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Publication of BE711537ApublicationCriticalpatent/BE711537A/fr
G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
Vorrichtung mit zwei mikromechanischen Substraten für ein mikromechanisches System oder Teil eines mikromechanischen Systems und Verfahren zur Zusammensetzung zweier mikromechanischer Substrate
Thermopiles a thermojonctions du type distribuees, fluxmetres thermiques radiatif et conductif mettant en oeuvre ces thermopiles, ainsi que leurs procedes de fabrication