BE879052A - Energie-overdrachtsnetwerk - Google Patents

Energie-overdrachtsnetwerk

Info

Publication number
BE879052A
BE879052A BE2/58102A BE2058102A BE879052A BE 879052 A BE879052 A BE 879052A BE 2/58102 A BE2/58102 A BE 2/58102A BE 2058102 A BE2058102 A BE 2058102A BE 879052 A BE879052 A BE 879052A
Authority
BE
Belgium
Prior art keywords
energy transfer
transfer network
network
energy
transfer
Prior art date
Application number
BE2/58102A
Other languages
English (en)
Original Assignee
Coulter Systems Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Coulter Systems Corp filed Critical Coulter Systems Corp
Publication of BE879052A publication Critical patent/BE879052A/nl

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32733—Means for moving the material to be treated
    • H01J37/32752—Means for moving the material to be treated for moving the material across the discharge
    • H01J37/32761—Continuous moving
    • H01J37/3277—Continuous moving of continuous material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3444—Associated circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P5/00—Coupling devices of the waveguide type

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
BE2/58102A 1978-09-28 1979-09-28 Energie-overdrachtsnetwerk BE879052A (nl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/945,805 US4284489A (en) 1978-09-28 1978-09-28 Power transfer network

Publications (1)

Publication Number Publication Date
BE879052A true BE879052A (nl) 1980-03-28

Family

ID=25483576

Family Applications (1)

Application Number Title Priority Date Filing Date
BE2/58102A BE879052A (nl) 1978-09-28 1979-09-28 Energie-overdrachtsnetwerk

Country Status (2)

Country Link
US (1) US4284489A (nl)
BE (1) BE879052A (nl)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4368092A (en) * 1981-04-02 1983-01-11 The Perkin-Elmer Corporation Apparatus for the etching for semiconductor devices
US4494043A (en) * 1981-07-02 1985-01-15 Physics International Company Imploding plasma device
US4584079A (en) * 1983-10-11 1986-04-22 Honeywell Inc. Step shape tailoring by phase angle variation RF bias sputtering
US4557819A (en) * 1984-07-20 1985-12-10 Varian Associates, Inc. System for igniting and controlling a wafer processing plasma
US4610775A (en) * 1985-07-26 1986-09-09 Westinghouse Electric Corp. Method and apparatus for clearing short-circuited, high-voltage cathodes in a sputtering chamber
US4802080A (en) * 1988-03-18 1989-01-31 American Telephone And Telegraph Company, At&T Information Systems Power transfer circuit including a sympathetic resonator
US5141651A (en) * 1989-06-12 1992-08-25 University Of Utah Pinched channel inlet system for reduced relaxation effects and stopless flow injection in field-flow fractionation
US6098568A (en) * 1997-12-01 2000-08-08 Applied Materials, Inc. Mixed frequency CVD apparatus
US7004107B1 (en) * 1997-12-01 2006-02-28 Applied Materials Inc. Method and apparatus for monitoring and adjusting chamber impedance
US6136388A (en) * 1997-12-01 2000-10-24 Applied Materials, Inc. Substrate processing chamber with tunable impedance
CN110800376B (zh) 2017-06-27 2022-04-01 佳能安内华股份有限公司 等离子体处理装置
KR20220031132A (ko) 2017-06-27 2022-03-11 캐논 아네르바 가부시키가이샤 플라스마 처리 장치
SG11201912567RA (en) * 2017-06-27 2020-01-30 Canon Anelva Corp Plasma processing apparatus
KR102257134B1 (ko) * 2017-06-27 2021-05-26 캐논 아네르바 가부시키가이샤 플라스마 처리 장치
SG11202009122YA (en) * 2018-06-26 2020-10-29 Canon Anelva Corp Plasma processing apparatus, plasma processing method, program, and memory medium
IL281747B2 (en) * 2021-03-22 2024-04-01 N T Tao Ltd System and method for creating plasma with high efficiency

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL143199B (nl) * 1947-11-29 Mizusawa Industrial Chem Werkwijze voor het bereiden van fosforzuur uit ruw fosfaat.
US2756393A (en) * 1952-10-03 1956-07-24 Philco Corp Constant bandwidth coupling system
US3436333A (en) * 1966-08-23 1969-04-01 Lab For Electronics Inc Impedance matching network for gas reaction apparatus
US3569777A (en) * 1969-07-28 1971-03-09 Int Plasma Corp Impedance matching network for plasma-generating apparatus
US3704219A (en) * 1971-04-07 1972-11-28 Mcdowell Electronics Inc Impedance matching network for use with sputtering apparatus
US3803019A (en) * 1971-10-07 1974-04-09 Hewlett Packard Co Sputtering system
US3767551A (en) * 1971-11-01 1973-10-23 Varian Associates Radio frequency sputter apparatus and method
US3849283A (en) * 1972-05-01 1974-11-19 Era Patents Ltd Sputtering apparatus
US3892650A (en) * 1972-12-29 1975-07-01 Ibm Chemical sputtering purification process

Also Published As

Publication number Publication date
US4284489A (en) 1981-08-18

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