CA1069342A - Tete de capteur de debit de gaz, a orifice variable - Google Patents

Tete de capteur de debit de gaz, a orifice variable

Info

Publication number
CA1069342A
CA1069342A CA278,653A CA278653A CA1069342A CA 1069342 A CA1069342 A CA 1069342A CA 278653 A CA278653 A CA 278653A CA 1069342 A CA1069342 A CA 1069342A
Authority
CA
Canada
Prior art keywords
orifice
membrane
flap
flow
gas flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA278,653A
Other languages
English (en)
Inventor
John J. Osborn
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Science and Technology Agency
Original Assignee
Research Development Corp of Japan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US05/779,557 external-priority patent/US4083245A/en
Application filed by Research Development Corp of Japan filed Critical Research Development Corp of Japan
Application granted granted Critical
Publication of CA1069342A publication Critical patent/CA1069342A/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/40—Details of construction of the flow constriction devices
    • G01F1/42—Orifices or nozzles
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/08—Detecting, measuring or recording devices for evaluating the respiratory organs
    • A61B5/087—Measuring breath flow
    • A61B5/0876—Measuring breath flow using means deflected by the fluid stream, e.g. flaps

Landscapes

  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Biomedical Technology (AREA)
  • Medical Informatics (AREA)
  • Pulmonology (AREA)
  • General Physics & Mathematics (AREA)
  • Biophysics (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Fluid Mechanics (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Physiology (AREA)
  • Molecular Biology (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Measuring Volume Flow (AREA)
  • Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
CA278,653A 1976-07-29 1977-05-18 Tete de capteur de debit de gaz, a orifice variable Expired CA1069342A (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US70986776A 1976-07-29 1976-07-29
US05/779,557 US4083245A (en) 1977-03-21 1977-03-21 Variable orifice gas flow sensing head

Publications (1)

Publication Number Publication Date
CA1069342A true CA1069342A (fr) 1980-01-08

Family

ID=27108328

Family Applications (1)

Application Number Title Priority Date Filing Date
CA278,653A Expired CA1069342A (fr) 1976-07-29 1977-05-18 Tete de capteur de debit de gaz, a orifice variable

Country Status (5)

Country Link
JP (1) JPS5316658A (fr)
CA (1) CA1069342A (fr)
DE (1) DE2723337A1 (fr)
FR (1) FR2360063A1 (fr)
SE (1) SE432023B (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111256766A (zh) * 2018-12-03 2020-06-09 苏斯微技术光刻有限公司 用于测量通过半导体制造装置的管道的流体流量的设备

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4197857A (en) * 1978-04-06 1980-04-15 Research Development Corporation System for measurement of oxygen uptake and respiratory quotient
FR2457675A1 (fr) * 1979-05-29 1980-12-26 Research Dev Corp Pneumotachographe a tubes de pitot
JPS6256820A (ja) * 1985-09-06 1987-03-12 Shinmeguro Keiki Kk 流量計測用絞り装置
DE3709776A1 (de) * 1987-03-25 1988-10-06 Eckardt Ag Verfahren zur messung des durchflusses eines mediums durch eine rohrleitung o. dgl.
EP0331772A1 (fr) * 1988-03-08 1989-09-13 Dräger Nederland B.V. Capteur de pression différentielle pour courants gazeux bidirectionnels
EP0331773A1 (fr) * 1988-03-08 1989-09-13 Dräger Nederland B.V. Tuyau présentant une résistance au courant pour débitmètre gazeux
CA2803645A1 (fr) * 2010-06-29 2012-01-05 Rostrum Medical Innovations Inc. Tube respiratoire de spirometre a membrane composee
US9476744B2 (en) * 2014-10-08 2016-10-25 Dieterich Standard, Inc. Integrated orifice plate assembly

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2989866A (en) * 1956-01-03 1961-06-27 Bendix Corp Cantilever beam flowmeter

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111256766A (zh) * 2018-12-03 2020-06-09 苏斯微技术光刻有限公司 用于测量通过半导体制造装置的管道的流体流量的设备
US11499855B2 (en) * 2018-12-03 2022-11-15 Suss Microtec Lithography Gmbh Apparatus for measuring a fluid flow through a pipe of a semiconductor manufacturing device
TWI831881B (zh) * 2018-12-03 2024-02-11 德商蘇士微科技印刷術股份有限公司 測量通過半導體製造裝置的管路之流體流動的設備

Also Published As

Publication number Publication date
DE2723337A1 (de) 1978-02-02
JPS61567B2 (fr) 1986-01-09
JPS5316658A (en) 1978-02-15
SE7705919L (sv) 1978-01-30
SE432023B (sv) 1984-03-12
FR2360063A1 (fr) 1978-02-24

Similar Documents

Publication Publication Date Title
US4083245A (en) Variable orifice gas flow sensing head
EP0502098B1 (fr) Debitmetre a gaz avec obstruction de section de passage variable
US5038621A (en) Variable area obstruction gas flow meter
JP3557595B2 (ja) フローセンサ
US5134890A (en) Fluid flow monitoring device
Klopfenstein Jr Air velocity and flow measurement using a Pitot tube
CA1069342A (fr) Tete de capteur de debit de gaz, a orifice variable
JP2011501129A (ja) 流量計
US4142401A (en) Gage
US7201067B2 (en) System and method for determining flow characteristics
CN106108906A (zh) 用于肺功能检测的流量传感器
GB2142725A (en) Fluid flow meter
JPH0374570B2 (fr)
Buess et al. Design and construction of a pulsed ultrasonic air flowmeter
CA2422398A1 (fr) Dispositif de mesure du debit gazeux et procedes de traitement du signal s'y appliquant
CN2256527Y (zh) 一种新型微流量传感器
Hancock Low Reynolds number two-dimensional separated and reattaching turbulent shear flow
Lee et al. An apparatus for measuring air flow during inspiration
Elliott et al. Turbulent airflow meter for long-term monitoring in patient-ventilator circuits
KR100682026B1 (ko) 소형 단방향 기류 계측용 호흡관
US3924611A (en) Spirometer and anenometer apparatus
US20090204014A1 (en) Down-sized single directional respiratory air flow measuring tube
JP3171017B2 (ja) 流量計
US3555898A (en) Gas low pressure low flow rate metering system
US8585608B2 (en) Flow meter for pulmonary function tests

Legal Events

Date Code Title Description
MKEX Expiry