CA1196398A - Piezoelectric resonator - Google Patents
Piezoelectric resonatorInfo
- Publication number
- CA1196398A CA1196398A CA000432077A CA432077A CA1196398A CA 1196398 A CA1196398 A CA 1196398A CA 000432077 A CA000432077 A CA 000432077A CA 432077 A CA432077 A CA 432077A CA 1196398 A CA1196398 A CA 1196398A
- Authority
- CA
- Canada
- Prior art keywords
- ceramic substrate
- groove
- piezoelectric ceramic
- piezoelectric
- main electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Abstract
ABSTRACT OF THE DISCLOSURE
This disclosure is directed to an improved strip type or rectangular type piezoelectric resonator utilizing length mode vibration, which includes a piezoelectric ceramic substrate, and first and second main electrode faces formed on opposite surfaces of the piezoelectric ceramic substrate, and which is characterized in that there is further provided a groove which is formed in one of said first and second main electrode faces so as to extend over an entire length of the piezoelectric ceramic substrate in a direction parallel to the longitudinal direction thereof.
The groove is set to have a depth in the range of 30 to 70%
of the thickness of the piezoelectric substrate.
This disclosure is directed to an improved strip type or rectangular type piezoelectric resonator utilizing length mode vibration, which includes a piezoelectric ceramic substrate, and first and second main electrode faces formed on opposite surfaces of the piezoelectric ceramic substrate, and which is characterized in that there is further provided a groove which is formed in one of said first and second main electrode faces so as to extend over an entire length of the piezoelectric ceramic substrate in a direction parallel to the longitudinal direction thereof.
The groove is set to have a depth in the range of 30 to 70%
of the thickness of the piezoelectric substrate.
Description
" ~ 963~8 02 BACKGROUND OF THE I~VENTION
03 The present invention generally relates 0~ to a piezoelectric resonator and more particularly, 05 to an improved strip type or rectangular type 06 piezoelectric resonator for use, ~or example, in 07 oscillators, electrical filters and the like.
08 With the recent progress in the field of 09 integrated circuits, inexpensive cera~ic resona~ors have been widely utilized for the actual 11 applicationsl and normally, disc type or rectangular 12 plate type piezoelectric resonators are generally 13 employed for the purpose in a range of resonance 14 frequencies rom 100 KHZ up to 1 MHZ so as -to utilize the expansion mode of vibration thereof.
16 BRIEF DESCRIPTIO~ OF THE DRAWINGS
17 Objects and features of the present 18 invention will become apparent from the following 19 description taken in conjunction with the preferred embodiment thereof with reference to the 21 accompanying drawings, in which:
22 Figure 1 is a perspective view showing a 23 construction of a conventional rectangular plate 24 type piezoelectric resonator (already referred to), Figure 2 is a perspective view showing a 26 construction of a conventional strip type 27 piezoelectric resonator (already referred to), 28 Figure 3 is a perspective view showing a 29 strip type piezoelectric resonator according to one preferred embodiment of the present invention, 31 Figure 4 is a graph showing a state of 32 resonance for the strip type piezoelectric resonator 33 according to the present invention, and 34 Figure 5 is a graph showing variations in the characteristics of the strip type 36 piezoelectric resonator according to the present 37 invention when depth of the groove is altered.
.;. ~,.
63~3 01 _ ~ _ 02 ~s shown in ~igure 1, the known 03 rectangular plate type piezoelectric resonator 04 referred to above includes, for example, a 05 piezoelectric ceramic substrate 1, main electrode 06 faces 2 and 3 ormed on the opposite suraces of 07 said piezoelectric ceramic substrate 1, and lead 08 wires 4 respectively connected to said main 09 electrode faces 2 and 3. However, in the rectangular plate type piezoelectric resonator as 11 described above or disc type piezoelectric resonator 12 conventionally employed, there have been such 13 disadvantages that -they are generally large in size, 14 and moreover, tend to produce spurious waves due to thickness mode vibration based on the fundamental 16 wave.
