CA1056593A - Apparatus for direct measurement of linear and angular displacements with digital readout - Google Patents
Apparatus for direct measurement of linear and angular displacements with digital readoutInfo
- Publication number
- CA1056593A CA1056593A CA242,601A CA242601A CA1056593A CA 1056593 A CA1056593 A CA 1056593A CA 242601 A CA242601 A CA 242601A CA 1056593 A CA1056593 A CA 1056593A
- Authority
- CA
- Canada
- Prior art keywords
- scale
- lines
- diaphragm
- linear
- graticule
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000006073 displacement reaction Methods 0.000 title claims abstract description 30
- 238000005259 measurement Methods 0.000 title claims description 18
- 230000003287 optical effect Effects 0.000 claims abstract description 16
- 230000005540 biological transmission Effects 0.000 claims description 4
- 230000001131 transforming effect Effects 0.000 claims description 2
- 230000000875 corresponding effect Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000005855 radiation Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 241000422252 Cales Species 0.000 description 1
- 241000282465 Canis Species 0.000 description 1
- 101100345589 Mus musculus Mical1 gene Proteins 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000001454 recorded image Methods 0.000 description 1
- 230000004304 visual acuity Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
Abstract
Abstract of the Disclosure The present invention relates to a apparatus for digitally reading out the linear or angular displacement of an object. A precise graticule is mounted on the object. A light source illuminates the graticule. Light from the graticule is fed through an optical enlarging system. The output of the enlarging system is fed through a striate diaphragm which is an identical optical enlargement of a portion of the graticule. Movement of the object and therefore the graticule produces light pulses at the output of the diaphragm.
These light pulses are converted to electrical pulses which are exactly pro-portional to the displacement of the object.
These light pulses are converted to electrical pulses which are exactly pro-portional to the displacement of the object.
Description
5~
This invention relates to an apparatus for direct measurement of linear ~nd angular displacements with digital readout.
In known apparatus for the measurement of displacements the essence of the measurement resolves itself to reading out the magnitude of the dis-placement on scales marked by mech~nical, chemical, optical or magnetic means.
In order to incr~ase the accuracy of the rOE~dout devices, auxiliary ~cales are applied such as verniers, micrometer screws, or optical ~evices in the form of projectors and microscopes, which enlarge the scale.
The main ~sadvantage of appliances of this type is that the accuracy lo of the measurement depends on the limited resolution of the sc~le and on the considerable influence o~ subjective errors committed by the operator.
There are known apparatus, as for instance the device shown in Polish Patent Specification No. 54755, which provide for the possibility of direct digital readout of linear or angular displacements. The readout accuracy and thus the measurement accuracy of said apparatus~is~ however, limited by the accuracy of registering and readout which, for the most accurate known apparatus of said type, does not exceed 500 bits per ~illimetre. Further increases in the accuracy o~ the measuring apparatus necessitates the use of special technical methods and additional readout devices, such as electronic verniers and the like, which apart from inc~e~sing costs, complicate the struc~ure of the device and simultaneously reduce its operational dependability.
? From Un~tedc,States Patent Specification No. 3,552,861, issued January 5, 1971 to Scato Albarda an apparatus is known to be used for measure-ment of displacements of the units of machine tools by using a diffraction grating. The acauracy of the said apparatus is limited, however, by the resolving power of the grating which, ~iven known methods of manufacture, does ` ~ - 2 - ~
~,s~5g;3 not exceed several hundred marks or lines per millimeter.
Further, from United States Patent Specification No, 3,578,979, issued on May 18, 1971 to-;~a~aguchi et al~ an apparatus is known by which displacements are determined by counting light pulses generated by dis~lacing graticules which are coupled with the member ~o be measured.
The present invention is aimed at making possible the direct digital measurement of linear and angular displacements but with a considerable in-crease in the accuracy of such measurements when compared with the results obtainable hitherto b~ the u~e of known means.
The object of the present invention is achieved by constructing a measuring apparatus fitted with a calibra~ed scale of very high density lines and which have been inscribed with a very high degree of accuracy, and with a light pulse generator with an optical system discriminating against zero order diffraction line order from said scale and converting its linear or angular displacements into electric ~ulses. The examination of the invention proved that the scale of this type should preferally be produced in the form of a hologram i.e. by photographic recording of interference patterns of co-herent waves emitted by a la~er. This procedure ~nsures a scale density of the order of several hundred to several thousan~ lines per 1 millimeter.
In order to make possible the conversion of displacements of a high line density scale, the apparatus is equipped with an optical system which produces a~ suitably magnifiead image of zero order diffraction lines orders from said scale, and with a striated diaphragm consituting a photographically recorded image of the same magnification and scale as the magnified image of zero order diffraction lines orders of the holographic scale.
