BG41744A1 - Method for control of chimico= thermic processing of work- pieces with glowing dicharge in medium of processing gas and device for implementing this method - Google Patents
Method for control of chimico= thermic processing of work- pieces with glowing dicharge in medium of processing gas and device for implementing this methodInfo
- Publication number
- BG41744A1 BG41744A1 BG8467672A BG6767284A BG41744A1 BG 41744 A1 BG41744 A1 BG 41744A1 BG 8467672 A BG8467672 A BG 8467672A BG 6767284 A BG6767284 A BG 6767284A BG 41744 A1 BG41744 A1 BG 41744A1
- Authority
- BG
- Bulgaria
- Prior art keywords
- processing
- chimico
- dicharge
- glowing
- implementing
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32917—Plasma diagnostics
- H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
BG8467672A BG41744A1 (en) | 1984-11-26 | 1984-11-26 | Method for control of chimico= thermic processing of work- pieces with glowing dicharge in medium of processing gas and device for implementing this method |
DD85283100A DD284132A7 (de) | 1984-11-26 | 1985-11-22 | Verfahren zur steuerung der waermebehandlung von werkstuecken durch glimmentladung im gasmedium und einrichtung zur realisierung des verfahrens |
HU854492A HU198969B (en) | 1984-11-26 | 1985-11-25 | Process for controlling chemical-thermal treatment of workpieces, carried out in handling gas medium by gas discharge, and equipment for realizing the process |
DE8585114999T DE3568193D1 (en) | 1984-11-26 | 1985-11-26 | Method and apparatus for controlling the chemical-thermal treatment of work pieces in a flow discharge |
EP85114999A EP0183230B1 (fr) | 1984-11-26 | 1985-11-26 | Procédé et dispositif de réglage d'un processus de traitement thermique d'articles dans une décharge luminescente |
US06/802,211 US4648952A (en) | 1984-11-26 | 1985-11-26 | Method of controlling thermochemical treatment of workpieces in glow discharge in a treating gas medium and device which embodies this method |
JP60263921A JPS61210173A (ja) | 1984-11-26 | 1985-11-26 | ワ−クピ−スの熱化学的処理制御方法および装置 |
IN967/MAS/85A IN166299B (fr) | 1984-11-26 | 1985-11-29 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
BG8467672A BG41744A1 (en) | 1984-11-26 | 1984-11-26 | Method for control of chimico= thermic processing of work- pieces with glowing dicharge in medium of processing gas and device for implementing this method |
Publications (1)
Publication Number | Publication Date |
---|---|
BG41744A1 true BG41744A1 (en) | 1987-08-14 |
Family
ID=3914660
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BG8467672A BG41744A1 (en) | 1984-11-26 | 1984-11-26 | Method for control of chimico= thermic processing of work- pieces with glowing dicharge in medium of processing gas and device for implementing this method |
Country Status (8)
Country | Link |
---|---|
US (1) | US4648952A (fr) |
EP (1) | EP0183230B1 (fr) |
JP (1) | JPS61210173A (fr) |
BG (1) | BG41744A1 (fr) |
DD (1) | DD284132A7 (fr) |
DE (1) | DE3568193D1 (fr) |
HU (1) | HU198969B (fr) |
IN (1) | IN166299B (fr) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1990002216A1 (fr) * | 1988-08-25 | 1990-03-08 | Vac-Tec Systems, Inc. | Appareil et procede de revetement double par deposition en phase gazeuse par procede physique |
US4913790A (en) * | 1988-03-25 | 1990-04-03 | Tokyo Electron Limited | Treating method |
US5234561A (en) * | 1988-08-25 | 1993-08-10 | Hauzer Industries Bv | Physical vapor deposition dual coating process |
JP2529031B2 (ja) * | 1991-01-30 | 1996-08-28 | 株式会社芝浦製作所 | スパッタリング装置 |
US5254237A (en) * | 1991-03-01 | 1993-10-19 | Snaper Alvin A | Plasma arc apparatus for producing diamond semiconductor devices |
