CA1003672A - Optical sensor for determining the focussing error in an optical illumination system embodying a projection lens - Google Patents

Optical sensor for determining the focussing error in an optical illumination system embodying a projection lens

Info

Publication number
CA1003672A
CA1003672A CA195,267A CA195267A CA1003672A CA 1003672 A CA1003672 A CA 1003672A CA 195267 A CA195267 A CA 195267A CA 1003672 A CA1003672 A CA 1003672A
Authority
CA
Canada
Prior art keywords
determining
projection lens
illumination system
optical
system embodying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA195,267A
Other languages
English (en)
Inventor
Jean P. Peltier
Jean P. Lacotte
Francois Le Carvennec
Roland Malissin
Jean P. Le Merer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thomson-Brandt SA
Original Assignee
Thomson-Brandt SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomson-Brandt SA filed Critical Thomson-Brandt SA
Application granted granted Critical
Publication of CA1003672A publication Critical patent/CA1003672A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/08—Disposition or mounting of heads or light sources relatively to record carriers
    • G11B7/09—Disposition or mounting of heads or light sources relatively to record carriers with provision for moving the light beam or focus plane for the purpose of maintaining alignment of the light beam relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
    • G11B7/0908—Disposition or mounting of heads or light sources relatively to record carriers with provision for moving the light beam or focus plane for the purpose of maintaining alignment of the light beam relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following for focusing only
    • G11B7/0912—Disposition or mounting of heads or light sources relatively to record carriers with provision for moving the light beam or focus plane for the purpose of maintaining alignment of the light beam relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following for focusing only by push-pull method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/40—Optical focusing aids

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Automatic Focus Adjustment (AREA)
  • Optical Recording Or Reproduction (AREA)
  • Focusing (AREA)
CA195,267A 1973-03-19 1974-03-18 Optical sensor for determining the focussing error in an optical illumination system embodying a projection lens Expired CA1003672A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7309718A FR2222666B1 (de) 1973-03-19 1973-03-19

Publications (1)

Publication Number Publication Date
CA1003672A true CA1003672A (en) 1977-01-18

Family

ID=9116492

Family Applications (1)

Application Number Title Priority Date Filing Date
CA195,267A Expired CA1003672A (en) 1973-03-19 1974-03-18 Optical sensor for determining the focussing error in an optical illumination system embodying a projection lens

Country Status (7)

Country Link
US (1) US3912922A (de)
JP (1) JPS5036120A (de)
CA (1) CA1003672A (de)
DE (1) DE2413155A1 (de)
FR (1) FR2222666B1 (de)
GB (1) GB1469435A (de)
IT (1) IT1007385B (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2325953A1 (fr) * 1975-09-29 1977-04-22 Thomson Brandt Senseur optique de focalisation et dispositif de focalisation comportant un tel senseur
JPS52120805A (en) * 1976-04-02 1977-10-11 Sony Corp Servo apparatus
JPS54133305A (en) * 1978-04-07 1979-10-17 Hitachi Ltd Information recorder
DE2908757C2 (de) * 1979-03-06 1986-10-16 Baumgartner, Viktor, 8028 Taufkirchen Abstandsänderungs-Meßanordnung
NL7904724A (nl) * 1979-06-18 1980-12-22 Philips Nv Optische aftastinrichting met fokusseerstelsel.
US4357533A (en) * 1980-07-14 1982-11-02 Discovision Associates Focus detector for an optical disc playback system
US4600832A (en) * 1983-10-28 1986-07-15 Nanometrics Incorporated Method and apparatus for automatic optical focusing on an optically discernible feature on an object
US4742218A (en) * 1985-03-11 1988-05-03 Hitachi, Ltd. Focus error detection apparatus utilizing focusing an front and rear sides of focal planes
JPH0610694B2 (ja) * 1985-04-12 1994-02-09 株式会社日立製作所 自動焦点合せ方法及び装置
US4645347A (en) * 1985-04-30 1987-02-24 Canadian Patents And Development Limited-Societe Canadienne Des Brevets Et D'exploitation Limitee Three dimensional imaging device
CH672376A5 (de) * 1986-07-12 1989-11-15 Wild Heerbrugg Ag
US4844617A (en) * 1988-01-20 1989-07-04 Tencor Instruments Confocal measuring microscope with automatic focusing
JP2718705B2 (ja) * 1988-07-27 1998-02-25 株式会社日立製作所 光音響信号検出方法及びその装置
DE4025577C2 (de) * 1990-08-11 1999-09-09 Fraunhofer Ges Forschung Vorrichtung zum berührungslosen Messen des Abstands von einem Objekt
US5306902A (en) * 1992-09-01 1994-04-26 International Business Machines Corporation Confocal method and apparatus for focusing in projection lithography
DE69424532T2 (de) * 1993-12-23 2001-01-18 Thomson-Csf, Paris Verfahren und optisches system zur aufzeichnung/wiedergabe von information auf einem aufzeichnungsmedium
FR2787232B1 (fr) 1998-12-15 2001-02-23 Thomson Csf Disque d'enregistrement optique anti-piratage et procede de lecture d'un tel disque
US6801260B1 (en) 2000-02-15 2004-10-05 Accu-Sort Systems, Inc. Automatic focusing camera with moving mirror between fixed lens and fixed image sensor
DE10009571A1 (de) * 2000-02-29 2001-09-06 Vision Components Ges Fuer Bil Verfahren und Vorrichtung zum Justieren einer Kamera
US6917421B1 (en) * 2001-10-12 2005-07-12 Kla-Tencor Technologies Corp. Systems and methods for multi-dimensional inspection and/or metrology of a specimen
US20030227614A1 (en) * 2002-06-05 2003-12-11 Taminiau August A. Laser machining apparatus with automatic focusing
US20070164202A1 (en) * 2005-11-16 2007-07-19 Wurz David A Large depth of field line scan camera
DE102006012694B4 (de) * 2006-03-17 2009-03-12 Tropf, Hermann Optische Einrichtung zur Bildaufnahme
US20080135774A1 (en) * 2006-12-08 2008-06-12 Asml Netherlands B.V. Scatterometer, a lithographic apparatus and a focus analysis method
FR2923006B1 (fr) * 2007-10-29 2010-05-14 Signoptic Technologies Dispositif optique pour l'observation de details structurels millimetriques ou submillimetriques d'un objet a comportement speculaire

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3041459A (en) * 1959-06-29 1962-06-26 Comapco Inc Radiant energy control system
GB1199142A (en) * 1966-05-26 1970-07-15 Steel Co Of Wales Ltd Method of Determining the Focussing Error of Optical Instruments
FR1593883A (de) * 1968-02-17 1970-06-01
US3542475A (en) * 1968-08-09 1970-11-24 Alphanumeric Inc Optical focusing
DE2003492A1 (de) * 1970-01-27 1971-08-12 Leitz Ernst Gmbh Messverfahren fuer Schrittgeber zum Messen von Laengen oder Winkeln sowie Anordnungen zur Durchfuehrung dieses Messverfahrens
US3768910A (en) * 1972-05-25 1973-10-30 Zygo Corp Detecting the position of a surface by focus modulating the illuminating beam

Also Published As

Publication number Publication date
FR2222666B1 (de) 1976-11-05
JPS5036120A (de) 1975-04-05
DE2413155A1 (de) 1974-10-03
GB1469435A (en) 1977-04-06
FR2222666A1 (de) 1974-10-18
IT1007385B (it) 1976-10-30
US3912922A (en) 1975-10-14

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