CA2015462C - Light emitting diode array - Google Patents

Light emitting diode array

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Publication number
CA2015462C
CA2015462C CA002015462A CA2015462A CA2015462C CA 2015462 C CA2015462 C CA 2015462C CA 002015462 A CA002015462 A CA 002015462A CA 2015462 A CA2015462 A CA 2015462A CA 2015462 C CA2015462 C CA 2015462C
Authority
CA
Canada
Prior art keywords
layer
semiconductor
insulating layer
electrode
light emitting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CA002015462A
Other languages
French (fr)
Inventor
Susumu Yoshida
Takafumi Nishioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP63279390A priority Critical patent/JPH02127053A/en
Priority claimed from JP63279390A external-priority patent/JPH02127053A/en
Priority to US07/513,878 priority patent/US5045895A/en
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to CA002015462A priority patent/CA2015462C/en
Priority to EP90108461A priority patent/EP0454891A1/en
Priority to US07/700,422 priority patent/US5094970A/en
Priority claimed from US07/700,422 external-priority patent/US5094970A/en
Application granted granted Critical
Publication of CA2015462C publication Critical patent/CA2015462C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/83Electrodes
    • H10H20/831Electrodes characterised by their shape
    • H10H20/8314Electrodes characterised by their shape extending at least partially onto an outer side surface of the bodies
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/435Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material
    • B41J2/447Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material using arrays of radiation sources
    • B41J2/45Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material using arrays of radiation sources using light-emitting diode [LED] or laser arrays
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H29/00Integrated devices, or assemblies of multiple devices, comprising at least one light-emitting semiconductor element covered by group H10H20/00
    • H10H29/10Integrated devices comprising at least one light-emitting semiconductor component covered by group H10H20/00
    • H10H29/14Integrated devices comprising at least one light-emitting semiconductor component covered by group H10H20/00 comprising multiple light-emitting semiconductor components

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Printers Or Recording Devices Using Electromagnetic And Radiation Means (AREA)
  • Led Devices (AREA)

Abstract

ABSTRACT OF THE DISCLOSURE In a light emitting diode array, an N- electrode layer is extended from the bottom surface to the top surface of a semiconductor body through the side surface. PN junctions are exposed to the cleavage surface S and light is emitted therefrom. Since the N-electrode layer and P-electrode layers are located on a common surface, the LED away can be mounted on a base plate through a soldering proceed. The LED array can be used without a self-focus lens array in an electric printer for photography. - 21 -

