BE659687A - - Google Patents

Info

Publication number
BE659687A
BE659687A BE659687A BE659687A BE659687A BE 659687 A BE659687 A BE 659687A BE 659687 A BE659687 A BE 659687A BE 659687 A BE659687 A BE 659687A BE 659687 A BE659687 A BE 659687A
Authority
BE
Belgium
Application number
BE659687A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of BE659687A publication Critical patent/BE659687A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/16—Vessels; Containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/15—External mechanical adjustment of electron or ion optical components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/21—Means for adjusting the focus

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Physical Vapour Deposition (AREA)
BE659687A 1964-02-14 1965-02-12 BE659687A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL6401328A NL6401328A (ja) 1964-02-14 1964-02-14

Publications (1)

Publication Number Publication Date
BE659687A true BE659687A (ja) 1965-05-28

Family

ID=19789292

Family Applications (1)

Application Number Title Priority Date Filing Date
BE659687A BE659687A (ja) 1964-02-14 1965-02-12

Country Status (5)

Country Link
BE (1) BE659687A (ja)
DE (1) DE1224853B (ja)
GB (1) GB1096261A (ja)
LU (1) LU47965A1 (ja)
NL (1) NL6401328A (ja)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2793882A (en) * 1955-10-21 1957-05-28 Charles L Keck Manifolding device
NL255393A (ja) * 1960-07-12
BE554195A (ja) * 1964-04-15

Also Published As

Publication number Publication date
DE1224853B (de) 1966-09-15
GB1096261A (en) 1967-12-20
LU47965A1 (ja) 1966-08-11
NL6401328A (ja) 1965-08-16

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