The relative displacement of the strated dia~hragm again~ the 5~S9;~
magnified image of æero order diffraction lines orders of the scale, produced by the optical system, causes falling of lines of one of these elements onto the in~erlinear spacing of the other element, this generating in the known way, light pulses, where quantity is directly proportional to the magnitude of the measured displacements. Then the light pulses are converted in a known way, e.g. b~ ~ans of a detector, into corresponding easily counked electric pulses.
Though the principle of light pulse generation is known, among others from the United States Patent Specification No. 3,578,979 and the mutual displace-ment of the magni~ied scale image and the striated diaphragm from the United ~tates Patent Specification No. 2,406,29~, however, in the apparatus aecord-ing to the present invention the use of a densi~y of several hundred to several thousand lines per millimeter and an optical system discriminating against zero diffraction linesorder from said scale and eliminating the ad-verse effect of the diffraction makes it possible to obtain distinct light pulses at a ~onsiderably higher scale density. Thus the measuring accuracy has been oorrespondingly,increased.
According to the present invention, there is provided an apparatus for direct digital measurement of linear and angular displacement, comprising:
; 2~ a holographic scale of a density from several hundred to several thousand lines per millimeter, an optical system discriminating against ~ero order diffraction line order from said scale, a striated diaphragm comprising a magnified pattern of zero order diffraction lines orders of said scale, and a detector transforming light pulses generated due to mutual displacement of the scale and diaphragm into corresponding electrical pulses, said holographic scale being located so as to fill completel~ the transmission field of the _ 4 -~L~S~iS93 optical system.
The invention will be now described in detail by means onaan e~emplary embodiment with reference to the accompanying drawings, in which:
~ igure liis a block diagram of the apparatus -for direct digital measurement of linear and angular displacements;
Figure 2 is a schematic diagram o~ the apparatus according to the invention for digital measurement of linear displacements, Figure 3 is a schematic diagram of the apparatus for direct digital measurement of angular displacements with peripheral scale; and Figure 4 is a schematic diagram of the apparatus according to Figure 3 but with a radial scale.
The apparatus for direct digital measurement of linear and angular displacements, whose block diagram is shown in Figure 1, consists of the fol-lowing units: radiation source 1 which illuminates the holographic high den-sity scale 2 /several hund~edato several thousand lines per mm/, light pulse generator 4 including the optical system 3, d~tector 5, electric pulse counter ~and display 7, presenting the digital result.
In the exemplary embodiment of the apparatus according to the in-vention shown in Figure 2, the radiation source 1 constltutes a light source.
It is possible to employ other radiation sources such as infra-red radiation, provided that the alternative source is c0mp~tablel~with the operational con~
ditions of the apparatus. In this case, the detector 5 must be suited to the type of radiation used.
The optical system produces a magnified image 10 of zero order diffraction line of the holographic scale, the holographic scale 2 being located so, that its lines fully occupy the transmission field of the optical system 3.
The light pulse generator is equipped with a striated diaphragm 9, which constitutes a photographically recorded magnified image 10 of zero order diffraction lines orders of the scale The detector 5 transforms the light pulses generated due to the -mutual corresponding electric pulses, The counting unit 6 counts the electrical pulses entering its in-put which, as the final resu~ts o~ the measurements, are in digital form shown in the display unit 7.
The operational mode of the apparatus according to the invention is as follows:
An element, the displacement magnitude of which is to be measured, is coupled with the scale 2 or the striate diaphragm 9 which causes correspond-ing displacement of the scal~ or the striate diaphragm against each other.
During the travel of, ~or instance, the enlarged image 10 in relation to the striate diaphragm 9, there follows a subsequent covering and uncovering of the inter-line spaces of the striate diaphragm 9 by the lines of the enlarged image 10. The number of light pulses thus generated is directly proportional to the magnitude of the displacement being measured.
Since the lines of the holographic scale 2 fully occupy the trans-mission field of the optical system 3, the light pulses are generated as a result o~ simultaneous oovering of a plurality of interlinear spaces of the striated diaphragm 9 bY the lines of the magnified image 10 displaced ~ith respect to them. This light pulses falling onto detector 5 represen~ an aYeraged light signal intensity providing a high reliability of the measure~
ment.
5S~3 Each light pulse incident on the active surface of the detector 5 is converted into an electrical pulse. The elec~rical pulses are then counted by the counting unit 6 and the result, on being divided by the number of pulses corresponding with ~he unit of displacement, is shown on the display unit 7 as the result of the measurement~
Figure 3 shows an apparatus in which the scale 8,iin the form of a hologram, is placed on the periphery of a cylinder coup].ed with the element whose angular displacement is to be measured.
