BE669190A - - Google Patents
Info
- Publication number
- BE669190A BE669190A BE669190DA BE669190A BE 669190 A BE669190 A BE 669190A BE 669190D A BE669190D A BE 669190DA BE 669190 A BE669190 A BE 669190A
- Authority
- BE
- Belgium
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/007—Autodoping
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/914—Doping
- Y10S438/925—Fluid growth doping control, e.g. delta doping
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Physics & Mathematics (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US39626764A | 1964-09-14 | 1964-09-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| BE669190A true BE669190A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1965-12-31 |
Family
ID=23566545
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BE669190D BE669190A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1964-09-14 | 1965-09-03 |
Country Status (8)
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4831021B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1968-09-14 | 1973-09-26 | ||
| US3901182A (en) * | 1972-05-18 | 1975-08-26 | Harris Corp | Silicon source feed process |
| US3964089A (en) * | 1972-09-21 | 1976-06-15 | Bell Telephone Laboratories, Incorporated | Junction transistor with linearly graded impurity concentration in the high resistivity portion of its collector zone |
| US3849789A (en) * | 1972-11-01 | 1974-11-19 | Gen Electric | Schottky barrier diodes |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3172791A (en) * | 1960-03-31 | 1965-03-09 | Crystallography orientation of a cy- lindrical rod of semiconductor mate- rial in a vapor deposition process to obtain a polygonal shaped rod | |
| US3168422A (en) * | 1960-05-09 | 1965-02-02 | Merck & Co Inc | Process of flushing unwanted residue from a vapor deposition system in which silicon is being deposited |
| NL265823A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1960-06-13 | |||
| US3170825A (en) * | 1961-10-02 | 1965-02-23 | Merck & Co Inc | Delaying the introduction of impurities when vapor depositing an epitaxial layer on a highly doped substrate |
| US3243323A (en) * | 1962-06-11 | 1966-03-29 | Motorola Inc | Gas etching |
| US3189494A (en) * | 1963-08-22 | 1965-06-15 | Texas Instruments Inc | Epitaxial crystal growth onto a stabilizing layer which prevents diffusion from the substrate |
-
1964
- 1964-09-14 US US396267A patent/US3523046A/en not_active Expired - Lifetime
-
1965
- 1965-08-24 GB GB36219/65A patent/GB1056720A/en not_active Expired
- 1965-09-03 BE BE669190D patent/BE669190A/xx unknown
- 1965-09-04 DE DE1544204A patent/DE1544204C3/de not_active Expired
- 1965-09-06 AT AT814865A patent/AT256184B/de active
- 1965-09-10 CH CH1264865A patent/CH464154A/de unknown
- 1965-09-13 NL NL6511881A patent/NL6511881A/xx unknown
- 1965-09-14 SE SE11955/65A patent/SE322844B/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| SE322844B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1970-04-20 |
| US3523046A (en) | 1970-08-04 |
| GB1056720A (en) | 1967-01-25 |
| DE1544204B2 (de) | 1972-11-16 |
| AT256184B (de) | 1967-08-10 |
| DE1544204C3 (de) | 1974-02-14 |
| DE1544204A1 (de) | 1970-03-12 |
| CH464154A (de) | 1968-10-31 |
| NL6511881A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1966-03-15 |