CA1163022A - Apparatus for recording pulse height distribution in a fluorescent x-ray film thickness meter - Google Patents
Apparatus for recording pulse height distribution in a fluorescent x-ray film thickness meterInfo
- Publication number
- CA1163022A CA1163022A CA000395563A CA395563A CA1163022A CA 1163022 A CA1163022 A CA 1163022A CA 000395563 A CA000395563 A CA 000395563A CA 395563 A CA395563 A CA 395563A CA 1163022 A CA1163022 A CA 1163022A
- Authority
- CA
- Canada
- Prior art keywords
- staircase
- signal
- discriminator
- pulse height
- fluorescent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
- G01B15/02—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D1/00—Measuring arrangements giving results other than momentary value of variable, of general application
- G01D1/14—Measuring arrangements giving results other than momentary value of variable, of general application giving a distribution function of a value, i.e. number of times the value comes within specified ranges of amplitude
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/265—Contactless testing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/07—Investigating materials by wave or particle radiation secondary emission
- G01N2223/076—X-ray fluorescence
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Electromagnetism (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
Abstract
ABSTRACT
An apparatus for recording pulse height distribution of X-rays detected in a fluorescent X-ray apparatus in which a basically single channel analysis circuit is switched by means of an analog staircase signal so as to produce an output for each step of the staircase and thereby effectively give multi-channel analysis of pulse heights.
An apparatus for recording pulse height distribution of X-rays detected in a fluorescent X-ray apparatus in which a basically single channel analysis circuit is switched by means of an analog staircase signal so as to produce an output for each step of the staircase and thereby effectively give multi-channel analysis of pulse heights.
Description
APPARATUS FOR R~CORDING PULSE HEIGHT DISTRIB~TION IN A FLUORESCENT
X-RAY FILM THICRNESS METER
The present device relates to an apparatus for recording pulse helght distribution in a fluorescent X-ray f~lm thickness me~er, and more particularly to an i~proved and novel device in which the analysis of the pulse height distribution can be performed in a single channel circuit by applying a stalrcase signal, In the prior art, analysi~ of pulse height distribu~ion has required scannlng and the provision of a variable resistor at the input of a single channel circuit. Alternatively, a multi-channel device has been u3ed.
In the conventional single channel circuit arrangement, since the variable resistor i8 controlled either manually or by a motor, it is difficult to carry out the measurement accurately or to increase such accuracy.
An ob~ect of the present disclosure is to provide an effective means for eliminating the above described drawbacks. The device here disclosed applies a respective analog ~taircase signal to respective input~ of upper limlt and lower limit discrlminators connected to a comparator gate circuit to carry out the multi-channel analysis.
Specific embodiments of the invention will now be described having reference to the accompanying drawings in which:
Fig. 1 is a diagrammatic side view of an X-ray apparatus for measuring film thickness by X-ray fluorescence, Fig, 2 i8 an electrical circuit diagram for obtalning a pulse height information from the detector of the apparatus oP Fig. 1, Fig. 3 is a graph showing a curve of pulse height distribution obtained in a typical observation, and Figs. 4 (A), 4 (B), 4 (C), and 4 (D) illustrates signals obtained in various parts of the circuit of Fig. 2.
. ~
3~
An apparatus for recording pulse height distribution ln a fluorescent X-ray film thlckness meter wlll now be described in more detail in con~unction with the at~ached drawings. An X-ray tube 1 delivers X-radiation (shown by the broken line in Fig. 1) through a collimator 2 to a sample 3. Fluorescing X-rays from the sample 3 are reused in a detector 4. An output signal from the detector 4 i8 applied to the input terminal 5 shown in Fig. 2 which feeds the input of an upper limit discriminator 6 and a lower limit discriminator 7. A
staircase analog signal from respective signal generators 8 and 9 is applied to each other input terminal of the discriminators 6 and 7. The outputs from the discriminators 6 and 7 are applied to the inputs of comparator gate circuit 10, whose output in ~urn is fed to a counter 11 and a display device 12. The output from the analog signal generator 9 is applied to the display 12.
