BE768413A - Preparation de films d'oxyde de fer par pulverisation cathodique - Google Patents

Preparation de films d'oxyde de fer par pulverisation cathodique

Info

Publication number
BE768413A
BE768413A BE768413A BE768413A BE768413A BE 768413 A BE768413 A BE 768413A BE 768413 A BE768413 A BE 768413A BE 768413 A BE768413 A BE 768413A BE 768413 A BE768413 A BE 768413A
Authority
BE
Belgium
Prior art keywords
preparation
iron oxide
oxide films
cathodic spraying
cathodic
Prior art date
Application number
BE768413A
Other languages
English (en)
French (fr)
Inventor
F G Peters
W N Sinclair
M V Sullivan
Original Assignee
Western Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co filed Critical Western Electric Co
Publication of BE768413A publication Critical patent/BE768413A/xx

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/54—Absorbers, e.g. of opaque materials
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/50—Mask blanks not covered by G03F1/20 - G03F1/34; Preparation thereof

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Physical Vapour Deposition (AREA)
  • Compounds Of Iron (AREA)
  • Surface Treatment Of Glass (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
BE768413A 1970-06-15 1971-06-11 Preparation de films d'oxyde de fer par pulverisation cathodique BE768413A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US4640570A 1970-06-15 1970-06-15

Publications (1)

Publication Number Publication Date
BE768413A true BE768413A (fr) 1971-11-03

Family

ID=21943278

Family Applications (1)

Application Number Title Priority Date Filing Date
BE768413A BE768413A (fr) 1970-06-15 1971-06-11 Preparation de films d'oxyde de fer par pulverisation cathodique

Country Status (8)

Country Link
US (1) US3650921A (ref)
BE (1) BE768413A (ref)
CA (1) CA927317A (ref)
DE (1) DE2129000A1 (ref)
FR (1) FR2096297A5 (ref)
GB (1) GB1346814A (ref)
NL (1) NL7107902A (ref)
SE (1) SE360397B (ref)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5311679B2 (ref) * 1974-08-26 1978-04-24
US4096026A (en) * 1976-07-27 1978-06-20 Toppan Printing Co., Ltd. Method of manufacturing a chromium oxide film

Also Published As

Publication number Publication date
SE360397B (ref) 1973-09-24
CA927317A (en) 1973-05-29
GB1346814A (en) 1974-02-13
FR2096297A5 (ref) 1972-02-11
NL7107902A (ref) 1971-12-17
US3650921A (en) 1972-03-21
DE2129000A1 (de) 1971-12-23

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