CA1235384A - Dual ion beam deposition of amorphous semiconductor films - Google Patents
Dual ion beam deposition of amorphous semiconductor filmsInfo
- Publication number
- CA1235384A CA1235384A CA000480168A CA480168A CA1235384A CA 1235384 A CA1235384 A CA 1235384A CA 000480168 A CA000480168 A CA 000480168A CA 480168 A CA480168 A CA 480168A CA 1235384 A CA1235384 A CA 1235384A
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- CA
- Canada
- Prior art keywords
- current
- ions
- films
- electrolytic
- anode electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
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Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Photovoltaic Devices (AREA)
- Electrolytic Production Of Metals (AREA)
Abstract
ABSTRACT
A sputtering process for preparing amorphous semiconducting films having a reduced number of localized states is disclosed. In particular, hydrogenated films free of polyhydrides may be prepared according to the inventive process. In one application of the process, a silicon target is bombarded by separate beams of relatively heavy sputtering ions, such as argon ions, effective in sputtering the target and by passivating ions of a substance effective in passivating localized states in amorphous semiconducting films, such as hydrogen ions. The products of this sputtering are collected on remotely located substrates to form passivated amorphous films. Films produced according to the process may be doped and junction structures formed during deposition by adding ions of a gaseous dopant to the beam of passivating ions. In a preferred application, amorphous, hydrogenated silicon films contain hydrogen only in the form of silicon monohydride.
A sputtering process for preparing amorphous semiconducting films having a reduced number of localized states is disclosed. In particular, hydrogenated films free of polyhydrides may be prepared according to the inventive process. In one application of the process, a silicon target is bombarded by separate beams of relatively heavy sputtering ions, such as argon ions, effective in sputtering the target and by passivating ions of a substance effective in passivating localized states in amorphous semiconducting films, such as hydrogen ions. The products of this sputtering are collected on remotely located substrates to form passivated amorphous films. Films produced according to the process may be doped and junction structures formed during deposition by adding ions of a gaseous dopant to the beam of passivating ions. In a preferred application, amorphous, hydrogenated silicon films contain hydrogen only in the form of silicon monohydride.
Description
3~j3~3;~ (, , BACKGROUND OF THE INVENTION
The present invention relates to a method of electrolytic treatment on the surface of metal web with ..~ which the stability of graphite electrodes used in the electrolytic treatment of a metal plate is remarkably improved.
Examples of a method of applying an electrolytic treatment to the surface of a metal member made of aluminum, iron or the like are the plating method, the electrolytic roughening method, the electrolytic etching method, the anodic oxidation method, the electrolytic coloring method and the electrolytic satin finishing method all wish have been extensively employed in the art. DO sources, power . . - mains ARC. sources, superposed-waveform current sources, and lo thyristor-controlled special-waveform or square-wave ARC.
sources have been employed with these methods in order Jo meet requirements of quality of the electrolytic treatment or to improve the reaction efficiency. For instance, . CA 1,093,009 discloses-a process in which an ARC. is applied in the electrolytic treatment of an aluminum plate with the voltage applied to the anode electrode being higher than that applied to the cathode electrode, whereby an aluminum '`~
, ' :
:
`:
~;2353~3:3 r 1; substrate for lithographic printing whose surface is electroqra:Lned satisfactorily is obtained. When using a regulated ARC., it is essential to employ electrodes which are highly stable In general, platinum, tantalum, titanium, iron, lead and graphite are employed as electrode materials.
Graphite electrodes are widely employed because they are chemically relatively stable and are of low cost.
BRIEF DESCRIPTION OF THE DRAWINGS
Fig. 1 is an explanatory diagram schematically showing an example of a conventional continuous electrolytic treatment system;
Fig. 2 is a diagram showing current waveforms for a description of the invention; and Figs. 3, 4 and 5 are explanatory diagrams schematically showing examples of continuous electrolytic treatment systems for practicing an electrolytic treatment method according to the invention.
