BE832966A - Liquide de decapage pour de l'aluminium - Google Patents

Liquide de decapage pour de l'aluminium

Info

Publication number
BE832966A
BE832966A BE159656A BE159656A BE832966A BE 832966 A BE832966 A BE 832966A BE 159656 A BE159656 A BE 159656A BE 159656 A BE159656 A BE 159656A BE 832966 A BE832966 A BE 832966A
Authority
BE
Belgium
Prior art keywords
aluminum
pickling liquid
pickling
liquid
Prior art date
Application number
BE159656A
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of BE832966A publication Critical patent/BE832966A/fr

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
    • H01L21/321—After treatment
    • H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
    • H01L21/32133—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only
    • H01L21/32134—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by liquid etching only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • C23F1/32—Alkaline compositions
    • C23F1/36—Alkaline compositions for etching aluminium or alloys thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
BE159656A 1974-09-03 1975-09-01 Liquide de decapage pour de l'aluminium BE832966A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7411645A NL7411645A (nl) 1974-09-03 1974-09-03 Etsvloeistof voor aluminium.

Publications (1)

Publication Number Publication Date
BE832966A true BE832966A (fr) 1976-03-01

Family

ID=19822017

Family Applications (1)

Application Number Title Priority Date Filing Date
BE159656A BE832966A (fr) 1974-09-03 1975-09-01 Liquide de decapage pour de l'aluminium

Country Status (11)

Country Link
JP (1) JPS5150834A (fr)
AT (1) AT336974B (fr)
BE (1) BE832966A (fr)
CA (1) CA1055823A (fr)
CH (1) CH616708A5 (fr)
DE (1) DE2537154A1 (fr)
FR (1) FR2283943A1 (fr)
GB (1) GB1499037A (fr)
IT (1) IT1042185B (fr)
NL (1) NL7411645A (fr)
SE (1) SE7509691L (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3047588C2 (de) * 1980-12-17 1984-07-12 Siemens AG, 1000 Berlin und 8000 München Ätzflüssigkeit für Aufdampfschichten und Verfahren zur Ätzung von Dünnfilmstrukturen
US4425183A (en) * 1983-08-08 1984-01-10 Ncr Corporation Metal bevel process for multi-level metal semiconductor applications

Also Published As

Publication number Publication date
NL7411645A (nl) 1976-03-05
AT336974B (de) 1977-06-10
FR2283943B1 (fr) 1980-09-12
FR2283943A1 (fr) 1976-04-02
GB1499037A (en) 1978-01-25
JPS5150834A (fr) 1976-05-04
DE2537154A1 (de) 1976-03-18
SE7509691L (sv) 1976-03-04
CA1055823A (fr) 1979-06-05
CH616708A5 (en) 1980-04-15
IT1042185B (it) 1980-01-30
ATA672375A (de) 1976-09-15

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