CA1133148A - Monolithically integrated circuit of high dielectric strength for electrically coupling isolated circuits - Google Patents

Monolithically integrated circuit of high dielectric strength for electrically coupling isolated circuits

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Publication number
CA1133148A
CA1133148A CA336,425A CA336425A CA1133148A CA 1133148 A CA1133148 A CA 1133148A CA 336425 A CA336425 A CA 336425A CA 1133148 A CA1133148 A CA 1133148A
Authority
CA
Canada
Prior art keywords
circuit
signal
integrated circuit
monolithically integrated
oscillator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA336,425A
Other languages
French (fr)
Inventor
Rudiger Muller
Michael Pomper
Ludwig Leipold
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Application granted granted Critical
Publication of CA1133148A publication Critical patent/CA1133148A/en
Expired legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01PWAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P5/00Coupling devices of the waveguide type
    • H01P5/02Coupling devices of the waveguide type with invariable factor of coupling
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/12Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
    • H01L27/13Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body combined with thin-film or thick-film passive components
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S331/00Oscillators
    • Y10S331/03Logic gate active element oscillator

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Bipolar Integrated Circuits (AREA)

Abstract

ABSTRACT OF THE DISCLOSURE
A system is disclosed for coupling electrically isolated circuits in a monolithic integrated circuit. A signal coupler is integrated on a chip together with a primary circuit and a secondary circuit which is to be coupled to the primary circuit. The signal coupler comprises an integrated coupling capacitor which consists of a coplanar conductor path arrangement embedded into a passivation layer, the passivation layer being applied to an insulating substrate, preferably sapphire.

Description

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BACKGROUND OF THE INVENTION
The invention relates to a monolithically integrated circuit of high dielectric strength for electrically coupling isolated circuits.
In most cases circuits operated directly from the mains require electrical decoupling between the input side and the output side with high dielectric strength, e.g. 1.5 kV between the two sides. Previously circuits of this kind have been constructed exclusively from discrete components, such as for exa~ple transformers, capacitors or opto-couplers. Known semiconducto relays are constructed for example with hybrid-integrated components in which case an opto-coupler consists of a photo-diode, a light conducting path, and a photo-transistor. The use of a capacitor for the aforementioned purpose is disclosed for example in the magazine "Elektor", July/August 1976, 7-48/~9 "Kapazitiver TriacKeppler".
One of the disadvantages of the kno-wn circuits is that they are relatively complicated and are also expensive.
SUM~Y OF T~ VENTION
An object of the present invention is to provide a circuit which combines the advantages of high dielectric strength in the path between input side and out~ut side, a smal] space requirement, and low production costs.
The object on which the invention is based is attained by a mono-lithically integrated circuit of high dielectric strength for electrically coupling isolated circuits. A signal coupler is integrated on a chip to-gether with a primary circuit and a secondary circuit which is to be coupled to the primary circuit. The signal coupler comprises an integrated coupling capacitor -which consists of a coplanar conductor path arrangement which is ~3~

known per se and is embedded into a passivation layer and is applied to an insulating substrate which preferably consists of sapphire.
A coplanar conductor path arrangem~nt of the above m~ntioned type is kncwn from the "Siemens Forschungs- and Entwicklungsberichten", see Vol. 5 (1976) No. 2, page 72-75~ H. Fritzsche; "Capacitances of Coplanar Microstrip Lines in Integrated Circuits".
The invention offers the advantage that a relatively high dielectric strength can be achieved which, when solid silicon techniques are used, can otherwise only be reproduced with extreme difficulty. A further advantage con-sists in that the monolithically integrated circuit corresponding to the inven-tion is small in volume and can be produced with favorable cost.
A further development of the invention is that a plurality of coupling capacitors consisting of ooplanar canductor path arrangements are arranged on the chip. The coupling capacitors are comm~nly interconnected in a series arrangem~nt to form a capacitive voltage divider. me intervals between the con-ductor paths are reduced in comparison to the intervals between the conductor paths in the case of a coupling capacitor consisting of one single coplanar con-ductor path ar~angement.
A further development of the invention offers the advantage that ~he dielectric strength of the path between the input and the output of the overall circuit can be increased.
BKIEF ~ESCRIPTICN OF THE DRAW¢NGS
Figure 1 is the block circuit diagram of an integrated solid body re-lay which is designed in accordance with the invention and the individual cir-cuit zones of which are arranged in integrated fashion on one single chip;