Description

`~ 201 5462 : f ::: : A LIGHT EMITTING DIODE ARRAY . ;: ~ACKGROUND OF THE INVENTION . Field of the Invantion ; The present invention relates to a light 1 emitting diode (LED) array employable in an : - 'f electronic printer for photography, and particularly ;~ to a structure of P and N electrodes on the LED : : array. :' . ~ ' . SUMM~RY OF TH~ INVENTION According to the present invention, a light emitting diode array comprises: (a) a semiconductor layer of a first conductivity type; (b) semiconductor regions of a ~ . second conductivity type which are selectively formed in a top surface of the semiconductor layer : .' and which form PN junctions with the semiconductor .~: f layer, the PN junctions being exposed at a first side surface of the semiconductor layer; (c) a first electrode layer provided on a bottom surface of the ~.; semiconductor layer; and (d) an electrode pattern .; ~ which has second electrode layers provided on top ~::.. : surfaces of the semiconductor regions, respectively. Preferably, the LED array further comprises (e) a . ~0 ? 546~ multi-layer structure having an insulating layer and a conductivity layer and provided on at least a second side surface of the semiconductor layer so that the insulating layer is sandwiched between the semiconductor layer and the conductive layer. The conductive layer has a first portion connected to one of the first electrode layers and the electrode pattern and a second portion located on a surface on which the other of the first electrode layers and the electrode pattern is located. The first and second portions of the conductive layer are electrically connected to each other. Preferably, the insulating layer includes: a first portion formed on the second side surface; and a second portion formed on the top surface and having windows on the semiconductor regions. The first portion of the conductive layer is located on the first portion of the insulating layer and is connected to the first electrode layer at a boundary between the second side surface and the bottom surface. On the other hand, the second portion of the conductive layer is located on the second portion of the insulating layer and is electrically isolated from the electrode pattern. According to a still further broad aspect of the present invention, there is provided a light emitting diode array which comprises a semiconductor layer of a first conductivity type. Semiconductor regions of a second conductivity type are selectively formed in a top surface of the semiconductor layer and which form PN junctions with the semiconductor layer. The PN junctions are exposed at a first side surface of the semiconductor layer. A first electrode layer , . 201 546~ is provided on a bottom surface of the semiconductor layer. An electrode pattern which has second electrode layers is provided on top surface.s of the semiconductor regions, respectively. A multi-layer structure having an insulating layer and a conductivity layer is provided on at least a second side surface of the semiconductor layer so that the insulating layer is sandwiched between the semiconductor layer and the conductive layer. The conductive layer has a first portion connected to one of the first electrode layer and the electrode pattern and a second portion located on a surface on which the ` other of the first electrode layer and the electrode pattern is located. The first and second portions of the conductive layer are electrically connected to each other, wherein the second side surface is located on an opposite side of the first side surface According to a still further broad aspect of the present invention, there is provided a light emitting diode which comprises a semiconductive layer of a first conductivity type. A serniconductor region of a second conductivity type is selectively formed in a top surface of the semiconductor layer and forms a PN junction with the semiconductor layer. The PN juncti.on is exposed at a first side surface of the semiconductor layer. A first electrode layer is ~-j provided on a bottom surface of the semiconductor region. A second electrode layer is provided on the top surface of the semiconductor region. A multi-layer structure has an insulating layer and a conductivity layer and at least a second side surface of the semiconductor layer so that the said insulating layers is sandwiched between the -2a- .. ~ ~Ul 5~h2 semiconductor layer and the conductive layer. The conductive layer has a first portion connected to one of th~ first electrode layer and said second electrode layer and a second portion located on a surface on which the other of the first electrode layer and second electrode layer