CA1017139A - Measurement of surface defects of periodically structured surfaces - Google Patents
Measurement of surface defects of periodically structured surfacesInfo
- Publication number
- CA1017139A CA1017139A CA160,403A CA160403A CA1017139A CA 1017139 A CA1017139 A CA 1017139A CA 160403 A CA160403 A CA 160403A CA 1017139 A CA1017139 A CA 1017139A
- Authority
- CA
- Canada
- Prior art keywords
- measurement
- surface defects
- structured surfaces
- periodically structured
- periodically
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9506—Optical discs
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19722200222 DE2200222A1 (de) | 1972-01-04 | 1972-01-04 | Vorrichtung zur bestimmung der oberflaechenguete |
Publications (1)
Publication Number | Publication Date |
---|---|
CA1017139A true CA1017139A (en) | 1977-09-13 |
Family
ID=5832302
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA160,403A Expired CA1017139A (en) | 1972-01-04 | 1973-01-02 | Measurement of surface defects of periodically structured surfaces |
Country Status (5)
Country | Link |
---|---|
JP (1) | JPS4879663A (ja) |
CA (1) | CA1017139A (ja) |
DE (1) | DE2200222A1 (ja) |
FR (1) | FR2166390B1 (ja) |
GB (1) | GB1406470A (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4069484A (en) * | 1976-05-28 | 1978-01-17 | Rca Corporation | Defect plotting system |
US4030835A (en) * | 1976-05-28 | 1977-06-21 | Rca Corporation | Defect detection system |
EP0123929B1 (de) * | 1983-04-22 | 1988-06-22 | Erwin Sick GmbH Optik-Elektronik | Fehlerfeststellungsvorrichtung |
JPS60147945A (ja) * | 1984-01-10 | 1985-08-05 | Victor Co Of Japan Ltd | 光デイスク検査装置 |
US5168412A (en) * | 1989-06-28 | 1992-12-01 | Toan Doan | Surface interference detector |
JP2020502492A (ja) | 2016-10-26 | 2020-01-23 | ボード・オブ・リージエンツ,ザ・ユニバーシテイ・オブ・テキサス・システム | 反射型および透過型ナノフォトニック装置のための高スループット、高解像度光学計測 |
-
1972
- 1972-01-04 DE DE19722200222 patent/DE2200222A1/de active Pending
- 1972-12-19 JP JP12681372A patent/JPS4879663A/ja active Pending
- 1972-12-20 GB GB5890372A patent/GB1406470A/en not_active Expired
- 1972-12-26 FR FR7247204A patent/FR2166390B1/fr not_active Expired
-
1973
- 1973-01-02 CA CA160,403A patent/CA1017139A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
GB1406470A (en) | 1975-09-17 |
FR2166390A1 (ja) | 1973-08-17 |
JPS4879663A (ja) | 1973-10-25 |
FR2166390B1 (ja) | 1974-01-04 |
DE2200222A1 (de) | 1973-07-12 |
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