DE4127504A1 (de) * | 1991-08-20 | 1993-02-25 | Leybold Ag | Einrichtung zur unterdrueckung von lichtboegen |
RU2048601C1 (ru) * | 1993-12-20 | 1995-11-20 | Рыжов Николай Михайлович | Способ диагностики процесса химико-термической обработки сталей и сплавов в тлеющем разряде и устройство для его осуществления |
WO1998026105A1 (fr) * | 1996-12-11 | 1998-06-18 | Osipov, Dmitry Evgenievich | Methode d'estimation des parametres d'une atmosphere ionisee lors du traitement chimico-thermique d'aciers et d'alliages dans une decharge corona et dispositif a cet effet |
CA2609975A1 (fr) * | 2005-06-03 | 2006-12-14 | Mark T. Arnold | Dispositif de prelavage pour nettoyage de la vaisselle |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1068972B (de) * | 1959-11-12 | Dortmund-Hörder Hüttenunion Aktiengesellschaft, Dortmund | Vorrichtung zum Betreiben stromstarker Glimmentladungen in Entladungsgefäßen, insbesondere zur Behandlung von in das Entladungsgefäß eingebrachten Körpern | |
BE569245A (fr) * | 1953-12-09 | |||
BE546604A (fr) * | 1955-04-02 | |||
FR1541370A (fr) * | 1966-11-08 | 1968-10-04 | Berghaus Elektrophysik Anst | Procédé et dispositif de contrôle du comportement électrique d'une décharge luminescente à forte intensité, pour des opérations métallurgiques |
DE2606396C3 (de) * | 1976-02-18 | 1979-01-04 | Ionit Anstalt Bernhard Berghaus, Vaduz | Vorrichtung zum Aufheizen und Einstellen einer vorgegebenen Behandlungstemperatur von Werkstücken mittels stromstarker Glimmentladung |
DE2606395C3 (de) * | 1976-02-18 | 1979-01-18 | Ionit Anstalt Bernhard Berghaus, Vaduz | Verfahren und Vorrichtung zur Überwachung des elektrischen Verhaltens einer stromstarken Glimmentladung |
JPS5929669B2 (ja) * | 1977-08-25 | 1984-07-21 | 石川島播磨重工業株式会社 | グロ−放電処理装置の運転制御装置 |
JPS5435138A (en) * | 1977-08-25 | 1979-03-15 | Ishikawajima Harima Heavy Ind Co Ltd | Automatic returning method for abnormal discharge generating time at glow discharge processing apparatus |
US4331856A (en) * | 1978-10-06 | 1982-05-25 | Wellman Thermal Systems Corporation | Control system and method of controlling ion nitriding apparatus |
US4313783A (en) * | 1980-05-19 | 1982-02-02 | Branson International Plasma Corporation | Computer controlled system for processing semiconductor wafers |
US4396478A (en) * | 1981-06-15 | 1983-08-02 | Aizenshtein Anatoly G | Method of control of chemico-thermal treatment of workpieces in glow discharge and a device for carrying out the method |
US4500408A (en) * | 1983-07-19 | 1985-02-19 | Varian Associates, Inc. | Apparatus for and method of controlling sputter coating |
US4533449A (en) * | 1984-04-16 | 1985-08-06 | The Perkin-Elmer Corporation | Rapid surface figuring by selective deposition |
-
1984
- 1984-11-26 BG BG8467672A patent/BG41744A1/xx unknown
-
1985
- 1985-11-22 DD DD85283100A patent/DD284132A7/xx not_active IP Right Cessation
- 1985-11-25 HU HU854492A patent/HU198969B/hu not_active IP Right Cessation
- 1985-11-26 US US06/802,211 patent/US4648952A/en not_active Expired - Fee Related
- 1985-11-26 DE DE8585114999T patent/DE3568193D1/de not_active Expired
- 1985-11-26 JP JP60263921A patent/JPS61210173A/ja active Pending
- 1985-11-26 EP EP85114999A patent/EP0183230B1/fr not_active Expired
- 1985-11-29 IN IN967/MAS/85A patent/IN166299B/en unknown
Also Published As
Publication number | Publication date |
---|---|
DE3568193D1 (en) | 1989-03-16 |
IN166299B (fr) | 1990-04-07 |
US4648952A (en) | 1987-03-10 |
HU198969B (en) | 1989-12-28 |
JPS61210173A (ja) | 1986-09-18 |
DD284132A7 (de) | 1990-11-07 |
EP0183230B1 (fr) | 1989-02-08 |
EP0183230A2 (fr) | 1986-06-04 |
HUT39211A (en) | 1986-08-28 |
EP0183230A3 (en) | 1987-02-04 |
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