BE705239A - - Google Patents

Info

Publication number
BE705239A
BE705239A BE705239DA BE705239A BE 705239 A BE705239 A BE 705239A BE 705239D A BE705239D A BE 705239DA BE 705239 A BE705239 A BE 705239A
Authority
BE
Belgium
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from FR65643A external-priority patent/FR1534681A/fr
Application filed filed Critical
Priority claimed from NL6715095A external-priority patent/NL6715095A/xx
Publication of BE705239A publication Critical patent/BE705239A/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
BE705239D 1966-06-15 1967-10-17 BE705239A (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR65643A FR1534681A (fr) 1966-06-15 1966-06-15 Procédé de métallisation au zinc en continu d'une bande en matière diélectrique
NL6715095A NL6715095A (fr) 1966-06-15 1967-11-07
US69027267A 1967-12-13 1967-12-13

Publications (1)

Publication Number Publication Date
BE705239A true BE705239A (fr) 1968-03-01

Family

ID=33458078

Family Applications (1)

Application Number Title Priority Date Filing Date
BE705239D BE705239A (fr) 1966-06-15 1967-10-17

Country Status (2)

Country Link
US (1) US3498259A (fr)
BE (1) BE705239A (fr)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3866565A (en) * 1973-12-21 1975-02-18 David E U Ridout Vapor deposition apparatus with rotating drum mask
US4296153A (en) * 1978-05-15 1981-10-20 Cha Industries Vacuum chamber door assembly and method
US4403002A (en) * 1979-12-10 1983-09-06 Fuji Photo Film Co., Ltd. Vacuum evaporating apparatus
US4682565A (en) * 1984-11-19 1987-07-28 Sfe Technologies Vapor nozzle with gas barrier bars
US4844009A (en) * 1987-11-28 1989-07-04 Leybold Aktiengesellschaft Apparatus for coating webs of material having an open structure in depth
KR20090101738A (ko) * 2008-03-24 2009-09-29 삼성전기주식회사 진공증착장치 및 그 제어방법
US20110065282A1 (en) * 2009-09-11 2011-03-17 General Electric Company Apparatus and methods to form a patterned coating on an oled substrate
JP2015021172A (ja) * 2013-07-19 2015-02-02 日東電工株式会社 スパッタ装置
JP6772663B2 (ja) * 2016-08-23 2020-10-21 住友金属鉱山株式会社 ロールツーロール方式による長尺基材の処理装置及びこれを用いた成膜装置
EP3929324A1 (fr) * 2020-06-26 2021-12-29 Bühler Alzenau GmbH Procédé et dispositif de revêtement
US20220356028A1 (en) * 2021-05-04 2022-11-10 Applied Materials, Inc. Roller for transporting a flexible substrate, vacuum processing apparatus, and methods therefor

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1708935A (en) * 1927-08-09 1929-04-16 Bell Telephone Labor Inc Coil and transformer
GB350471A (en) * 1929-03-04 1931-06-04 Edison Swan Electric Co Ltd Improvements in and relating to electric discharge tubes
US2877140A (en) * 1953-10-12 1959-03-10 Waxide Paper Company Method for cooling and setting wax coatings on paper
US2975753A (en) * 1958-11-18 1961-03-21 Nat Res Corp Vacuum coating apparatus
US3044438A (en) * 1959-11-06 1962-07-17 Highland Supply Corp Means and methods for metalizing films and sheet materials
US3018397A (en) * 1959-11-09 1962-01-23 Charles J Bronco Demountable photomultiplier refrigerator
US3241519A (en) * 1962-04-05 1966-03-22 Western Electric Co Tensioned and cooled mask
NL293028A (fr) * 1962-06-05
US3397672A (en) * 1965-11-10 1968-08-20 United States Steel Corp Control system for vapor-deposition coating apparatus
US3381660A (en) * 1967-06-09 1968-05-07 Nat Res Corp Vapor deposition apparatus including pivoted shutters

Also Published As

Publication number Publication date
US3498259A (en) 1970-03-03

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