17 Meanwhile, as shown in Figure 2, there 18 has also been conventionally available a strip type 19 piezoelectric resonator utilizing length mode vibration based on the fundamental wave, and having 21 a construction generally similar to that of the 22 rectangular plate type piezoelectric resonator in 23 Figure 1 as represented by like re~erence 24 numerals. Although advantageous in that the dimensions are reduced as compared with the 26 rectangular plate type or disc type piezoelectric 27 resonator, the conventional strip type piezoelectric 28 resonator as described above still has disadvantages 29 in that undesirable spurious responses due to width mode vibration and thicXness mode vibration tend to 31 be produced.
33 Accordingly, an essential object of the 34 present invention is to provide an improved strip type piezoelectric resonator in which undesirable 36 spurious waves due to width mode vibra~ion and 37 thickness mode vibration are suppressed by formin~ a ,.'.'`,'~
39~
01 _ 3 _ 02 groove on one of opposite main electrode faces of 03 the resonator, in a direction parallel to the 04 longitudinal direction thereof, with a depth of said 05 groove being set at 30 to 70~ of a thic~ness of said 06 piezoelectric ceramic substrate so as to 07 substantially eliminate the disadvantages inherent 08 in the conventional piezoelectric resonators of this 09 kind.
Another important object of the present 11 invention is to provide a strip type piezoelectric 12 resonator of the above described type, which is 13 simple in construction and stable in functioning at 14 high reliability, and can be readily manufactured on a large scale at low cost.
16 In accomplishing these and other 17 objects, according to one preferred embodiment of 18 the present invention, there is provided a strip 19 type piezoelectric resonator utilizing lengthwise 2C mode vibration, which includes a piezoelectric 21 ceramic substrate, and first and second main 22 electrode faces formed on opposite surfaces of the 23 piezoelectric ceramic substrate, and is 24 characterized in that there is -further provided a groove which is formed in one of said first and 26 second main electrode Eaces so as to extend over an 27 entire length of the piezoelectric ceramic substrate 28 in a direction parallel to the longitudinal 29 direction thereof. The groove is set to have a depth in the range of 30 to 70% of the thickness of 31 said piezoelectric ceramic substrate.
32 By arrangement according to the present 33 invention as described above, an improved strip type 34 piezoelectric resonator with suppressed spurious responses has been advantageously presented through 36 simple construction.
, ~ ..
3~3~
02 DETAILED DESCRIPTIO~ OF THE INVENTIO~
03 Before the description of the present 04 invention proceeds, it is to be noted that like 05 par-ts are designated by like reference numerals 06 throughout the accompanying drawings.
07 Referring now to the drawings, there is 08 shown in Figure 3 a strip type piezoelectric 09 resonator according to one preferred embodiment of the present invention, which generally includes a 11 piezoelectric ceramic substrate 10, and upper and 12 lower main electrode faces 10A and 10B formed on 13 opposite surfaces of the substrate 10. In one 14 surface of r.~,. j 7`
~9~;3~B
the piezoelectric ceramic substrate 10 at the side of the upper main electrode face 10~, there is formed a groove 11 which extends over an entire length of the substrate 10 in a direction parallel to the longitudinal direction of said substrate 10, and is located at a center in a widthwise direction of said upper main electrode face lOA or said substrate 10 as illustrated. By the above groove 11, the upper main electrode face lOA of the substrate 10 is divided into one region 12 and the other region 13, while the lower main electrode face lOB is formed on the other entire surface of the substrate 10 in the similar manner as in the conventional arrangement of Fiys. 1 or 2.