Fig. 1 shows an example of a conventional continuous electrolytic treatment system for metal webs which utilizes graphite electrodes. In this system, a metal web 1 is introduced into an electrolytic cell 4 while being guided by a guide roll 2, and is conveyed horizontally through the cell while being supported by a roll 3.
Jo .
3L~3~ 3 l Finally, the web 1 is moved out of the cell passing around a guide roll 5. The electrolytic cell 4 is divided by an insulator 6 into two chambers in which graphite electrodes are arranged on both sides of the metal web 1. A supply of electrolytic solution 28 is stored in a tank 9. A pump 10 supplies the electrolytic solution 28 to electrolytic solution supplying pipes 11 and 12 which debauch into the electrolytic cell 4. The electrolytic solution thus supplied covers the graphite electrodes 7 and 8 and the metal web and then returns to the tank 9 through a discharging pipe 13. A power source 14 connected to the graphite electrodes 7 and 8 applies a voltage thereto. An electrolytic treatment can be continuously applied to the metal web 1 with this system.
The power source 14 may produce (1) direct current, (2) symmetric alternate Kent waveform, I and (4) asymmetric alternate current waveform, and (5) and I as~trlc scurvy alternate current waveform as shown in Fig. 20 In general, in such an ARC. waveform, the average value of the forward I current In is not equal to the average value of the reverse current If.
A graphite electrode is very stable when used as a cathode electrode. however, when a graphite electrode is used as an anode electrode J it is consumed in the electrolytic solution, forming C02 by anode oxidation and, at the same time, it decays due to erosion ox the .. .
~?~
~Z35383 l graphite inter layers, which occurs at a rat depending on electrolytic conditions. When decay occurs, the current distribution in the electrode changes so that the electrolytic treatment becomes nonuniform. Therefore, the occurrence of such a phenomenon should be avoided in a case where the electrolytic treatment must be done with high accuracy. Accordingly, it is necessary to replace the electrodes periodically. This requirement is a drawback for mass production, and is one of the factors which lowers productivity.
An object of the invention is to provide an electrolytic treatment method in which, based on the properties of graphite, the electrodes are maintained sufficiently stable even in an electrolytic treatment using 15~ an asymmetric waveform ARC
SUMMARY OF TIE INVENTION
The inventors have conducted intensive research regarding ways to prevent the consumption of graphite electrodes and found conditions exist under which graphite . 20 electrodes employed in a system using asymmetric waveform ARC. can be stabilized. Specifically, in the electrolytic cell shown in Fig. 1, an asymmetric waveform current yin If) as shown at (4) in Fig. 2 was used. The forward terminal was connected to the electrode 7 and the reverse terminal to the electrode 8. Under these conditions, an electrolytic treatment was carried out by Jo , ~LX3S3~3 1 using a I Hal electrolytic bath with a current density of 50 Adam and a frequency of 60 Ho. In this case, the graphite electrode 7 was consumed quickly, while when the connection of the terminals was reversed, the electrode 8 was consumed but not the electrode 7. This means that, for the use of an asymmetric waveform current, the graphite electrode is consumed when Anode > Cathode and it is not consumed when Anode Cathode where Anode is the current i value in the periods in which the graphite electrode electrochemically acts as an anode electrode and Cathode is the current value in the periods in which the graphite electrode electrochemically acts as a cathode electrode.
eased on this stabilization condition, the inventors have developed a novel electrolytic treatment method with which graphite electrodes can be maintained stable with an asymmetric waveform current.
DESCRIPTION OF TIE PUFF RUED EMBODIMENTS
the invention will now be described in detail with reference to preferred embodiments shown in Figs. 3, 4 and 5.
Fig. 3 is an explanatory diagram showing an example of a continuous electrolytic treatment method for , . I.
