CA1168765A - Methode de fabrication de transistors a canal court - Google Patents

Methode de fabrication de transistors a canal court

Info

Publication number
CA1168765A
CA1168765A CA000374257A CA374257A CA1168765A CA 1168765 A CA1168765 A CA 1168765A CA 000374257 A CA000374257 A CA 000374257A CA 374257 A CA374257 A CA 374257A CA 1168765 A CA1168765 A CA 1168765A
Authority
CA
Canada
Prior art keywords
layer
oxide layer
oxide
silicon dioxide
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA000374257A
Other languages
English (en)
Inventor
Hyman J. Levinstein
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Application granted granted Critical
Publication of CA1168765A publication Critical patent/CA1168765A/fr
Expired legal-status Critical Current

Links

Landscapes

  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Electrodes Of Semiconductors (AREA)
CA000374257A 1980-04-17 1981-03-31 Methode de fabrication de transistors a canal court Expired CA1168765A (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US14112180A 1980-04-17 1980-04-17
US141,121 1980-04-17

Publications (1)

Publication Number Publication Date
CA1168765A true CA1168765A (fr) 1984-06-05

Family

ID=22494250

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000374257A Expired CA1168765A (fr) 1980-04-17 1981-03-31 Methode de fabrication de transistors a canal court

Country Status (1)

Country Link
CA (1) CA1168765A (fr)

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Legal Events

Date Code Title Description
MKEX Expiry