In this example, the striate diaphragm 9~ of the apparatus is the photographic registration of the enlarged image of a section of the scale being placed on the cylinder. The operational mode of the apparatus is ide~tical to that shown in Figure 2~
As shown in Figure ~, the apparatus can be provided with a scale 12 which is placed on the periphery of a disc and having a form of radially ar~
ranged lines. In this case the striate diaphragm 9 is a registered, photo-graphically enlarged image of the scale 12 Due to the possibility of directly converting the pulses obtained as a result of the displacements o~ the scales 2, 8 or 12 into light pulses, as employed in the apparatus according to the invention, and then of convert-ing the light pulses into corresponding electrical pulses which are easily counted, it is possible to obtain a direct and quick digital readout of the said measurements.
The apparatus can measure displacements within a wiae range of velocities. ~y utilizing suitable units of time, the apparatus oan measure, in a relatively simple manner, velocity, acceleration or derivatives of various orders as measured by aisplacements of physical quantities. Thus the _ 7 -l(~S~
apparatus disclosed herein may be employed as a direct unit coupled with a computer used for controlling various technical processes.
A digital-to-analog converter can also be employed in the present invention thereby making it possible to present the output in an analog ~orm, _ 8 -
This invention relates to an apparatus for direct measurement of linear ~nd angular displacements with digital readout.
In known apparatus for the measurement of displacements the essence of the measurement resolves itself to reading out the magnitude of the dis-placement on scales marked by mech~nical, chemical, optical or magnetic means.
In order to incr~ase the accuracy of the rOE~dout devices, auxiliary ~cales are applied such as verniers, micrometer screws, or optical ~evices in the form of projectors and microscopes, which enlarge the scale.
The main ~sadvantage of appliances of this type is that the accuracy lo of the measurement depends on the limited resolution of the sc~le and on the considerable influence o~ subjective errors committed by the operator.
There are known apparatus, as for instance the device shown in Polish Patent Specification No. 54755, which provide for the possibility of direct digital readout of linear or angular displacements. The readout accuracy and thus the measurement accuracy of said apparatus~is~ however, limited by the accuracy of registering and readout which, for the most accurate known apparatus of said type, does not exceed 500 bits per ~illimetre. Further increases in the accuracy o~ the measuring apparatus necessitates the use of special technical methods and additional readout devices, such as electronic verniers and the like, which apart from inc~e~sing costs, complicate the struc~ure of the device and simultaneously reduce its operational dependability.
? From Un~tedc,States Patent Specification No. 3,552,861, issued January 5, 1971 to Scato Albarda an apparatus is known to be used for measure-ment of displacements of the units of machine tools by using a diffraction grating. The acauracy of the said apparatus is limited, however, by the resolving power of the grating which, ~iven known methods of manufacture, does ` ~ - 2 - ~
~,s~5g;3 not exceed several hundred marks or lines per millimeter.
Further, from United States Patent Specification No, 3,578,979, issued on May 18, 1971 to-;~a~aguchi et al~ an apparatus is known by which displacements are determined by counting light pulses generated by dis~lacing graticules which are coupled with the member ~o be measured.
The present invention is aimed at making possible the direct digital measurement of linear and angular displacements but with a considerable in-crease in the accuracy of such measurements when compared with the results obtainable hitherto b~ the u~e of known means.
The object of the present invention is achieved by constructing a measuring apparatus fitted with a calibra~ed scale of very high density lines and which have been inscribed with a very high degree of accuracy, and with a light pulse generator with an optical system discriminating against zero order diffraction line order from said scale and converting its linear or angular displacements into electric ~ulses. The examination of the invention proved that the scale of this type should preferally be produced in the form of a hologram i.e. by photographic recording of interference patterns of co-herent waves emitted by a la~er. This procedure ~nsures a scale density of the order of several hundred to several thousan~ lines per 1 millimeter.
In order to make possible the conversion of displacements of a high line density scale, the apparatus is equipped with an optical system which produces a~ suitably magnifiead image of zero order diffraction lines orders from said scale, and with a striated diaphragm consituting a photographically recorded image of the same magnification and scale as the magnified image of zero order diffraction lines orders of the holographic scale.
The relative displacement of the strated dia~hragm again~ the 5~S9;~
magnified image of æero order diffraction lines orders of the scale, produced by the optical system, causes falling of lines of one of these elements onto the in~erlinear spacing of the other element, this generating in the known way, light pulses, where quantity is directly proportional to the magnitude of the measured displacements. Then the light pulses are converted in a known way, e.g. b~ ~ans of a detector, into corresponding easily counked electric pulses.
