CA1228130A - Process and device for machining a resonator plate and plate thus produced - Google Patents
Process and device for machining a resonator plate and plate thus producedInfo
- Publication number
- CA1228130A CA1228130A CA000466224A CA466224A CA1228130A CA 1228130 A CA1228130 A CA 1228130A CA 000466224 A CA000466224 A CA 000466224A CA 466224 A CA466224 A CA 466224A CA 1228130 A CA1228130 A CA 1228130A
- Authority
- CA
- Canada
- Prior art keywords
- plate
- tier
- iris
- opening
- thinned
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 title claims abstract description 16
- 238000003754 machining Methods 0.000 title claims abstract description 11
- 230000002093 peripheral effect Effects 0.000 claims description 6
- 150000002500 ions Chemical class 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 238000000151 deposition Methods 0.000 claims description 3
- 238000005304 joining Methods 0.000 claims description 3
- 239000010453 quartz Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 238000010884 ion-beam technique Methods 0.000 claims 1
- 239000012528 membrane Substances 0.000 description 7
- 210000003423 ankle Anatomy 0.000 description 2
- 239000002966 varnish Substances 0.000 description 2
- 101100536354 Drosophila melanogaster tant gene Proteins 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- 241000985630 Lota lota Species 0.000 description 1
- 241000282320 Panthera leo Species 0.000 description 1
- 244000046052 Phaseolus vulgaris Species 0.000 description 1
- 235000010627 Phaseolus vulgaris Nutrition 0.000 description 1
- 240000004808 Saccharomyces cerevisiae Species 0.000 description 1
- 235000018936 Vitellaria paradoxa Nutrition 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 230000003292 diminished effect Effects 0.000 description 1
- 239000002305 electric material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 210000003608 fece Anatomy 0.000 description 1
- 239000010977 jade Substances 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 150000002989 phenols Chemical class 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- NMGNJWORLGLLHQ-UHFFFAOYSA-M sulcofuron-sodium Chemical compound [Na+].[O-]S(=O)(=O)C1=CC(Cl)=CC=C1OC1=CC=C(Cl)C=C1NC(=O)NC1=CC=C(Cl)C(Cl)=C1 NMGNJWORLGLLHQ-UHFFFAOYSA-M 0.000 description 1
- 230000001256 tonic effect Effects 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
Abstract
ABSTRACT OF THE DISCLOSURE
The invention relates to a process for machining a resonator plate by ionic bombardment, a device for making use of it, and a plate thus produced.
An iris is employed, having a part which is consumed during the bombardment, so as to produce a widening of its opening, which makes it possible to streamline the tier existing between a part of the plate which is thinned by bombardment and the remainder of the latter.
The tier of the plate may be in the shape of a double step.
The invention relates to a process for machining a resonator plate by ionic bombardment, a device for making use of it, and a plate thus produced.
An iris is employed, having a part which is consumed during the bombardment, so as to produce a widening of its opening, which makes it possible to streamline the tier existing between a part of the plate which is thinned by bombardment and the remainder of the latter.
The tier of the plate may be in the shape of a double step.
Description
I -PROCESS AND DEVICE OR MACHINING RESONATOR PLATE AND
PLATE THUS PRODUCED
The present 1nvent10n relates to process and a device or machining a resonator plate and Gore part-cularl~ a thinned pars of the plate, and plate thus pro-duped.
- RACEGR~VND_OF 'Lowe INVENTION
r~s-~n~n~ ,677 therm us Nina pus-electric resonator incorporating a quartz disc hiving in its center a thinned part foreign a ~enbrane, this thinned part being joined to the unthinned part by a tier shaped owned A first electrode extends over one face of the disc Ron the outside of the disc to the center of the thinned part, traversln~ the tter-shaped part. A second electrode arranged on the other face of the disc, extends from the periphery of the disc to the center of the thinned part.
This other face of the disc Jay be plane or Jay Also have a 15 ~ier-sh~p2d zone, which the second-e-e~rDd~ just then traverse.
horn the electrodes are Nader for example of silver or Allen, us the process taught by the US Patent 3~94,677, it us found tint they have a Tokyo spot on the 20 Ryan of the tier, which can put the resonator out of action by breaking electrical Gont~nu~ty~
In French Patent 2,527,865 filed on 1 July 19B2~ the Applicant Company has proposed to rein-force the first electrode with a conductive tab dopiest 25 on tier-shaped zone.