"I
1 metal webs according to the invention. The parts (3) through (6) of Fig. 2 show a variety of asymmetric waveforms which may be employed with the invention.
First, a metal web 1 is passed through an auxiliary electrolytic cell 15 by a guide roll 16~ and then through an electrolytic cell 4 via pass rolls 17 and 18 and a guide roll 2. In the electrolytic cell 4, the web 1 is conveyed horizontally by a backing roll 3. Finally, the web is moved out of the cell 4 by a roll 5.
-The auxiliary electrolytic cell has an auxiliary electrode, namely, an insoluble anode electrode 20 which is disposed confronting the metal web. The insoluble anode electrode is made of platinum or lead. A pump 10 is used to deliver the electrolytic solution 28 to an electrolytic solution supplying pipe 19 which debauches into the auxiliary electrolytic cell 15. The electrolytic solution thus delivered covers the insoluble anode electrode 20 and the metal web 1 in the cell 15/ and is then returned to the tank 9 through a discharging pipe 21.
The electrolytic cell 4 is divided by an insulator 6 into two parts in which respective graphite electrodes 7 and 8 are disposed confronting the metal web 1. The pump 10 supplies the electrolytic solution from the tank g to electrolytic solution supplying pips LO and 12 op^nlng unto ' .
~23~
1 the electrolytic cell 4. The electrolytic solution thus supplied is returned through the discharging pipe 13 to the tank 9. In general, the electrolytic solution circulating system includes a heat exchanger and a filter so that the temperature of the electrolytic solution is controlled precisely and foreign matter is removed from the solution.
A power source 14 is provided to apply an asymmetric alternate waveform current, for instance, having a waveform as shown in parts (3) through (6) of Fig. 2, to the electrolytic cell with the electrodes arranged as described. The current waveform is such that In If and In = If + a are maintained, where In is the forward current value and If is the reverse current value. The positive terminal of the power source 14 is connected to the graphite electrode 7, and is further connected through a thruster or diode 22 to the insoluble anode electrode 20 in the auxiliary electrolytic cell I The negative terminal of the power source is connected to the graphite electrode 8.
In the forward period (positive half cycle) of the current flow, the current In is applied to both the graphite electrode 7 and the insoluble anode electrode 20. The current thus applied, which causes an anode reaction to occur on the surfaces of these electrodes, flows through the electrolytic solution to the metal web 1. At the same time 3~3~3 1 a cathode reaction treatment occurs on the metal web confronting the electrodes. The current Inn which flows in the metal web due to electron conduction, is returned through the electrolytic solution and the graphite electrode 8 to the power source 14. In this operation, the part of the metal web 1 which confronts the electrode 8 is subjected to an anode reaction treatment, while the surface of -the electrode 8 is subjected to a cathode reaction treatment.
Assuming that the currents applied to the graphite electrode 7 and the insoluble anode electrode 20 are represented by In and I, respectively, then control is carried out so as to satisfy the following condition:
> I. :
Such control may be achieved, if a thruster is employed, by controlling its ON time, or in the case of a diode, by inserting a variable resistor in its ` circuit.
Alternatively, control may be achieved by adjusting the distance between the anode electrode 20 and the metal web 1, or by adjusting the effective area of the anode electrode 20. Further, a separate electrolytic solution circulating tank (not shown) or the auxiliary electrolytic cell 15 can be provided so that the type of electrolytic solution and parameters thereof including its temperature and density can be varied.
l In the reverse current period (negative half cycle), the current If is supplied from the power source 14 to the graphite electrode 8, and is applied through the electrolytic solution to the metal web l. In this operation, an anode reaction treatment occurs on the surface of the graphite electrode 8, while a cathode reaction treatment occurs on the surface of the metal web l. The current Inn which flows in the metal web by electron conduction, is returned thrush the electrolytic solution and the graphite electrode 7 Jo the power source 14. In this operation, a cathode reaction treatment occurs on the surface of the graphite electrode 7, while the part of the metal web 1 confronting the graphite electrode 7 is subjected to an anode reaction treatment. In the reverse period, the current If does not flow to the anode electrode 20 due to the presence of the thruster or diode.
