CA1017876A - Method of fabricating stepped electrodes - Google Patents
Method of fabricating stepped electrodesInfo
- Publication number
- CA1017876A CA1017876A CA227,046A CA227046A CA1017876A CA 1017876 A CA1017876 A CA 1017876A CA 227046 A CA227046 A CA 227046A CA 1017876 A CA1017876 A CA 1017876A
- Authority
- CA
- Canada
- Prior art keywords
- fabricating
- stepped electrodes
- stepped
- electrodes
- fabricating stepped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/482—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body
- H01L23/4824—Pads with extended contours, e.g. grid structure, branch structure, finger structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/823406—Combination of charge coupled devices, i.e. CCD, or BBD
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66946—Charge transfer devices
- H01L29/66954—Charge transfer devices with an insulated gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Electrodes Of Semiconductors (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Formation Of Insulating Films (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US496697A US3924319A (en) | 1974-08-12 | 1974-08-12 | Method of fabricating stepped electrodes |
Publications (1)
Publication Number | Publication Date |
---|---|
CA1017876A true CA1017876A (en) | 1977-09-20 |
Family
ID=23973743
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA227,046A Expired CA1017876A (en) | 1974-08-12 | 1975-05-15 | Method of fabricating stepped electrodes |
Country Status (8)
Country | Link |
---|---|
US (1) | US3924319A (no) |
JP (1) | JPS6129154B2 (no) |
CA (1) | CA1017876A (no) |
DE (1) | DE2535272A1 (no) |
FR (1) | FR2282164A1 (no) |
GB (1) | GB1514949A (no) |
IT (1) | IT1041555B (no) |
NL (1) | NL7509360A (no) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4035906A (en) * | 1975-07-23 | 1977-07-19 | Texas Instruments Incorporated | Silicon gate CCD structure |
US4027381A (en) * | 1975-07-23 | 1977-06-07 | Texas Instruments Incorporated | Silicon gate ccd structure |
US4167017A (en) * | 1976-06-01 | 1979-09-04 | Texas Instruments Incorporated | CCD structures with surface potential asymmetry beneath the phase electrodes |
JPS581878A (ja) * | 1981-06-26 | 1983-01-07 | Fujitsu Ltd | 磁気バブルメモリ素子の製造方法 |
US4965648A (en) * | 1988-07-07 | 1990-10-23 | Tektronix, Inc. | Tilted channel, serial-parallel-serial, charge-coupled device |
JP2855291B2 (ja) * | 1991-03-07 | 1999-02-10 | 富士写真フイルム株式会社 | 固体撮像装置 |
US5292680A (en) * | 1993-05-07 | 1994-03-08 | United Microelectronics Corporation | Method of forming a convex charge coupled device |
CN107170842B (zh) * | 2017-06-12 | 2019-07-02 | 京东方科技集团股份有限公司 | 光电探测结构及其制作方法、光电探测器 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3651349A (en) * | 1970-02-16 | 1972-03-21 | Bell Telephone Labor Inc | Monolithic semiconductor apparatus adapted for sequential charge transfer |
US3697786A (en) * | 1971-03-29 | 1972-10-10 | Bell Telephone Labor Inc | Capacitively driven charge transfer devices |
US3837907A (en) * | 1972-03-22 | 1974-09-24 | Bell Telephone Labor Inc | Multiple-level metallization for integrated circuits |
US3852799A (en) * | 1973-04-27 | 1974-12-03 | Bell Telephone Labor Inc | Buried channel charge coupled apparatus |
-
1974
- 1974-08-12 US US496697A patent/US3924319A/en not_active Expired - Lifetime
-
1975
- 1975-05-15 CA CA227,046A patent/CA1017876A/en not_active Expired
- 1975-08-06 JP JP50095084A patent/JPS6129154B2/ja not_active Expired
- 1975-08-06 NL NL7509360A patent/NL7509360A/xx not_active Application Discontinuation
- 1975-08-07 FR FR7524697A patent/FR2282164A1/fr active Granted
- 1975-08-07 DE DE19752535272 patent/DE2535272A1/de not_active Withdrawn
- 1975-08-07 GB GB32969/75A patent/GB1514949A/en not_active Expired
- 1975-08-11 IT IT69070/75A patent/IT1041555B/it active
Also Published As
Publication number | Publication date |
---|---|
GB1514949A (en) | 1978-06-21 |
IT1041555B (it) | 1980-01-10 |
FR2282164B1 (no) | 1978-03-17 |
FR2282164A1 (fr) | 1976-03-12 |
JPS6129154B2 (no) | 1986-07-04 |
NL7509360A (nl) | 1976-02-16 |
US3924319A (en) | 1975-12-09 |
DE2535272A1 (de) | 1976-02-26 |
JPS5142471A (no) | 1976-04-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
AU500603B2 (en) | Method of producing microcapsules | |
AU503458B2 (en) | Electrode | |
AU501009B2 (en) | Method of moulding electrodes | |
SU697050A3 (ru) | Способ получени замещенных дифенилсульфидов или их солей | |
CA1017876A (en) | Method of fabricating stepped electrodes | |
CA1032793A (en) | Manufacture of netting | |
AU500257B2 (en) | Method of sealing | |
JPS5276675A (en) | Method of manufacturing electrodes | |
CA1011394A (en) | Multi-wire oxygen electrode and method of manufacturing the same | |
AU497535B2 (en) | Manufacture of phosphonnates | |
CA1029727A (en) | Production of chlorocyanuric acid | |
JPS5220979A (en) | Manufacture of electrodes | |
SU566587A1 (ru) | Способ получени таблеток | |
JPS5278040A (en) | Method of manufacturing electrode | |
JPS52107596A (en) | Method of manufacturing transparent electrode | |
CA1014319A (en) | Method of manufacturing cushion-filling material | |
CA987388A (en) | Antimony electrodes and method of manufacturing same | |
SU574250A1 (ru) | Способ изготовлени пр мошовных труб | |
AU498596B2 (en) | Manufacture of n-alkenyl-2-aminomethyl-pyrrolidine | |
JPS51142670A (en) | Method of forming electrodes | |
AU490989B2 (en) | Method of manufacturing coffee-aroma material | |
JPS5249946A (en) | Method of fabricating covered electrode | |
AU8029875A (en) | Method of manufacturing coffee-aroma material | |
CA1020724A (en) | Method for construction of houses | |
AU484303B2 (en) | Process forthe manufacture of biscuits |