specification. For a better understanding of the ~-invention, its operating advantages, and specific objects attained~by its use, reference is made to the accompanying drawings and descriptive matter in which preferred embodiments of the invention are illustrated. ~-BRIEF DESCRIPTION OF THE DRAWINGS ~ ~
; ,: I I . ~ :,-:
2~ With this summary of the invention, a detailed description~follows with reference being made to-the accompanying drawings which form part of the ~ -specification, of which:
Figs. 1 and 2 are plan and front views, respectively, of a lightweight structure core mounted, in accordance with a first embodiment of the invention, for deposition thereon of an overcoat material;
::
: ':
2~9~
Fig. 3 is a detailed view of two of the three intersecting and interlocking ribs of the lightweight structure core of Figs. 1 and 2;
Fig. 4 is a detailed view of the third one of the intersecting and interlocking ribs of the lightweight structure core of Figs. 1 and 2;
Figs. 5 and 6 are plan and front views, respectively, of a lightweight structure core mounted, in accordance with a second embodiment of the invention, for deposition thereon of an overcoat material;
Fig. 7 is a perspective view of a chemically vapor deposited SiC lightweight structure produced utilizing the lightweight structure core mounted as shown in Figs.
5 and 6;
Figs. 8 and 9 are plan and front views, respectively, of a lightweight structure core mounted, in accordance with a third embodiment of the invention, for deposition thereon of an overcoat material;
Fig. 10 is a perspective view of a chemically vapor deposited fabricated SiC lightweight structure bonded to a SiC faceplate produced utilizing the lightweight structure core mounted as shown in Figs. 8 and 9;
Fig. 11 is a schematic illustration of a chemically vapor deposition apparatus that may be employed to ~fabricate SiC and Si lightweight structures, as illustrated in Figs. 1-10;
Figs. 12 and 13 are plan and side views, respectively, of a scaled up in size lightweight back-up structure core assembly having utility in the formation by chemical vapor deposition of a monolithic lightweight Si/SiC mirror faceplate and the back-up structure therefor;
., , " - -. ~ -. . . .
-~"` 2~196~7 Figs. 14-30 are side views illustrating the shapes of the ribs used in the back-up structure core assembly of Figs. 12 and 13, with the assembly being in accordance with a first and preferred method;
Figs. 31 and 32 are plan and side views, respectively, of a scaled up in size lightweight back-up structure core assembly having utility in the formation -by chemical vapor deposition of a monolithic lightweight Si/SiC mirror faceplate and the back-up structure therefor, with the assembly of the lightweight back-up structure core being by a second method;
Figs. 33-42 are side views illustrating the shapes ~-of the ribs used in the back-up structure core assembly of Figs. 31 and 32 in accordance with a second method of assembly; and Fig. 43 is a schematic illustration of a chemical vapor deposition furnace that may be used to effect SiC
and Si deposits on a mirror faceplate and the back-up structure therefor as shown in Figs. 12, 13, 33 and 34.
, , DESCRIPTION OF THE PREFERRED EM~ODIMENT~
Figs. 1 and 2 of the drawings illustrate a lightweight structure core 10 that is fabricated from graphite ribs 12a, 12b, 12c and 14a...14f. The core 10 is fabricated such that the ribs 14a...14f, which are all of the same length, form a hexagonal cell. The ribs 12a, 12b and 12c intersect in the center and connect the six corners of the hexagon. Ribs 12a, 12b and 12c also divide the hexa~on into six triangular parts. Rib~ 12a, 12b and 12c are fabricated with center slots, as described further hereinafter with reference to Figs. 3 and 4, to interlock them in place.
,.. .. .
f~
2~ ~6~7 In the preferred embodiments of the invention, the ribs all have a thickness of about 0.5 mm.(0.020 inch).
Further, the ribs are all characterized in having a hiyh ratio of the length and height thereof to their thickness. That is to say, the length and the height of each rib greatly exceeds its thickness.
In the invention embodiment illustrated in Figs. 1 and 2 and those illustrated, also, in Figs. 5 and 6 and in Figs. 8 and 9, all of the ribs have at least two adjacent surfaces that form an edge, all portions of which are located in a single plane, such as that containing the bottom edges 14g, 14h and 14i shown in Fig. 2.
To the end that the ribs 12a, 12b and 12c may interlock with each other at the center thereof, two of the ribs, 12a and 12b, for example, as shown in Fig. 3, are provided with a single transverse slot 12d that extends slightly more than half way through the height of the rib. The third rib, 12c, as shown in Fig. 4, is provided at the center thereof with opposed transverse slots 12e and 12f that extend less than half way through the height thereof. Assembly of the ribs 12a...12c in operative relation is effected by placing the slots 12d of ribs 12a and 12b in interlocking relation with opposed transverse slots 12e and 12f, each of which slots extends less than half way through the height of rib 12c. Ribs 14a...14f are positioned to define the outer perimeter of the structure 10, that is, to complete a hexagon, as shown.
The graphite ribs 12a.. 12c and 14a.. 14f may be joined with a graphite cement. Graphite is a good core material because it is compatible with most deposition procedures. Further, several different types of graphite with different thermal expansion coefficients ~.' . . . .
. ~ .,, .. . . . .
\~
2~9697 are available. A particular graphite having a thermal expansion coefficient closely matching that of an overcoat material to be deposited can be selected. A
disadvantage of graphite is that it is a fragile material. Thus, difficulties may be encountered in the fabrication of lightweight structure cores with graphite rib thicknesses less than 0.5 mm. (0.020 inch). The -~
graphite rib thickness may be reduced to less than 0.5 mm., however, by burning of the rib in air. Other strong and stiff materials such as Si, SiC, tungsten (W), molybdenum (Mo), etc. may also be used to fabricate extremely thin wall lightweight structure cores.
Mounting of the lightweight structure core 10 in a ~-deposition system for deposit thereon of a suitable deposition material depends upon the application for which the lightweight structure is intended to be used.
If only the lightweight structure core is required without any plate or substrate at either end, the lightweight structure core may be mounted on graphite poles 16a...16f attached to a substrate 18, as shown in Fig. 2, with the edges of the ribs engaging the tips of the poles. After the deposition of the overcoat material is completed, the lightweight structure is obtained by separating the structure from the poles, as by cutting.
If a plate of the deposited material is required at one end of the lightweight structure, the lightweight structure core 10 either may be loosely bonded to or placed on a substrate 20 coated with a mold release substance 22, as shown in Figs. 5 and 6. A suspension of graphite particles in an organic solvent may be used as the mold release coating. With such use, deposition will occur not only on the walls of the lightweight `~- 2 ~
structure core 10 but also at the base thereof. On completion of the deposition process, the lightweight structure with a base plate 24 of overcoat material formed thereon is separated from the substrate 20. In Fig. 7, there is illustrated a perspective view of a SiC
totally enclosed graphite lightweight structure 26 fabricated by this method.
In some applications such as the fabrication of lightweight Si or SiC mirrors, it may be desirable simultaneously to fabricate the lightweight structure and bond it to a faceplate of a desired material. In such cases, a lightweight structure core 10, as shown in Figs. 8 and 9, is bonded to a faceplate 28, as by flow bonding indicated at 30, and the deposition operation is performed. The material of the faceplate should be compatible with the deposition process to assure adherence of the deposited material. Fig. 10 illustrates a SiC enclosed graphite lightweight structure bonded to a SiC faceplate which has been -fabricated by the use of this method.
In order to enclose the lightweight structure core, an appropriate overcoat material may be deposited by any of the vapor deposition processes that are currently ; available. These processes include physical vapor deposition, sputtering, chemical vapor deposition and its different types (plasma assisted vapor deposition, low pressure vapor deposition, laser assisted vapor ! ' deposition, metal organic vapor deposition, etc.), evaporation and ion beam implantation. The materials which can be deposited include metals and nonmetals (plastics, ceramics, glasses, polymers, etc.).
Fig. 11 schematically illustrates a chemical vapor deposition apparatus, designated 32, that may be used to fabricate SiC and Si lightweight structures in .. .. .. . . . . . ... .