~,~

~33~

Figure 2 is the block circuit diagram of an integrated capacitive coupler for signal transmission which is designed in accordance with the invention;
Figure 3 is a cross-sectional view of a portion of a circuit con-structed in accordance with the invention illustrating the arrangement of coplanar conductor paths 1, 2 in a passivation layer and on a substrate;
Figure 4 is a cross-section through an arrangement corresponding to the invention of a plurality of coplanar conductor paths 1, 2 . . . n;
Figure 5 illustrates the qualitative curve of the break through field strength Ema in dependence upon a spacing d between the conductor paths 1, 2;
Figure 6 is a gate circuit diagram of an integrated capacitive coupler designed in accordance with the invention;
Figure 7 is a detailed circuit diagram forming part of the gate circuit diagram shown in Figure 6 of an integrated capacitive coupler : constructed in accordance with the invention;
Figure 8 is a block circuit diagram of an integrated capaciti~e coupler for power transmission constructed in accordance with the invention;
and Figure 9 is a detailed circuit diagram of the coupler illustrated in Fi.gure 8.
DESCRIPTION OF THE PREFERRED EMBODIMENTS
As already mentioned, Figure 1 is a simplified block circuit diagram of a switch which is monolithically integrated on a chip CH, and which is to switch a load circuit V at the secondary side and contains ~ 33~f~

electrical isolation means GT (solid body rela~). If the primary circuit PS is to be supplied from the secondary side, in addition to a signal coupler SK whichinfluences the secondary circuit SS, an energy transmission circuit, i.e. a p~wer coupler EK, ls also required. The signal path is referenced SW whereas the p~wer supply path is referen oe d EWo As already mentioned, Figure 2 is the block circuit diagram of a cir-cuit for a capacitive signal coupler. At the primary side P a high-frequency signal is produced by an oscillator OSZ which is cantrolled by the signal input E transmitted via the coupling capacitor ~ to the secondary side S, where i-t isamplified and preferably rectified (output signal A) Figure 3 illustrates the arrangement of an integrated coupling capacitor which, embedded into a passivation layer PASS, lies on an insulating substrate SUB (e.g. ESFI-SOS technology). l~e capacitance is produoe d by the coplanar conductor path arrangement l-a-2. An arrangem~nt of this type produces very high dielectric strengths which, using solid silicon technolcgy, can other-wise only be achieved with great difficulty. On passivated surfaces the dielectric strength is in the region of several kV and the capacitance values are in the 100 pF-range.
; ESFI-SOS technology is described in the brochure "Siemens HaIbleiterbauelem~ente fur die Elektronik", order No. B 10/1431, pages 60 and 61.
Sinoe, given small spacings d, the breakthrough field strength EmaX
displays a sharp increase A (see Figure 5) it can be advantageous to connect a plurality of coplanar capacitors (conductor paths) in series while simLltane-ously reducing the spacing thereby achieving high dielectric strengths ~.~.3;3~

and greater coupling capacitances (see Figure ~). In this case the inner conductor paths (2 . . . n-l~ do not carry a fixed potential. An increased dielectric strength of the multi~conductor arrangement is subject to precise symmetrical design of the conductor paths which can be achieved relatively easily with current technology.
In accordance with Figures 3, 4 and 5, the breakthrough voltage (UDB) for two conductors and n conductors is governed by UDB 12 ~ E12 a (1) and UDB ln ~ n E12 a (2) In order to achieve an equal dielectric strength with n conductor paths we must have 12 ~ ~12 _a (3) n a if CKln 7 CK 12 and a~- ~ a A genuine gain can be achieved with respect to the quality (UDB and CK) and area of the coupling capacitor.
In order to further increase the coupling capacitance, the passi-vation layer should possess as high as possible a relative dielectric constant.
Figures 6 and 7 illustrate an example of a capacitive coupling circuit constructed for signal transmission in ESFI-SOS technology. The circuit elements are conventional transistors, diodes, resistors~and capacitors (with the exception of CK), as are used in ESFI technology. As a transmission path of this type displays band-pass characteristics, it is effective to tune 3 ~33~

