BE797424A - Procede de fabrication de tubes ou corps creux semi-conducteurs - Google Patents

Procede de fabrication de tubes ou corps creux semi-conducteurs

Info

Publication number
BE797424A
BE797424A BE129344A BE129344A BE797424A BE 797424 A BE797424 A BE 797424A BE 129344 A BE129344 A BE 129344A BE 129344 A BE129344 A BE 129344A BE 797424 A BE797424 A BE 797424A
Authority
BE
Belgium
Prior art keywords
bodies
manufacturing semiconductor
hollow tubes
semiconductor hollow
tubes
Prior art date
Application number
BE129344A
Other languages
English (en)
French (fr)
Original Assignee
Wacker Chemitronic
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19722215143 external-priority patent/DE2215143C3/de
Application filed by Wacker Chemitronic filed Critical Wacker Chemitronic
Publication of BE797424A publication Critical patent/BE797424A/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/24—Deposition of silicon only
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/025—Deposition multi-step
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/073—Hollow body
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/122—Polycrystalline

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Chemical Vapour Deposition (AREA)
  • Catalysts (AREA)
BE129344A 1972-03-28 1973-03-28 Procede de fabrication de tubes ou corps creux semi-conducteurs BE797424A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19722215143 DE2215143C3 (de) 1972-03-28 Verfahren zur Herstellung von Halbleiterhohlkörpern oder -Rohren

Publications (1)

Publication Number Publication Date
BE797424A true BE797424A (fr) 1973-09-28

Family

ID=5840435

Family Applications (1)

Application Number Title Priority Date Filing Date
BE129344A BE797424A (fr) 1972-03-28 1973-03-28 Procede de fabrication de tubes ou corps creux semi-conducteurs

Country Status (5)

Country Link
US (1) US3867497A (es)
JP (1) JPS5134263B2 (es)
BE (1) BE797424A (es)
GB (1) GB1420388A (es)
NL (1) NL7304259A (es)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE837370A (fr) * 1975-04-15 1976-05-03 Procede de preparation de monocristaux de silicium dopes par activation avec des neutrons
DE2618293A1 (de) * 1976-04-27 1977-11-17 Papst Motoren Kg Kollektorloser gleichstrommotor
US4271235A (en) * 1979-05-10 1981-06-02 Lawrence Hill Method of obtaining polycrystalline silicon and workpiece useful therein
US4238436A (en) * 1979-05-10 1980-12-09 General Instrument Corporation Method of obtaining polycrystalline silicon
US4804633A (en) * 1988-02-18 1989-02-14 Northern Telecom Limited Silicon-on-insulator substrates annealed in polysilicon tube
US6093330A (en) * 1997-06-02 2000-07-25 Cornell Research Foundation, Inc. Microfabrication process for enclosed microstructures
US6180536B1 (en) 1998-06-04 2001-01-30 Cornell Research Foundation, Inc. Suspended moving channels and channel actuators for microfluidic applications and method for making
WO2002060620A1 (en) 2001-01-31 2002-08-08 G.T. Equipment Technologies Inc. Method of producing shaped bodies of semiconductor materials
US20020170487A1 (en) * 2001-05-18 2002-11-21 Raanan Zehavi Pre-coated silicon fixtures used in a high temperature process
JP6485251B2 (ja) 2015-06-29 2019-03-20 住友電気工業株式会社 変換装置及びその制御方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE666629A (es) * 1964-08-04
JPS4813268B1 (es) * 1968-10-09 1973-04-26
US3576932A (en) * 1969-02-17 1971-04-27 Texas Instruments Inc Sintering vapor deposited silica on a mandrel designed to reduce shrinkage
DE1943359A1 (de) * 1969-08-26 1971-03-04 Siemens Ag Verfahren zum Herstellen eines mindestens einseitig offenen Hohlkoerpers aus Halbleitermaterial
US3698936A (en) * 1969-12-19 1972-10-17 Texas Instruments Inc Production of very high purity metal oxide articles
US3679470A (en) * 1970-03-13 1972-07-25 Motorola Inc Method for producing high purity monocrystalline silicon
US3734770A (en) * 1970-12-14 1973-05-22 Motorola Inc Nitrogen nucleation process for the chemical vapor deposition of polycrystalline silicon from sici4

Also Published As

Publication number Publication date
DE2215143B2 (de) 1976-02-26
DE2215143A1 (de) 1973-10-04
NL7304259A (es) 1973-10-02
JPS5134263B2 (es) 1976-09-25
GB1420388A (en) 1976-01-07
JPS499967A (es) 1974-01-29
US3867497A (en) 1975-02-18

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