CA1017139A - Measurement of surface defects of periodically structured surfaces - Google Patents

Measurement of surface defects of periodically structured surfaces

Info

Publication number
CA1017139A
CA1017139A CA160,403A CA160403A CA1017139A CA 1017139 A CA1017139 A CA 1017139A CA 160403 A CA160403 A CA 160403A CA 1017139 A CA1017139 A CA 1017139A
Authority
CA
Canada
Prior art keywords
measurement
surface defects
structured surfaces
periodically structured
periodically
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA160,403A
Other languages
English (en)
Other versions
CA160403S (en
Inventor
Hans-Erdmann Korth
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of CA1017139A publication Critical patent/CA1017139A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9506—Optical discs

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
CA160,403A 1972-01-04 1973-01-02 Measurement of surface defects of periodically structured surfaces Expired CA1017139A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19722200222 DE2200222A1 (de) 1972-01-04 1972-01-04 Vorrichtung zur bestimmung der oberflaechenguete

Publications (1)

Publication Number Publication Date
CA1017139A true CA1017139A (en) 1977-09-13

Family

ID=5832302

Family Applications (1)

Application Number Title Priority Date Filing Date
CA160,403A Expired CA1017139A (en) 1972-01-04 1973-01-02 Measurement of surface defects of periodically structured surfaces

Country Status (5)

Country Link
JP (1) JPS4879663A (ja)
CA (1) CA1017139A (ja)
DE (1) DE2200222A1 (ja)
FR (1) FR2166390B1 (ja)
GB (1) GB1406470A (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4069484A (en) * 1976-05-28 1978-01-17 Rca Corporation Defect plotting system
US4030835A (en) * 1976-05-28 1977-06-21 Rca Corporation Defect detection system
DE3472300D1 (en) * 1983-04-22 1988-07-28 Sick Optik Elektronik Erwin Device for the detection of faults
JPS60147945A (ja) * 1984-01-10 1985-08-05 Victor Co Of Japan Ltd 光デイスク検査装置
US5168412A (en) * 1989-06-28 1992-12-01 Toan Doan Surface interference detector
JP2020502492A (ja) 2016-10-26 2020-01-23 ボード・オブ・リージエンツ，ザ・ユニバーシテイ・オブ・テキサス・システム 反射型および透過型ナノフォトニック装置のための高スループット、高解像度光学計測

Also Published As

Publication number Publication date
FR2166390B1 (ja) 1974-01-04
JPS4879663A (ja) 1973-10-25
GB1406470A (en) 1975-09-17
DE2200222A1 (de) 1973-07-12
FR2166390A1 (ja) 1973-08-17

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