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Publication of BE717893ApublicationCriticalpatent/BE717893A/xx
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/32—Gas-filled discharge tubes
H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
H01J37/32082—Radio frequency generated discharge
H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
H—ELECTRICITY
H01—ELECTRIC ELEMENTS
H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/32—Gas-filled discharge tubes
H01J37/32431—Constructional details of the reactor
H01J37/32733—Means for moving the material to be treated
H01J37/32743—Means for moving the material to be treated for introducing the material into processing chamber
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Physics & Mathematics
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Engineering & Computer Science
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Plasma & Fusion
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Chemical & Material Sciences
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Analytical Chemistry
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Inorganic Compounds Of Heavy Metals
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Plasma Technology
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Silicon Compounds
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Physical Or Chemical Processes And Apparatus
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