This conductive layer, enroll deposited by spray in or eYapor~tion, has preferably an averse thickness I .
of 1000 I. It it preferably ode of old In precuts it usually Doria than the electrode he present trend in technology 15 towards Ryan-Tories of increasingly higher frequency, which McKee it necessary to reduce further and further the thickness of the unthinned part Under these conditions, the Hyatt of the tier has to be jade treater, ~ncress~n2 the diff~c~lt~es encountered on respect of the electrode which just traverse it. The improvement provided by the reinforces tab does not always suffice to ensure the reliability of the electrical contact when the tier is high (of the order of 50 microns and over).
The present invention airs it over coin these d~sadvanta~es. To this end, its object is I machining process and corresponding device awaken it possible to produce progressive tier foci lightweight no the mechanic Bavaria of the electrode which Cassius the tier the electrode Boone preferably reinforced by a coroductive tab such us described on French Patent 2,527,865, 20 referred to above.
Sly Y OF YE INTO ON
Jo The lnY`entlon relate firstly to a process for elysian a thinned part on it least one plate of resow-atop by ionic bob ardent awaken use it least one us eharaeter1~ed in that the irks has part ~d3qcent to its 25 open no end pod so that, Doreen the bombardment, it 15 it Lotte partly consumed and causes a widening of the irks opening, so us to streamline the tier present on the thin-nod port and the relaunder of the plate.
According to it rut alternative for, the sod .
I -part is step-shaped in cross-section.
Accordions to a second alternative form the said part is frustoconical.
The process according to the invention aye advent-ageously include additional steps for depositing a conduct live tab in the region of the tier, end or deposit~na the two electrodes one of which covers the conductive tub at least partially.
The invention also relates to device for awaken use of the process specified above. This incorporates device for ionic bombardment emitting a bean of ions in the direction of at least one plate of a resonator and at yeast one iris arranged facing the slid plate so as to Nash its periphery and to alloy ions of the beam to pass through an opening in the said iris. It is characterized in that the said iris has a part adjacent to its opening and,sh3ped so that during the bombardment, -it--is_~t'least partially consumed and causes widening of the opening in the said iris, so us to streamline the tier between the thinned part and the remainder of the plate According to a first alternative form, the said pars is step-3haped in cross-section.
According to a second ~lternetive for, the slid part is frustocon~cal.
F1na~y, the invention relates to resonator plate resulting from the use of the process according to the invention. The plate is of the type having an unthinned peripheral part and a thinned central part and a tier joining the peripheral part to the central part It is - -~lZ2~
ch~racterised in that the tier is gradual.
According to a first alternative for, the tier has the shape ox a double step.
According to second alternative for, the tier has, in cross-sec~on, the shape of a ~onotonic curve.
BRIEF DESCRIPTION OF LEE DRAWINGS
~bodi~ent, the plate has an electrode ossociatediwith a conductive tab formed by a layer of petal deposited in the tier-shaped zone.
The invention Jill be understood better from read-in the following description, which us riven by Jay ofnon-L;mitin~ example, in conjunction with the attached dryness, which show:
- figures pa and 1b, the staves of manufacture of a first embodiment of an iris according Jo the invention, intended to be employed in a first wanner of employing the kenning process according to the invention, the staves of which are illustrated in pharisee pa to Ed - figure 3, a second embodiment of an iris accord-in to the invention, intended to be employed in second wanner of e~p~oyin~ the ~achinin3 process according Jo the invention, the staves of which are shown in figures pa to Ed.
DETAILED DUPE OF REFERRED EMBODIMENTS
According to figure 1b, an irks 1 has central opening 2 surrounded by a part 12 in the shape of a step I I This is produced by starting with a disc pierced in its center by an opening 2 end covered on its outer faces with a asking varnish or a masking metal deposit (3, 4, 5), except for a preferably circular part 6 adjoin-ivy the opening 2 on one of the faces of the disc A chew ~.22~3~3~ -teal attack of the disk is carried out, which results in the latter being hollowed out in the unmasked parts I so as to for an opening part 10 which us Doria than the opening 2 and bounded by a bottom 6' and a face 11. The face 9 of the part of the opening 2 which remains and the bottom 6' thus bound the part 12.
