CA1136882A - Spectrophotometric apparatus for remote measuring - Google Patents

Spectrophotometric apparatus for remote measuring

Info

Publication number
CA1136882A
CA1136882A CA000344463A CA344463A CA1136882A CA 1136882 A CA1136882 A CA 1136882A CA 000344463 A CA000344463 A CA 000344463A CA 344463 A CA344463 A CA 344463A CA 1136882 A CA1136882 A CA 1136882A
Authority
CA
Canada
Prior art keywords
measuring
optical
fibre optic
loop
light beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA000344463A
Other languages
English (en)
French (fr)
Inventor
Gilbert Chevalier
Jean-Jacques Perez
Gilbert Boisde
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Application granted granted Critical
Publication of CA1136882A publication Critical patent/CA1136882A/en
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0213Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using attenuators
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0218Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using optical fibers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/42Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
CA000344463A 1979-01-30 1980-01-28 Spectrophotometric apparatus for remote measuring Expired CA1136882A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR7902297A FR2448134A1 (fr) 1979-01-30 1979-01-30 Dispositif spectrophotometrique pour mesure a distance
FREN7902297 1979-01-30

Publications (1)

Publication Number Publication Date
CA1136882A true CA1136882A (en) 1982-12-07

Family

ID=9221346

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000344463A Expired CA1136882A (en) 1979-01-30 1980-01-28 Spectrophotometric apparatus for remote measuring

Country Status (6)

Country Link
EP (1) EP0015170B1 (US07321065-20080122-C00020.png)
JP (1) JPS55132923A (US07321065-20080122-C00020.png)
CA (1) CA1136882A (US07321065-20080122-C00020.png)
DE (1) DE3063792D1 (US07321065-20080122-C00020.png)
ES (1) ES8103837A1 (US07321065-20080122-C00020.png)
FR (1) FR2448134A1 (US07321065-20080122-C00020.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4632563A (en) * 1983-02-28 1986-12-30 The Syconex Corporation In-situ gas analyzer
US9810558B2 (en) 2014-03-14 2017-11-07 Particle Measuring Systems, Inc. Pressure-based airflow sensing in particle impactor systems

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4529308A (en) * 1982-05-28 1985-07-16 Hunter Associates Laboratory, Inc. Spectrophotometer apparatus and method including scale drift correction feature
GB2159940A (en) * 1984-06-01 1985-12-11 Stc Plc Remote optical sensors
DE3430050A1 (de) * 1984-08-16 1986-04-10 Betz, Michael, Dr., 2300 Molfsee Photometer zur analyse von waessrigen medien
FR2569864B1 (fr) * 1984-09-04 1987-01-30 Commissariat Energie Atomique Equipement d'emission et de distribution de lumiere par fibres optiques, notamment pour le controle spectrophotometrique en ligne a l'aide d'un spectrophotometre double faisceau
JPS6195220A (ja) * 1984-10-17 1986-05-14 Hitachi Ltd 分光光度計
JPS61108933A (ja) * 1984-11-01 1986-05-27 Power Reactor & Nuclear Fuel Dev Corp 遠隔操作型分光光度計
JPS62124430A (ja) * 1985-11-25 1987-06-05 Sanyo Kokusaku Pulp Co Ltd 色濃度の測定装置及び測定方法
SE8802536D0 (sv) * 1988-07-07 1988-07-07 Altoptronic Ab Metod och apparat for spektroskopisk metning av koncentrationen av en gas i ett prov
US5039855A (en) * 1990-03-05 1991-08-13 Bran+Luebbe Analyzing Technologies, Inc. Dual beam acousto-optic tunable spectrometer
US5818578A (en) * 1995-10-10 1998-10-06 American Air Liquide Inc. Polygonal planar multipass cell, system and apparatus including same, and method of use
US5742399A (en) * 1996-04-18 1998-04-21 American Air Liquide, Inc. Method for stabilizing the wavelength in a laser spectrometer system
US5963336A (en) * 1995-10-10 1999-10-05 American Air Liquide Inc. Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use
US5751422A (en) * 1996-02-26 1998-05-12 Particle Measuring Systems, Inc. In-situ particle detection utilizing optical coupling
US5949537A (en) 1996-04-18 1999-09-07 American Air Liquide Inc. In-line cell for absorption spectroscopy
US5880850A (en) * 1996-04-18 1999-03-09 American Air Liquide Inc Method and system for sensitive detection of molecular species in a vacuum by harmonic detection spectroscopy
US5835230A (en) * 1997-07-10 1998-11-10 American Air Liquide Inc. Method for calibration of a spectroscopic sensor
US6084668A (en) * 1997-07-10 2000-07-04 American Air Liquide Inc. In-line cell for absorption spectroscopy
US6442736B1 (en) 2000-10-03 2002-08-27 L'air Liquide Societe Anonyme A Directoire Et Conseil De Surveillance Pour L'etude Et L'expolitation Des Procedes Georges Claude Semiconductor processing system and method for controlling moisture level therein
JP2009002864A (ja) * 2007-06-22 2009-01-08 Olympus Corp 分析装置および分析方法
JP5478501B2 (ja) 2007-12-04 2014-04-23 パーティクル・メージャーリング・システムズ・インコーポレーテッド 粒子検出用の2次元光学画像化方法及びシステム

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1054767A (US07321065-20080122-C00020.png) * 1963-10-11 1900-01-01
US3506459A (en) * 1967-07-11 1970-04-14 Pillsbury Co Tamper-proof multiple compartment package
GB1290903A (US07321065-20080122-C00020.png) * 1969-11-18 1972-09-27
US3805066A (en) * 1972-08-14 1974-04-16 T Chijuma Smoke detecting device utilizing optical fibers
FR2317638A1 (fr) * 1975-07-09 1977-02-04 Commissariat Energie Atomique Dispositif d'analyse des constituants d'une solution par mesure photometrique
JPS594258Y2 (ja) * 1976-12-11 1984-02-07 オムロン株式会社 ダブルビ−ム分光光度計

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4632563A (en) * 1983-02-28 1986-12-30 The Syconex Corporation In-situ gas analyzer
US9810558B2 (en) 2014-03-14 2017-11-07 Particle Measuring Systems, Inc. Pressure-based airflow sensing in particle impactor systems

Also Published As

Publication number Publication date
JPS55132923A (en) 1980-10-16
EP0015170A1 (fr) 1980-09-03
DE3063792D1 (en) 1983-07-28
ES488067A0 (es) 1981-02-16
JPH0131130B2 (US07321065-20080122-C00020.png) 1989-06-23
FR2448134B1 (US07321065-20080122-C00020.png) 1982-02-05
EP0015170B1 (fr) 1983-06-22
FR2448134A1 (fr) 1980-08-29
ES8103837A1 (es) 1981-02-16

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