`-` 20~9~97 accordance with the invention~ This apparatus 32 includes a horizontal research furnace 34, specifically an electrically heated 3-zone Lindberg furnace, a reactant supply system 36, and an exhaust system 38.
Associated with furnace 34 is an elongated tube 40 of aluminum oxide (A12O3) containing a reaction or deposition chamber 42 that is substantially coextensive with zone 2. ~one 2, as shown, is heated by a heating element 44 while zones 1 and 3 are heated by individually associated heating elements 46 and 48, respectively. Blocks of firebrick, designated 50 and 52, are located outside tube 40 in the regions thereof respectively associated with zones 1 and 3.
The deposition region within chamber 40 is indicated at 54 and, as shown, has associated therewith a mandrel 56 consisting of four sides of an open box and a baffle plate 58. The pressure within chamber 42 is indicated by a pressure gauge 60.
Mounting, as by bonding, of the lightweight structure core 10 on the baffle plate 58 for the deposition thereon of an overcoat material is preferred.
This is for the reason that such mounting provides minimal deposition nonuniformity from cell to cell in the lightweight structure core.
The reactant supply system 36 includes a t~nk 60 comprising a source of argon (Ar) under pressure, a bubbler tank 62 containing methyltrichlorosilane (CH3SiC13) or trichlorosilane (SiHC13) through which -argon from source 60 is bubbled under control of valves -64a and 64b, and a separate source (not shown) of hydrogen (H2). The SiC and Si material to be deposited is fabricated by reacting Ch3SiC13 or SiHC13 with H2, respectively. Other silane and hydrocarbon sources can ~, ~, . , , , . : -,: , : .
2~19~97 be used to form SiC and Si. Both of these materials have been fabricated over a wide range of deposition temperature and reactor pressure, as shown in Table I
below.
TABLE I - NOMINAL CVD PROCESS PARAMETERS
USED TO FABRICATE SiC AND Si LIGHTWEIGHT STRUCTURES
Si Mater- FLC ~ RATES (Slpm)¦Deposi- Reactor Deposi-No. ial ~ _ ~3sicl3 Ar tion Pres- tion Pro- or Temper- sure Rate duced SiC13 ature C torr ~m/min.
_ _ 1 SiC <10 <2.0 <4.C 13558 - 25-300 <1.25 2 Si <15 <2.0 <5 ~ 182358 - 25-300 <1.75 The reagents may be introduced into the deposition chamber 42 through a central injector (not shown). The injector may be cooled with water to ~i) prevent deposition in the injector and (ii) to keep the temperature of the reagents low thereby minimizing gas phase decomposition or nucleation. The deposition thickness is controlled by varying the chemical vapor deposition process parameters and the deposition time.
After a sufficient thickness of the material is deposited, the deposition process is terminated and the furnace is cooled very slowly to prevent cracking and distortion of the lightweight structure due to residual stresses.
The exhaust system 38 shown in Fig. 11 includes a vacuum pump 64, a scrubber 66, gaseous filters 68 and an oil filter 70. The exhaust system 38 is provided to evacuate the gaseous reaction products that are released in the reaction chamber 42 during the deposition process.
:.: , . .
- :
2019~7 Removal of the graphite core, as mentioned previously, is optional. Since the deposited material completely encloses the core material, it is not necessary to remove the core material. As those skilled in the art understand, a core material can be selected the presence of which will not degrade the performance of the lightweight structure. Candidate core materials are graphite, Si, glass, quartz and various metals.
It is noted that when a vapor deposition technique is used to fabricate a lightweight structure, the gaseous flow in the lightweight structure, as illustrated by the arrows in Fig. 2, is a "stagnation"
flow governed by diffusion. This tends to yield deposition nonuniformity along the cell depth where the undesired effects of stagnation flow tend to be the greatest. By the term "stagnation flow" is meant a flow that is sluggish or lacking in activity, that is, a flow that has little motion or power of motion.
In accordance with the invention~ such stagnation flow may be minimized by providing holes 14j, as shown -in Figs. 6, 7 and 9, in the walls of the lightweight -~
structure core lO, and in particular, the walls of adjacent cells. This results in a gaseous flow, as illustrated ~y the arrows in Figs. 6 and 9, and improves the strength of the lightweight structure that is ; - -produced. The preferred location for the holes 14j is on the walls near the base o~ the lightweight structure -~ -core, that is, adjacent the substrate 20, as seen in Fig.
., , 6, and adjacent the faceplate 28, as seen in Fig. 9.
EXAMPLE I
:
The SiC enclosed graphite lightweight structure shown in Fig. 7 was fabricated by the above method -described in connection with the deposition apparatus , ~ , , , . ,; .: . .. . ..
.,: .. , . , . . - . , , . . : : --~;: . : - ~ . . . .
.. . . . :
~ 2019697 shown in Fig. 11 and involving process parameters as given in TABLE I. The lightweight structure core was constructed from graphite ribs about a . 5 mm. thick, 3.25 cm. long and 2.5 cm. high. The deposition thickness was about O.76 mm. (O.03 inch). The lightweight structure produced was quite strong and rigid. There were no apparent stresses or cracks in the structure.
EXAMPLE II
The chemical vapor technology of fabricating a lightweight back-up structure was demonstrated by fabricating a one cell SiC structure on the backside of a faceplate. First, a graphite core consisting of an outer hexagonal cell with six inner triangular cells, as illustrated in Figs. 8 and 9, was constructed from graphite ribs about 0.5 mm. thick. Each side of this hexagonal cell was 3.25 cm. long and 2.50 cm. high.
This graphite core was placed on the backside of the SiC
faceplate and then coated with SiC. This process produced a monolithic lightweight SiC structure without the use of any bonding agent. To avoid residual stresses in the structure, a grade of graphite was used which has a thermal expansion coefficient larger than that of the chemically vapor deposited SiC.
A coating of Si about 0.5 mm. thick on the near-net shape SiC faceplate was applied to permit fabrication of the final optical figure. To obtain a more uniform Si coating, the SiC faceplate was mounted such that the flow directly impinged on the replicated surface. Since the Si coating is required only on the front surface of the mirror, all other areas were masked with grafoil.
The mirror was polished flat to a figure of 1/5th of a wave at 0.6328 ~m and a finish of <lOA ~MS.
', ~ . , ' :
~,: . . ' : ' : - : ' ` " 2~697 In accordance with the invention, the aforementioned procedure may also be extended to fabricate curved Si/SiC mirrors of scaled up size and lightweight back-up structures therefor.
When fabricating structure cores for use as back-up structure for flat mirrors, the assembly of the ribs, as previously mentioned, is such that all of the ribs have at least two adjacent surfaces that form an edge, all portions of which lie in a single plane. Thus, contiguous edge portions of the plurality of cells formed by the assembly of the ribs all lie in the same ... .
plane. In the case of the fabrication of structure ;
cores for use as back-up structure for curved mirrors, contiguous edge portions of the cells of the structure formed by the ribs, when assembled, lie on a curved surface.
The fabrication of curved mirrors is more involved, as is apparent from the description provided~ ~ ~
hereinafter, due to ti) the optical fabrication of a - -curved surface required, and tii) fabrication and assembly of a graphite core for the lightweight structure. In other respects, the fabrication of curved and flat mirrors is similar. -, In order to scale the lightweight SiC back-up structure, first the graphite core is scaled. Since the thickness of the graphite ribs is kept the same during scaling, considerable care is required to assemble a large size graphite structure core.
Figs. 12 and 13 illustrate plan and side views, respectively, of a scaled up lightweight structure core according to the invention. The lightweight structure core, designated 72, comprising a fourth embodiment of -the invention, has particular utility as the back-up 2~ ~697 structure for lightweight Si/SiC curved mirrors as distinguished from flat mirrors, as shown in Figs. 7 and 10. Two methods are disclosed herein for the fabrication of the lightweight structure core 72.
The lightweight structure core 72, as shown in Fig.
12, is fabricated from six ribs of equal length which are positioned such that a large hexagonal cell having a depth equal to that of the ribs covers most of the backside of a circular faceplate 74. Connecting the six corners of this hexagon are three large ribs which intersect at their centers. These ribs also divide the hexagon into six equal triangular parts. These large ribs, similarly to ribs 12a, 12b and 12c shown in Figs.