is located. The first and second portions of the conductive layer are electrically connected to each other, wherein the second side surface is located on an opposite side of the first side surface. According to the present invention, the method comprises the steps of (a) preparing a semiconductor wafer having a semiconductor~layer of a first conductivity type therein; (b) forming a matrix array of semiconductor regions of a second conductivity type in a top surface of the semiconductor layeri (c) forming a first insulating layer on the top surface of the semiconductor layer; (d) selectively removing the first insulating layer; (e) cutting said wafer into strips each having a linear array of the semiconductor regions; (f) forming a second strip layer on a side surface of a strip obtained in step (f), the second insulating layer being connected to said first insulating layer on said strip; (g) providing a conductive layer on top and bottom surfaces of the strip and on the first and second insulating layers; and (h) selectively removing the conductive layer on the first insulating layer to obtain a first electrode layer which covers the bottom surface of the strip and the second insulating layer and which 2b 201 5462 partially covers the first insulating layer on the strip; and second electrode layers filling ' the windows on the strip, respectively. The present invention is also directed to a I method of fabricating a light emittinq diode. According to the present invention, the method comprises the steps of: (a) preparing a semiconductor wafer having a semiconductor layer of a first conductivity type thereih; (b) forming I a matrix array of semiconductor regions of a second conductivity type in a top surface of the semiconductor layer; (c) forming a first insulating layer on the top surface of the ` semiconductor layer; (d) selectively removing the first in:ula=ing layer , ., , :~ : ~, ~ -` .. ' .~., -2c-- ` ` 2~1 546~ . to obtain windows on the semiconductor regions; (e) providing first conductive layers in the windows; (f) cutting the wafer into strips each having a linear array of the semiconductor regions; (g) forming a second insulating layer on a side surface of a strip obtained in the step (f), the second insulating layer being connected to the first insulating layer on the strip; and (h) providing a second conductive layer having a first portion located on a bottom surface of the strip, a second portion located on the second insulating layer and a third portion located on a part of the first insulating layer of the strip. Accordingly, an object of the present invention is to provide an LED array usable at a high transmission efficiency of the light. Another object is to provide an LED array which can be easily mounted on a base plate in the orientation where the light emitting surface of the LED array is perpendicular to the surface of a base plate. BRIEF DESCRIPTION OF THE DR,~WINGS These and other objects, features, aspects and advantages of the present invention will become more apparent from the following detailed description of the present invention when taken in conjunction with the accompanying drawings. Fig~.~ 1 is a perspective~ view of a conventional LED array with part broken away for clarity; Fig. 2 is a schematic side view of a conventional electronic printer for photography in which the LED array shown in Fig. 1 is employed; ' '' ~'. '~,'''' ~ ' ~`' -`~ - 3 ~ 201 5462 : . j Fig. 3 is a perspective view of an LED array according to a preferrecl embodiment of the present invention with part broken away for clarity; Fig. ~ is a schematic side view of an electronic printer for photography in which the LED array shown in Fig. 3 is employed; Figs. 5A through 5F are sectional views showing a process of fabricating the LED array shown in Fig. 3; Figs. 6A through 6D are sectional views showlng a modification in the process of Figs. 5A through 5F; and Fig. 7 is a sectional view showing an LED array according to another embodiment of the present invention. Description of Prior Art , . , Fig. 1 illustrates the structure of a conventional LED array 1. The LED array 1 comprises a semiconductor body 10 having an N-GaAs layer 3, an N-A~xGa1_xAs layer 4 and P-A~xGa1_xAs regions 5. An N-electrode layer 2 is formed on the bottom surface of the semiconductor body 10, while an insulating layer 8 is provided on the top surface of the semiconductor body 10. The insulating layer 8 has a linear array of rectangular windows g, which are defined on the P-regions 5. P-electrode layers 11 are formed on the insulating layer 8 and respective end portio~s thereof are in contact with the top surfaces of the P-regions 5 