According to figure pa, the Uris I after removal of the varnish or of the metal deposit (3, 4, 5), is placed in contact with a plate consisting of a disc 20 of pus-electric Atari, for example quartz or lithium tant~lAte,in order to produce ionic machining. The latter is carried out figure 2b) under vacuum by a device for ionic bombard-mint D emitting a beam of ions F at right angles to the surface of the resonator. More particularly, figure 2b fixes the instant when the part 12 has been completely con-Swede At this instant the disc 20 has, in its center, a blind opening 2, the diameter of vouch corresponds to that of opening 2, and the opening of the iris 1 is restricted to the only retaining part of the opening 10.
Machining is continued figure 2c~ until the bottom of the blind opening I bounds a ~enbrane 25 of the required thickness. At this stave, the thickness of the iris 1 has diminished further, and its opinion us still restricted to the repining part of the opening lo The disc 20 then has a tier formed by a double step. The first step consists of the upper face of the disc 20 and the machined vertical Hall 23, and the second of the machined flat bottom 22 and the vertical Hall 26.
According to figure Ed, a metal tab 29 is when de-~.2;2~
posited which extends traverse the double step of the Tory from the upper face of the disc 20 to an end 33 Kit-used at the periphery of the membrane 25.
An electrode 27 is then deposited, and it extends, S traversing the double step of the tier, prom the periphery of the upper ware of the disc 20 to an end I situated in the center of the membrane 25, at the save time as suckered electrode 27' from the periphery of the o'er face of the disc 20 to an end 28' situated on the center of the membrane 25 opposite the end 28 of electrode 27.
It Jill be understood that in general the machining us carried out by subjecting a plurality of plates to the save ionic bombardment, each plate being fitted with an iris for this purpose.
According to figure 3, an iris 31 has an opinion 32~ the side 33 of which us frustoconical.
The iris I is placed uith-~ts-~ce_~n which the opening 32 has the staller diameter pharaoh aye in contact with a plate consisting of a disc 40 of a pus electric material. The whole is arranged on a vacuum enclosure in-corpora a device for tonic bombardment D producing -be of ions F us right ankles Jo the surface of the disc.
. .
During the ~achinin~, a blind opening 41 with curved feces 42 and flat bottom I is gradually excavated my virtue 25 of the frustoconical shape of the side 33 of the opening 32 of the irks 31, the diameter of the iris 31 in son~acg it the disc ED is griddle widened. It is this phenol xenon of consumption of the iris 31 which jives a curved out Line to the face I .
~L~2~3~
when the machining is finished pharaoh 4c), disc MU is obtained Shea has a curved tier 42 and a membrane 44 one face of which is the Lower face of the disc 40 and the other face of which us the flat bottom 45 of the opening I
According to figure Ed, a conductive tab 49, ego tending, from the upperif~ce of the disc 40 to sun end 50 situated at the periphery of the membrane 44, and traversed no the curved tier 42, is deposited.
A first electrode 47 which extends, traversing the curved tier 4Z, from the periphery of the upper lace of the disc 40 to an end 48 situated in the center of the membrane I and a second electrode 51 which extends from the periphery of the Lower face of the disc 40 Jo an end 52 situated in the center of the membrane 44 opposite the end 48 of the electrode 47, are when deposited simultan-easily.
As stated earlier, machining of several plates 5 is generally curried out s;~ultaneousLy.
- 20 It Jill be noted that the examples described above are given only by Jay of example Hyatt implying a Lit-anion. It us not necessary, for example, for the Jon beam to be directed at ugh ankles to the surface of the disc to be machined.
PLATE THUS PRODUCED
The present 1nvent10n relates to process and a device or machining a resonator plate and Gore part-cularl~ a thinned pars of the plate, and plate thus pro-duped.
- RACEGR~VND_OF 'Lowe INVENTION
r~s-~n~n~ ,677 therm us Nina pus-electric resonator incorporating a quartz disc hiving in its center a thinned part foreign a ~enbrane, this thinned part being joined to the unthinned part by a tier shaped owned A first electrode extends over one face of the disc Ron the outside of the disc to the center of the thinned part, traversln~ the tter-shaped part. A second electrode arranged on the other face of the disc, extends from the periphery of the disc to the center of the thinned part.
