BE781443A - Dispositif de revetement de plaques de grande surface en verre ou autres matieres par pulverisation cathodique - Google Patents

Dispositif de revetement de plaques de grande surface en verre ou autres matieres par pulverisation cathodique

Info

Publication number
BE781443A
BE781443A BE781443A BE781443A BE781443A BE 781443 A BE781443 A BE 781443A BE 781443 A BE781443 A BE 781443A BE 781443 A BE781443 A BE 781443A BE 781443 A BE781443 A BE 781443A
Authority
BE
Belgium
Prior art keywords
glass
materials
large surface
surface plates
coating large
Prior art date
Application number
BE781443A
Other languages
English (en)
French (fr)
Original Assignee
Delog Detag Flachglas Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE2116190A external-priority patent/DE2116190C3/de
Application filed by Delog Detag Flachglas Ag filed Critical Delog Detag Flachglas Ag
Publication of BE781443A publication Critical patent/BE781443A/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
BE781443A 1971-04-02 1972-03-30 Dispositif de revetement de plaques de grande surface en verre ou autres matieres par pulverisation cathodique BE781443A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2116190A DE2116190C3 (de) 1971-04-02 1971-04-02 Vorrichtung zum Beschichten großflächiger Platten wie Glasscheiben, Keramik- oder Kunststoffplatten und dergleichen mittels Kathodenzerstäubung

Publications (1)

Publication Number Publication Date
BE781443A true BE781443A (fr) 1972-07-17

Family

ID=5803722

Family Applications (1)

Application Number Title Priority Date Filing Date
BE781443A BE781443A (fr) 1971-04-02 1972-03-30 Dispositif de revetement de plaques de grande surface en verre ou autres matieres par pulverisation cathodique

Country Status (4)

Country Link
US (1) US3738928A (enExample)
BE (1) BE781443A (enExample)
FR (1) FR2132033B1 (enExample)
GB (1) GB1323274A (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2202169B2 (enExample) * 1972-10-07 1977-05-27 Delog Detag Flachglas Ag
US3976555A (en) * 1975-03-20 1976-08-24 Coulter Information Systems, Inc. Method and apparatus for supplying background gas in a sputtering chamber
US4194962A (en) * 1978-12-20 1980-03-25 Advanced Coating Technology, Inc. Cathode for sputtering
US4274936A (en) * 1979-04-30 1981-06-23 Advanced Coating Technology, Inc. Vacuum deposition system and method
US20140246311A1 (en) * 2013-03-01 2014-09-04 Poole Ventura, Inc. In-situ sputtering apparatus

Also Published As

Publication number Publication date
GB1323274A (en) 1973-07-11
FR2132033B1 (enExample) 1975-10-24
US3738928A (en) 1973-06-12
FR2132033A1 (enExample) 1972-11-17

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Legal Events

Date Code Title Description
RE Patent lapsed

Owner name: FLACHGLAS A.G. DELOG DETAG

Effective date: 19890331