through the windows 9. Fig. 2 is a schematic diagram showing the situation in which the LED array 1 is employed in an electronic printer for photography. ~he LED array 1 is fixed to a base plate 21 such as a printed board, and the electric connection between the LED array 1 ' - 4 ~` 201 5462 and the base plate 21 is attained through die bonding and wire bonding. A self-focus lens array (SLA) 22 is supported by a supporting member (not shown) so that the windows 9 (Fig. 1) -Eace to the SLA 22 across a gap therebetween. A photosensitive drum 23 is rotatably provided and the center axis of the drum 23 is located on a line passing through the LED array 1 and the SLA 22. An image signal is transmitted to an LED drive circuit (not shown), and in response to the image signal, the LED drive circuit selectively supplies electric power to the LEDs included in the LED array 1 through the electrodes 2 and 11. The LEDs supplied with the electric power generate light L1 at the PN ~unctions thereof and emit the light L1 through the windows 9. The SLA 22 converts the light L1 into converging light L2, which is applied to the photosensitive surface 24 of the drum 23. The SLA 22 is effective for preventing the light spot from spreading on the photosensitive surface 24 of the drum 23. Prior to the exposure to the light L2, the photosensitive surface 24 of the drum 23 is electrostatically charged to a negative level. When the light L2 is applied to the photosensitive surface 24, only the part of the su~rface 24 exposed to the light L2 is discharged. Therefore, a latent image is obtained on the photosensitive surface 24 by repeating the light generating process while rotating the drum 23 àround the axis thereof. Then,~ the photosensitive surface 24 is supplied with toner charged to a negative level, and the toner stays ,,~ only on the discharged part of the surface 24 since the toner cannot stay on the non-discharged part due to electrostatic repulsive force. The toner staying on the surface 24 is transferred onto a paper, and ~ ~ :. 3 ~ 5 ~ ~ ~ 20 ! 5462 then, the image thus obtained is fix~d by heat and pressure. The transmission efficiency of light is about several percent in the LED array head consisting of the LED array 1, the base plate 21, the SLA 22 and a driver (not shown). This is because the SLA 22, which has a relatively low transmission efficiency of light, should be provicled in the conventional LED array head. Furthermore, since the electrode layers 2 and 11 are located on opposite surfaces of the semiconductor body 10, the LED array 1 must be ;~ mounted on the base plate 21 through die bonding and wire bonding. Accordingly, a complex process is required in mounting the LED array 1 on the base plate 21 and the mounting of the LED array 1 is restricted to such orlentation that the light emitting surface is in parallel to the surface of the base plate 21. DESCRIPTION OF PREFERRED EMBODIMENTS Referring to Fig. 3, there is shown an LED array 100 according to a preferred embodiment of the present invention, where part thereof is broken away for clarity and an XYZ-coordinate axes are defined for representing respective directions. The LED array 100 comprises a semiconductor body 30 having àn N-GaAs buffer layer 33 on which an N-AexGal_xAs layer 34 is formed. A linear array of P-AexGal_xAs regions 35 is selectively provided in the top ~ ~1 surface of the N-AexGal_xAs layer 34, whereby PN junctions 42 are formed between the layer 34 and the regions 35. , '~ 3 ~ `` "., .~, - 6 - 201 54~2 An insulating layer 38 is provided on the semiconductor body 30. The insulating layer 38 has a horiæontal portion 38a covering the top surface of ~, ~ ~01 54~ semiconductor body 30 and a vertical portion 38b covering the back side surface of the semiconductor body 30. A linear array of windows 39 located on the P-regions 35 is formed in the horizontal portion 38a of the insulating layer 8. The windows 39 are broken windows whose respective halves are broken away at a cleavage plane S. A linear array of P-electrode layers 41 is provided so as to fill the windows 39, and the top surface of the P-electrode regions 41 are higher than that of the horizontal portion 32a of the insulating layer 32 in the vertical direction z. The LED array further comprises an N electrode layer 32, which has a horizontal bottom portion 32a covering the bottom surface of the semiconductor body 30, a vertical portion 32b covering the vertical portion 38b of the insulating layer 38 and a horizontal top portion 32c covering a part of the top portion 38a of the insulating layer 38. The horizontal top portion 32c of the N-electrode layer 32 is electrically insulated