CA1237174A - Filtre d'ondes sonores superficielles - Google Patents
Filtre d'ondes sonores superficiellesInfo
- Publication number
- CA1237174A CA1237174A CA000487843A CA487843A CA1237174A CA 1237174 A CA1237174 A CA 1237174A CA 000487843 A CA000487843 A CA 000487843A CA 487843 A CA487843 A CA 487843A CA 1237174 A CA1237174 A CA 1237174A
- Authority
- CA
- Canada
- Prior art keywords
- electrodes
- acoustic wave
- surface acoustic
- wave filter
- apodization
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010897 surface acoustic wave method Methods 0.000 title claims abstract description 45
- 239000000758 substrate Substances 0.000 claims description 9
- 239000010453 quartz Substances 0.000 claims description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 2
- 239000002344 surface layer Substances 0.000 claims description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
- 239000002019 doping agent Substances 0.000 claims 1
- 238000003780 insertion Methods 0.000 abstract description 15
- 230000037431 insertion Effects 0.000 abstract description 15
- 238000000034 method Methods 0.000 abstract description 11
- 230000008569 process Effects 0.000 abstract description 3
- 230000004044 response Effects 0.000 description 5
- 230000032683 aging Effects 0.000 description 3
- 238000004070 electrodeposition Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 238000010420 art technique Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- FFUAGWLWBBFQJT-UHFFFAOYSA-N hexamethyldisilazane Chemical compound C[Si](C)(C)N[Si](C)(C)C FFUAGWLWBBFQJT-UHFFFAOYSA-N 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- XPDWGBQVDMORPB-UHFFFAOYSA-N Fluoroform Chemical compound FC(F)F XPDWGBQVDMORPB-UHFFFAOYSA-N 0.000 description 1
- 241000218652 Larix Species 0.000 description 1
- 235000005590 Larix decidua Nutrition 0.000 description 1
- 238000003483 aging Methods 0.000 description 1
- 239000002305 electric material Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
- H03H9/14517—Means for weighting
- H03H9/1452—Means for weighting by finger overlap length, apodisation
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02614—Treatment of substrates, e.g. curved, spherical, cylindrical substrates ensuring closed round-about circuits for the acoustical waves
- H03H9/02629—Treatment of substrates, e.g. curved, spherical, cylindrical substrates ensuring closed round-about circuits for the acoustical waves of the edges
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
- H03H9/14502—Surface acoustic wave [SAW] transducers for a particular purpose
- H03H9/14505—Unidirectional SAW transducers
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/46—Filters
- H03H9/64—Filters using surface acoustic waves
- H03H9/6489—Compensation of undesirable effects
- H03H9/6496—Reducing ripple in transfer characteristic
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02637—Details concerning reflective or coupling arrays
- H03H9/02653—Grooves or arrays buried in the substrate
- H03H9/02661—Grooves or arrays buried in the substrate being located inside the interdigital transducers
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US06/636,679 US4577169A (en) | 1984-08-01 | 1984-08-01 | Small ripple surface acoustic wave filter with low insertion loss |
| US636,679 | 1984-08-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1237174A true CA1237174A (fr) | 1988-05-24 |
Family
ID=24552897
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000487843A Expired CA1237174A (fr) | 1984-08-01 | 1985-07-31 | Filtre d'ondes sonores superficielles |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US4577169A (fr) |