This other face of the disc Jay be plane or Jay Also have a 15 ~ier-sh~p2d zone, which the second-e-e~rDd~ just then traverse.
horn the electrodes are Nader for example of silver or Allen, us the process taught by the US Patent 3~94,677, it us found tint they have a Tokyo spot on the 20 Ryan of the tier, which can put the resonator out of action by breaking electrical Gont~nu~ty~
In French Patent 2,527,865 filed on 1 July 19B2~ the Applicant Company has proposed to rein-force the first electrode with a conductive tab dopiest 25 on tier-shaped zone.
This conductive layer, enroll deposited by spray in or eYapor~tion, has preferably an averse thickness I .
of 1000 I. It it preferably ode of old In precuts it usually Doria than the electrode he present trend in technology 15 towards Ryan-Tories of increasingly higher frequency, which McKee it necessary to reduce further and further the thickness of the unthinned part Under these conditions, the Hyatt of the tier has to be jade treater, ~ncress~n2 the diff~c~lt~es encountered on respect of the electrode which just traverse it. The improvement provided by the reinforces tab does not always suffice to ensure the reliability of the electrical contact when the tier is high (of the order of 50 microns and over).
The present invention airs it over coin these d~sadvanta~es. To this end, its object is I machining process and corresponding device awaken it possible to produce progressive tier foci lightweight no the mechanic Bavaria of the electrode which Cassius the tier the electrode Boone preferably reinforced by a coroductive tab such us described on French Patent 2,527,865, 20 referred to above.
Sly Y OF YE INTO ON
Jo The lnY`entlon relate firstly to a process for elysian a thinned part on it least one plate of resow-atop by ionic bob ardent awaken use it least one us eharaeter1~ed in that the irks has part ~d3qcent to its 25 open no end pod so that, Doreen the bombardment, it 15 it Lotte partly consumed and causes a widening of the irks opening, so us to streamline the tier present on the thin-nod port and the relaunder of the plate.
According to it rut alternative for, the sod .
I -part is step-shaped in cross-section.
Accordions to a second alternative form the said part is frustoconical.
The process according to the invention aye advent-ageously include additional steps for depositing a conduct live tab in the region of the tier, end or deposit~na the two electrodes one of which covers the conductive tub at least partially.
The invention also relates to device for awaken use of the process specified above. This incorporates device for ionic bombardment emitting a bean of ions in the direction of at least one plate of a resonator and at yeast one iris arranged facing the slid plate so as to Nash its periphery and to alloy ions of the beam to pass through an opening in the said iris. It is characterized in that the said iris has a part adjacent to its opening and,sh3ped so that during the bombardment, -it--is_~t'least partially consumed and causes widening of the opening in the said iris, so us to streamline the tier between the thinned part and the remainder of the plate According to a first alternative form, the said pars is step-3haped in cross-section.
According to a second ~lternetive for, the slid part is frustocon~cal.
F1na~y, the invention relates to resonator plate resulting from the use of the process according to the invention. The plate is of the type having an unthinned peripheral part and a thinned central part and a tier joining the peripheral part to the central part It is - -~lZ2~
ch~racterised in that the tier is gradual.
According to a first alternative for, the tier has the shape ox a double step.
According to second alternative for, the tier has, in cross-sec~on, the shape of a ~onotonic curve.
BRIEF DESCRIPTION OF LEE DRAWINGS
~bodi~ent, the plate has an electrode ossociatediwith a conductive tab formed by a layer of petal deposited in the tier-shaped zone.
The invention Jill be understood better from read-in the following description, which us riven by Jay ofnon-L;mitin~ example, in conjunction with the attached dryness, which show:
- figures pa and 1b, the staves of manufacture of a first embodiment of an iris according Jo the invention, intended to be employed in a first wanner of employing the kenning process according to the invention, the staves of which are illustrated in pharisee pa to Ed - figure 3, a second embodiment of an iris accord-in to the invention, intended to be employed in second wanner of e~p~oyin~ the ~achinin3 process according Jo the invention, the staves of which are shown in figures pa to Ed.