from the P-electrode layers 41. It is to be noted that the horizontal top portion 32c of the N-electrode layer 32 and the P-electrode layers 41 are located on a same surface, i.e., the top surface of the horizontal portion 38a of the insulating layer 38. The front side surface of the LED array 100 is the cleavage plane and is exposed to the external space. Although only three LED cells are shown in Fig. 3, the LED ,~ ~ '~ : : ` : ` ~ ~S~6;2 arra~ 100 has a number of LED cells aligned in the horizontal direction X. It other words, a multi-layer structure MS having the insulating layer 38 and a conductive layer CL is provlded on the area extending from the side surface to the top surface. The conductive layer CL is united with the horizontal bottom portion 32a of the N-electrode layer 32. The ~ulti-layer structure MS is provided for extending N- electrode layer 32 to the top surface of the semiconductor body 30 on which an electrode pattern consisting of the P- electrode layers 41 is provided. Fig. 4 is a schematic side view of an electronic printer for photography in which the LED array 100 is employed. The LED array 100 is mounted on a base plate 25 such as a printed board through a bump wiring process, i.e., a process of soldering the P-electrode layers 41 and the portlon 32c of the N-electrode layer 32 onto the surface of the base plate 25. A device thus obtained is so oriented that the cleavage plane S faces to the photosensitive - surface 24 of a rotatable photosensitive drum 23. When an image signal is transmitted to a drive circ~it (not shown~ and the drive circuit selectively applles an electric voltage across the N-electrode layer 32 and the P-electrode layers 41, the LED cells in the LED arra~ 100 selectively generate light L3 at the PN junctions " - '; - 9 - , 2~ i4~ 42 (~ig. 3). The light L3 consists of narrow light beams and is emitted from the cleavage plane S onto the photosensitive surface 24 which is previously charged. Light emission from the windows 39 is prevented since the windows 39 are filled with the P-electrode layers 41. A latent image which is obtained on the photosensitive surface 24 by repeating the light-emission process while rotating the drum 23 is transferred to paper through the same process with the conventional printer. The LED array head shown in Fig. 3 has the following advantages: (1) Since the P-electrode layers 41 and the portion 32c of the N-electrode layer 32 are located on the common surface, the LED array 100 can be mounted on the base plate 25 in the orientation where the light-emitting surface S is in perpendicular to the mounting surface of the base plate 25. A complex process of mounting the LED array is not requlred because the electrodes 41 and 32c have relatively large areas and the LED array 100 can be fixed to the base plate 25 through a dump wiring process without causing a high contact resistance. (2) The light L3 is not a spreading light but a!set of narrow beams from the cleavage surface S, and therefore, reIatively small spots can be obtained on the photosensitive surf~ce 24 without an SLA. As a result, the transmission .~ - 10- ~ ' '. : 2Clt~5~6~ efficiency of light in the LED array head is improved as compared with conventional one, and the cost for fabricating the LED array head and the electric power for driving the same can be decreased. A process of fabricating the LED array 100 is as follows: First, an N-GaAs substrate or wafer 51 (Fig. 5A) is prep~red and an N-AQxGal xAs layer 52 is ~formed on the substrate 51 through epitaxial growth technique. Then, a mask layer 53 (Fig. 5B) is formed on the top surface of the N-layer 52 and a matrix array of windows 54 are formed. P- type impurity ions are selectively implanted through the windows 54 to form a matrix array of P-AQxGal xAs regions or well~ 55 in the top surface of the N-layer 52. Then, the mask layer 53 is removed from the top surface, an then, an insulating layer 56 (Fig. 5c) is formed on the top surface of the N-layer 52. A matrix array of windows 57 located on the P-regions 55 is formed through a photolithography process. An aluminum layer covering the insulating layer 56 and the P-regions 55 is formed and then is selectively remo~ed so that P-electrode layers 58 are obtained. The P- electrode layers 58 are in contact with the P-regions 55 thro~gh the windows 5~ and the top surfaces of the P- electrode regions 55 are higher than the top surface of the insulating layer 56. Furthermore, P-electrode regions 58 . -- 1 1 2111~5~62 have parts 58a located on the insulating layer 56. Then, the wafer is cut into strips through a dicing process along lines LN. One of the strips thus obtained is shown