FR2398398A1 - Laser a gaz pulse a ionisation prealable - Google Patents

Laser a gaz pulse a ionisation prealable

Info

Publication number
FR2398398A1
FR2398398A1 FR7806665A FR7806665A FR2398398A1 FR 2398398 A1 FR2398398 A1 FR 2398398A1 FR 7806665 A FR7806665 A FR 7806665A FR 7806665 A FR7806665 A FR 7806665A FR 2398398 A1 FR2398398 A1 FR 2398398A1
Authority
FR
France
Prior art keywords
gas laser
pulsed gas
ionized
plates
transmission line
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7806665A
Other languages
English (en)
Other versions
FR2398398B3 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xonics Inc
Original Assignee
Xonics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xonics Inc filed Critical Xonics Inc
Publication of FR2398398A1 publication Critical patent/FR2398398A1/fr
Application granted granted Critical
Publication of FR2398398B3 publication Critical patent/FR2398398B3/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0971—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited
    • H01S3/09713—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited with auxiliary ionisation, e.g. double discharge excitation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0971—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited
    • H01S3/0973—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited having a travelling wave passing through the active medium

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

L'invention concerne un laser à gaz pulsé. Elle se rapporte à l'ionisation préalable d'un laser à gaz par utilisation d'une ligne de transmission de Blumlein repliée formée par des plaques 21 à 24. Le diélectrique liquide placé entre les plaques de la ligne de transmission est l'eau. Application à la réalisation de lasers à gaz pulsé de très grande puissance.
FR7806665A 1977-07-18 1978-03-08 Laser a gaz pulse a ionisation prealable Granted FR2398398A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/816,696 US4223279A (en) 1977-07-18 1977-07-18 Pulsed electric discharge laser utilizing water dielectric blumlein transmission line

Publications (2)

Publication Number Publication Date
FR2398398A1 true FR2398398A1 (fr) 1979-02-16
FR2398398B3 FR2398398B3 (fr) 1980-11-14

Family

ID=25221371

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7806665A Granted FR2398398A1 (fr) 1977-07-18 1978-03-08 Laser a gaz pulse a ionisation prealable

Country Status (7)

Country Link
US (1) US4223279A (fr)
JP (1) JPS5421297A (fr)
BE (1) BE864677A (fr)
DE (1) DE2811198A1 (fr)
FR (1) FR2398398A1 (fr)
IT (1) IT1105916B (fr)
NL (1) NL7801338A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0092088A2 (fr) * 1982-04-16 1983-10-26 Siemens Aktiengesellschaft Dispositif pour l'adaptation des circuits de mise en forme d'impulsions aux nécessités du circuit d'excitation d'un dipositif laser à haute énergie du type TE

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US7016388B2 (en) * 2002-05-07 2006-03-21 Cymer, Inc. Laser lithography light source with beam delivery
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US7217941B2 (en) 2003-04-08 2007-05-15 Cymer, Inc. Systems and methods for deflecting plasma-generated ions to prevent the ions from reaching an internal component of an EUV light source
US7277188B2 (en) 2003-04-29 2007-10-02 Cymer, Inc. Systems and methods for implementing an interaction between a laser shaped as a line beam and a film deposited on a substrate
US7209507B2 (en) * 2003-07-30 2007-04-24 Cymer, Inc. Method and apparatus for controlling the output of a gas discharge MOPA laser system
US6873418B1 (en) 2003-09-30 2005-03-29 Cymer, Inc. Optical mountings for gas discharge MOPA laser spectral analysis module
US6894785B2 (en) * 2003-09-30 2005-05-17 Cymer, Inc. Gas discharge MOPA laser spectral analysis module
US7277464B2 (en) * 2003-12-18 2007-10-02 Cymer, Inc. Method and apparatus for controlling the output of a gas discharge laser system
US20060146906A1 (en) * 2004-02-18 2006-07-06 Cymer, Inc. LLP EUV drive laser
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US20050286599A1 (en) * 2004-06-29 2005-12-29 Rafac Robert J Method and apparatus for gas discharge laser output light coherency reduction
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JP5687488B2 (ja) 2010-02-22 2015-03-18 ギガフォトン株式会社 極端紫外光生成装置
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0092088A2 (fr) * 1982-04-16 1983-10-26 Siemens Aktiengesellschaft Dispositif pour l'adaptation des circuits de mise en forme d'impulsions aux nécessités du circuit d'excitation d'un dipositif laser à haute énergie du type TE
EP0092088A3 (en) * 1982-04-16 1985-06-19 Kraftwerk Union Aktiengesellschaft Arrangement for adapting pulse shaping networks to the requirements of the excitation circuit of a high-energy te laser system

Also Published As

Publication number Publication date
US4223279A (en) 1980-09-16
IT7850301A0 (it) 1978-07-14
IT1105916B (it) 1985-11-11
DE2811198A1 (de) 1979-02-01
FR2398398B3 (fr) 1980-11-14
NL7801338A (nl) 1979-01-22
JPS5421297A (en) 1979-02-17
BE864677A (fr) 1978-07-03

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