The operation of the apparatus is as follows.
The signal from the detector 4 is shown in Fig. 4 ~A)~ When this signal is applied to the differential amplifiers 6 and 7 (which act as level discriminators), each pulse which has a level equal to or greater than LL
(lower llmit) shown at (B) in Fig. 4 is passed to the comparator ate circuit 10 by the lower limit discriminator 6, and each pulse having a level equal to or greater than UL (upper limit) shown at (C) Ln Fig. 4 is passed to the comparator gate circuit 10 by the upper Limit discrimlnator 7. The upper and lower limlts are determined in each instance by the level of the staircase signal present on the respective other input terminalc of di6criminators 6 and 7 at that timaO
The signal shown at (D) in Fig. 4 is produced by the comparator gate circuit 10 which suppresses all pulses exceeding the upper limit and passes there~ore only those of amplitude between the lower and upper limits. The output of circult 10 is passed to the counter 11 and also to the display 12.
1~3~2 Let us assume that this first reading has been taken with the staircase signals synchronized and at their first ~teps. At a later time instant the staircase signals will present their second steps to the respectlve discrimlnators 6 and 7, thus setting new lower and uppar limits. A second pulse spectrum will be obtained. Later the third steps of the staircases will determine the next lower and upper limlts and so on. By feeding at least one of the synchronized staircases to the display 12 the pulse amplitude range belng measured at each instant can be lndlcated.
Thus by switchlng this single channel apparatus using the stalrcase signals, multi-channel analysis is performed and the pulse height distribution curve shown in Fig. 3 can be obtalned.
The pulse height distributlon curve shown in Fig. 3 ls the result of analysis for a sample of copper plated with silver. In this curve, the lower lntensity portion is due to X-ray fluorescence of Cu and that at high intensity is due to X-ray fluorescence of Ag.
Thls apparatus therefore allows the productlon of a pulse height dlstribution record automatically from a circuit of little greater complexity than a slngle channel device.
X-RAY FILM THICRNESS METER
The present device relates to an apparatus for recording pulse helght distribution in a fluorescent X-ray f~lm thickness me~er, and more particularly to an i~proved and novel device in which the analysis of the pulse height distribution can be performed in a single channel circuit by applying a stalrcase signal, In the prior art, analysi~ of pulse height distribu~ion has required scannlng and the provision of a variable resistor at the input of a single channel circuit. Alternatively, a multi-channel device has been u3ed.
In the conventional single channel circuit arrangement, since the variable resistor i8 controlled either manually or by a motor, it is difficult to carry out the measurement accurately or to increase such accuracy.
An ob~ect of the present disclosure is to provide an effective means for eliminating the above described drawbacks. The device here disclosed applies a respective analog ~taircase signal to respective input~ of upper limlt and lower limit discrlminators connected to a comparator gate circuit to carry out the multi-channel analysis.
Specific embodiments of the invention will now be described having reference to the accompanying drawings in which:
Fig. 1 is a diagrammatic side view of an X-ray apparatus for measuring film thickness by X-ray fluorescence, Fig, 2 i8 an electrical circuit diagram for obtalning a pulse height information from the detector of the apparatus oP Fig. 1, Fig. 3 is a graph showing a curve of pulse height distribution obtained in a typical observation, and Figs. 4 (A), 4 (B), 4 (C), and 4 (D) illustrates signals obtained in various parts of the circuit of Fig. 2.
. ~
3~
An apparatus for recording pulse height distribution ln a fluorescent X-ray film thlckness meter wlll now be described in more detail in con~unction with the at~ached drawings. An X-ray tube 1 delivers X-radiation (shown by the broken line in Fig. 1) through a collimator 2 to a sample 3. Fluorescing X-rays from the sample 3 are reused in a detector 4. An output signal from the detector 4 i8 applied to the input terminal 5 shown in Fig. 2 which feeds the input of an upper limit discriminator 6 and a lower limit discriminator 7. A
staircase analog signal from respective signal generators 8 and 9 is applied to each other input terminal of the discriminators 6 and 7. The outputs from the discriminators 6 and 7 are applied to the inputs of comparator gate circuit 10, whose output in ~urn is fed to a counter 11 and a display device 12. The output from the analog signal generator 9 is applied to the display 12.
