BE761977A - PROCESS FOR PRODUCING METAL SILICON FROM A MIXTURE OF TRICHLOROSILANE AND DICHLOROSILANE - Google Patents

PROCESS FOR PRODUCING METAL SILICON FROM A MIXTURE OF TRICHLOROSILANE AND DICHLOROSILANE

Info

Publication number
BE761977A
BE761977A BE761977A BE761977A BE761977A BE 761977 A BE761977 A BE 761977A BE 761977 A BE761977 A BE 761977A BE 761977 A BE761977 A BE 761977A BE 761977 A BE761977 A BE 761977A
Authority
BE
Belgium
Prior art keywords
dichlorosilane
trichlorosilane
mixture
metal silicon
producing metal
Prior art date
Application number
BE761977A
Other languages
French (fr)
Inventor
H B Bradley
Original Assignee
Union Carbide Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Union Carbide Corp filed Critical Union Carbide Corp
Publication of BE761977A publication Critical patent/BE761977A/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/24—Deposition of silicon only
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Silicon Compounds (AREA)
BE761977A 1970-10-19 1971-01-25 PROCESS FOR PRODUCING METAL SILICON FROM A MIXTURE OF TRICHLOROSILANE AND DICHLOROSILANE BE761977A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US8183570A 1970-10-19 1970-10-19

Publications (1)

Publication Number Publication Date
BE761977A true BE761977A (en) 1971-07-26

Family

ID=22166694

Family Applications (1)

Application Number Title Priority Date Filing Date
BE761977A BE761977A (en) 1970-10-19 1971-01-25 PROCESS FOR PRODUCING METAL SILICON FROM A MIXTURE OF TRICHLOROSILANE AND DICHLOROSILANE

Country Status (9)

Country Link
JP (1) JPS4944845B1 (en)
BE (1) BE761977A (en)
BR (1) BR7100904D0 (en)
CA (1) CA955808A (en)
DE (1) DE2107503A1 (en)
DK (1) DK134901B (en)
FR (1) FR2109545A5 (en)
GB (1) GB1342605A (en)
NL (1) NL7101631A (en)

Also Published As

Publication number Publication date
JPS4944845B1 (en) 1974-11-30
DK134901C (en) 1977-06-27
BR7100904D0 (en) 1973-05-03
CA955808A (en) 1974-10-08
DE2107503A1 (en) 1972-04-20
FR2109545A5 (en) 1972-05-26
GB1342605A (en) 1974-01-03
NL7101631A (en) 1972-04-21
DK134901B (en) 1977-02-07

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