| EP (1) | EP0188604B1 (fr) |
| JP (1) | JP2628985B2 (fr) |
| CA (1) | CA1237174A (fr) |
| DE (1) | DE3576258D1 (fr) |
| WO (1) | WO1986001054A1 (fr) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2638047B1 (fr) * | 1988-10-14 | 1990-11-23 | Thomson Csf | |
| US5313177A (en) * | 1992-04-06 | 1994-05-17 | Motorola, Inc. | Method and apparatus for an acoustic wave filter |
| US5349359A (en) * | 1993-05-10 | 1994-09-20 | Environmental Research Institute Of Michigan | Spatially variant apodization |
| US5528206A (en) * | 1994-11-23 | 1996-06-18 | Murata Manufacturing Co., Ltd. | Surface acoustic wave filter with attenuated spurious emissions |
| JP3185591B2 (ja) * | 1995-03-03 | 2001-07-11 | 株式会社村田製作所 | Ｓａｗ共振子 |
| WO2001076064A2 (fr) * | 2000-03-30 | 2001-10-11 | Sawtek Inc. | Configuration de matrice pour dispositifs saw et procedes associes |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3675054A (en) * | 1970-12-02 | 1972-07-04 | Texas Instruments Inc | Series connection of interdigitated surface wave transducers |
| FR2146541A5 (fr) * | 1971-07-16 | 1973-03-02 | Thomson Csf | |
| FR2290786A1 (fr) * | 1974-11-08 | 1976-06-04 | Thomson Csf | Dispositif a reflexion selective d'ondes elastiques de surface |
| US4006438A (en) * | 1975-08-18 | 1977-02-01 | Amp Incorporated | Electro-acoustic surface-wave filter device |
| GB1565756A (en) * | 1976-09-30 | 1980-04-23 | Toko Inc | Surface elastic wave devices |
| US4130813A (en) * | 1977-05-23 | 1978-12-19 | Raytheon Company | Surface wave device having enhanced reflectivity gratings |
| CA1118883A (fr) * | 1977-06-02 | 1982-02-23 | Thomas E. Parker | Methode de fabrication de transducteurs d'ondes acoustiques de surface pour reduire les reflexions |
| JPS5847090B2 (ja) * | 1977-08-10 | 1983-10-20 | 株式会社村田製作所 | 弾性表面波フイルタ |
| US4237433A (en) * | 1979-03-13 | 1980-12-02 | Sperry Corporation | Surface acoustic wave resonators with integrated internal coupler reflectors |
| JPS564916A (en) * | 1979-06-25 | 1981-01-19 | Murata Mfg Co Ltd | Elastic surface wave filter |
| JPS5715514A (en) * | 1980-07-01 | 1982-01-26 | Nec Corp | Manufacture for reed screen electrode for elastic surface wave |
| US4353046A (en) * | 1980-11-04 | 1982-10-05 | R F Monolithics, Inc. | Surface acoustic wave device with reflectors |
| JPS57103420A (en) * | 1980-12-18 | 1982-06-28 | Toko Inc | Grouped unidirectional surface acoustic wave transducer |
| DE3117747A1 (de) * | 1981-05-05 | 1982-11-25 | Kollsman System-Technik GmbH, 8000 München | Piezoelektrisches element |
| US4499440A (en) * | 1983-08-22 | 1985-02-12 | United Technologies Corporation | Low reflectivity electrodes in semiconductive SAW devices |
-
1984
- 1984-08-01 US US06/636,679 patent/US4577169A/en not_active Expired - Lifetime
-
1985
- 1985-07-25 DE DE8585903936T patent/DE3576258D1/de not_active Expired - Fee Related
- 1985-07-25 WO PCT/US1985/001422 patent/WO1986001054A1/fr not_active Ceased
- 1985-07-25 JP JP60503481A patent/JP2628985B2/ja not_active Expired - Lifetime
- 1985-07-25 EP EP85903936A patent/EP0188604B1/fr not_active Expired
- 1985-07-31 CA CA000487843A patent/CA1237174A/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE3576258D1 (de) | 1990-04-05 |
| US4577169A (en) | 1986-03-18 |
| EP0188604B1 (fr) | 1990-02-28 |
| WO1986001054A1 (fr) | 1986-02-13 |
| JPS61502930A (ja) | 1986-12-11 |
| EP0188604A1 (fr) | 1986-07-30 |
| JP2628985B2 (ja) | 1997-07-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKEX | Expiry |