For the actual use of the piezoelectric resonator of Fig. 3 as described so far, the rsspective regions 12 and 13 on the upper main electrode ~ace lOA divided by the groove 11 are short-circuited to each other so as to be connected to a lead wire 14 for the upper side, while a lead wire 4 is connected to the lower main electrode face lOB in the similar manner as in the conventional arrangement of Fig. 1 or 2, and thus, a two terminal type resonator is constituted.
More specifically, by way of example, the piezoelectric ceramic substrate 10 is set in dimensions to be 4.65 mm in length, 0.8 mm in width, and 0.3 mm in thickness, and the yroove 11 has a width of 0.15 Inm and a depth of 0.15 mm, and the oscillation frequency of the strip 3~8 type pie~.oelectric resonator o Fig. 3 is ~O0 K~IZ when used as an oscillator.
Subsequently, in the piezoelectric resonator havin~ the construction as shown in Fig. 3, on thc a~sumption that the depth of the groove 11 is represented by d, and the thickness of the piezoelectric ceramic substrate 10 is denoted by t, measurements were taken on the characteristics thereof, with the value d/t employed as a parameter. As shown in Fig. 4, response level was represented as a level difference between resonant poin~ and anti-resonant point.
As a result of the above measurements, it has been found as shown in Fig. 5 that, as the value d/t increases, the main response gradually decreRses, whereas the spurious responses due to thickness mode vibration and width mode vibration based on the fundamental wave, which were approximat:ely the same magnitude as that of the main response in the absence of the groove ll, are rapidly reduced with the increase of the value of d/t. Moreover, width mode vibration by third harmonics ~first excited overtone of width mode) is gradually increased, following tlle increase of the value d/t.
Normally, for the spurious oscillation to be suppressed, it is necessary that the spurious waves are reduced to less than half of the main response, and in order to satisfy the above requirement in the result of mcasurement in Fig. 5, d/t must be larger than 30%. On the 3~
other hand, since the strength of the piezoelectric ceramic substrate 10 tends to b~ reduced due to the increase of d/t, with a simultaneous reduction of the main response, the upper limit o, d/t is at 70%.
Accordingly, as is seen from the above description, the depth oE the groove 11 to be provided according to the present invention should be in the range of 30 to 70% of the thickness of the piezoelectric ceramic substrate.
In the arrangement of Fig. 3, although the groove 11 is provided in the upper main electrode face lOA, it is needless to say that such groove 11 may be so modified as to be provided in the lower main electrode face lOs to obtain the same effect.
Furthermore, in the foregoing embodiment, although the groove 11 is described as formed at ~he center in the widthwise direction of the upper main electrode surface lOA, results of measurements generally in the similar trend as those of Fig. 5 have been obtained even when said groove 11 is deviated in position to either one side of said electrode surface lOA.
It should be noted here -that, although the arrangement of the present invention is prepared as a resonator, it is bes-t suited to applications to an oscillator.
For manufacturing the strip type piezoelectric resonator according to the present invention in an efficient 3633~ -mannerr processings may be effected in such steps as forming electrode layers over the entire opposite surfaces, i.e.
upper and lower surfaces of a large piezoelectric ceramic plate having a predetermined thickness, subsequently forming grooves each having the predetermined depth in one of the electrode formed surfaces at equal intervals, and finally cutting off the large piezoelectric ceramic plate thus processed into dimensions o~ individual piezoelectric resonators as shown in Fig. 3.
As is clear from the foregoing description, according to the present invention, since the piezoelectric resonator is constituted by forming the groove having the depth at 30 to 70~ of the thickness of the strip type piezoelectric ceramic substrate in one of the main electrode faces of the strip type piezoelectric ceramic substrate in a direction parallel to the longitudinal direction thereof, spurious waves due to width mode vibration and thickness mode vibration may be suppressed to less than 40 dB with respect to the main response of 65 dB, and thus, the piezoelectric resonator free from generation of spurious response has been advantageously presented.
