CA1040320A - Depletion isolated semiconductor on insulator structures - Google Patents

Depletion isolated semiconductor on insulator structures

Info

Publication number
CA1040320A
CA1040320A CA243,354A CA243354A CA1040320A CA 1040320 A CA1040320 A CA 1040320A CA 243354 A CA243354 A CA 243354A CA 1040320 A CA1040320 A CA 1040320A
Authority
CA
Canada
Prior art keywords
layer
semiconductor
circuit components
semiconductor material
insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA243,354A
Other languages
English (en)
French (fr)
Inventor
Alfred C. Ipri
John C. Sarace
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RCA Corp
Original Assignee
RCA Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RCA Corp filed Critical RCA Corp
Application granted granted Critical
Publication of CA1040320A publication Critical patent/CA1040320A/en
Expired legal-status Critical Current

Links

Classifications

    • H10P95/00—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/01—Manufacture or treatment
    • H10D86/03—Manufacture or treatment wherein the substrate comprises sapphire, e.g. silicon-on-sapphire [SOS]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00—Subject matter not provided for in other groups of this subclass

Landscapes

  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Element Separation (AREA)
  • Thin Film Transistor (AREA)
CA243,354A 1975-01-13 1976-01-12 Depletion isolated semiconductor on insulator structures Expired CA1040320A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US54044375A 1975-01-13 1975-01-13

Publications (1)

Publication Number Publication Date
CA1040320A true CA1040320A (en) 1978-10-10

Family

ID=24155496

Family Applications (1)

Application Number Title Priority Date Filing Date
CA243,354A Expired CA1040320A (en) 1975-01-13 1976-01-12 Depletion isolated semiconductor on insulator structures

Country Status (11)

Country Link
JP (1) JPS5346701B2 (member.php)
BE (1) BE837382A (member.php)
CA (1) CA1040320A (member.php)
CH (1) CH598695A5 (member.php)
DE (1) DE2600221B2 (member.php)
FR (1) FR2297496A1 (member.php)
GB (1) GB1509949A (member.php)
IN (1) IN144889B (member.php)
IT (1) IT1049016B (member.php)
NL (1) NL7600259A (member.php)
SE (1) SE408508B (member.php)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4448632A (en) * 1981-05-25 1984-05-15 Mitsubishi Denki Kabushiki Kaisha Method of fabricating semiconductor devices
US7282409B2 (en) * 2004-06-23 2007-10-16 Micron Technology, Inc. Isolation structure for a memory cell using Al2O3 dielectric
JP2011119397A (ja) * 2009-12-02 2011-06-16 Canon Inc 半導体装置及びその製造方法

Also Published As

Publication number Publication date
DE2600221A1 (de) 1976-07-15
DE2600221B2 (de) 1978-09-07
BE837382A (nl) 1976-05-03
JPS5346701B2 (member.php) 1978-12-15
JPS5195785A (member.php) 1976-08-21
GB1509949A (en) 1978-05-10
SE408508B (sv) 1979-06-11
SE7600122L (sv) 1976-07-14
CH598695A5 (member.php) 1978-05-12
IN144889B (member.php) 1978-07-22
IT1049016B (it) 1981-01-20
NL7600259A (nl) 1976-07-15
FR2297496A1 (fr) 1976-08-06

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