DETAILED DUPE OF REFERRED EMBODIMENTS
According to figure 1b, an irks 1 has central opening 2 surrounded by a part 12 in the shape of a step I I This is produced by starting with a disc pierced in its center by an opening 2 end covered on its outer faces with a asking varnish or a masking metal deposit (3, 4, 5), except for a preferably circular part 6 adjoin-ivy the opening 2 on one of the faces of the disc A chew ~.22~3~3~ -teal attack of the disk is carried out, which results in the latter being hollowed out in the unmasked parts I so as to for an opening part 10 which us Doria than the opening 2 and bounded by a bottom 6' and a face 11. The face 9 of the part of the opening 2 which remains and the bottom 6' thus bound the part 12.
According to figure pa, the Uris I after removal of the varnish or of the metal deposit (3, 4, 5), is placed in contact with a plate consisting of a disc 20 of pus-electric Atari, for example quartz or lithium tant~lAte,in order to produce ionic machining. The latter is carried out figure 2b) under vacuum by a device for ionic bombard-mint D emitting a beam of ions F at right angles to the surface of the resonator. More particularly, figure 2b fixes the instant when the part 12 has been completely con-Swede At this instant the disc 20 has, in its center, a blind opening 2, the diameter of vouch corresponds to that of opening 2, and the opening of the iris 1 is restricted to the only retaining part of the opening 10.
Machining is continued figure 2c~ until the bottom of the blind opening I bounds a ~enbrane 25 of the required thickness. At this stave, the thickness of the iris 1 has diminished further, and its opinion us still restricted to the repining part of the opening lo The disc 20 then has a tier formed by a double step. The first step consists of the upper face of the disc 20 and the machined vertical Hall 23, and the second of the machined flat bottom 22 and the vertical Hall 26.
According to figure Ed, a metal tab 29 is when de-~.2;2~
posited which extends traverse the double step of the Tory from the upper face of the disc 20 to an end 33 Kit-used at the periphery of the membrane 25.
An electrode 27 is then deposited, and it extends, S traversing the double step of the tier, prom the periphery of the upper ware of the disc 20 to an end I situated in the center of the membrane 25, at the save time as suckered electrode 27' from the periphery of the o'er face of the disc 20 to an end 28' situated on the center of the membrane 25 opposite the end 28 of electrode 27.
It Jill be understood that in general the machining us carried out by subjecting a plurality of plates to the save ionic bombardment, each plate being fitted with an iris for this purpose.
According to figure 3, an iris 31 has an opinion 32~ the side 33 of which us frustoconical.
The iris I is placed uith-~ts-~ce_~n which the opening 32 has the staller diameter pharaoh aye in contact with a plate consisting of a disc 40 of a pus electric material. The whole is arranged on a vacuum enclosure in-corpora a device for tonic bombardment D producing -be of ions F us right ankles Jo the surface of the disc.
. .
During the ~achinin~, a blind opening 41 with curved feces 42 and flat bottom I is gradually excavated my virtue 25 of the frustoconical shape of the side 33 of the opening 32 of the irks 31, the diameter of the iris 31 in son~acg it the disc ED is griddle widened. It is this phenol xenon of consumption of the iris 31 which jives a curved out Line to the face I .
~L~2~3~
when the machining is finished pharaoh 4c), disc MU is obtained Shea has a curved tier 42 and a membrane 44 one face of which is the Lower face of the disc 40 and the other face of which us the flat bottom 45 of the opening I
According to figure Ed, a conductive tab 49, ego tending, from the upperif~ce of the disc 40 to sun end 50 situated at the periphery of the membrane 44, and traversed no the curved tier 42, is deposited.
A first electrode 47 which extends, traversing the curved tier 4Z, from the periphery of the upper lace of the disc 40 to an end 48 situated in the center of the membrane I and a second electrode 51 which extends from the periphery of the Lower face of the disc 40 Jo an end 52 situated in the center of the membrane 44 opposite the end 48 of the electrode 47, are when deposited simultan-easily.
As stated earlier, machining of several plates 5 is generally curried out s;~ultaneousLy.
- 20 It Jill be noted that the examples described above are given only by Jay of example Hyatt implying a Lit-anion. It us not necessary, for example, for the Jon beam to be directed at ugh ankles to the surface of the disc to be machined.
Claims (10)
1. Process for machining a thinned part of a plate of a resonator by ionic bombardment employing an iris, in which the iris has a part adjoining its opening and shaped so that during the bombardment it is at least partially consumed and causes a widening of the opening of the iris, so as to streamline a tier existing between the thinned part and the remainder of the plate.