Although the present invention has been fully described by way of example with reference to the accompanying drawings, it is to be noted here that various changcs and modifications will be apparent to those skilled in the art. Therefore, unless otherwise such changes and modifications depart from the scope of the present invention, they should be construed as included therein.
03 The present invention generally relates 0~ to a piezoelectric resonator and more particularly, 05 to an improved strip type or rectangular type 06 piezoelectric resonator for use, ~or example, in 07 oscillators, electrical filters and the like.
08 With the recent progress in the field of 09 integrated circuits, inexpensive cera~ic resona~ors have been widely utilized for the actual 11 applicationsl and normally, disc type or rectangular 12 plate type piezoelectric resonators are generally 13 employed for the purpose in a range of resonance 14 frequencies rom 100 KHZ up to 1 MHZ so as -to utilize the expansion mode of vibration thereof.
16 BRIEF DESCRIPTIO~ OF THE DRAWINGS
17 Objects and features of the present 18 invention will become apparent from the following 19 description taken in conjunction with the preferred embodiment thereof with reference to the 21 accompanying drawings, in which:
22 Figure 1 is a perspective view showing a 23 construction of a conventional rectangular plate 24 type piezoelectric resonator (already referred to), Figure 2 is a perspective view showing a 26 construction of a conventional strip type 27 piezoelectric resonator (already referred to), 28 Figure 3 is a perspective view showing a 29 strip type piezoelectric resonator according to one preferred embodiment of the present invention, 31 Figure 4 is a graph showing a state of 32 resonance for the strip type piezoelectric resonator 33 according to the present invention, and 34 Figure 5 is a graph showing variations in the characteristics of the strip type 36 piezoelectric resonator according to the present 37 invention when depth of the groove is altered.
.;. ~,.
63~3 01 _ ~ _ 02 ~s shown in ~igure 1, the known 03 rectangular plate type piezoelectric resonator 04 referred to above includes, for example, a 05 piezoelectric ceramic substrate 1, main electrode 06 faces 2 and 3 ormed on the opposite suraces of 07 said piezoelectric ceramic substrate 1, and lead 08 wires 4 respectively connected to said main 09 electrode faces 2 and 3. However, in the rectangular plate type piezoelectric resonator as 11 described above or disc type piezoelectric resonator 12 conventionally employed, there have been such 13 disadvantages that -they are generally large in size, 14 and moreover, tend to produce spurious waves due to thickness mode vibration based on the fundamental 16 wave.
17 Meanwhile, as shown in Figure 2, there 18 has also been conventionally available a strip type 19 piezoelectric resonator utilizing length mode vibration based on the fundamental wave, and having 21 a construction generally similar to that of the 22 rectangular plate type piezoelectric resonator in 23 Figure 1 as represented by like re~erence 24 numerals. Although advantageous in that the dimensions are reduced as compared with the 26 rectangular plate type or disc type piezoelectric 27 resonator, the conventional strip type piezoelectric 28 resonator as described above still has disadvantages 29 in that undesirable spurious responses due to width mode vibration and thicXness mode vibration tend to 31 be produced.
33 Accordingly, an essential object of the 34 present invention is to provide an improved strip type piezoelectric resonator in which undesirable 36 spurious waves due to width mode vibra~ion and 37 thickness mode vibration are suppressed by formin~ a ,.'.'`,'~
39~
01 _ 3 _ 02 groove on one of opposite main electrode faces of 03 the resonator, in a direction parallel to the 04 longitudinal direction thereof, with a depth of said 05 groove being set at 30 to 70~ of a thic~ness of said 06 piezoelectric ceramic substrate so as to 07 substantially eliminate the disadvantages inherent 08 in the conventional piezoelectric resonators of this 09 kind.
Another important object of the present 11 invention is to provide a strip type piezoelectric 12 resonator of the above described type, which is 13 simple in construction and stable in functioning at 14 high reliability, and can be readily manufactured on a large scale at low cost.
