CA1252228A - Lithographie en creux aux ultraviolets - Google Patents

Lithographie en creux aux ultraviolets

Info

Publication number
CA1252228A
CA1252228A CA000553493A CA553493A CA1252228A CA 1252228 A CA1252228 A CA 1252228A CA 000553493 A CA000553493 A CA 000553493A CA 553493 A CA553493 A CA 553493A CA 1252228 A CA1252228 A CA 1252228A
Authority
CA
Canada
Prior art keywords
equipment
laser
source
workpiece
optical system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA000553493A
Other languages
English (en)
Inventor
John H. Bruning
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
American Telephone and Telegraph Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CA000484658A external-priority patent/CA1232373A/fr
Application filed by American Telephone and Telegraph Co Inc filed Critical American Telephone and Telegraph Co Inc
Priority to CA000553493A priority Critical patent/CA1252228A/fr
Priority to CA000579702A priority patent/CA1269765A/fr
Application granted granted Critical
Publication of CA1252228A publication Critical patent/CA1252228A/fr
Expired legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
CA000553493A 1984-06-21 1987-12-03 Lithographie en creux aux ultraviolets Expired CA1252228A (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CA000553493A CA1252228A (fr) 1984-06-21 1987-12-03 Lithographie en creux aux ultraviolets
CA000579702A CA1269765A (fr) 1984-06-21 1988-10-07 Lithographie penetrante aux ultraviolets

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US62324784A 1984-06-21 1984-06-21
US623,247 1984-06-21
CA000484658A CA1232373A (fr) 1984-06-21 1985-06-20 Lithographie aux ultraviolets a forte penetration
CA000553493A CA1252228A (fr) 1984-06-21 1987-12-03 Lithographie en creux aux ultraviolets

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CA000484658A Division CA1232373A (fr) 1984-06-21 1985-06-20 Lithographie aux ultraviolets a forte penetration

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CA000579702A Division CA1269765A (fr) 1984-06-21 1988-10-07 Lithographie penetrante aux ultraviolets

Publications (1)

Publication Number Publication Date
CA1252228A true CA1252228A (fr) 1989-04-04

Family

ID=25670721

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000553493A Expired CA1252228A (fr) 1984-06-21 1987-12-03 Lithographie en creux aux ultraviolets

Country Status (1)

Country Link
CA (1) CA1252228A (fr)

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