3 and 4, are fabricated with center slots to interlock them in place.
More specifically, in the fabrication of the lightweight structure core 72, six outer sides of a large hexagon comprising ribs of a first set, all of which have the same length, and three central ribs comprising ribs of a second set, all of which have the same length, are bonded together. Next the six triangular regions that are formed within the hexagon are filled with ribs of a third set to form smaller cells of equilateral cross section and bonded together to complete the inner region. The region outside the hexagon may then be closed with ribs of a fourth set to cover as much of the circular area of the faceplate 74, as possible.
Details of the assembly of the lightweight structure core 72 of Figs. 12 and 13, according to a preferred method of assembly, are described herein with reference to Figs. 14-30. As shown in Fig. 12, ribs 76, 78, 80, 82 and 84 are positioned in parallel in equally spaced apart relation. The ribs 76...84 all have - 20196~7 different lengths and are provided with uniformly spaced slots, designated 86a at the top, as shown in Figs.
14-18, respectively. Each of ribs 76 and 82, as shown in Figs. 14 and 17, also include two spaced notches, designated 86b, at the top. There are two pieces for each of the ribs 78...84, the second piece in each case being designated by a prime mark (') in Fig. 12. One of the two pieces in each case is positioned in the upper half of the large hexagon, as seen in Fig. 12, and the other piece is positioned in the lower half. Thus, rib 84 is positioned in the top half and rib 84' is positioned in the bottom half.
Additional parallel positioned and equally spaced apart ribs, designated 88, 90, 92, 94 and 96, as seen in ~ -Fig. 12, all have different lengths and are provided with uniformly spaced slots, designated 98a at the bottom, as shown in Figs. 19-23, respectively, with ribs 88 and 94 also having two notches, designated 98b, at the top. Note that the ribs are made up of three parts when the slots are made into the notches. Thus, rib 88, as shown in Fig. 19, comprises three parts that are designated 94, 94' and 94". Similarly rib 94, as shown in Fig. 22, comprises three parts athat are designated 94, 94' and 94". There are two pieces of each of the 25 ribs 9096, with the second piece being designated by a prime mark. The two rib pieces, 96 and 96', thus are positioned at opposite sides of the large hexagon, as shown.
Further parallel positioned and equally spaced ribs, designated 100, 102, 104, 106 and 108, as seen in Fig. 12, all have different lengths and are provided with uniformly spaced slots, designated 110a, at the top and uniformly spaced slots, designated 110b, at the bottom, as shown in Figs. 24-28, respectively, ~i 20196~7 with two spaced notches, each designated 112, being provided in the top of ribs 100 and 106. There are two pieces of each of the ribs 102...108, with the second piece being designated by a prime mark.
~: :
As shown in Fig. 12, the region outside the large hexagon may be closed by a total of 12 ribs designated 114 (or 116) and there are six ribs designated 118. Ribs 114, 116, as shown in Fig. 29, and ribs 118, as shown in Fig. 30, are not provided 10~ with any slots. For convenience of illustration, the closure segments 114, 116 and 118 are not shown in Fig. 13.
~- Thus, there are a total of 45 pieces that are required to assemble the lightweight back-up structure core 72. There are flow holes, designated 120, that are provided in the ribs. Each cell has such holes.
In accordance with the invention, the scaled up in size lightweight structure core may be assembled by a second method. According to this method, which is ; 20 described with reference to Figs. 31 and 32, in the assembly of a lightweight~structure core 72', three -~
centraI ribs 122,~124 and l26 are first attached at the centers thereof. ~One of these ribs, 122, has one slot in the center at the~top, as shown in Fig. 33, another one, 124, has one slot in the center at the bottom, as shown in Fig. 34, and the third one, 126, has two slots, with one being in the center at the bottom and the other in the center at the top, as shown in Fig. 35. Then six ribs designated I28, 130, 132, 134, 136 and 138, all of which are of the same size, as illustrated in Fig. 36, are bonded to ribs 122, 124 and 126 to complete the large hexagon.
Each of the large triangles formed within the hexagon are then filled with smaller triangular cells.
For example, ribs 140, 142 and 144, as illustrated in Fig. 37, are bonded. ~ach of ribs 140, 142 and 144 has a top slit and a bottom slit, which slots are spaced by a cell length. Then ribs 146, 148 and 150, which are of the same length, are locked in the center of the triangle and bonded at the edges. Such locking may be performed in the same manner as described hereinbefore.
That is to say, one of the ribs 146 may have one slot at the bottom, another rib 148 may have one slot at the top, and the third rib 150 may have two slots, one at the top and one at the bottom, as shown in Fig. 38.
Rib 150 andribs 152 and 154, as shown in Fig. 39, are then locked and bonded at the edges. Finally, ribs 148 and 154, and a rib 156, also as shown in Fig. 39, are locked to complete the triangle. Once all six triangles, and hence, the large hexagon is all filled up, six outside closer modules are attached utilizing closure segments 158, 160, 162 as shown in Figs. 40-42, respectively, and in Fig. 31. For convenience of illustration, the closure segments have not been shown in Fig. 32.
As shown in the following TABL~ II, there are a total of 117 ribs or pieces required in the assembly of the lightweight structure core 72 utilizing the second method. The quantity of each piece required is given in the TABLE.
2~19~97 TABLE II
Reference No.
of Piece QuantitY Fiq. No.
128... 138 6 36 140... 144 18 37 146... 150 18 38 152... 156 18 39 1~2 18 42 As contrasted with the rib3 in the lightweight structure cores 10 shown in Figs. 1-10 in which the bottom edges of the ribs are all located in the same plane, the bottom edges of the ribs of the lightweight structure cores 72 and 72', as best seen in Figs. 13 and 33, respectively, curved, and hence, ail portions thereo are not located in the same plane. The structure of Figs. 1-10, as described, is appropriate for use in the fabrication of back-up structures for fIat mirrors or other flat members; those of Figs. 12-42 facilitate use in the fabrication of mirrors or other -~
members having curved surfaces. This demonstrates the adaptability of the lightweight structure core of the invention for fabrication in various configurations.
Fig. 43 illustrates a chemical vapor deposition system 164 that may be used to effect SiC and Si deposits on a mirror faceplate and the back-up structure therefor. The system 164 includes a furnace 166 -comprising a vertically positioned graphite tube 168, electrical heating elements 170 that surround tube 168, ~ ` 2019697 three mandrels 172, 174 and 176, and three baffle plates 178, 180 and 182.
The mandrels 172, 174 and 176 are arranged in series and are fabricated from high density graphite having a thermal expansion coefficient larger than that of the chemical vapor deposited SiC~ Each graphite mandrel 172, 174 and 176 is held with four graphite posts which, in turn, are attached to respectively associated graphite baffle plates 178, 180 and 182.
Each baffle plate is supported by the circular graphite tube 168 which encloses the deposition area and isolates the latter from the graphite heating elements 170.
Reagents, CH3SiC13 and H2, are introduced into the bottom of the tube 170 from four water-cooled injectors 184 mounted in the bottom cover 186 of tube -:
168.
In order to increase deposition efficiency and accommodate three mandrels in the chemical vapor deposition furnace, the first mandrel 172 is placed close to the injectors 184. To prevent the injectors 184 from producing "growth marks" on the first mandrel, a graphite manifold 188 was used which blunted the injector flow and allowed the reagents to flow uniformly :
through a large central hole. This arrangement provides a more uniform deposit on all three mandrels 172, 174 and 176.
CH3SiC13 is a liquid at room temperature with a vapor pressure of about 140 torr at 20C. It is carried to the deposition region by bubbling argon through two CH3SiC13 tanks ~not shown). The CH3SiC13 flow Erom the two tanks is divided into four parts which pass through the four injectors. The pressure and ~ ,!.. " " . , " ~
~ \
- 20~9697 temperature of the CH3SiC13 tank and the argon flow rates are maintained the same for both tanks to obtain a uniform deposition.
EXAMP~E III
The chemical vapor deposition mirror fabrication technology was scaled from a small horizontal research furnace to a pilot-plant size production furnace capable of fabricating a 40-cm.-diameter mirror. A
40-cm.-diameter mirror was designed. The salient features of the arrangement are given in TABLE III.