in Fig. 5D, which is somewhat enlarged as compared with Figs. 5A through 5C for convenience of illustration. The strip 60 extends in the direction X perpendicular to the drawing sheet. The layers 51, 52, 55, 56 and 58 are renumbered with reference numerals 33, 34, 35, 38a and 41, respectively, in order to clarlfy that the former are those for the wafer while the latter are those for the strip 60. Similarly, broken windows 39 aligned in the direction Z correspond to the windows 57. A semiconductor body 30 consists of the layers 33 and 34 and the regions 35, where the P-regions 35 are linearly aligned in the direction X. In the next process step, an insulating layer 38b (Fig. 5E) is formed on a side surface 61 of the semiconductor body 30, the side surface 61 being opposite to another side surface 62 on which the P-region 35 is exposed. The insulating layers 38a and 38b are made of a same material, e.g., silicon oxide, so that the layers 38a and 38b are united with each other to provide a hook-shaped insulating layer 38. Then, aluminum paste is applied to the insualting layer 38 and the bottom surface of the semiconductor body ~S~62 . . 30, and then is hardened. A part of the aluminum located on the top surface of the insulating layer 38 is selectively removed through a photolithography process to thereby obtain an N-electrode layer 32 (Fig. 5F) having a horizontal bottom partlon 32a, a vertical portion 3Zb and a horizontal top portlon 32c. An LED array 100 thus obtained in Fig. 5F corresponds to that shown in Fig. 3, where Fig. 5F is the cros~ section along line V-V in Fig. 3. Another process of fabricating the LED array 100 is described below. In this process, the process steps shown in Figs. 5A and 5B are also applied. After removing the mask layer 53, an insualting layer 56 shown in Fig. 6A is formed. Windows 57 are formed in the insulating layer 56 on the P-regions 55 and the wafer is out into strips through a dicing process along lines LN. Then, as shown in Fig. 6B as an enlarged cross section, an insulating layer 38b is formed on the side surface 61 of the semiconductor body 30. The renu~bering of the layers 51, 52, 55 and 56 is similar to that in Fig. 5D. After obtaining an insulating layer 38 having the horizontal portion 38a and the vertical 38b, aluminum paste 63 tFig. 6C) is applied to respective surfaces of the insulating layer 32, the bottom surface of the se~iconductor body 30 and the respective inner surfaces in the windows 39. Then, the aluminum paste layer 63 is hardened and a partion - 13 - . 21~5~62 ~., 63a (Fig. 6D) of the aluminum layer 63 which is located on the horizontal portion 38a of the insulating layer 38 is selectively removed through a photolithography process. As a result, the aluminum layer 63 is divided into P-electrode layers 41 and an N-electrode layer 32 which are electrically insolated from each other. The N-electrode layer 32 consists of horizontal portions 32a and 32c and a vertical portlon 32b. Fig. 6D also corresponds to the cross section of Flg. 3 long the line V-V. Fig. 7 is a cross section of an LED array 200 according to another prefered embodiment of the present invention. In the LED array 200, each of P-electrode layers 41 has portions 41P and 41a-41c. The electrode portion 41P fill~ the corresponding window 39 and the first horizontal portlon 41a extends on the horizontal top portion 38a of an insulating layer 38. The vertical portions 41b extends on the vertical portion 38b of the insulating layer 38, and the second horizontal portion 41c is selectively formed on the horizontal bottom portion 38c of the insulating layer 38. Thes~ portions 41a-41c and 41P are united with each other in each LED cell. On the other hand, an N-electrode layer 32 is selectively formed on the bottom surface of the semiconductor body 30, and is electrically isolated from the hori~ontal bottom portion 41c of each P-electrode layer 41. - 14 - 2~ 6~ The LED array 200 is mounted on a base plate such that the bottom surface in Fig. 7 is fixed to the mounting surface of the base plate. Incidentally, the conductivity types "P" and "N" in the above-described embodiments may be excharged with each other. Furthermore, the present invention can be applied to a single LED cell as well as an LED array. The single LED cell may have a construction corresponding to the section A shown in Fig. 3. Although the present invention has been described and lllustrated in detail, it is clearly understood that the same is by way of illustration and example only and is not to be taken by way of limitation. The spirit and scope of the present invention should be limited only by the terms of the appended claims.