the oscillator frequency to the middle frequency. This can be achieved by virtue of the selection of the number of stages in the ring oscillator or by modifying the inverter transit time. In this arrangement the input and output stage are referenced STE and STA respectively, the amplifier is referenced VS, and the rectifier is referenced GL.
Figures 8 and 9 illustrate an example of a power supply circuit consisting of a capacitive coupler. The voltage component U+l of an oscilla-tor signal of high frequency (f ) is amplified and the oscillator signal is transmitted via CK to the primary side. Here a current of the value UH -
2 f osc CK flows. The current is rectified and the storage capacitor ESPis charged. The stored energy is adequate to temporarily supply the primary circuit ~ith current.
Although various minor modifications may be suggested by those versed in the art, it should be understood that we wish to embody within the scope of the patent warranted hereon, all such embodiments as reasonably and properly come within the scope of our contribution to the art.

Claims (12)

THE EMBODIMENT OF THE INVENTION IN WHICH AN EXCLUSIVE
PROPERTY OR PRIVILEGE IS CLAIMED ARE DEFINED AS FOLLOWS:
1. A monolithically integrated circuit of high dielectric strength for electrically coupling isolated circuits, comprising: a signal coupler integrated on a chip; a primary circuit on the chip; a secondary circuit on the chip to be coupled to the primary circuit; the signal coupler having an integrated coupling capacitor formed of a coplanar arrangement of spaced conductor paths embedded into a passivation layer, the passivation layer being arranged on an insulating substrate.
2. The circuit of claim 1 wherein the insulating substrate comprises sapphire.
3. A monolithically integrated circuit of claim 1 wherein a plurality of coupling capacitors formed of coplanar conductor path arrangements are positioned on the chip, the coupling capacitors being commonly interconnected in a series arrangement to form a capacitive voltage divider, and spacings between the conductor paths being reduced in comparison to spacings between conductor paths in the case of a coupling capacitor of a single coplanar conductor path arrangement.
4. A monolithically integrated circuit of claim 3 wherein the passivation layer has a high relative dielectric constant.
5. A monolithically integrated circuit of claim 1 further including a signal input arranged to be influenced from outside of the chip and a signal output arranged to influence circuits external to the chip, the primary circuit having oscillator means for emitting an AC signal when it receives a relevant signal via the signal input, the secondary circuit having an amplifier and a rectifier between an output of the amplifier and the signal output, means for input coupling AC signals emitted from the oscilla-tor via the coupling capacitor into an input of the amplifier such that a signal corresponding to the signal supplied to the signal input can be obtained from the signal output.
6. A monolithically integrated circuit of claim 5 wherein the oscillator means oscillates at a predetermined frequency which is a middle frequency of the overall circuit having band-pass characteristics.
7. A monolithically integrated circuit of claim 6 wherein the oscillator means comprises a ring oscillator of a logic-linking element and at least one inverter connected to an output of the logic-linking element, the number being selected so as to determine the oscillating frequency of the oscillator.
8. A monolithically integrated circuit of claim 6 wherein the oscillator has a ring oscillator and comprises a logic-linking element and at least one inverter which is connected to an output of the logic-linking element, can be determined via the selection of the inverter, a transit time of the inverter being selected so as to determine the oscillating frequency of the oscillator.
9. A monolithically integrated circuit of claim 1 further including power coupler means for power supply of the primary circuit from a secondary voltage source, said power coupler means being arranged on the chip and designed substantially the same as the signal coupler, said power coupler means including at least one oscillator at its input end and at least one rectifier at its output end.
10. A monolithically integrated circuit of claim 9 wherein the output signal of the oscillator is connected for amplification by an ampli-fier and the rectifier is followed by a power store means from which short-duration pulses can be taken for power supply of the primary circuit.
11. The circuit of claim 10 wherein the power store means comprises a storage capacitor.
12. A monolithically integrated circuit of high dielectric strength for electrically coupling isolated circuits, comprising: a primary circuit and a secondary circuit integrated on a chip; a signal coupler connected to couple signals between the primary and secondary circuits; said signal coupler comprising spaced parallel conductor paths embedded in a passivation layer on an insulating substrate so as to form an integrated coupling capacitor.
CA336,425A 1978-09-28 1979-09-26 Monolithically integrated circuit of high dielectric strength for electrically coupling isolated circuits Expired CA1133148A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DEP2842319.0 1978-09-28
DE19782842319 DE2842319A1 (en) 1978-09-28 1978-09-28 MONOLITHICALLY INTEGRATED CIRCUIT WITH HIGH VOLTAGE RESISTANCE FOR COUPLING GALVANICALLY ISOLATED CIRCUITS