The operation of the apparatus is as follows.
The signal from the detector 4 is shown in Fig. 4 ~A)~ When this signal is applied to the differential amplifiers 6 and 7 (which act as level discriminators), each pulse which has a level equal to or greater than LL
(lower llmit) shown at (B) in Fig. 4 is passed to the comparator ate circuit 10 by the lower limit discriminator 6, and each pulse having a level equal to or greater than UL (upper limit) shown at (C) Ln Fig. 4 is passed to the comparator gate circuit 10 by the upper Limit discrimlnator 7. The upper and lower limlts are determined in each instance by the level of the staircase signal present on the respective other input terminalc of di6criminators 6 and 7 at that timaO
The signal shown at (D) in Fig. 4 is produced by the comparator gate circuit 10 which suppresses all pulses exceeding the upper limit and passes there~ore only those of amplitude between the lower and upper limits. The output of circult 10 is passed to the counter 11 and also to the display 12.
1~3~2 Let us assume that this first reading has been taken with the staircase signals synchronized and at their first ~teps. At a later time instant the staircase signals will present their second steps to the respectlve discrimlnators 6 and 7, thus setting new lower and uppar limits. A second pulse spectrum will be obtained. Later the third steps of the staircases will determine the next lower and upper limlts and so on. By feeding at least one of the synchronized staircases to the display 12 the pulse amplitude range belng measured at each instant can be lndlcated.
Thus by switchlng this single channel apparatus using the stalrcase signals, multi-channel analysis is performed and the pulse height distribution curve shown in Fig. 3 can be obtalned.
The pulse height distributlon curve shown in Fig. 3 ls the result of analysis for a sample of copper plated with silver. In this curve, the lower lntensity portion is due to X-ray fluorescence of Cu and that at high intensity is due to X-ray fluorescence of Ag.
Thls apparatus therefore allows the productlon of a pulse height dlstribution record automatically from a circuit of little greater complexity than a slngle channel device.
Claims
OR PRIVILEGE IS CLAIMED ARE DEFINED AS FOLLOWS:
1. An apparatus for recording pulse height distribution of fluorescing X-rays in a film thickness meter, comprising:
a pair of analog signal generators for generating a staircase signal;
an upper limit discriminator and a lower limit discriminator, each having a first input terminal for a respective staircase signal from a respective said signal generator;
input means for receiving a detected signal from a fluorescent X-ray detector for applying said detected signal to a respective second input terminal of said upper limit discriminator and said lower limit discriminator, respectively;
a comparator gate circuit for output signals from said upper limit discriminator and said lower limit discriminator;
a counter connected to said comparator circuit;
a display device connected to said counter;
an input means on said display device for one of said staircase signals from its respective generator device; and said discriminators passing only pulses from said detected signal of amplitude exceeding respective lower and upper limits determined by aid staircase signals, said comparator gate passing only pulses exceeding said lower limit but suppressing pulses exceeding said upper limit, whereby a count and display of pulses falling between said lower and upper limits for each step of said staircase signals is obtained.