16 In accomplishing these and other 17 objects, according to one preferred embodiment of 18 the present invention, there is provided a strip 19 type piezoelectric resonator utilizing lengthwise 2C mode vibration, which includes a piezoelectric 21 ceramic substrate, and first and second main 22 electrode faces formed on opposite surfaces of the 23 piezoelectric ceramic substrate, and is 24 characterized in that there is -further provided a groove which is formed in one of said first and 26 second main electrode Eaces so as to extend over an 27 entire length of the piezoelectric ceramic substrate 28 in a direction parallel to the longitudinal 29 direction thereof. The groove is set to have a depth in the range of 30 to 70% of the thickness of 31 said piezoelectric ceramic substrate.
32 By arrangement according to the present 33 invention as described above, an improved strip type 34 piezoelectric resonator with suppressed spurious responses has been advantageously presented through 36 simple construction.
, ~ ..
3~3~
02 DETAILED DESCRIPTIO~ OF THE INVENTIO~
03 Before the description of the present 04 invention proceeds, it is to be noted that like 05 par-ts are designated by like reference numerals 06 throughout the accompanying drawings.
07 Referring now to the drawings, there is 08 shown in Figure 3 a strip type piezoelectric 09 resonator according to one preferred embodiment of the present invention, which generally includes a 11 piezoelectric ceramic substrate 10, and upper and 12 lower main electrode faces 10A and 10B formed on 13 opposite surfaces of the substrate 10. In one 14 surface of r.~,. j 7`
~9~;3~B
the piezoelectric ceramic substrate 10 at the side of the upper main electrode face 10~, there is formed a groove 11 which extends over an entire length of the substrate 10 in a direction parallel to the longitudinal direction of said substrate 10, and is located at a center in a widthwise direction of said upper main electrode face lOA or said substrate 10 as illustrated. By the above groove 11, the upper main electrode face lOA of the substrate 10 is divided into one region 12 and the other region 13, while the lower main electrode face lOB is formed on the other entire surface of the substrate 10 in the similar manner as in the conventional arrangement of Fiys. 1 or 2.
For the actual use of the piezoelectric resonator of Fig. 3 as described so far, the rsspective regions 12 and 13 on the upper main electrode ~ace lOA divided by the groove 11 are short-circuited to each other so as to be connected to a lead wire 14 for the upper side, while a lead wire 4 is connected to the lower main electrode face lOB in the similar manner as in the conventional arrangement of Fig. 1 or 2, and thus, a two terminal type resonator is constituted.
More specifically, by way of example, the piezoelectric ceramic substrate 10 is set in dimensions to be 4.65 mm in length, 0.8 mm in width, and 0.3 mm in thickness, and the yroove 11 has a width of 0.15 Inm and a depth of 0.15 mm, and the oscillation frequency of the strip 3~8 type pie~.oelectric resonator o Fig. 3 is ~O0 K~IZ when used as an oscillator.
Subsequently, in the piezoelectric resonator havin~ the construction as shown in Fig. 3, on thc a~sumption that the depth of the groove 11 is represented by d, and the thickness of the piezoelectric ceramic substrate 10 is denoted by t, measurements were taken on the characteristics thereof, with the value d/t employed as a parameter. As shown in Fig. 4, response level was represented as a level difference between resonant poin~ and anti-resonant point.
As a result of the above measurements, it has been found as shown in Fig. 5 that, as the value d/t increases, the main response gradually decreRses, whereas the spurious responses due to thickness mode vibration and width mode vibration based on the fundamental wave, which were approximat:ely the same magnitude as that of the main response in the absence of the groove ll, are rapidly reduced with the increase of the value of d/t. Moreover, width mode vibration by third harmonics ~first excited overtone of width mode) is gradually increased, following tlle increase of the value d/t.
