BE692365A - - Google Patents
Info
- Publication number
- BE692365A BE692365A BE692365DA BE692365A BE 692365 A BE692365 A BE 692365A BE 692365D A BE692365D A BE 692365DA BE 692365 A BE692365 A BE 692365A
- Authority
- BE
- Belgium
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Materials For Photolithography (AREA)
- Printing Plates And Materials Therefor (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE1522495A DE1522495C3 (de) | 1966-01-10 | 1966-01-10 | Verfahren zur Herstellung von Druckformen |
Publications (1)
Publication Number | Publication Date |
---|---|
BE692365A true BE692365A (US07655688-20100202-C00010.png) | 1967-07-10 |
Family
ID=7228546
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BE692365D BE692365A (US07655688-20100202-C00010.png) | 1966-01-10 | 1967-01-09 |
Country Status (8)
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5569265A (en) * | 1978-11-15 | 1980-05-24 | Hitachi Ltd | Pattern-forming method |
DE3038605A1 (de) * | 1980-10-13 | 1982-06-03 | Hoechst Ag, 6000 Frankfurt | Verfahren zur herstellung von reliefkopien |
CN111240153B (zh) * | 2020-02-12 | 2022-05-20 | 厦门恒坤新材料科技股份有限公司 | 硬掩膜组合物和硬掩膜及形成图案的方法 |
CN111290216B (zh) * | 2020-02-12 | 2022-05-20 | 厦门恒坤新材料科技股份有限公司 | 硬掩膜组合物和硬掩膜及形成图案的方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1574357A (en) * | 1922-03-08 | 1926-02-23 | Wadsworth Watch Case Co | Photographic media and process |
BE332468A (US07655688-20100202-C00010.png) * | 1922-11-18 | |||
BE332469A (US07655688-20100202-C00010.png) * | 1922-11-24 | |||
US1740061A (en) * | 1925-01-22 | 1929-12-17 | Harold v | |
US1604674A (en) * | 1925-04-22 | 1926-10-26 | Wadsworth Watch Case Co | Photographic medium and production thereof |
US2544905A (en) * | 1948-10-23 | 1951-03-13 | Eastman Kodak Co | Method of making photographic relief images |
NL263797A (US07655688-20100202-C00010.png) * | 1960-04-19 |
-
1966
- 1966-01-10 DE DE1522495A patent/DE1522495C3/de not_active Expired
-
1967
- 1967-01-02 NL NL6700017A patent/NL6700017A/xx unknown
- 1967-01-09 SE SE00298/67A patent/SE350134B/xx unknown
- 1967-01-09 BE BE692365D patent/BE692365A/xx unknown
- 1967-01-09 GB GB1081/67A patent/GB1158672A/en not_active Expired
- 1967-01-09 FR FR90395A patent/FR1507660A/fr not_active Expired
- 1967-01-09 AT AT19667A patent/AT271518B/de active
- 1967-01-09 US US607897A patent/US3529966A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US3529966A (en) | 1970-09-22 |
AT271518B (de) | 1969-06-10 |
GB1158672A (en) | 1969-07-16 |
DE1522495B2 (de) | 1978-02-02 |
DE1522495C3 (de) | 1978-10-05 |
NL6700017A (US07655688-20100202-C00010.png) | 1967-07-11 |
FR1507660A (fr) | 1967-12-29 |
SE350134B (US07655688-20100202-C00010.png) | 1972-10-16 |
DE1522495A1 (de) | 1969-08-28 |