a pair of analog signal generators for generating a staircase signal;
an upper limit discriminator and a lower limit discriminator, each having a first input terminal for a respective staircase signal from a respective said signal generator;
input means for receiving a detected signal from a fluorescent X-ray detector for applying said detected signal to a respective second input terminal of said upper limit discriminator and said lower limit discriminator, respectively;
a comparator gate circuit for output signals from said upper limit discriminator and said lower limit discriminator;
a counter connected to said comparator circuit;
a display device connected to said counter;
an input means on said display device for one of said staircase signals from its respective generator device; and said discriminators passing only pulses from said detected signal of amplitude exceeding respective lower and upper limits determined by aid staircase signals, said comparator gate passing only pulses exceeding said lower limit but suppressing pulses exceeding said upper limit, whereby a count and display of pulses falling between said lower and upper limits for each step of said staircase signals is obtained.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1467881U JPS57129111U (en) | 1981-02-04 | 1981-02-04 | |
| JP14678/81 | 1981-02-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1163022A true CA1163022A (en) | 1984-02-28 |
Family
ID=11867869
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000395563A Expired CA1163022A (en) | 1981-02-04 | 1982-02-04 | Apparatus for recording pulse height distribution in a fluorescent x-ray film thickness meter |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPS57129111U (en) |
| CA (1) | CA1163022A (en) |
| DE (1) | DE3203746A1 (en) |
| FR (1) | FR2499240A1 (en) |
| GB (1) | GB2096313A (en) |
| NL (1) | NL8200300A (en) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3440537A (en) * | 1963-08-20 | 1969-04-22 | Non Linear Systems Inc | Bar-graph display instrument |
| JPS5810098Y2 (en) * | 1973-05-07 | 1983-02-24 | 株式会社小松製作所 | Yuatsu Sokutei Souchi |
| US4129827A (en) * | 1976-05-20 | 1978-12-12 | Southwick R | Amplitude probability detector |
-
1981
- 1981-02-04 JP JP1467881U patent/JPS57129111U/ja active Pending
-
1982
- 1982-01-27 NL NL8200300A patent/NL8200300A/en not_active Application Discontinuation
- 1982-01-29 GB GB8202550A patent/GB2096313A/en not_active Withdrawn
- 1982-02-04 CA CA000395563A patent/CA1163022A/en not_active Expired
- 1982-02-04 DE DE19823203746 patent/DE3203746A1/en not_active Withdrawn
- 1982-02-04 FR FR8201803A patent/FR2499240A1/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| DE3203746A1 (en) | 1982-09-02 |
| JPS57129111U (en) | 1982-08-12 |
| FR2499240A1 (en) | 1982-08-06 |
| NL8200300A (en) | 1982-09-01 |
| GB2096313A (en) | 1982-10-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US3581087A (en) | X-ray fluorescence measuring system employing balanced x-ray filters and circuit means to vary the effective relative transmission thereof | |
| US4591984A (en) | Radiation measuring device | |
| US3984679A (en) | Coating thickness monitor for multiple layers | |
| US5021664A (en) | Method and apparatus for correcting the energy resolution of ionizing radiation spectrometers | |
| EP0410828A2 (en) | Dead time correction and regulation method and apparatus for nuclear spectroscopy | |
| Földiák et al. | A computer controlled pulse radiolysis laboratory | |
| US5005146A (en) | Signal processing method for nuclear spectrometers | |
| US5371362A (en) | Nuclear detection process with base potential correction and correspnding apparatus (particularly a gamma-camera) | |
| GB1145713A (en) | Method and apparatus for counting standardization in scintillation spectrometry | |
| US3914606A (en) | Electron detector | |
| US3806726A (en) | Apparatus for x-ray analysis | |
| CA1163022A (en) | Apparatus for recording pulse height distribution in a fluorescent x-ray film thickness meter | |
| US2590057A (en) | Half-life determining method | |
| US3657646A (en) | Method and apparatus of automatic estimation of nonregular curves, especially electromiographic curves and the digital system for realization of the method | |
| WO1996026454A1 (en) | Electron beam stop analyzer | |
| US3290500A (en) | Fast neutron spectrometer utilizing lithium containing films | |
| US4413183A (en) | Gamma camera | |
| US4007366A (en) | Radioactive tracer profiling system and apparatus | |
| US4546488A (en) | X-Ray analysis apparatus with pulse amplitude shift correction | |
| Heinrich | Instrumental developments for electron microprobe readout | |
| US3942011A (en) | Gamma camera display system | |
| JP3083534B2 (en) | Dead time adjustment method for X-ray detector system of two-counter EXAFS measurement device and two-counter EXAFS measurement device | |
| Kozyczkowski et al. | Amplitude and rise time compensated timing optimized for large semiconductor detectors | |
| SU1657013A1 (en) | Differential system for stabilizing spectrometer channel gain | |
| US2843749A (en) | System for measuring x-radiation |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKEX | Expiry |