In the above-described electrolytic treatment method according to the invention, the electrodes 7 and 8 are very stable, being free from oxidation consumption. When the graphite electrode 7 acts as an anode electrode, the current Anode there through is In and when it acts as a cathode electrode, the current Cathode there through is If. In this case, In = If n = In +
I, and > are established, and therefore In < In .
' , .
., . I. .
1538~
1 Accordingly, for the graphite electrode 7, Anode <
Cathode- Thus, the stabilization condition is satisfied.
On the other hand, when the graphite electrode 8 acts as an anode electrode, the current Anode there through is Inn and when it acts as a cathode electrode, the current Cathode there through is In. That is, since If In is established, the stabilization condition Anode < Cathode is maintained.
The auxiliary electrode 20 in the auxiliary electrolytic cell 15 is always stable because it is an insoluble anode electrode, and only an anode reaction occurs therewith.
In electrolytic treatment system shown in Figs. 4 and 5, in which figures those components which have been described with reference to Fig. 3 are designated by the same reference numerals, the insoluble anode electrode 20 is positioned on one side of the metal web 1 opposite the side on which the graphite electrodes 7 and 8 are disposed. In this system, the electrodes are stable. However, an electrolytic reaction also occurs on the rear side of the metal web, thus forming a film thereon. This phenomenon is undesirable. Furthermore, as a part of the current flows to the rear surface, the reaction efficiency is lowered as much. Thus, the employment of these systems may not be economical for some applications, and accordingly, the system shown in Fig. 3 is usually preferable.
-, .:
- .-. ..
.
'
The present invention relates to a method of electrolytic treatment on the surface of metal web with ..~ which the stability of graphite electrodes used in the electrolytic treatment of a metal plate is remarkably improved.
Examples of a method of applying an electrolytic treatment to the surface of a metal member made of aluminum, iron or the like are the plating method, the electrolytic roughening method, the electrolytic etching method, the anodic oxidation method, the electrolytic coloring method and the electrolytic satin finishing method all wish have been extensively employed in the art. DO sources, power . . - mains ARC. sources, superposed-waveform current sources, and lo thyristor-controlled special-waveform or square-wave ARC.
sources have been employed with these methods in order Jo meet requirements of quality of the electrolytic treatment or to improve the reaction efficiency. For instance, . CA 1,093,009 discloses-a process in which an ARC. is applied in the electrolytic treatment of an aluminum plate with the voltage applied to the anode electrode being higher than that applied to the cathode electrode, whereby an aluminum '`~
, ' :
:
`:
~;2353~3:3 r 1; substrate for lithographic printing whose surface is electroqra:Lned satisfactorily is obtained. When using a regulated ARC., it is essential to employ electrodes which are highly stable In general, platinum, tantalum, titanium, iron, lead and graphite are employed as electrode materials.
Graphite electrodes are widely employed because they are chemically relatively stable and are of low cost.
BRIEF DESCRIPTION OF THE DRAWINGS
Fig. 1 is an explanatory diagram schematically showing an example of a conventional continuous electrolytic treatment system;
Fig. 2 is a diagram showing current waveforms for a description of the invention; and Figs. 3, 4 and 5 are explanatory diagrams schematically showing examples of continuous electrolytic treatment systems for practicing an electrolytic treatment method according to the invention.
Fig. 1 shows an example of a conventional continuous electrolytic treatment system for metal webs which utilizes graphite electrodes. In this system, a metal web 1 is introduced into an electrolytic cell 4 while being guided by a guide roll 2, and is conveyed horizontally through the cell while being supported by a roll 3.
Jo .