TABLE III - 40-cm.-DIAMETER Si/SiC
MIRROR DESIGN FEATURES
Si Cladded SiC FaceplateInch cm.
Si Cladding Thickness 0.020 0.05 SiC Faceplate Thickness0.0880.22 Faceplate Total Thickness 0.108 0.27 SiC Liqhtweiqht Structure ~all Thickness 0.064 0.163 Cell Height 1.28 3.25 ;
Cell Length 1.97 5.00 Flow Hole Diameter 0.275 0.70 Hole Center Distance From Edge 0.40 1.02 ~ -~
No. of Equilateral Triangular Cells 96.0 96.0 2$ Cell Aspect Ratio 1.3 1.3 SitSiC Mirror Mandrel Diameter 16.0 40.48 Radius of Curvature 39.37 100.0 Total Mirror Thickness1.3883.52 Center Depth 0.82 2.09 2~9~97 The mirror design assumed a polishing load of -1 psi, a peak-to-valley intercell sag of -0.025 ~m, a peak-to-valley self-weight gravity distortion between supports (20 cm. apart) of -0.025 pm, and a minimum natural frequency of 25 Hz. The weight of the mirror is 2.94 kg which corresponds to a weight specification of about 19 kg per meter squared.
In order to scaIe the SiC back-up structure, first -~
the graphite core is scaled. The lightweight structure consisted of 16 hexagonal cells containing a total of 96 triangular cells. The cell aspect ratio, defined as the cell depth to the diameter of the inscribed circle, is 1.3 for each triangular cell.
The scaling of the chemical vapor deposition fabrication technology to the required size involves the following:
(a) Material scaling. The optimum chemical vapor deposition process conditions which produced the Si and SiC materials in the research furnace were scaled to the pilot-plant size furnace. This scaling was performed keeping the following parameters unchanged: (1) deposition rate, (2) deposition setup geomet cally similar to the one used in the research furnace, (3) deposition temperature, and (4) furnace pressure. In addition, nondimensional chemical vapor deposition process parameters were identified and important scaling laws were develped. Based on these laws, reagent 1OW rates, molar ratio, and injector diameter were fixed. The scaling laws were validated by fabricating Si and SiC plates o size 32 cm. x 90 cm. and 0.63 cm. in the pilot-plant size furnace. Important physical, optical, - -` 20~9697 mechanical, and thermal properties of this material were compared with those corresponding to the research material, and were found to be identical.
(b) Scaling of the chemical vapor deposition mirror fabrication technology. This involves scaling of the replicated faceplate.
The scaled graphite core was placed on the backside of the SiC faceplate and coated with ~iC in the pilot-plant size furnace. After this was accomplished, the SiC faceplate was separated from the graphite mandrel and the front of the faceplate was coated with chemical vapor deposited Si.
Thus, in accordance with the invention, there has been provided unique lightweight structures and improved methods that enable simplification in, reduction of time ~ -required for, and cost of their fabrication. The structures provided are comprised of vapor deposited material such as SiC or Si in a monolithic form. The structures, while light in weight, are characterized by ;
being very stiff and strong and in having extreme figure stability retention. The structures are further -characterized in having an extraordinary adaptability for fabrication in various predetermined configurations, for being scaled up in size, and in having utility in a variety of diverse applications including back-up structure for mirrors.
With this description of the invention in detail, ~
those skilled in the art will appreciate that modifica- -tions may be made to the invention without departing from its spirit. Therefore, it is not intended that the scope of the invention be limited to the specific embodiment illustrated and described. Rather, it is intended that the scope of the invention be determined by the appended claims and their equivalents.
Figs. 8 and 9 are plan and front views, respectively, of a lightweight structure core mounted, in accordance with a third embodiment of the invention, for deposition thereon of an overcoat material;
Fig. 10 is a perspective view of a chemically vapor deposited fabricated SiC lightweight structure bonded to a SiC faceplate produced utilizing the lightweight structure core mounted as shown in Figs. 8 and 9;
Fig. 11 is a schematic illustration of a chemically vapor deposition apparatus that may be employed to ~fabricate SiC and Si lightweight structures, as illustrated in Figs. 1-10;
Figs. 12 and 13 are plan and side views, respectively, of a scaled up in size lightweight back-up structure core assembly having utility in the formation by chemical vapor deposition of a monolithic lightweight Si/SiC mirror faceplate and the back-up structure therefor;
., , " - -. ~ -. . . .
-~"` 2~196~7 Figs. 14-30 are side views illustrating the shapes of the ribs used in the back-up structure core assembly of Figs. 12 and 13, with the assembly being in accordance with a first and preferred method;
Figs. 31 and 32 are plan and side views, respectively, of a scaled up in size lightweight back-up structure core assembly having utility in the formation -by chemical vapor deposition of a monolithic lightweight Si/SiC mirror faceplate and the back-up structure therefor, with the assembly of the lightweight back-up structure core being by a second method;
Figs. 33-42 are side views illustrating the shapes ~-of the ribs used in the back-up structure core assembly of Figs. 31 and 32 in accordance with a second method of assembly; and Fig. 43 is a schematic illustration of a chemical vapor deposition furnace that may be used to effect SiC
and Si deposits on a mirror faceplate and the back-up structure therefor as shown in Figs. 12, 13, 33 and 34.
, , DESCRIPTION OF THE PREFERRED EM~ODIMENT~
Figs. 1 and 2 of the drawings illustrate a lightweight structure core 10 that is fabricated from graphite ribs 12a, 12b, 12c and 14a...14f. The core 10 is fabricated such that the ribs 14a...14f, which are all of the same length, form a hexagonal cell. The ribs 12a, 12b and 12c intersect in the center and connect the six corners of the hexagon. Ribs 12a, 12b and 12c also divide the hexa~on into six triangular parts. Rib~ 12a, 12b and 12c are fabricated with center slots, as described further hereinafter with reference to Figs. 3 and 4, to interlock them in place.
,.. .. .
f~
2~ ~6~7 In the preferred embodiments of the invention, the ribs all have a thickness of about 0.5 mm.(0.020 inch).
Further, the ribs are all characterized in having a hiyh ratio of the length and height thereof to their thickness. That is to say, the length and the height of each rib greatly exceeds its thickness.
In the invention embodiment illustrated in Figs. 1 and 2 and those illustrated, also, in Figs. 5 and 6 and in Figs. 8 and 9, all of the ribs have at least two adjacent surfaces that form an edge, all portions of which are located in a single plane, such as that containing the bottom edges 14g, 14h and 14i shown in Fig. 2.
To the end that the ribs 12a, 12b and 12c may interlock with each other at the center thereof, two of the ribs, 12a and 12b, for example, as shown in Fig. 3, are provided with a single transverse slot 12d that extends slightly more than half way through the height of the rib. The third rib, 12c, as shown in Fig. 4, is provided at the center thereof with opposed transverse slots 12e and 12f that extend less than half way through the height thereof. Assembly of the ribs 12a...12c in operative relation is effected by placing the slots 12d of ribs 12a and 12b in interlocking relation with opposed transverse slots 12e and 12f, each of which slots extends less than half way through the height of rib 12c. Ribs 14a...14f are positioned to define the outer perimeter of the structure 10, that is, to complete a hexagon, as shown.
The graphite ribs 12a.. 12c and 14a.. 14f may be joined with a graphite cement. Graphite is a good core material because it is compatible with most deposition procedures. Further, several different types of graphite with different thermal expansion coefficients ~.' . . . .
. ~ .,, .. . . . .
\~
2~9697 are available. A particular graphite having a thermal expansion coefficient closely matching that of an overcoat material to be deposited can be selected. A
disadvantage of graphite is that it is a fragile material. Thus, difficulties may be encountered in the fabrication of lightweight structure cores with graphite rib thicknesses less than 0.5 mm. (0.020 inch). The -~
graphite rib thickness may be reduced to less than 0.5 mm., however, by burning of the rib in air. Other strong and stiff materials such as Si, SiC, tungsten (W), molybdenum (Mo), etc. may also be used to fabricate extremely thin wall lightweight structure cores.
Mounting of the lightweight structure core 10 in a ~-deposition system for deposit thereon of a suitable deposition material depends upon the application for which the lightweight structure is intended to be used.
