CA1313813C - Appareil de production d'une pellicule - Google Patents

Appareil de production d'une pellicule

Info

Publication number
CA1313813C
CA1313813C CA000557115A CA557115A CA1313813C CA 1313813 C CA1313813 C CA 1313813C CA 000557115 A CA000557115 A CA 000557115A CA 557115 A CA557115 A CA 557115A CA 1313813 C CA1313813 C CA 1313813C
Authority
CA
Canada
Prior art keywords
susceptors
forming apparatus
film forming
reaction chamber
rotating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CA000557115A
Other languages
English (en)
Inventor
Masanori Ohmura
Hiroshi Sakama
Kenji Araki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Engineering Corp
Original Assignee
Nippon Kokan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP61291468A external-priority patent/JPS63144513A/ja
Application filed by Nippon Kokan Ltd filed Critical Nippon Kokan Ltd
Priority to CA000557115A priority Critical patent/CA1313813C/fr
Application granted granted Critical
Publication of CA1313813C publication Critical patent/CA1313813C/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

CA000557115A 1986-12-09 1988-01-22 Appareil de production d'une pellicule Expired - Fee Related CA1313813C (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CA000557115A CA1313813C (fr) 1986-12-09 1988-01-22 Appareil de production d'une pellicule

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP61291468A JPS63144513A (ja) 1986-12-09 1986-12-09 バレル型エピタキシヤル成長装置
CA000557115A CA1313813C (fr) 1986-12-09 1988-01-22 Appareil de production d'une pellicule

Publications (1)

Publication Number Publication Date
CA1313813C true CA1313813C (fr) 1993-02-23

Family

ID=25671675

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000557115A Expired - Fee Related CA1313813C (fr) 1986-12-09 1988-01-22 Appareil de production d'une pellicule

Country Status (1)

Country Link
CA (1) CA1313813C (fr)

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