3L~3~ 3 l Finally, the web 1 is moved out of the cell passing around a guide roll 5. The electrolytic cell 4 is divided by an insulator 6 into two chambers in which graphite electrodes are arranged on both sides of the metal web 1. A supply of electrolytic solution 28 is stored in a tank 9. A pump 10 supplies the electrolytic solution 28 to electrolytic solution supplying pipes 11 and 12 which debauch into the electrolytic cell 4. The electrolytic solution thus supplied covers the graphite electrodes 7 and 8 and the metal web and then returns to the tank 9 through a discharging pipe 13. A power source 14 connected to the graphite electrodes 7 and 8 applies a voltage thereto. An electrolytic treatment can be continuously applied to the metal web 1 with this system.
The power source 14 may produce (1) direct current, (2) symmetric alternate Kent waveform, I and (4) asymmetric alternate current waveform, and (5) and I as~trlc scurvy alternate current waveform as shown in Fig. 20 In general, in such an ARC. waveform, the average value of the forward I current In is not equal to the average value of the reverse current If.
A graphite electrode is very stable when used as a cathode electrode. however, when a graphite electrode is used as an anode electrode J it is consumed in the electrolytic solution, forming C02 by anode oxidation and, at the same time, it decays due to erosion ox the .. .
~?~
~Z35383 l graphite inter layers, which occurs at a rat depending on electrolytic conditions. When decay occurs, the current distribution in the electrode changes so that the electrolytic treatment becomes nonuniform. Therefore, the occurrence of such a phenomenon should be avoided in a case where the electrolytic treatment must be done with high accuracy. Accordingly, it is necessary to replace the electrodes periodically. This requirement is a drawback for mass production, and is one of the factors which lowers productivity.
An object of the invention is to provide an electrolytic treatment method in which, based on the properties of graphite, the electrodes are maintained sufficiently stable even in an electrolytic treatment using 15~ an asymmetric waveform ARC
SUMMARY OF TIE INVENTION
The inventors have conducted intensive research regarding ways to prevent the consumption of graphite electrodes and found conditions exist under which graphite . 20 electrodes employed in a system using asymmetric waveform ARC. can be stabilized. Specifically, in the electrolytic cell shown in Fig. 1, an asymmetric waveform current yin If) as shown at (4) in Fig. 2 was used. The forward terminal was connected to the electrode 7 and the reverse terminal to the electrode 8. Under these conditions, an electrolytic treatment was carried out by Jo , ~LX3S3~3 1 using a I Hal electrolytic bath with a current density of 50 Adam and a frequency of 60 Ho. In this case, the graphite electrode 7 was consumed quickly, while when the connection of the terminals was reversed, the electrode 8 was consumed but not the electrode 7. This means that, for the use of an asymmetric waveform current, the graphite electrode is consumed when Anode > Cathode and it is not consumed when Anode Cathode where Anode is the current i value in the periods in which the graphite electrode electrochemically acts as an anode electrode and Cathode is the current value in the periods in which the graphite electrode electrochemically acts as a cathode electrode.
eased on this stabilization condition, the inventors have developed a novel electrolytic treatment method with which graphite electrodes can be maintained stable with an asymmetric waveform current.
DESCRIPTION OF TIE PUFF RUED EMBODIMENTS
the invention will now be described in detail with reference to preferred embodiments shown in Figs. 3, 4 and 5.
Fig. 3 is an explanatory diagram showing an example of a continuous electrolytic treatment method for , . I.
"I
1 metal webs according to the invention. The parts (3) through (6) of Fig. 2 show a variety of asymmetric waveforms which may be employed with the invention.
First, a metal web 1 is passed through an auxiliary electrolytic cell 15 by a guide roll 16~ and then through an electrolytic cell 4 via pass rolls 17 and 18 and a guide roll 2. In the electrolytic cell 4, the web 1 is conveyed horizontally by a backing roll 3. Finally, the web is moved out of the cell 4 by a roll 5.
