BE864677A - Laser a gaz pulse a ionisation prealable - Google Patents

Laser a gaz pulse a ionisation prealable

Info

Publication number
BE864677A
BE864677A BE185756A BE185756A BE864677A BE 864677 A BE864677 A BE 864677A BE 185756 A BE185756 A BE 185756A BE 185756 A BE185756 A BE 185756A BE 864677 A BE864677 A BE 864677A
Authority
BE
Belgium
Prior art keywords
gas laser
pulsed gas
ionized
ionized pulsed
laser
Prior art date
Application number
BE185756A
Other languages
English (en)
French (fr)
Original Assignee
Xonics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xonics Inc filed Critical Xonics Inc
Publication of BE864677A publication Critical patent/BE864677A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0971—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited
    • H01S3/09713—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited with auxiliary ionisation, e.g. double discharge excitation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0971—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited
    • H01S3/0973—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited having a travelling wave passing through the active medium

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
BE185756A 1977-07-18 1978-03-08 Laser a gaz pulse a ionisation prealable BE864677A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/816,696 US4223279A (en) 1977-07-18 1977-07-18 Pulsed electric discharge laser utilizing water dielectric blumlein transmission line

Publications (1)

Publication Number Publication Date
BE864677A true BE864677A (fr) 1978-07-03

Family

ID=25221371

Family Applications (1)

Application Number Title Priority Date Filing Date
BE185756A BE864677A (fr) 1977-07-18 1978-03-08 Laser a gaz pulse a ionisation prealable

Country Status (7)

Country Link
US (1) US4223279A (xx)
JP (1) JPS5421297A (xx)
BE (1) BE864677A (xx)
DE (1) DE2811198A1 (xx)
FR (1) FR2398398A1 (xx)
IT (1) IT1105916B (xx)
NL (1) NL7801338A (xx)

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US7061959B2 (en) * 2001-04-18 2006-06-13 Tcz Gmbh Laser thin film poly-silicon annealing system
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US7196342B2 (en) 2004-03-10 2007-03-27 Cymer, Inc. Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source
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US7482609B2 (en) 2005-02-28 2009-01-27 Cymer, Inc. LPP EUV light source drive laser system
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JP5687488B2 (ja) 2010-02-22 2015-03-18 ギガフォトン株式会社 極端紫外光生成装置
US8941967B2 (en) * 2010-11-10 2015-01-27 The United States Of America, As Represented By The Secretary Of The Navy Underwater laser-guided discharge
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US8683907B1 (en) 2011-09-07 2014-04-01 Xtreme Ads Limited Electrical discharge system and method for neutralizing explosive devices and electronics
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US4064465A (en) * 1973-05-30 1977-12-20 Westinghouse Electric Corporation Laser cavities with gas flow through the electrodes
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US3864643A (en) * 1973-11-23 1975-02-04 Us Navy Traveling wave vacuum spark and a travelling wave flashlamp

Also Published As

Publication number Publication date
US4223279A (en) 1980-09-16
DE2811198A1 (de) 1979-02-01
NL7801338A (nl) 1979-01-22
IT7850301A0 (it) 1978-07-14
IT1105916B (it) 1985-11-11
JPS5421297A (en) 1979-02-17
FR2398398A1 (fr) 1979-02-16
FR2398398B3 (xx) 1980-11-14

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