CA1128423A - Boron cantilever and method of making the same - Google Patents

Boron cantilever and method of making the same

Info

Publication number
CA1128423A
CA1128423A CA341,736A CA341736A CA1128423A CA 1128423 A CA1128423 A CA 1128423A CA 341736 A CA341736 A CA 341736A CA 1128423 A CA1128423 A CA 1128423A
Authority
CA
Canada
Prior art keywords
boron
layer
chromium
amorphous
metal substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA341,736A
Other languages
English (en)
French (fr)
Inventor
Masaki Aoki
Shigeru Yoshida
Hiroshi Yamazoe
Masahiro Nagasawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Application granted granted Critical
Publication of CA1128423A publication Critical patent/CA1128423A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B35/00—Boron; Compounds thereof
    • C01B35/02—Boron; Borides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/28—Deposition of only one other non-metal element
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R1/00—Details of transducers, loudspeakers or microphones
    • H04R1/16—Mounting or connecting stylus to transducer with or without damping means
    • H04R1/18—Holders for styli; Mounting holders on transducers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Chemical Vapour Deposition (AREA)
  • Laminated Bodies (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
CA341,736A 1978-12-12 1979-12-12 Boron cantilever and method of making the same Expired CA1128423A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP53-153936/1978 1978-12-12
JP15393678A JPS5579034A (en) 1978-12-12 1978-12-12 Boron structure material and preparation thereof

Publications (1)

Publication Number Publication Date
CA1128423A true CA1128423A (en) 1982-07-27

Family

ID=15573309

Family Applications (1)

Application Number Title Priority Date Filing Date
CA341,736A Expired CA1128423A (en) 1978-12-12 1979-12-12 Boron cantilever and method of making the same

Country Status (4)

Country Link
EP (1) EP0013492B1 (enExample)
JP (1) JPS5579034A (enExample)
CA (1) CA1128423A (enExample)
DE (1) DE2965012D1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2068152A1 (en) * 1991-06-12 1992-12-13 William L. Mowrey Method for producing articles by chemical vapor deposition and the articles produced therefrom
CN117263199B (zh) * 2023-10-12 2025-09-16 广东先导微电子科技有限公司 高纯硼中痕量溴的去除方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1774410A (en) * 1925-10-05 1930-08-26 Philips Nv Process of precipitating boron
GB326899A (en) * 1929-01-01 1930-03-27 Philips Nv Improvements in or relating to gramophone needles and the manufacture thereof
US2528454A (en) * 1946-11-07 1950-10-31 Hermann I Schlesinger Coating process
US3053636A (en) * 1960-11-10 1962-09-11 Kenneth E Bean Boron deposition method
US3215439A (en) * 1963-05-03 1965-11-02 Astatic Corp Compliant phonograph stylus mounting
DE1268931B (de) * 1965-06-11 1968-05-22 Philips Nv Verfahren zur Herstellung von duennen Metallboridschichten auf metallischen und nichtmetallischen Traegern
US3985917A (en) * 1972-03-02 1976-10-12 Avco Corporation Method of depositing material on a heated substrate
JPS5122362B2 (enExample) * 1973-11-27 1976-07-09

Also Published As

Publication number Publication date
JPS6133703B2 (enExample) 1986-08-04
JPS5579034A (en) 1980-06-14
DE2965012D1 (en) 1983-04-14
EP0013492A1 (en) 1980-07-23
EP0013492B1 (en) 1983-03-09

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Legal Events

Date Code Title Description
MKEX Expiry