-The auxiliary electrolytic cell has an auxiliary electrode, namely, an insoluble anode electrode 20 which is disposed confronting the metal web. The insoluble anode electrode is made of platinum or lead. A pump 10 is used to deliver the electrolytic solution 28 to an electrolytic solution supplying pipe 19 which debauches into the auxiliary electrolytic cell 15. The electrolytic solution thus delivered covers the insoluble anode electrode 20 and the metal web 1 in the cell 15/ and is then returned to the tank 9 through a discharging pipe 21.
The electrolytic cell 4 is divided by an insulator 6 into two parts in which respective graphite electrodes 7 and 8 are disposed confronting the metal web 1. The pump 10 supplies the electrolytic solution from the tank g to electrolytic solution supplying pips LO and 12 op^nlng unto ' .
~23~
1 the electrolytic cell 4. The electrolytic solution thus supplied is returned through the discharging pipe 13 to the tank 9. In general, the electrolytic solution circulating system includes a heat exchanger and a filter so that the temperature of the electrolytic solution is controlled precisely and foreign matter is removed from the solution.
A power source 14 is provided to apply an asymmetric alternate waveform current, for instance, having a waveform as shown in parts (3) through (6) of Fig. 2, to the electrolytic cell with the electrodes arranged as described. The current waveform is such that In If and In = If + a are maintained, where In is the forward current value and If is the reverse current value. The positive terminal of the power source 14 is connected to the graphite electrode 7, and is further connected through a thruster or diode 22 to the insoluble anode electrode 20 in the auxiliary electrolytic cell I The negative terminal of the power source is connected to the graphite electrode 8.
In the forward period (positive half cycle) of the current flow, the current In is applied to both the graphite electrode 7 and the insoluble anode electrode 20. The current thus applied, which causes an anode reaction to occur on the surfaces of these electrodes, flows through the electrolytic solution to the metal web 1. At the same time 3~3~3 1 a cathode reaction treatment occurs on the metal web confronting the electrodes. The current Inn which flows in the metal web due to electron conduction, is returned through the electrolytic solution and the graphite electrode 8 to the power source 14. In this operation, the part of the metal web 1 which confronts the electrode 8 is subjected to an anode reaction treatment, while the surface of -the electrode 8 is subjected to a cathode reaction treatment.
Assuming that the currents applied to the graphite electrode 7 and the insoluble anode electrode 20 are represented by In and I, respectively, then control is carried out so as to satisfy the following condition:
> I. :
Such control may be achieved, if a thruster is employed, by controlling its ON time, or in the case of a diode, by inserting a variable resistor in its ` circuit.
Alternatively, control may be achieved by adjusting the distance between the anode electrode 20 and the metal web 1, or by adjusting the effective area of the anode electrode 20. Further, a separate electrolytic solution circulating tank (not shown) or the auxiliary electrolytic cell 15 can be provided so that the type of electrolytic solution and parameters thereof including its temperature and density can be varied.
l In the reverse current period (negative half cycle), the current If is supplied from the power source 14 to the graphite electrode 8, and is applied through the electrolytic solution to the metal web l. In this operation, an anode reaction treatment occurs on the surface of the graphite electrode 8, while a cathode reaction treatment occurs on the surface of the metal web l. The current Inn which flows in the metal web by electron conduction, is returned thrush the electrolytic solution and the graphite electrode 7 Jo the power source 14. In this operation, a cathode reaction treatment occurs on the surface of the graphite electrode 7, while the part of the metal web 1 confronting the graphite electrode 7 is subjected to an anode reaction treatment. In the reverse period, the current If does not flow to the anode electrode 20 due to the presence of the thruster or diode.
In the above-described electrolytic treatment method according to the invention, the electrodes 7 and 8 are very stable, being free from oxidation consumption. When the graphite electrode 7 acts as an anode electrode, the current Anode there through is In and when it acts as a cathode electrode, the current Cathode there through is If. In this case, In = If n = In +
I, and > are established, and therefore In < In .