2. Process according to claim 1, in which the said part is step-shaped in cross-section.
3. Process according to claim 1, characterized in that the said part is frustoconical.
4. Process according to claim 1, including additional stages for depositing a conductive tab in the region of the tier and for depositing two electrodes one of which covers the conductive tab at least partially.
5. Device for making use of the process according to claim 1 and incorporating a device for ionic bombardment emitting an ion beam in the direction of at least one plate of a resonator, and at least one iris arranged facing the said plate so as to mask the periphery of the said quartz plate and to allow ions of the beam to pass through an opening in the iris, in which the said iris has a part adjointing its opening and shaped so that, during the bombardment, it is at least partially consumed and causes a widening of the opening in the iris so as to streamline the tier between the thinned part and the remainder of the plate.
6. Device according to claim 5, in which the said part is, in cross-section, in the shape of a step.
7. Device according to claim 5, in which the said part is frustoconical.
8. Resonator plate having an unthinned peripheral part and a thinned central part and a tier joining the peripheral part to the central part, in which the tier is gradual and in the shape of a double step.
9. Resonator plate having an unthinned peripheral part and a thinned central part and a tier joining the peripheral part to the central part, in which the tier is gradual and has, in cross-section, the shape of a monotonic curve.
10. Plate according to claim 8 or claim 9 having an electrode associated with a conductive tab formed by a layer of metal deposited in the tier-shaped zone.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8317320 | 1983-10-28 | ||
| FR8317320A FR2554289B1 (en) | 1983-10-28 | 1983-10-28 | METHOD AND DEVICE FOR MACHINING A RESONATOR BLADE AND BLADE THUS OBTAINED |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1228130A true CA1228130A (en) | 1987-10-13 |
Family
ID=9293664
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000466224A Expired CA1228130A (en) | 1983-10-28 | 1984-10-24 | Process and device for machining a resonator plate and plate thus produced |
Country Status (5)
| Country | Link |
|---|---|
| EP (1) | EP0143686B1 (en) |
| JP (1) | JPS60174509A (en) |
| CA (1) | CA1228130A (en) |
| DE (1) | DE3472339D1 (en) |
| FR (1) | FR2554289B1 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2577362B1 (en) * | 1985-02-13 | 1987-04-17 | Ebauchesfabrik Eta Ag | METHOD FOR MANUFACTURING HIGH FREQUENCY QUARTZ RESONATORS |
| US5668057A (en) * | 1991-03-13 | 1997-09-16 | Matsushita Electric Industrial Co., Ltd. | Methods of manufacture for electronic components having high-frequency elements |
| US5747857A (en) * | 1991-03-13 | 1998-05-05 | Matsushita Electric Industrial Co., Ltd. | Electronic components having high-frequency elements and methods of manufacture therefor |
| JPH06291587A (en) * | 1992-07-08 | 1994-10-18 | Matsushita Electric Ind Co Ltd | Piezoelectric vibrator |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2319242A1 (en) * | 1975-07-25 | 1977-02-18 | Thomson Csf | Control of charged particle machining of substrate - is particularly for thickness control and uses substrate resonant frequency |
| JPS5386187A (en) * | 1976-12-17 | 1978-07-29 | Citizen Watch Co Ltd | Production of crystal vibrator for wristwatch |
| FR2484734A1 (en) * | 1980-06-13 | 1981-12-18 | Cepe | Piezoelectric resonator for thermostatic control - has components for temp. stabilisation circuit using quartz or lithium tantalate plate mounted on solid ring |
-
1983
- 1983-10-28 FR FR8317320A patent/FR2554289B1/en not_active Expired
-
1984
- 1984-10-23 EP EP19840402133 patent/EP0143686B1/en not_active Expired
- 1984-10-23 DE DE8484402133T patent/DE3472339D1/en not_active Expired
- 1984-10-24 CA CA000466224A patent/CA1228130A/en not_active Expired
- 1984-10-29 JP JP22599584A patent/JPS60174509A/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| EP0143686B1 (en) | 1988-06-22 |
| JPS60174509A (en) | 1985-09-07 |
| FR2554289A1 (en) | 1985-05-03 |
| FR2554289B1 (en) | 1985-12-27 |
| EP0143686A1 (en) | 1985-06-05 |
| DE3472339D1 (en) | 1988-07-28 |
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