BR112016029829A2 - sistema e método para medição in-situ de propriedades de camadas de material, e, meio legível por computador não transitório. - Google Patents

sistema e método para medição in-situ de propriedades de camadas de material, e, meio legível por computador não transitório.

Info

Publication number
BR112016029829A2
BR112016029829A2 BR112016029829A BR112016029829A BR112016029829A2 BR 112016029829 A2 BR112016029829 A2 BR 112016029829A2 BR 112016029829 A BR112016029829 A BR 112016029829A BR 112016029829 A BR112016029829 A BR 112016029829A BR 112016029829 A2 BR112016029829 A2 BR 112016029829A2
Authority
BR
Brazil
Prior art keywords
ice
computer readable
material layer
readable media
transient computer
Prior art date
Application number
BR112016029829A
Other languages
English (en)
Inventor
l perkins David
M Price James
Gao Li
Atkinson Robert
Original Assignee
Halliburton Energy Services Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Halliburton Energy Services Inc filed Critical Halliburton Energy Services Inc
Publication of BR112016029829A2 publication Critical patent/BR112016029829A2/pt

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B17/00—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations
    • G01B17/02—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B17/00—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations
    • G01B17/02—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations for measuring thickness
    • G01B17/025—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations for measuring thickness for measuring thickness of coating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/043—Analysing solids in the interior, e.g. by shear waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2462—Probes with waveguides, e.g. SAW devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/44—Processing the detected response signal, e.g. electronic circuits specially adapted therefor
    • G01N29/46—Processing the detected response signal, e.g. electronic circuits specially adapted therefor by spectral analysis, e.g. Fourier analysis or wavelet analysis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/023—Solids
    • G01N2291/0237—Thin materials, e.g. paper, membranes, thin films
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/02854—Length, thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0423—Surface waves, e.g. Rayleigh waves, Love waves

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Immunology (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Optics & Photonics (AREA)
  • Mathematical Physics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Acoustics & Sound (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Abstract

os sistemas e os métodos de mediação in situ das propriedades físicas de um dispositivo de elemento computacional integrado (ice) usando a espectroscopia de onda acústica de superfície (saw) durante a fabricação são fornecidos. o sistema inclui um dispositivo de medição que tem uma fonte da bomba que fornece um pulso de excitação que gera uma saw na superfície exterior do ice. o sistema fornece uma radiação de sonda sendo interagida com a superfície exterior do dispositivo de ice e formar uma radiação interagida e um transdutor óptico configurado para receber a radiação interagida e formar um sinal. um analisador recebe o sinal do transdutor óptico e determina uma propriedade de uma camada de material na superfície exterior do dispositivo de ice e um segundo dispositivo de medição usando pelo menos um dentre monitorização óptico, elipsometria e espectroscopia óptica, está configurado para medir uma segunda propriedade no dispositivo ice.
BR112016029829A 2014-07-30 2014-07-30 sistema e método para medição in-situ de propriedades de camadas de material, e, meio legível por computador não transitório. BR112016029829A2 (pt)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US2014/048791 WO2016018278A1 (en) 2014-07-30 2014-07-30 In-situ analysis of ice using surface acoustic wave spectroscopy

Publications (1)

Publication Number Publication Date
BR112016029829A2 true BR112016029829A2 (pt) 2017-08-22

Family

ID=55217998

Family Applications (1)

Application Number Title Priority Date Filing Date
BR112016029829A BR112016029829A2 (pt) 2014-07-30 2014-07-30 sistema e método para medição in-situ de propriedades de camadas de material, e, meio legível por computador não transitório.

Country Status (5)

Country Link
US (1) US20160265910A1 (pt)
EP (1) EP3146292A4 (pt)
BR (1) BR112016029829A2 (pt)
MX (1) MX368144B (pt)
WO (1) WO2016018278A1 (pt)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6658406B2 (ja) 2016-08-31 2020-03-04 株式会社デンソー 炭化珪素半導体装置の製造方法
DE102018122391A1 (de) * 2018-09-13 2020-03-19 Sikora Ag Vorrichtung und Verfahren zum Detektieren eines Gegenstandes
US20220057368A1 (en) * 2019-04-08 2022-02-24 Chevron U.S.A. Inc. Systems and methods for modeling substance characteristics

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5812261A (en) * 1992-07-08 1998-09-22 Active Impulse Systems, Inc. Method and device for measuring the thickness of opaque and transparent films
US6175416B1 (en) * 1996-08-06 2001-01-16 Brown University Research Foundation Optical stress generator and detector
US6217720B1 (en) * 1997-06-03 2001-04-17 National Research Council Of Canada Multi-layer reactive sputtering method with reduced stabilization time
US6795198B1 (en) * 1998-05-28 2004-09-21 Martin Fuchs Method and device for measuring thin films and semiconductor substrates using reflection mode geometry
US6393915B1 (en) * 1999-07-29 2002-05-28 Koninklijke Philips Electronics N.V. Method and device for simultaneously measuring multiple properties of multilayer films
US6381019B1 (en) * 2000-06-30 2002-04-30 Brown University Research Foundation Ultrasonic generator and detector using an optical mask having a grating for launching a plurality of spatially distributed, time varying strain pulses in a sample
US7006221B2 (en) * 2001-07-13 2006-02-28 Rudolph Technologies, Inc. Metrology system with spectroscopic ellipsometer and photoacoustic measurements
US6786099B2 (en) * 2002-02-14 2004-09-07 Kla-Tencor Technologies Corporation Surface photo-acoustic film measurement device and technique
US8960294B2 (en) * 2011-08-05 2015-02-24 Halliburton Energy Services, Inc. Methods for monitoring fluids within or produced from a subterranean formation during fracturing operations using opticoanalytical devices
US9261461B2 (en) * 2011-08-05 2016-02-16 Halliburton Energy Services, Inc. Systems and methods for monitoring oil/gas separation processes
US9575209B2 (en) * 2012-12-22 2017-02-21 Halliburton Energy Services, Inc. Remote sensing methods and systems using nonlinear light conversion and sense signal transformation

Also Published As

Publication number Publication date
MX2016017329A (es) 2017-05-01
WO2016018278A1 (en) 2016-02-04
US20160265910A1 (en) 2016-09-15
EP3146292A4 (en) 2018-01-17
EP3146292A1 (en) 2017-03-29
MX368144B (es) 2019-09-20

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Legal Events

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B06U Preliminary requirement: requests with searches performed by other patent offices: procedure suspended [chapter 6.21 patent gazette]
B11B Dismissal acc. art. 36, par 1 of ipl - no reply within 90 days to fullfil the necessary requirements