CA1069342A - Variable orifice gas flow sensing head - Google Patents

Variable orifice gas flow sensing head

Info

Publication number
CA1069342A
CA1069342A CA278,653A CA278653A CA1069342A CA 1069342 A CA1069342 A CA 1069342A CA 278653 A CA278653 A CA 278653A CA 1069342 A CA1069342 A CA 1069342A
Authority
CA
Canada
Prior art keywords
orifice
membrane
flap
flow
gas flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA278,653A
Other languages
English (en)
French (fr)
Inventor
John J. Osborn
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Science and Technology Agency
Original Assignee
Research Development Corp of Japan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US05/779,557 external-priority patent/US4083245A/en
Application filed by Research Development Corp of Japan filed Critical Research Development Corp of Japan
Application granted granted Critical
Publication of CA1069342A publication Critical patent/CA1069342A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/40—Details of construction of the flow constriction devices
    • G01F1/42—Orifices or nozzles
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/08—Measuring devices for evaluating the respiratory organs
    • A61B5/087—Measuring breath flow
    • A61B5/0876—Measuring breath flow using means deflected by the fluid stream, e.g. flaps

Landscapes

  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Medical Informatics (AREA)
  • Surgery (AREA)
  • Biophysics (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Physiology (AREA)
  • Molecular Biology (AREA)
  • Pulmonology (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
  • Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
CA278,653A 1976-07-29 1977-05-18 Variable orifice gas flow sensing head Expired CA1069342A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US70986776A 1976-07-29 1976-07-29
US05/779,557 US4083245A (en) 1977-03-21 1977-03-21 Variable orifice gas flow sensing head

Publications (1)

Publication Number Publication Date
CA1069342A true CA1069342A (en) 1980-01-08

Family

ID=27108328

Family Applications (1)

Application Number Title Priority Date Filing Date
CA278,653A Expired CA1069342A (en) 1976-07-29 1977-05-18 Variable orifice gas flow sensing head

Country Status (5)

Country Link
JP (1) JPS5316658A (enrdf_load_stackoverflow)
CA (1) CA1069342A (enrdf_load_stackoverflow)
DE (1) DE2723337A1 (enrdf_load_stackoverflow)
FR (1) FR2360063A1 (enrdf_load_stackoverflow)
SE (1) SE432023B (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111256766A (zh) * 2018-12-03 2020-06-09 苏斯微技术光刻有限公司 用于测量通过半导体制造装置的管道的流体流量的设备

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4197857A (en) * 1978-04-06 1980-04-15 Research Development Corporation System for measurement of oxygen uptake and respiratory quotient
DE3020265C2 (de) * 1979-05-29 1984-03-15 Research Development Corp., San Francisco, Calif. Pneumotachograph
JPS6256820A (ja) * 1985-09-06 1987-03-12 Shinmeguro Keiki Kk 流量計測用絞り装置
DE3709776A1 (de) * 1987-03-25 1988-10-06 Eckardt Ag Verfahren zur messung des durchflusses eines mediums durch eine rohrleitung o. dgl.
EP0331773A1 (de) * 1988-03-08 1989-09-13 Dräger Nederland B.V. Strömungswiderstandsrohr für Gasströmungsmesser
EP0331772A1 (de) * 1988-03-08 1989-09-13 Dräger Nederland B.V. Differenzdruckmesser für bidirektionale Gasströme
AU2011274212B2 (en) * 2010-06-29 2015-01-22 Rostrum Medical Innovations Inc. Spirometer breathing tube with compound membrane
US9476744B2 (en) * 2014-10-08 2016-10-25 Dieterich Standard, Inc. Integrated orifice plate assembly

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2989866A (en) * 1956-01-03 1961-06-27 Bendix Corp Cantilever beam flowmeter

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111256766A (zh) * 2018-12-03 2020-06-09 苏斯微技术光刻有限公司 用于测量通过半导体制造装置的管道的流体流量的设备
US11499855B2 (en) * 2018-12-03 2022-11-15 Suss Microtec Lithography Gmbh Apparatus for measuring a fluid flow through a pipe of a semiconductor manufacturing device
TWI831881B (zh) * 2018-12-03 2024-02-11 德商蘇士微科技印刷術股份有限公司 測量通過半導體製造裝置的管路之流體流動的設備
CN111256766B (zh) * 2018-12-03 2024-08-02 苏斯微技术光刻有限公司 用于测量通过半导体制造装置的管道的流体流量的设备

Also Published As

Publication number Publication date
SE432023B (sv) 1984-03-12
FR2360063A1 (fr) 1978-02-24
DE2723337A1 (de) 1978-02-02
JPS61567B2 (enrdf_load_stackoverflow) 1986-01-09
SE7705919L (sv) 1978-01-30
JPS5316658A (en) 1978-02-15

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Legal Events

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