BE700185A - - Google Patents
Info
- Publication number
- BE700185A BE700185A BE700185DA BE700185A BE 700185 A BE700185 A BE 700185A BE 700185D A BE700185D A BE 700185DA BE 700185 A BE700185 A BE 700185A
- Authority
- BE
- Belgium
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
- C23C16/08—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metal halides
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4089566 | 1966-06-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| BE700185A true BE700185A (US20110158925A1-20110630-C00042.png) | 1967-12-01 |
Family
ID=12593229
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BE700185D BE700185A (US20110158925A1-20110630-C00042.png) | 1966-06-20 | 1967-06-19 |
Country Status (4)
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3762052D1 (de) * | 1986-03-31 | 1990-05-03 | Unisys Corp | Abscheidung einer vanadin-unterlage fuer magnetische filme. |
| GB2196019A (en) * | 1986-10-07 | 1988-04-20 | Cambridge Instr Ltd | Metalorganic chemical vapour deposition |
| US4997677A (en) * | 1987-08-31 | 1991-03-05 | Massachusetts Institute Of Technology | Vapor phase reactor for making multilayer structures |
| WO1990010092A1 (en) * | 1989-02-24 | 1990-09-07 | Massachusetts Institute Of Technology | A modified stagnation flow apparatus for chemical vapor deposition providing excellent control of the deposition |
-
1967
- 1967-06-12 GB GB2705667A patent/GB1189344A/en not_active Expired
- 1967-06-13 NL NL6708168A patent/NL149232B/xx unknown
- 1967-06-19 BE BE700185D patent/BE700185A/xx unknown
- 1967-06-20 CH CH874767A patent/CH485867A/de not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| DE1621289A1 (de) | 1971-05-13 |
| GB1189344A (en) | 1970-04-22 |
| NL6708168A (US20110158925A1-20110630-C00042.png) | 1967-12-21 |
| CH485867A (de) | 1970-02-15 |
| NL149232B (nl) | 1976-04-15 |
| DE1621289B2 (de) | 1972-08-17 |