If only the lightweight structure core is required without any plate or substrate at either end, the lightweight structure core may be mounted on graphite poles 16a...16f attached to a substrate 18, as shown in Fig. 2, with the edges of the ribs engaging the tips of the poles. After the deposition of the overcoat material is completed, the lightweight structure is obtained by separating the structure from the poles, as by cutting.
If a plate of the deposited material is required at one end of the lightweight structure, the lightweight structure core 10 either may be loosely bonded to or placed on a substrate 20 coated with a mold release substance 22, as shown in Figs. 5 and 6. A suspension of graphite particles in an organic solvent may be used as the mold release coating. With such use, deposition will occur not only on the walls of the lightweight `~- 2 ~
structure core 10 but also at the base thereof. On completion of the deposition process, the lightweight structure with a base plate 24 of overcoat material formed thereon is separated from the substrate 20. In Fig. 7, there is illustrated a perspective view of a SiC
totally enclosed graphite lightweight structure 26 fabricated by this method.
In some applications such as the fabrication of lightweight Si or SiC mirrors, it may be desirable simultaneously to fabricate the lightweight structure and bond it to a faceplate of a desired material. In such cases, a lightweight structure core 10, as shown in Figs. 8 and 9, is bonded to a faceplate 28, as by flow bonding indicated at 30, and the deposition operation is performed. The material of the faceplate should be compatible with the deposition process to assure adherence of the deposited material. Fig. 10 illustrates a SiC enclosed graphite lightweight structure bonded to a SiC faceplate which has been -fabricated by the use of this method.
In order to enclose the lightweight structure core, an appropriate overcoat material may be deposited by any of the vapor deposition processes that are currently ; available. These processes include physical vapor deposition, sputtering, chemical vapor deposition and its different types (plasma assisted vapor deposition, low pressure vapor deposition, laser assisted vapor ! ' deposition, metal organic vapor deposition, etc.), evaporation and ion beam implantation. The materials which can be deposited include metals and nonmetals (plastics, ceramics, glasses, polymers, etc.).
Fig. 11 schematically illustrates a chemical vapor deposition apparatus, designated 32, that may be used to fabricate SiC and Si lightweight structures in .. .. .. . . . . . ... .
`-` 20~9~97 accordance with the invention~ This apparatus 32 includes a horizontal research furnace 34, specifically an electrically heated 3-zone Lindberg furnace, a reactant supply system 36, and an exhaust system 38.
Associated with furnace 34 is an elongated tube 40 of aluminum oxide (A12O3) containing a reaction or deposition chamber 42 that is substantially coextensive with zone 2. ~one 2, as shown, is heated by a heating element 44 while zones 1 and 3 are heated by individually associated heating elements 46 and 48, respectively. Blocks of firebrick, designated 50 and 52, are located outside tube 40 in the regions thereof respectively associated with zones 1 and 3.
The deposition region within chamber 40 is indicated at 54 and, as shown, has associated therewith a mandrel 56 consisting of four sides of an open box and a baffle plate 58. The pressure within chamber 42 is indicated by a pressure gauge 60.
Mounting, as by bonding, of the lightweight structure core 10 on the baffle plate 58 for the deposition thereon of an overcoat material is preferred.
This is for the reason that such mounting provides minimal deposition nonuniformity from cell to cell in the lightweight structure core.
The reactant supply system 36 includes a t~nk 60 comprising a source of argon (Ar) under pressure, a bubbler tank 62 containing methyltrichlorosilane (CH3SiC13) or trichlorosilane (SiHC13) through which -argon from source 60 is bubbled under control of valves -64a and 64b, and a separate source (not shown) of hydrogen (H2). The SiC and Si material to be deposited is fabricated by reacting Ch3SiC13 or SiHC13 with H2, respectively. Other silane and hydrocarbon sources can ~, ~, . , , , . : -,: , : .
2~19~97 be used to form SiC and Si. Both of these materials have been fabricated over a wide range of deposition temperature and reactor pressure, as shown in Table I
below.
TABLE I - NOMINAL CVD PROCESS PARAMETERS
USED TO FABRICATE SiC AND Si LIGHTWEIGHT STRUCTURES
Si Mater- FLC ~ RATES (Slpm)¦Deposi- Reactor Deposi-No. ial ~ _ ~3sicl3 Ar tion Pres- tion Pro- or Temper- sure Rate duced SiC13 ature C torr ~m/min.
_ _ 1 SiC <10 <2.0 <4.C 13558 - 25-300 <1.25 2 Si <15 <2.0 <5 ~ 182358 - 25-300 <1.75 The reagents may be introduced into the deposition chamber 42 through a central injector (not shown). The injector may be cooled with water to ~i) prevent deposition in the injector and (ii) to keep the temperature of the reagents low thereby minimizing gas phase decomposition or nucleation. The deposition thickness is controlled by varying the chemical vapor deposition process parameters and the deposition time.
After a sufficient thickness of the material is deposited, the deposition process is terminated and the furnace is cooled very slowly to prevent cracking and distortion of the lightweight structure due to residual stresses.
The exhaust system 38 shown in Fig. 11 includes a vacuum pump 64, a scrubber 66, gaseous filters 68 and an oil filter 70. The exhaust system 38 is provided to evacuate the gaseous reaction products that are released in the reaction chamber 42 during the deposition process.
:.: , . .
- :
2019~7 Removal of the graphite core, as mentioned previously, is optional. Since the deposited material completely encloses the core material, it is not necessary to remove the core material. As those skilled in the art understand, a core material can be selected the presence of which will not degrade the performance of the lightweight structure. Candidate core materials are graphite, Si, glass, quartz and various metals.
It is noted that when a vapor deposition technique is used to fabricate a lightweight structure, the gaseous flow in the lightweight structure, as illustrated by the arrows in Fig. 2, is a "stagnation"
flow governed by diffusion. This tends to yield deposition nonuniformity along the cell depth where the undesired effects of stagnation flow tend to be the greatest. By the term "stagnation flow" is meant a flow that is sluggish or lacking in activity, that is, a flow that has little motion or power of motion.
In accordance with the invention~ such stagnation flow may be minimized by providing holes 14j, as shown -in Figs. 6, 7 and 9, in the walls of the lightweight -~
structure core lO, and in particular, the walls of adjacent cells. This results in a gaseous flow, as illustrated ~y the arrows in Figs. 6 and 9, and improves the strength of the lightweight structure that is ; - -produced. The preferred location for the holes 14j is on the walls near the base o~ the lightweight structure -~ -core, that is, adjacent the substrate 20, as seen in Fig.
., , 6, and adjacent the faceplate 28, as seen in Fig. 9.
EXAMPLE I
:
The SiC enclosed graphite lightweight structure shown in Fig. 7 was fabricated by the above method -described in connection with the deposition apparatus , ~ , , , . ,; .: . .. . ..
.,: .. , . , . . - . , , . . : : --~;: . : - ~ . . . .
.. . . . :
~ 2019697 shown in Fig. 11 and involving process parameters as given in TABLE I. The lightweight structure core was constructed from graphite ribs about a . 5 mm. thick, 3.25 cm. long and 2.5 cm. high. The deposition thickness was about O.76 mm. (O.03 inch). The lightweight structure produced was quite strong and rigid. There were no apparent stresses or cracks in the structure.
EXAMPLE II
The chemical vapor technology of fabricating a lightweight back-up structure was demonstrated by fabricating a one cell SiC structure on the backside of a faceplate. First, a graphite core consisting of an outer hexagonal cell with six inner triangular cells, as illustrated in Figs. 8 and 9, was constructed from graphite ribs about 0.5 mm. thick. Each side of this hexagonal cell was 3.25 cm. long and 2.50 cm. high.
This graphite core was placed on the backside of the SiC
faceplate and then coated with SiC. This process produced a monolithic lightweight SiC structure without the use of any bonding agent. To avoid residual stresses in the structure, a grade of graphite was used which has a thermal expansion coefficient larger than that of the chemically vapor deposited SiC.