Normally, for the spurious oscillation to be suppressed, it is necessary that the spurious waves are reduced to less than half of the main response, and in order to satisfy the above requirement in the result of mcasurement in Fig. 5, d/t must be larger than 30%. On the 3~
other hand, since the strength of the piezoelectric ceramic substrate 10 tends to b~ reduced due to the increase of d/t, with a simultaneous reduction of the main response, the upper limit o, d/t is at 70%.
Accordingly, as is seen from the above description, the depth oE the groove 11 to be provided according to the present invention should be in the range of 30 to 70% of the thickness of the piezoelectric ceramic substrate.
In the arrangement of Fig. 3, although the groove 11 is provided in the upper main electrode face lOA, it is needless to say that such groove 11 may be so modified as to be provided in the lower main electrode face lOs to obtain the same effect.
Furthermore, in the foregoing embodiment, although the groove 11 is described as formed at ~he center in the widthwise direction of the upper main electrode surface lOA, results of measurements generally in the similar trend as those of Fig. 5 have been obtained even when said groove 11 is deviated in position to either one side of said electrode surface lOA.
It should be noted here -that, although the arrangement of the present invention is prepared as a resonator, it is bes-t suited to applications to an oscillator.
For manufacturing the strip type piezoelectric resonator according to the present invention in an efficient 3633~ -mannerr processings may be effected in such steps as forming electrode layers over the entire opposite surfaces, i.e.
upper and lower surfaces of a large piezoelectric ceramic plate having a predetermined thickness, subsequently forming grooves each having the predetermined depth in one of the electrode formed surfaces at equal intervals, and finally cutting off the large piezoelectric ceramic plate thus processed into dimensions o~ individual piezoelectric resonators as shown in Fig. 3.
As is clear from the foregoing description, according to the present invention, since the piezoelectric resonator is constituted by forming the groove having the depth at 30 to 70~ of the thickness of the strip type piezoelectric ceramic substrate in one of the main electrode faces of the strip type piezoelectric ceramic substrate in a direction parallel to the longitudinal direction thereof, spurious waves due to width mode vibration and thickness mode vibration may be suppressed to less than 40 dB with respect to the main response of 65 dB, and thus, the piezoelectric resonator free from generation of spurious response has been advantageously presented.
Although the present invention has been fully described by way of example with reference to the accompanying drawings, it is to be noted here that various changcs and modifications will be apparent to those skilled in the art. Therefore, unless otherwise such changes and modifications depart from the scope of the present invention, they should be construed as included therein.
Claims
The embodiments of the invention in which an exclusive property or privilege is claimed are defined as follows:
(1) A strip type piezoelectric resonator utilizing length mode vibration, which comprises a piezoelectric ceramic substrate, and first and second main electrode faces formed on opposite surfaces of the piezoelectric ceramic substrate, the improvement comprising a groove which is formed on one of said first and second main electrode faces so as to extend over an entire length of the piezoelectric ceramic substrate in a direction parallel to the longitudinal direction thereof, said groove being set to have a depth in the range of 30 to 70% of the thickness of said piezoelectric ceramic substrate.
(2) A strip type piezoelectric resonator as claimed in Claim 1, wherein said groove is formed at a center in a widthwise direction of the piezoelectric ceramic substrate to divide the one of said first and second main electrode faces into two regions.
(3) A strip type piezoelectric resonator as claimed in Claim 1, wherein said piezoelectric ceramic substrate is set to be 4.65 mm in length, 0.8 mm in width and 0.3 mm in thickness, and said groove is set to be 0.15 mm in width and 0.15 mm in depth, said piezoelectric resonator having a frequency at 400 KHZ when used as an oscillator.
(4) A strip type piezoelectric resonator as claimed in Claim 1, wherein one region and the other region in the one of said first and second main electrode faces divided by said groove are short-circuited to each other.