Claims (9)

  1. The embodiments of the invention in which an exclusive property or privilege is claimed are defined as follows: 1. A light emitting diode array comprising: (a) a semiconductor layer of a first conductivity type; (b) semiconductor regions of a second conductivity type which are selectively formed in a top surface of said semiconductor layer and which form PN junctions with said semiconductor layer, said PN junctions being exposed at a first side surface of said semiconductor layer; (c) a first electrode layer provided on a bottom surface of said semiconductor layer; (d) an electrode pattern which has second electrode layers provided on top surfaces of said semiconductor regions, respectively; and (e) a multi-layer structure having an insulating layer and a conductivity layer and provided on at least a second side surface of said semiconductor layer so that said insulating layer is sandwiched between said semiconductor layer and said conductive layer, said conductive layer having a first portion connected to one of said first electrode layer and said electrode pattern and a second portion located on a surface on which the other of said first electrode layer and said electrode pattern is located, said first and second portions of said conductive layer being electrically connected to each other, wherein said second side surface is located on an opposite side of said first side surface.
  2. 2. A light emitting diode array of claim 1, wherein: -16- said insulating layer includes: a first portion formed on said second side surface; and a second portion formed on said top surface and having windows on said semiconductor regions.
  3. 3. A light emitting diode array of claim 2, wherein: said windows are broken windows which are truncated at said first side surface.
  4. 4. A light emitting diode array of claim 3, wherein: said second electrode layers are provided so as to fill said windows, respectively.
  5. 5. A light emitting diode array of claim 4, wherein: said first portion of said conductive layer is located on said first portion of said insulating layer and is connected to said first electrode layer at a boundary between said second side surface and said bottom surface; and said second portion of said conductive layer is located on said second portion of said insulating layer and is electrically isolated from said electrode pattern.
  6. 6. A light emitting diode array of claim 4, wherein: said first electrode layer is formed on a first area of said bottom surface; said insulating layer further includes: a third portion formed on a second area of said bottom surface and connected to said first portion of said insulating layer: - 17 - said first portion of said conductive layer is located on said third portion of said insulating layer; said second portion of said conductive layer is located on said second portion of said insulating layer and is connected to said electrode pattern; and said conductive layer further has a third portion provided on said first portion of said insulating layer and is connected to said first and second portions of said conductive layer.
  7. 7. A light emitting diode comprising: (a) a semiconductor layer of a first conductivity type; (b) a semiconductor region of a second conductivity type which is selectively formed in a top surface of said semiconductor layer and which forms a PN junction with said semiconductor layer, said PN junctions being exposed at a first side surface of said semiconductor layer; (c) a first electrode layer provided on a bottom surface of said semiconductor region; (d) a second electrode layer provided on a top surface of said semiconductor region; and (e) a multi-layer structure having an insulating layer and a conductivity layer and provided on at least a second side surface of said semiconductor layer so that said insulating layer is sandwiched between said semiconductor layer and said conductive layer, said conductive layer having a first portion connected to one of said first electrode layer and said second electrode layer and a second portion located on a surface on which the other of said first electrode layer and said second layer electrode layer is located, said first and second portions -18- of said conductive layer being electrically connected to each other, wherein said second side surface is located on an opposite side of said first side surface.
  8. 8. A method of fabricating a light emitting diode, comprising the steps of: (a) preparing a semiconductor wafer having a semiconductor layer of a first conductivity type therein; (b) forming a matrix array of semiconductor regions of a second conductivity type in a top surface of said semiconductor layer; (c) forming a first insulating layer on said top surface of said semiconductor layer; (d) selectively removing said first insulating layer to obtain windows on said semiconductor regions; (e) providing first conductive layers in said windows; (f) cutting said wafer into strips each having a linear array of said semiconductor regions; (g) forming a second insulating layer on a side surface of a strip obtained in the step (f), said second insulating layer being connected to said first insulating layer on said strip; and (h) providing a second conductive layer having a first portion located on a bottom surface of said strip, a second portion located on said second insulating layer and a third portion located on a part of said first insulating layer of said strip.
  9. 9. A method of fabricating a light emitting diode, comprising the steps of: -19- (a) preparing a semiconductor wafer having a semiconductor layer of a first conductivity type therein: (b) forming a matrix array of semiconductor regions of a second conductivity type in a top surface of said semiconductor layer; (c) forming a first insulating layer on said top surface of said semiconductor layer; (d) selectively removing said first insulating layer to obtain windows on said semiconductor regions; (e) cutting said wafer into strips each having a linear array of said semiconductor regions; (f) forming a second insulating layer on a side surface of a strip obtained in the step (f), said second insulating layer being connected to said first insulating layer on said strip; (g) providing a conductive layer on top and bottom surfaces of said strip and on said first and second insulating layers; and (h) selectively removing said conductive layer on said first insulating layer to obtain: a first electrode layer which covers said bottom surface of said strip and said second insulating layer and which partially covers said first insulating layer on said strip; and second electrode layers filling said windows on said strip, respectively. -20-
CA002015462A 1988-11-07 1990-04-26 Light emitting diode array Expired - Fee Related CA2015462C (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP63279390A JPH02127053A (en) 1988-11-07 1988-11-07 Led array
US07/513,878 US5045895A (en) 1988-11-07 1990-04-24 Light emitting diode array with electrodes
CA002015462A CA2015462C (en) 1988-11-07 1990-04-26 Light emitting diode array
EP90108461A EP0454891A1 (en) 1988-11-07 1990-05-04 Light emitting diode array
US07/700,422 US5094970A (en) 1988-11-07 1991-05-15 Method of making a light emitting diode array

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP63279390A JPH02127053A (en) 1988-11-07 1988-11-07 Led array
CA002015462A CA2015462C (en) 1988-11-07 1990-04-26 Light emitting diode array
EP90108461A EP0454891A1 (en) 1988-11-07 1990-05-04 Light emitting diode array
US07/700,422 US5094970A (en) 1988-11-07 1991-05-15 Method of making a light emitting diode array

Publications (1)

Publication Number Publication Date
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CA002015462A Expired - Fee Related CA2015462C (en) 1988-11-07 1990-04-26 Light emitting diode array

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