BE764761A - Agencement pour le depot de matiere semi-conductrice cristalline - Google Patents

Agencement pour le depot de matiere semi-conductrice cristalline

Info

Publication number
BE764761A
BE764761A BE764761A BE764761A BE764761A BE 764761 A BE764761 A BE 764761A BE 764761 A BE764761 A BE 764761A BE 764761 A BE764761 A BE 764761A BE 764761 A BE764761 A BE 764761A
Authority
BE
Belgium
Prior art keywords
deposit
arrangement
crystalline material
semiconductor crystalline
semiconductor
Prior art date
Application number
BE764761A
Other languages
English (en)
French (fr)
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of BE764761A publication Critical patent/BE764761A/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • H10P14/24—
    • H10P14/3411—

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
  • Silicon Compounds (AREA)
BE764761A 1970-09-30 1971-03-24 Agencement pour le depot de matiere semi-conductrice cristalline BE764761A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19702048155 DE2048155A1 (de) 1970-09-30 1970-09-30 Anordnung zum Abscheiden von kri stallinem Halbleitermaterial

Publications (1)

Publication Number Publication Date
BE764761A true BE764761A (fr) 1971-08-16

Family

ID=5783855

Family Applications (1)

Application Number Title Priority Date Filing Date
BE764761A BE764761A (fr) 1970-09-30 1971-03-24 Agencement pour le depot de matiere semi-conductrice cristalline

Country Status (12)

Country Link
JP (1) JPS531204B1 (enExample)
AT (1) AT321992B (enExample)
BE (1) BE764761A (enExample)
CA (1) CA960551A (enExample)
CH (1) CH561081A5 (enExample)
CS (1) CS166293B2 (enExample)
DE (1) DE2048155A1 (enExample)
FR (1) FR2108381A5 (enExample)
GB (1) GB1332583A (enExample)
NL (1) NL7108122A (enExample)
SE (1) SE363978B (enExample)
SU (1) SU493954A3 (enExample)

Also Published As

Publication number Publication date
SE363978B (enExample) 1974-02-11
FR2108381A5 (enExample) 1972-05-19
GB1332583A (en) 1973-10-03
CA960551A (en) 1975-01-07
AT321992B (de) 1975-04-25
CH561081A5 (enExample) 1975-04-30
CS166293B2 (enExample) 1976-02-27
JPS531204B1 (enExample) 1978-01-17
SU493954A3 (ru) 1975-11-28
NL7108122A (enExample) 1972-04-05
DE2048155A1 (de) 1972-04-06

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