BE771188A - Systeme de creuset pour le tirage d'un cristal de semi-conducteur - Google Patents

Systeme de creuset pour le tirage d'un cristal de semi-conducteur

Info

Publication number
BE771188A
BE771188A BE771188A BE771188A BE771188A BE 771188 A BE771188 A BE 771188A BE 771188 A BE771188 A BE 771188A BE 771188 A BE771188 A BE 771188A BE 771188 A BE771188 A BE 771188A
Authority
BE
Belgium
Prior art keywords
semiconductor crystal
crucible system
crucible
crystal
semiconductor
Prior art date
Application number
BE771188A
Other languages
English (en)
Inventor
H G Kramer
Original Assignee
Monsanto Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Monsanto Co filed Critical Monsanto Co
Publication of BE771188A publication Critical patent/BE771188A/fr

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/14—Heating of the melt or the crystallised materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10S117/90—Apparatus characterized by composition or treatment thereof, e.g. surface finish, surface coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/1068—Seed pulling including heating or cooling details [e.g., shield configuration]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
BE771188A 1970-08-11 1971-08-11 Systeme de creuset pour le tirage d'un cristal de semi-conducteur BE771188A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US6293870A 1970-08-11 1970-08-11

Publications (1)

Publication Number Publication Date
BE771188A true BE771188A (fr) 1972-02-11

Family

ID=22045846

Family Applications (1)

Application Number Title Priority Date Filing Date
BE771188A BE771188A (fr) 1970-08-11 1971-08-11 Systeme de creuset pour le tirage d'un cristal de semi-conducteur

Country Status (3)

Country Link
US (1) US3694165A (fr)
BE (1) BE771188A (fr)
DE (1) DE2140070A1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2259353C3 (de) * 1972-12-04 1975-07-10 Heraeus-Quarzschmelze Gmbh, 6450 Hanau Tiegel aus Quarzglas oder Quarzgut zur Verwendung beim Züchten von Einkristallen
US4159891A (en) * 1975-03-12 1979-07-03 Prolizenz Ag Crucible
US5441014A (en) * 1991-06-24 1995-08-15 Komatsu Electronic Metals Co., Ltd. Apparatus for pulling up a single crystal
CN105132865B (zh) * 2015-08-20 2017-12-08 京东方科技集团股份有限公司 蒸发源装置及蒸镀设备
US9988740B1 (en) * 2016-08-16 2018-06-05 Northrop Grumman Systems Corporation Shaped induction field crystal printer

Also Published As

Publication number Publication date
DE2140070A1 (de) 1972-02-17
US3694165A (en) 1972-09-26

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