BR8400503A - Processo para fabricacao de semicondutores por remocao de impurezas em tubo fechado - Google Patents

Processo para fabricacao de semicondutores por remocao de impurezas em tubo fechado

Info

Publication number
BR8400503A
BR8400503A BR8400503A BR8400503A BR8400503A BR 8400503 A BR8400503 A BR 8400503A BR 8400503 A BR8400503 A BR 8400503A BR 8400503 A BR8400503 A BR 8400503A BR 8400503 A BR8400503 A BR 8400503A
Authority
BR
Brazil
Prior art keywords
removing impurities
closed tube
manufacturing semiconductors
semiconductors
manufacturing
Prior art date
Application number
BR8400503A
Other languages
English (en)
Portuguese (pt)
Inventor
Li S Chen
Joseph Desalvo
Original Assignee
Westinghouse Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Westinghouse Electric Corp filed Critical Westinghouse Electric Corp
Publication of BR8400503A publication Critical patent/BR8400503A/pt

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P32/00Diffusion of dopants within, into or out of wafers, substrates or parts of devices
    • H10P32/10Diffusion of dopants within, into or out of semiconductor bodies or layers
    • H10P32/12Diffusion of dopants within, into or out of semiconductor bodies or layers between a solid phase and a gaseous phase
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P32/00Diffusion of dopants within, into or out of wafers, substrates or parts of devices
    • H10P32/10Diffusion of dopants within, into or out of semiconductor bodies or layers
    • H10P32/17Diffusion of dopants within, into or out of semiconductor bodies or layers characterised by the semiconductor material
    • H10P32/171Diffusion of dopants within, into or out of semiconductor bodies or layers characterised by the semiconductor material being group IV material
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P36/00Gettering within semiconductor bodies
    • H10P36/03Gettering within semiconductor bodies within silicon bodies
BR8400503A 1983-02-04 1984-02-06 Processo para fabricacao de semicondutores por remocao de impurezas em tubo fechado BR8400503A (pt)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US46443283A 1983-02-04 1983-02-04

Publications (1)

Publication Number Publication Date
BR8400503A true BR8400503A (pt) 1984-09-11

Family

ID=23843930

Family Applications (1)

Application Number Title Priority Date Filing Date
BR8400503A BR8400503A (pt) 1983-02-04 1984-02-06 Processo para fabricacao de semicondutores por remocao de impurezas em tubo fechado

Country Status (9)

Country Link
JP (1) JPS59147438A (https=)
BE (1) BE898841A (https=)
BR (1) BR8400503A (https=)
CA (1) CA1207089A (https=)
DE (1) DE3403108A1 (https=)
FR (1) FR2540672B1 (https=)
GB (1) GB2134711B (https=)
IE (1) IE55119B1 (https=)
IN (1) IN159497B (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005058713B4 (de) * 2005-12-08 2009-04-02 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Reinigung des Volumens von Substraten, Substrat sowie Verwendung des Verfahrens

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL285088A (https=) * 1961-11-18
DE2758576C2 (de) * 1977-12-29 1986-04-03 Ibm Deutschland Gmbh, 7000 Stuttgart Verfahren zum Vermindern des Gehalts an bei der Herstellung von Silicium-Halbleiterbauelementen in das dotierte Halbleiterplättchen gelangtem Schwermetall
JPS56169324A (en) * 1980-05-30 1981-12-26 Nec Home Electronics Ltd Diffusion of impurity

Also Published As

Publication number Publication date
IE840100L (en) 1984-08-04
IE55119B1 (en) 1990-06-06
FR2540672B1 (fr) 1986-05-30
CA1207089A (en) 1986-07-02
BE898841A (fr) 1984-08-03
GB8402533D0 (en) 1984-03-07
GB2134711A (en) 1984-08-15
GB2134711B (en) 1987-04-23
FR2540672A1 (fr) 1984-08-10
IN159497B (https=) 1987-05-23
JPS59147438A (ja) 1984-08-23
DE3403108A1 (de) 1984-08-09

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