Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Arthur Pfeiffer Vakuumtechnik Wetzlar GmbH
Original Assignee
Arthur Pfeiffer Vakuumtechnik Wetzlar GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Arthur Pfeiffer Vakuumtechnik Wetzlar GmbHfiledCriticalArthur Pfeiffer Vakuumtechnik Wetzlar GmbH
Priority to CA000471043ApriorityCriticalpatent/CA1250538A/fr
Application grantedgrantedCritical
Publication of CA1250538ApublicationCriticalpatent/CA1250538A/fr