Though the principle of light pulse generation is known, among others from the United States Patent Specification No. 3,578,979 and the mutual displace-ment of the magni~ied scale image and the striated diaphragm from the United ~tates Patent Specification No. 2,406,29~, however, in the apparatus aecord-ing to the present invention the use of a densi~y of several hundred to several thousand lines per millimeter and an optical system discriminating against zero diffraction linesorder from said scale and eliminating the ad-verse effect of the diffraction makes it possible to obtain distinct light pulses at a ~onsiderably higher scale density. Thus the measuring accuracy has been oorrespondingly,increased.
According to the present invention, there is provided an apparatus for direct digital measurement of linear and angular displacement, comprising:
; 2~ a holographic scale of a density from several hundred to several thousand lines per millimeter, an optical system discriminating against ~ero order diffraction line order from said scale, a striated diaphragm comprising a magnified pattern of zero order diffraction lines orders of said scale, and a detector transforming light pulses generated due to mutual displacement of the scale and diaphragm into corresponding electrical pulses, said holographic scale being located so as to fill completel~ the transmission field of the _ 4 -~L~S~iS93 optical system.
The invention will be now described in detail by means onaan e~emplary embodiment with reference to the accompanying drawings, in which:
~ igure liis a block diagram of the apparatus -for direct digital measurement of linear and angular displacements;
Figure 2 is a schematic diagram o~ the apparatus according to the invention for digital measurement of linear displacements, Figure 3 is a schematic diagram of the apparatus for direct digital measurement of angular displacements with peripheral scale; and Figure 4 is a schematic diagram of the apparatus according to Figure 3 but with a radial scale.
The apparatus for direct digital measurement of linear and angular displacements, whose block diagram is shown in Figure 1, consists of the fol-lowing units: radiation source 1 which illuminates the holographic high den-sity scale 2 /several hund~edato several thousand lines per mm/, light pulse generator 4 including the optical system 3, d~tector 5, electric pulse counter ~and display 7, presenting the digital result.
In the exemplary embodiment of the apparatus according to the in-vention shown in Figure 2, the radiation source 1 constltutes a light source.
It is possible to employ other radiation sources such as infra-red radiation, provided that the alternative source is c0mp~tablel~with the operational con~
ditions of the apparatus. In this case, the detector 5 must be suited to the type of radiation used.
The optical system produces a magnified image 10 of zero order diffraction line of the holographic scale, the holographic scale 2 being located so, that its lines fully occupy the transmission field of the optical system 3.
The light pulse generator is equipped with a striated diaphragm 9, which constitutes a photographically recorded magnified image 10 of zero order diffraction lines orders of the scale The detector 5 transforms the light pulses generated due to the -mutual corresponding electric pulses, The counting unit 6 counts the electrical pulses entering its in-put which, as the final resu~ts o~ the measurements, are in digital form shown in the display unit 7.
The operational mode of the apparatus according to the invention is as follows:
An element, the displacement magnitude of which is to be measured, is coupled with the scale 2 or the striate diaphragm 9 which causes correspond-ing displacement of the scal~ or the striate diaphragm against each other.
During the travel of, ~or instance, the enlarged image 10 in relation to the striate diaphragm 9, there follows a subsequent covering and uncovering of the inter-line spaces of the striate diaphragm 9 by the lines of the enlarged image 10. The number of light pulses thus generated is directly proportional to the magnitude of the displacement being measured.
Since the lines of the holographic scale 2 fully occupy the trans-mission field of the optical system 3, the light pulses are generated as a result o~ simultaneous oovering of a plurality of interlinear spaces of the striated diaphragm 9 bY the lines of the magnified image 10 displaced ~ith respect to them. This light pulses falling onto detector 5 represen~ an aYeraged light signal intensity providing a high reliability of the measure~
ment.
5S~3 Each light pulse incident on the active surface of the detector 5 is converted into an electrical pulse. The elec~rical pulses are then counted by the counting unit 6 and the result, on being divided by the number of pulses corresponding with ~he unit of displacement, is shown on the display unit 7 as the result of the measurement~
Figure 3 shows an apparatus in which the scale 8,iin the form of a hologram, is placed on the periphery of a cylinder coup].ed with the element whose angular displacement is to be measured.