A coating of Si about 0.5 mm. thick on the near-net shape SiC faceplate was applied to permit fabrication of the final optical figure. To obtain a more uniform Si coating, the SiC faceplate was mounted such that the flow directly impinged on the replicated surface. Since the Si coating is required only on the front surface of the mirror, all other areas were masked with grafoil.
The mirror was polished flat to a figure of 1/5th of a wave at 0.6328 ~m and a finish of <lOA ~MS.
', ~ . , ' :
~,: . . ' : ' : - : ' ` " 2~697 In accordance with the invention, the aforementioned procedure may also be extended to fabricate curved Si/SiC mirrors of scaled up size and lightweight back-up structures therefor.
When fabricating structure cores for use as back-up structure for flat mirrors, the assembly of the ribs, as previously mentioned, is such that all of the ribs have at least two adjacent surfaces that form an edge, all portions of which lie in a single plane. Thus, contiguous edge portions of the plurality of cells formed by the assembly of the ribs all lie in the same ... .
plane. In the case of the fabrication of structure ;
cores for use as back-up structure for curved mirrors, contiguous edge portions of the cells of the structure formed by the ribs, when assembled, lie on a curved surface.
The fabrication of curved mirrors is more involved, as is apparent from the description provided~ ~ ~
hereinafter, due to ti) the optical fabrication of a - -curved surface required, and tii) fabrication and assembly of a graphite core for the lightweight structure. In other respects, the fabrication of curved and flat mirrors is similar. -, In order to scale the lightweight SiC back-up structure, first the graphite core is scaled. Since the thickness of the graphite ribs is kept the same during scaling, considerable care is required to assemble a large size graphite structure core.
Figs. 12 and 13 illustrate plan and side views, respectively, of a scaled up lightweight structure core according to the invention. The lightweight structure core, designated 72, comprising a fourth embodiment of -the invention, has particular utility as the back-up 2~ ~697 structure for lightweight Si/SiC curved mirrors as distinguished from flat mirrors, as shown in Figs. 7 and 10. Two methods are disclosed herein for the fabrication of the lightweight structure core 72.
The lightweight structure core 72, as shown in Fig.
12, is fabricated from six ribs of equal length which are positioned such that a large hexagonal cell having a depth equal to that of the ribs covers most of the backside of a circular faceplate 74. Connecting the six corners of this hexagon are three large ribs which intersect at their centers. These ribs also divide the hexagon into six equal triangular parts. These large ribs, similarly to ribs 12a, 12b and 12c shown in Figs.
3 and 4, are fabricated with center slots to interlock them in place.
More specifically, in the fabrication of the lightweight structure core 72, six outer sides of a large hexagon comprising ribs of a first set, all of which have the same length, and three central ribs comprising ribs of a second set, all of which have the same length, are bonded together. Next the six triangular regions that are formed within the hexagon are filled with ribs of a third set to form smaller cells of equilateral cross section and bonded together to complete the inner region. The region outside the hexagon may then be closed with ribs of a fourth set to cover as much of the circular area of the faceplate 74, as possible.
Details of the assembly of the lightweight structure core 72 of Figs. 12 and 13, according to a preferred method of assembly, are described herein with reference to Figs. 14-30. As shown in Fig. 12, ribs 76, 78, 80, 82 and 84 are positioned in parallel in equally spaced apart relation. The ribs 76...84 all have - 20196~7 different lengths and are provided with uniformly spaced slots, designated 86a at the top, as shown in Figs.
14-18, respectively. Each of ribs 76 and 82, as shown in Figs. 14 and 17, also include two spaced notches, designated 86b, at the top. There are two pieces for each of the ribs 78...84, the second piece in each case being designated by a prime mark (') in Fig. 12. One of the two pieces in each case is positioned in the upper half of the large hexagon, as seen in Fig. 12, and the other piece is positioned in the lower half. Thus, rib 84 is positioned in the top half and rib 84' is positioned in the bottom half.
Additional parallel positioned and equally spaced apart ribs, designated 88, 90, 92, 94 and 96, as seen in ~ -Fig. 12, all have different lengths and are provided with uniformly spaced slots, designated 98a at the bottom, as shown in Figs. 19-23, respectively, with ribs 88 and 94 also having two notches, designated 98b, at the top. Note that the ribs are made up of three parts when the slots are made into the notches. Thus, rib 88, as shown in Fig. 19, comprises three parts that are designated 94, 94' and 94". Similarly rib 94, as shown in Fig. 22, comprises three parts athat are designated 94, 94' and 94". There are two pieces of each of the 25 ribs 9096, with the second piece being designated by a prime mark. The two rib pieces, 96 and 96', thus are positioned at opposite sides of the large hexagon, as shown.
Further parallel positioned and equally spaced ribs, designated 100, 102, 104, 106 and 108, as seen in Fig. 12, all have different lengths and are provided with uniformly spaced slots, designated 110a, at the top and uniformly spaced slots, designated 110b, at the bottom, as shown in Figs. 24-28, respectively, ~i 20196~7 with two spaced notches, each designated 112, being provided in the top of ribs 100 and 106. There are two pieces of each of the ribs 102...108, with the second piece being designated by a prime mark.
~: :
As shown in Fig. 12, the region outside the large hexagon may be closed by a total of 12 ribs designated 114 (or 116) and there are six ribs designated 118. Ribs 114, 116, as shown in Fig. 29, and ribs 118, as shown in Fig. 30, are not provided 10~ with any slots. For convenience of illustration, the closure segments 114, 116 and 118 are not shown in Fig. 13.
~- Thus, there are a total of 45 pieces that are required to assemble the lightweight back-up structure core 72. There are flow holes, designated 120, that are provided in the ribs. Each cell has such holes.
In accordance with the invention, the scaled up in size lightweight structure core may be assembled by a second method. According to this method, which is ; 20 described with reference to Figs. 31 and 32, in the assembly of a lightweight~structure core 72', three -~
centraI ribs 122,~124 and l26 are first attached at the centers thereof. ~One of these ribs, 122, has one slot in the center at the~top, as shown in Fig. 33, another one, 124, has one slot in the center at the bottom, as shown in Fig. 34, and the third one, 126, has two slots, with one being in the center at the bottom and the other in the center at the top, as shown in Fig. 35. Then six ribs designated I28, 130, 132, 134, 136 and 138, all of which are of the same size, as illustrated in Fig. 36, are bonded to ribs 122, 124 and 126 to complete the large hexagon.
Each of the large triangles formed within the hexagon are then filled with smaller triangular cells.
For example, ribs 140, 142 and 144, as illustrated in Fig. 37, are bonded. ~ach of ribs 140, 142 and 144 has a top slit and a bottom slit, which slots are spaced by a cell length. Then ribs 146, 148 and 150, which are of the same length, are locked in the center of the triangle and bonded at the edges. Such locking may be performed in the same manner as described hereinbefore.
That is to say, one of the ribs 146 may have one slot at the bottom, another rib 148 may have one slot at the top, and the third rib 150 may have two slots, one at the top and one at the bottom, as shown in Fig. 38.
Rib 150 andribs 152 and 154, as shown in Fig. 39, are then locked and bonded at the edges. Finally, ribs 148 and 154, and a rib 156, also as shown in Fig. 39, are locked to complete the triangle. Once all six triangles, and hence, the large hexagon is all filled up, six outside closer modules are attached utilizing closure segments 158, 160, 162 as shown in Figs. 40-42, respectively, and in Fig. 31. For convenience of illustration, the closure segments have not been shown in Fig. 32.
As shown in the following TABL~ II, there are a total of 117 ribs or pieces required in the assembly of the lightweight structure core 72 utilizing the second method. The quantity of each piece required is given in the TABLE.
2~19~97 TABLE II
Reference No.
of Piece QuantitY Fiq. No.
128... 138 6 36 140... 144 18 37 146... 150 18 38 152... 156 18 39 1~2 18 42 As contrasted with the rib3 in the lightweight structure cores 10 shown in Figs. 1-10 in which the bottom edges of the ribs are all located in the same plane, the bottom edges of the ribs of the lightweight structure cores 72 and 72', as best seen in Figs. 13 and 33, respectively, curved, and hence, ail portions thereo are not located in the same plane. The structure of Figs. 1-10, as described, is appropriate for use in the fabrication of back-up structures for fIat mirrors or other flat members; those of Figs. 12-42 facilitate use in the fabrication of mirrors or other -~
members having curved surfaces. This demonstrates the adaptability of the lightweight structure core of the invention for fabrication in various configurations.