(5) A process of manufacturing a strip type piezoelectric resonator utilizing length mode vibration, which comprises a piezoelectric ceramic substrate, and first and second main electrode faces formed on opposite surfaces of the piezoelectric ceramic substrate, and is characterized in that there is further provided a groove which is formed on one of said first and second main electrode faces so as to extend over an entire length of the piezoelectric ceramic substrate in a direction parallel to the longitudinal direction thereof, said groove being set to have a depth in the range of 30 to 70% of the thickness of said piezoelectric substrate, said process comprising the steps of forming electrode layers for said first and second main electrode faces over entire opposite surfaces of a large area piezoelectric ceramic plate having a predetermined thickness, subsequently forming groove rows each having predetermined depth for said groove in one of said electrode layers at equal intervals, and finally cutting off said large area piezoelectric ceramic substrate thus processed into the dimensions of said individual strip type piezoelectric resonators.
(1) A strip type piezoelectric resonator utilizing length mode vibration, which comprises a piezoelectric ceramic substrate, and first and second main electrode faces formed on opposite surfaces of the piezoelectric ceramic substrate, the improvement comprising a groove which is formed on one of said first and second main electrode faces so as to extend over an entire length of the piezoelectric ceramic substrate in a direction parallel to the longitudinal direction thereof, said groove being set to have a depth in the range of 30 to 70% of the thickness of said piezoelectric ceramic substrate.
(2) A strip type piezoelectric resonator as claimed in Claim 1, wherein said groove is formed at a center in a widthwise direction of the piezoelectric ceramic substrate to divide the one of said first and second main electrode faces into two regions.
(3) A strip type piezoelectric resonator as claimed in Claim 1, wherein said piezoelectric ceramic substrate is set to be 4.65 mm in length, 0.8 mm in width and 0.3 mm in thickness, and said groove is set to be 0.15 mm in width and 0.15 mm in depth, said piezoelectric resonator having a frequency at 400 KHZ when used as an oscillator.
(4) A strip type piezoelectric resonator as claimed in Claim 1, wherein one region and the other region in the one of said first and second main electrode faces divided by said groove are short-circuited to each other.
(5) A process of manufacturing a strip type piezoelectric resonator utilizing length mode vibration, which comprises a piezoelectric ceramic substrate, and first and second main electrode faces formed on opposite surfaces of the piezoelectric ceramic substrate, and is characterized in that there is further provided a groove which is formed on one of said first and second main electrode faces so as to extend over an entire length of the piezoelectric ceramic substrate in a direction parallel to the longitudinal direction thereof, said groove being set to have a depth in the range of 30 to 70% of the thickness of said piezoelectric substrate, said process comprising the steps of forming electrode layers for said first and second main electrode faces over entire opposite surfaces of a large area piezoelectric ceramic plate having a predetermined thickness, subsequently forming groove rows each having predetermined depth for said groove in one of said electrode layers at equal intervals, and finally cutting off said large area piezoelectric ceramic substrate thus processed into the dimensions of said individual strip type piezoelectric resonators.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10464682U JPS599628U (en) | 1982-07-09 | 1982-07-09 | piezoelectric resonator |
| JP104646/1982 | 1982-07-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1196398A true CA1196398A (en) | 1985-11-05 |
Family
ID=14386220
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000432077A Expired CA1196398A (en) | 1982-07-09 | 1983-07-08 | Piezoelectric resonator |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPS599628U (en) |
| CA (1) | CA1196398A (en) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5327740B2 (en) * | 1972-09-27 | 1978-08-10 | ||
| JPS4963392A (en) * | 1972-10-20 | 1974-06-19 | ||
| JPS5327740U (en) * | 1976-08-18 | 1978-03-09 |
-
1982
- 1982-07-09 JP JP10464682U patent/JPS599628U/en active Granted
-
1983
- 1983-07-08 CA CA000432077A patent/CA1196398A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS599628U (en) | 1984-01-21 |
| JPH0246104Y2 (en) | 1990-12-05 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKEC | Expiry (correction) | ||
| MKEX | Expiry |