CA1201220A - Cuvette double d'epitaxie a partir d'une phase liquide - Google Patents
Cuvette double d'epitaxie a partir d'une phase liquideInfo
- Publication number
- CA1201220A CA1201220A CA000448169A CA448169A CA1201220A CA 1201220 A CA1201220 A CA 1201220A CA 000448169 A CA000448169 A CA 000448169A CA 448169 A CA448169 A CA 448169A CA 1201220 A CA1201220 A CA 1201220A
- Authority
- CA
- Canada
- Prior art keywords
- melt
- growth
- holder
- supply
- bins
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B19/00—Liquid-phase epitaxial-layer growth
- C30B19/06—Reaction chambers; Boats for supporting the melt; Substrate holders
- C30B19/063—Sliding boat system
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B19/00—Liquid-phase epitaxial-layer growth
- C30B19/10—Controlling or regulating
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CA000448169A CA1201220A (fr) | 1984-02-23 | 1984-02-23 | Cuvette double d'epitaxie a partir d'une phase liquide |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CA000448169A CA1201220A (fr) | 1984-02-23 | 1984-02-23 | Cuvette double d'epitaxie a partir d'une phase liquide |
Publications (1)
Publication Number | Publication Date |
---|---|
CA1201220A true CA1201220A (fr) | 1986-02-25 |
Family
ID=4127263
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA000448169A Expired CA1201220A (fr) | 1984-02-23 | 1984-02-23 | Cuvette double d'epitaxie a partir d'une phase liquide |
Country Status (1)
Country | Link |
---|---|
CA (1) | CA1201220A (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1998053123A1 (fr) * | 1997-05-21 | 1998-11-26 | Commissariat A L'energie Atomique | NACELLE D'EPITAXIE ET PROCEDE POUR DEPOT D'UNE COUCHE DE CdHgTe PAR EPITAXIE EN PHASE LIQUIDE |
-
1984
- 1984-02-23 CA CA000448169A patent/CA1201220A/fr not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1998053123A1 (fr) * | 1997-05-21 | 1998-11-26 | Commissariat A L'energie Atomique | NACELLE D'EPITAXIE ET PROCEDE POUR DEPOT D'UNE COUCHE DE CdHgTe PAR EPITAXIE EN PHASE LIQUIDE |
FR2763608A1 (fr) * | 1997-05-21 | 1998-11-27 | Commissariat Energie Atomique | Nacelle d'epitaxie pour depot d'une couche de cdhgte par epitaxie en phase liquide sur un heterosubstrat et procede de depot de cdhgte sur un heterosubstrat utilisant cette nacelle |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MKEX | Expiry |