Fig. 43 illustrates a chemical vapor deposition system 164 that may be used to effect SiC and Si deposits on a mirror faceplate and the back-up structure therefor. The system 164 includes a furnace 166 -comprising a vertically positioned graphite tube 168, electrical heating elements 170 that surround tube 168, ~ ` 2019697 three mandrels 172, 174 and 176, and three baffle plates 178, 180 and 182.
The mandrels 172, 174 and 176 are arranged in series and are fabricated from high density graphite having a thermal expansion coefficient larger than that of the chemical vapor deposited SiC~ Each graphite mandrel 172, 174 and 176 is held with four graphite posts which, in turn, are attached to respectively associated graphite baffle plates 178, 180 and 182.
Each baffle plate is supported by the circular graphite tube 168 which encloses the deposition area and isolates the latter from the graphite heating elements 170.
Reagents, CH3SiC13 and H2, are introduced into the bottom of the tube 170 from four water-cooled injectors 184 mounted in the bottom cover 186 of tube -:
168.
In order to increase deposition efficiency and accommodate three mandrels in the chemical vapor deposition furnace, the first mandrel 172 is placed close to the injectors 184. To prevent the injectors 184 from producing "growth marks" on the first mandrel, a graphite manifold 188 was used which blunted the injector flow and allowed the reagents to flow uniformly :
through a large central hole. This arrangement provides a more uniform deposit on all three mandrels 172, 174 and 176.
CH3SiC13 is a liquid at room temperature with a vapor pressure of about 140 torr at 20C. It is carried to the deposition region by bubbling argon through two CH3SiC13 tanks ~not shown). The CH3SiC13 flow Erom the two tanks is divided into four parts which pass through the four injectors. The pressure and ~ ,!.. " " . , " ~
~ \
- 20~9697 temperature of the CH3SiC13 tank and the argon flow rates are maintained the same for both tanks to obtain a uniform deposition.
EXAMP~E III
The chemical vapor deposition mirror fabrication technology was scaled from a small horizontal research furnace to a pilot-plant size production furnace capable of fabricating a 40-cm.-diameter mirror. A
40-cm.-diameter mirror was designed. The salient features of the arrangement are given in TABLE III.
TABLE III - 40-cm.-DIAMETER Si/SiC
MIRROR DESIGN FEATURES
Si Cladded SiC FaceplateInch cm.
Si Cladding Thickness 0.020 0.05 SiC Faceplate Thickness0.0880.22 Faceplate Total Thickness 0.108 0.27 SiC Liqhtweiqht Structure ~all Thickness 0.064 0.163 Cell Height 1.28 3.25 ;
Cell Length 1.97 5.00 Flow Hole Diameter 0.275 0.70 Hole Center Distance From Edge 0.40 1.02 ~ -~
No. of Equilateral Triangular Cells 96.0 96.0 2$ Cell Aspect Ratio 1.3 1.3 SitSiC Mirror Mandrel Diameter 16.0 40.48 Radius of Curvature 39.37 100.0 Total Mirror Thickness1.3883.52 Center Depth 0.82 2.09 2~9~97 The mirror design assumed a polishing load of -1 psi, a peak-to-valley intercell sag of -0.025 ~m, a peak-to-valley self-weight gravity distortion between supports (20 cm. apart) of -0.025 pm, and a minimum natural frequency of 25 Hz. The weight of the mirror is 2.94 kg which corresponds to a weight specification of about 19 kg per meter squared.
In order to scaIe the SiC back-up structure, first -~
the graphite core is scaled. The lightweight structure consisted of 16 hexagonal cells containing a total of 96 triangular cells. The cell aspect ratio, defined as the cell depth to the diameter of the inscribed circle, is 1.3 for each triangular cell.
The scaling of the chemical vapor deposition fabrication technology to the required size involves the following:
(a) Material scaling. The optimum chemical vapor deposition process conditions which produced the Si and SiC materials in the research furnace were scaled to the pilot-plant size furnace. This scaling was performed keeping the following parameters unchanged: (1) deposition rate, (2) deposition setup geomet cally similar to the one used in the research furnace, (3) deposition temperature, and (4) furnace pressure. In addition, nondimensional chemical vapor deposition process parameters were identified and important scaling laws were develped. Based on these laws, reagent 1OW rates, molar ratio, and injector diameter were fixed. The scaling laws were validated by fabricating Si and SiC plates o size 32 cm. x 90 cm. and 0.63 cm. in the pilot-plant size furnace. Important physical, optical, - -` 20~9697 mechanical, and thermal properties of this material were compared with those corresponding to the research material, and were found to be identical.
(b) Scaling of the chemical vapor deposition mirror fabrication technology. This involves scaling of the replicated faceplate.
The scaled graphite core was placed on the backside of the SiC faceplate and coated with ~iC in the pilot-plant size furnace. After this was accomplished, the SiC faceplate was separated from the graphite mandrel and the front of the faceplate was coated with chemical vapor deposited Si.
Thus, in accordance with the invention, there has been provided unique lightweight structures and improved methods that enable simplification in, reduction of time ~ -required for, and cost of their fabrication. The structures provided are comprised of vapor deposited material such as SiC or Si in a monolithic form. The structures, while light in weight, are characterized by ;
being very stiff and strong and in having extreme figure stability retention. The structures are further -characterized in having an extraordinary adaptability for fabrication in various predetermined configurations, for being scaled up in size, and in having utility in a variety of diverse applications including back-up structure for mirrors.
With this description of the invention in detail, ~
those skilled in the art will appreciate that modifica- -tions may be made to the invention without departing from its spirit. Therefore, it is not intended that the scope of the invention be limited to the specific embodiment illustrated and described. Rather, it is intended that the scope of the invention be determined by the appended claims and their equivalents.
Claims (17)
1. A stiff and strong lightweight structure comprising, a plurality of ribs each of which has a length and a height that are greatly in excess of the thickness thereof, said ribs having ends with some at least of said ribs having one or more slots intermediate said ends which enable said ribs to be positioned and assembled in intersecting and interlocking relation thereby to form a structure core containing a plurality of cells, and a stiffening and strengthening material coated on and enclosing said structure core in a monolithic structure, said stiffening and strengthening material comprising a material that is vapor deposited on said structure core.
2. A structure as defined by claim 1 further including flow holes in some at least of said ribs to facilitate uniform dispersal on said structure core of said material that is vapor deposited thereon.
3. A structure as defined by claim 1 wherein said cells of said structure core formed by said ribs have walls and have depth, wherein said material that is vapor deposited on said structure core is deposited by diffusion, a stagnation flow which tends to yield nonuniformity of said material deposited along the depths of the cells, and wherein said walls have holes therein, said holes being operative to minimize the stagnation flow of said vapor deposited material thereby to improve the uniformity of the material deposited along the walls of said cells.
4. A structure as defined by claim 3 wherein said holes are positioned in the walls of said cells relatively to the depths thereof where the tendency of stagnation flow is the greatest, and wherein said stiffening and strengthening material is deposited inside said holes and connects the walls of adjacent cells, thereby improving the strength of the lightweight structure.
5. A structure as defined by claim 1 wherein contiguous edge portions of the cells of the structure core formed by said ribs, as assembled, lie in the same plane.
6. A structure as defined by claim 1 wherein, as assembled, all of said ribs have at least two adjacent surfaces that form an edge all portions of which lie in substantially a single plane whereby said plurality of cells formed in said structure core have contiguous edge portions that lie in the same plane.
7. A structure as defined by claim 1 wherein contiguous edge portions of the plurality of cells of said structure core formed by said ribs, when assembled, lie on a surface of predetermined configuration.
8. A structure as defined by claim 1 further including flow holes in some at least of said ribs to facilitate uniform dispersal on said structure core of said material that is vapor deposited thereon, wherein said ribs are made of graphite having a thickness of about 0.020 inches (0.5 millimeters), wherein said stiffening and strengthening material is SiC that is chemically vapor deposited on said structure core, wherein the plurality of cells of said structure core have walls, have depth, and contiguous edge portions, further including flow holes in some at least of the walls of said cells to facilitate uniform dispersal on said structure core of said material that is vapor deposited thereon, and wherein the contiguous edge portions of said cells lie on a surface of predetermined configuration.