In this example, the striate diaphragm 9~ of the apparatus is the photographic registration of the enlarged image of a section of the scale being placed on the cylinder. The operational mode of the apparatus is ide~tical to that shown in Figure 2~
As shown in Figure ~, the apparatus can be provided with a scale 12 which is placed on the periphery of a disc and having a form of radially ar~
ranged lines. In this case the striate diaphragm 9 is a registered, photo-graphically enlarged image of the scale 12 Due to the possibility of directly converting the pulses obtained as a result of the displacements o~ the scales 2, 8 or 12 into light pulses, as employed in the apparatus according to the invention, and then of convert-ing the light pulses into corresponding electrical pulses which are easily counted, it is possible to obtain a direct and quick digital readout of the said measurements.
The apparatus can measure displacements within a wiae range of velocities. ~y utilizing suitable units of time, the apparatus oan measure, in a relatively simple manner, velocity, acceleration or derivatives of various orders as measured by aisplacements of physical quantities. Thus the _ 7 -l(~S~
apparatus disclosed herein may be employed as a direct unit coupled with a computer used for controlling various technical processes.
A digital-to-analog converter can also be employed in the present invention thereby making it possible to present the output in an analog ~orm, _ 8 -
Claims (4)
PROPERTY OR PRIVILEGE IS CLAIMED ARE DEFINED AS FOLLOWS:
1. Apparatus for direct digital measurement of linear and angular displacement, comprising: a holographic scale of a desity from several hundred to several thousand lines per millimeter, an optical system dis-criminating against zero order diffraction line order from said scale, a striated diaphragm comprising a magnified pattern of zero order diffraction lines orders of said scale, and a detector transforming light pulses generated due to mutual displacement of the scale and diaphragm into corresponding electrical pulses, said holographic scale being located so as to fill com-pletely the transmission field of the optical system.
2. Apparatus as defined in Claim 1, characterized by that its scale is plane and its lines are parallel to each other.
3. Apparatus as defined in Claims 1 and 2, characterized by that the scale is placed on a cylindrical surface, its lines being parallel to each other.
4. Apparatus as defined in Claims 1 and 2, characterized by that its scale is placed on the periphery of a disk, its lines being arranged radially.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PL1974176959A PL105392B1 (en) | 1974-12-30 | 1974-12-30 | DEVICE FOR DIRECT, DIGITAL MEASUREMENT OF LINEAR AND ANGLE MOVEMENTS |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1056593A true CA1056593A (en) | 1979-06-19 |
Family
ID=19970385
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA242,601A Expired CA1056593A (en) | 1974-12-30 | 1975-12-24 | Apparatus for direct measurement of linear and angular displacements with digital readout |
Country Status (7)
| Country | Link |
|---|---|
| JP (1) | JPS5416753B2 (en) |
| CA (1) | CA1056593A (en) |
| CH (1) | CH602981A5 (en) |
| DE (1) | DE2557136C3 (en) |
| FR (1) | FR2296836A1 (en) |
| PL (1) | PL105392B1 (en) |
| SE (1) | SE7514370L (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5412876A (en) * | 1977-06-30 | 1979-01-30 | Ono Sokki Seisakusho Kk | Shaft torque detector |
| DE3504194A1 (en) * | 1985-02-07 | 1986-06-12 | Aktiengesellschaft für industrielle Elektronik AGIE Losone bei Locarno, Losone, Locarno | Method and device for measuring displacements in the setting and control of machine tools |
| JP3089055B2 (en) * | 1991-08-14 | 2000-09-18 | 日本電産コパル株式会社 | Optical displacement detector |
-
1974
- 1974-12-30 PL PL1974176959A patent/PL105392B1/en unknown
-
1975
- 1975-12-09 CH CH1600575A patent/CH602981A5/xx not_active IP Right Cessation
- 1975-12-18 FR FR7538877A patent/FR2296836A1/en active Granted
- 1975-12-18 DE DE2557136A patent/DE2557136C3/en not_active Expired
- 1975-12-18 SE SE7514370A patent/SE7514370L/en unknown
- 1975-12-24 CA CA242,601A patent/CA1056593A/en not_active Expired
- 1975-12-26 JP JP15975075A patent/JPS5416753B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5193252A (en) | 1976-08-16 |
| FR2296836A1 (en) | 1976-07-30 |
| FR2296836B1 (en) | 1978-06-30 |
| SE7514370L (en) | 1976-07-01 |
| JPS5416753B2 (en) | 1979-06-25 |
| PL105392B1 (en) | 1979-10-31 |
| DE2557136A1 (en) | 1976-07-01 |
| CH602981A5 (en) | 1978-08-15 |
| DE2557136C3 (en) | 1979-03-15 |
| DE2557136B2 (en) | 1976-12-09 |
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