' , .
., . I. .
1538~
1 Accordingly, for the graphite electrode 7, Anode <
Cathode- Thus, the stabilization condition is satisfied.
On the other hand, when the graphite electrode 8 acts as an anode electrode, the current Anode there through is Inn and when it acts as a cathode electrode, the current Cathode there through is In. That is, since If In is established, the stabilization condition Anode < Cathode is maintained.
The auxiliary electrode 20 in the auxiliary electrolytic cell 15 is always stable because it is an insoluble anode electrode, and only an anode reaction occurs therewith.
In electrolytic treatment system shown in Figs. 4 and 5, in which figures those components which have been described with reference to Fig. 3 are designated by the same reference numerals, the insoluble anode electrode 20 is positioned on one side of the metal web 1 opposite the side on which the graphite electrodes 7 and 8 are disposed. In this system, the electrodes are stable. However, an electrolytic reaction also occurs on the rear side of the metal web, thus forming a film thereon. This phenomenon is undesirable. Furthermore, as a part of the current flows to the rear surface, the reaction efficiency is lowered as much. Thus, the employment of these systems may not be economical for some applications, and accordingly, the system shown in Fig. 3 is usually preferable.
-, .:
- .-. ..
.
'
Claims (7)
1. A method of electrolytic treatment on the surface of metal web employing graphite electrodes and in which an A.C. having asymmetric positive and negative half cycles is applied between opposed electrodes to continuously apply an electrolytic treatment to a metal web through an electrolytic solution, the improvement wherein a portion of the current of the one of said half cycles having the larger average value over a complete cycle of said A.C.
current is applied to an auxiliary anode electrode provided in addition to said graphite electrodes so that a current density for anode reaction on surfaces-of said graphite electrodes is smaller than a current density for a cathode reaction on surfaces-of said graphite electrodes.
current is applied to an auxiliary anode electrode provided in addition to said graphite electrodes so that a current density for anode reaction on surfaces-of said graphite electrodes is smaller than a current density for a cathode reaction on surfaces-of said graphite electrodes.
2. The method as claimed in claim 1, wherein said graphite electrodes and said auxiliary anode electrode are arranged on one side of said metal web and extend in the longitudinal direction of said metal web.
3. The method as claimed in claim 1, wherein said auxiliary anode electrode is disposed in an independent auxiliary cell separated from said graphite electrodes.
4. The method as claimed in claim 1, wherein said auxiliary anode electrode is made of lead.
5. The method as claimed in claim 1, wherein
5. The method as claimed in claim 1, wherein
Claim 5 cont'd....
said auxiliary anode electrode is made of platinum.
said auxiliary anode electrode is made of platinum.
6. The method as claimed in claim 1, wherein said portion of the current applied to said auxiliary anode electrode is larger than the portion of said current simultaneously applied to said graphite electrodes.
7. The method as claimed in claim 1, wherein a duration of said one half cycle of said current is greater than the duration of the other half cycle of said current.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US64720884A | 1984-09-04 | 1984-09-04 | |
| US647,208 | 1984-09-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1235384A true CA1235384A (en) | 1988-04-19 |
Family
ID=24596081
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000480168A Expired CA1235384A (en) | 1984-09-04 | 1985-04-26 | Dual ion beam deposition of amorphous semiconductor films |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JPS6167220A (en) |
| CA (1) | CA1235384A (en) |
| IN (1) | IN166821B (en) |
-
1985
- 1985-04-19 IN IN334/DEL/85A patent/IN166821B/en unknown
- 1985-04-26 CA CA000480168A patent/CA1235384A/en not_active Expired
- 1985-04-26 JP JP60090766A patent/JPS6167220A/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6167220A (en) | 1986-04-07 |
| IN166821B (en) | 1990-07-21 |
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| MKEX | Expiry |