9. A structure as defined by claim 1 further including a substrate having a surface of predetermined configuration, said ribs being positioned in intersecting and interlocking relation on said substrate transversely thereto with adjacent edges of said ribs in contact with said surface of predetermined configuration thereby forming said structure core consisting of said plurality of cells, and further including said vapor deposited stiffening and strenghtening material coated on and enclosing said surface of predetermined configuration in said monolithic structure.
10. A structure as defined by claim 9 wherein the surface of said substrate is that of the faceplate of a mirror, with material of the faceplate being compatible with said stiffening and strengthening material being deposited thereon to assure adherence of the deposited material to the faceplate and thereby adherence of said core to the faceplate.
11. A method of fabricating a lightweight structure from a plurality of ribs each of which have substantially the same height and thickness with the height and length greatly exceeding the thickness, comprising the steps of:
(a) forming from a first set of said ribs, each of which are of substantially the same length, a hexagonal cell having depth equal to the height of said ribs, (b) forming slots in the center of first, second and third ones of a second set of said ribs which ribs are all of the same length and substantially equal to the distance between the most widely spaced corners of said hexagonal cell, with a first slot from the top of a first one of said ribs, a second slot from the bottom of said second one of said ribs, and third and fourth slots from both the top and bottom of said third one of said ribs, with the lengths of said first and second slots being greater than half the height of said ribs and the lengths of said third and fourth slots being less than half the height of said ribs, (c) interlocking said first, second and third ones of said ribs at the centers thereof by bringing said first and second slots into cooperative relation with said third and fourth slots, respectively, (d) positioning said interlocked first, second and third ones of said ribs relatively to said hexagonal cell to connect the most widely spaced corners thereof thereby to form a structure core having six regions each of equilateral triangular cross section with each such region comprising a cell, and (e) exposing the structure core to a vapor deposition process to deposit and coat thereon a stiffening and strengthening material thereby to enclose said structure core in a monolithic structure of such material.
(a) forming from a first set of said ribs, each of which are of substantially the same length, a hexagonal cell having depth equal to the height of said ribs, (b) forming slots in the center of first, second and third ones of a second set of said ribs which ribs are all of the same length and substantially equal to the distance between the most widely spaced corners of said hexagonal cell, with a first slot from the top of a first one of said ribs, a second slot from the bottom of said second one of said ribs, and third and fourth slots from both the top and bottom of said third one of said ribs, with the lengths of said first and second slots being greater than half the height of said ribs and the lengths of said third and fourth slots being less than half the height of said ribs, (c) interlocking said first, second and third ones of said ribs at the centers thereof by bringing said first and second slots into cooperative relation with said third and fourth slots, respectively, (d) positioning said interlocked first, second and third ones of said ribs relatively to said hexagonal cell to connect the most widely spaced corners thereof thereby to form a structure core having six regions each of equilateral triangular cross section with each such region comprising a cell, and (e) exposing the structure core to a vapor deposition process to deposit and coat thereon a stiffening and strengthening material thereby to enclose said structure core in a monolithic structure of such material.
12. A method as defined by claim 11 including the further step (f) between steps (d) and (e) of providing a plurality of cells in each of said six cells of said structure core by positioning a plurality of ribs of a third set of said ribs in uniformly spaced and parallel relation on each of the opposite sides of said first, second and third ribs of said second set of ribs, with all of the ribs of said third set of ribs associated with each side of said first, second and third ribs of said second set being of different length and including appropriately positioned slots along the lengths thereof for cooperation with appropriately positioned slots in said first, second and third ribs of said second set at the positions of intersection therewith to allow such intersection and interlocking therewith.
13. A method as defined by claim 12 wherein in step (f) said third set of ribs comprises four ribs positioned in uniformly spaced and parallel relation on each side of said first, second and third ribs of said second set of ribs, respectively, whereby sixteen equilateral triangular volumes comprising sixteen cells are produced in each of the six cells of equilateral triangular cross section.
14. A method as defined by claim 13 further including the step (g) after step (f) of providing a fourth set of said ribs for forming a closure for each of said six cells of equilateral triangular cross section, said fourth set of ribs including three ribs for each of said six cells connected to the ends of the associated third set of ribs to transform the cross section of the outer periphery of the structure core from that of a hexagon having six sides to a polygon having eighteen sides.
15. A method as defined by claim 14 wherein the material of which said ribs are made is graphite and the material that is vapor deposited on the structure core is SiC.
16. A method as defined by claim 11 including the further step (h) between steps (d) and (e) of filling the six cells of equilateral triangular cross section with smaller cells of equilateral triangular cross section bonded together to complete the inner region of the structure core.
17. A method as defined by claim 16 including the further step (i) between steps (a) and (b) of placing said first, second and third ones of said ribs of said second set of said ribs on the surface of a circular substrate, and the further step (j) after step (h) of closing the outer region of the structure core to cover a greater portion of the area of the circular substrate.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US38924889A | 1989-08-03 | 1989-08-03 | |
| US07/389,248 | 1989-08-03 |
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| Publication Number | Publication Date |
|---|---|
| CA2019697A1 true CA2019697A1 (en) | 1991-02-03 |
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ID=23537460
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002019697A Abandoned CA2019697A1 (en) | 1989-08-03 | 1990-06-22 | Lightweight structures and methods for the fabrication thereof |
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|---|---|
| EP (1) | EP0411910A3 (en) |
| JP (1) | JPH03163501A (en) |
| CA (1) | CA2019697A1 (en) |
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| CA2057934C (en) * | 1991-12-18 | 1995-09-12 | Jitendra S. Goela | Method of fabricating lightweight honeycomb type structure |
| US5354580A (en) * | 1993-06-08 | 1994-10-11 | Cvd Incorporated | Triangular deposition chamber for a vapor deposition system |
| US5741445A (en) * | 1996-02-06 | 1998-04-21 | Cvd, Incorporated | Method of making lightweight closed-back mirror |
| JP2016142484A (en) * | 2015-02-03 | 2016-08-08 | イビデン株式会社 | Sub-capsule molten salt heat storage material |
| US11327208B2 (en) * | 2018-05-30 | 2022-05-10 | Raytheon Company | Method of manufacture for a lightweight, high-precision silicon carbide mirror assembly |
| CN116699791A (en) * | 2023-08-01 | 2023-09-05 | 长春长光智欧科技有限公司 | Actively-cooled ellipsoidal reflector and manufacturing method thereof |
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| US3507737A (en) * | 1966-01-03 | 1970-04-21 | Owens Illinois Inc | Art of sealing thermally crystallizable glass,and thermally crystallizable telescope mirror blank |
| US4292375A (en) * | 1979-05-30 | 1981-09-29 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Superplastically formed diffusion bonded metallic structure |
| US4678292A (en) * | 1981-05-01 | 1987-07-07 | Rca Corporation | Curved structure and method for making same |
| DE3315246C2 (en) * | 1983-04-27 | 1986-05-07 | Messerschmitt-Bölkow-Blohm GmbH, 8000 München | Component in sandwich construction |
| US4716064A (en) * | 1985-10-31 | 1987-12-29 | Air Products And Chemicals, Inc. | Composite stiff lightweight structure and method for making same |
| US4917934A (en) * | 1989-04-27 | 1990-04-17 | Corning Incorporated | Telescope mirror blank and method of production |
-
1990
- 1990-06-22 CA CA002019697A patent/CA2019697A1/en not_active Abandoned
- 1990-06-29 IL IL94928A patent/IL94928A0/en unknown
- 1990-07-31 EP EP19900308434 patent/EP0411910A3/en not_active Withdrawn
- 1990-08-02 JP JP2204023A patent/JPH03163501A/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| EP0411910A3 (en) | 1991-10-23 |
| JPH03163501A (en) | 1991-07-15 |
| EP0411910A2 (en) | 1991-02-06 |
| IL94928A0 (en) | 1991-04-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request | ||
| FZDE | Discontinued |