Publications (1)

Publication Number Publication Date
CA1133148A true CA1133148A (en) 1982-10-05

Family

ID=6050752

Family Applications (1)

Application Number Title Priority Date Filing Date
CA336,425A Expired CA1133148A (en) 1978-09-28 1979-09-26 Monolithically integrated circuit of high dielectric strength for electrically coupling isolated circuits

Country Status (6)

Country Link
US (1) US4339668A (en)
JP (1) JPS5546594A (en)
CA (1) CA1133148A (en)
DE (1) DE2842319A1 (en)
FR (1) FR2437698A1 (en)
GB (1) GB2035702B (en)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4853523A (en) * 1987-10-05 1989-08-01 Pitney Bowes Inc. Vault cartridge having capacitive coupling
US4802027A (en) * 1987-10-05 1989-01-31 Pitney Bowes Inc. Data storage device coupled to a data storage interface
CA1294333C (en) * 1987-10-12 1992-01-14 Marie-Christine Rolland Radio receiver antitheft device used namely in passenger cars
JPH0563615A (en) * 1991-08-30 1993-03-12 Ncr Corp Capacitive coupling device
US6728113B1 (en) 1993-06-24 2004-04-27 Polychip, Inc. Method and apparatus for non-conductively interconnecting integrated circuits
WO1998044687A1 (en) * 1997-03-31 1998-10-08 Hitachi, Ltd. Modem using capacitive insulating barrier, insulating coupler, and integrated circuit used in the modem
US6023202A (en) * 1998-02-13 2000-02-08 Hewlett-Packard Company Ground return for high speed digital signals that are capacitively coupled across a DC-isolated interface
KR19990072936A (en) 1998-02-27 1999-09-27 가나이 쓰도무 Isolator and modem unit using the same
US7356952B2 (en) * 2002-06-17 2008-04-15 Philip Morris Usa Inc. System for coupling package displays to remote power source
US7170927B2 (en) * 2002-08-16 2007-01-30 Texas Instruments Incorporated Methods and apparatus for an ADSL transceiver
JP2006121046A (en) * 2004-09-24 2006-05-11 Meiko:Kk Circuit board
US7425760B1 (en) 2004-10-13 2008-09-16 Sun Microsystems, Inc. Multi-chip module structure with power delivery using flexible cables
US8624740B2 (en) * 2005-02-04 2014-01-07 Philip Morris Usa Inc. Controllable RFID card
US7429984B2 (en) * 2005-02-04 2008-09-30 Philip Morris Usa Inc. Display management system
US7504905B1 (en) 2008-01-30 2009-03-17 The United States Of America As Represented By The Secretary Of The Navy Method for coupling a direct current power source across a dielectric membrane or other non-conducting membrane
US7741896B2 (en) * 2008-02-15 2010-06-22 Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. High voltage drive circuit employing capacitive signal coupling and associated devices and methods
WO2012065229A1 (en) 2010-11-18 2012-05-24 The Silanna Group Pty Ltd Single-chip integrated circuit with capacitive isolation

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4042948A (en) * 1959-05-06 1977-08-16 Texas Instruments Incorporated Integrated circuit isolation with mesas and/or insulating substrate
US3519901A (en) * 1968-01-29 1970-07-07 Texas Instruments Inc Bi-layer insulation structure including polycrystalline semiconductor material for integrated circuit isolation
US4024626A (en) * 1974-12-09 1977-05-24 Hughes Aircraft Company Method of making integrated transistor matrix for flat panel liquid crystal display
GB1537843A (en) * 1975-11-17 1979-01-04 Nat Res Dev Charge-coupled devices

Also Published As

Publication number Publication date
FR2437698B1 (en) 1984-08-10
DE2842319A1 (en) 1980-04-17
FR2437698A1 (en) 1980-04-25
GB2035702A (en) 1980-06-18
GB2035702B (en) 1983-03-02
JPS5546594A (en) 1980-04-01
US4339668A (en) 1982-07-13

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