BE725393A - - Google Patents
Info
- Publication number
- BE725393A BE725393A BE725393DA BE725393A BE 725393 A BE725393 A BE 725393A BE 725393D A BE725393D A BE 725393DA BE 725393 A BE725393 A BE 725393A
- Authority
- BE
- Belgium
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D8/00—Cold traps; Cold baffles
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR135093 | 1968-01-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| BE725393A true BE725393A (US07709020-20100504-C00041.png) | 1969-05-16 |
Family
ID=8644212
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BE725393D BE725393A (US07709020-20100504-C00041.png) | 1968-01-05 | 1968-12-13 |
Country Status (8)
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2319035A1 (fr) * | 1975-07-22 | 1977-02-18 | Physimeca | Appareil pour faire le vide a l'interieur d'une enceinte |
| US4311018A (en) * | 1979-12-17 | 1982-01-19 | Varian Associates, Inc. | Cryogenic pump |
| US4438632A (en) * | 1982-07-06 | 1984-03-27 | Helix Technology Corporation | Means for periodic desorption of a cryopump |
| US4763483A (en) * | 1986-07-17 | 1988-08-16 | Helix Technology Corporation | Cryopump and method of starting the cryopump |
| US4907413A (en) * | 1988-06-02 | 1990-03-13 | Grumman Aerospace Corporation | Regenerable cryosorption pump with movable physical barrier and physical barrier thereof |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2737779A (en) * | 1946-05-24 | 1956-03-13 | Ernest O Lawrence | Condensable vapor extraction apparatus |
| US3360949A (en) * | 1965-09-20 | 1968-01-02 | Air Reduction | Cryopumping configuration |
| US3327491A (en) * | 1966-06-08 | 1967-06-27 | Andonian Associates Inc | Windowless vacuum chamber for exposing a cooled device to successive samplers |
-
1968
- 1968-01-05 FR FR135093A patent/FR1557891A/fr not_active Expired
- 1968-12-13 BE BE725393D patent/BE725393A/xx unknown
- 1968-12-13 GB GB59444/68A patent/GB1181750A/en not_active Expired
- 1968-12-13 US US783628A patent/US3512369A/en not_active Expired - Lifetime
- 1968-12-20 LU LU57621D patent/LU57621A1/xx unknown
-
1969
- 1969-01-03 NL NL6900130A patent/NL6900130A/xx unknown
- 1969-01-04 ES ES362123A patent/ES362123A1/es not_active Expired
- 1969-01-04 DE DE19691900454 patent/DE1900454A1/de active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| NL6900130A (US07709020-20100504-C00041.png) | 1969-07-08 |
| DE1900454A1 (de) | 1969-09-04 |
| LU57621A1 (US07709020-20100504-C00041.png) | 1969-04-08 |
| ES362123A1 (es) | 1970-11-01 |
| GB1181750A (en) | 1970-02-18 |
| US3512369A (en) | 1970-05-19 |
| FR1557891A (US07709020-20100504-C00041.png) | 1969-02-21 |
